CN103175847B - Grating surface defect detecting device - Google Patents

Grating surface defect detecting device Download PDF

Info

Publication number
CN103175847B
CN103175847B CN201310087706.1A CN201310087706A CN103175847B CN 103175847 B CN103175847 B CN 103175847B CN 201310087706 A CN201310087706 A CN 201310087706A CN 103175847 B CN103175847 B CN 103175847B
Authority
CN
China
Prior art keywords
grating
control module
connects
light source
image
Prior art date
Application number
CN201310087706.1A
Other languages
Chinese (zh)
Other versions
CN103175847A (en
Inventor
王义文
冯超
廖益龙
权超健
朱鹏
林长友
梅恒
刘勇刚
Original Assignee
哈尔滨理工大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 哈尔滨理工大学 filed Critical 哈尔滨理工大学
Priority to CN201310087706.1A priority Critical patent/CN103175847B/en
Publication of CN103175847A publication Critical patent/CN103175847A/en
Application granted granted Critical
Publication of CN103175847B publication Critical patent/CN103175847B/en

Links

Abstract

The present invention relates to a kind of grating surface defect detecting device.At present, enterprise relies on artificial visual detection grating surface defect, and automaticity is low, and accuracy of detection is low, and reliability is low, and detection efficiency is low, and artificial subjective error is big, and testing cost is high.A kind of grating surface defect detecting device, its composition includes: column (1), control module, described column connects galianconism (2), described galianconism both sides are connected to a pair thick Fine adjustment knob, described galianconism connects long-armed (3), described is long-armed by through hole connection grating surface image acquisition device, industrial computer (7) outfan connection control system (8) input, the signal output part of described control system connects driving motor (9) and light source (10), motor is driven to connect grating sorting mechanism (11), raster image two-dimension translational platform (12) and the input of grating wiper mechanism (13), described light source is placed on raster image monitor station, light source is placed on raster image monitor station.The present invention is for improving the precision of grating surface defect detecting device, resolving power, automatization, detection efficiency.

Description

Grating surface defect detecting device

Technical field:

The present invention relates to relate to precision instrument detection field, be specifically related to a kind of grating surface defect detecting device.

Background technology:

At present, enterprise utilizes Stereo microscope, relies on artificial visual detection grating surface defect, has the disadvantage that

Automaticity is low.Grating is fixed, grating launches, grating identification, grating loading and unloading, grating marker etc. rely primarily on Manually complete.

Accuracy of detection is low.During manual detection, anthropic factor and equipment precision all can affect accuracy of detection, anthropic factor As aprosexia, get sth into one's head, discernable by eye power is limited, equipment precision such as use single light source, conventional optical microscope, The accuracy of manufacture etc..

Reliability is low.Owing to the factors such as working environment, individual mood, subjective judgment, manual operation, equipment advanced person's degree are led Cause staff and missing inspection, erroneous judgement, and then the reliability of impact detection quality occur during detection.

Detection efficiency is low.Owing to manual detection labor intensity is big, detection work dullness repeats to cause staff the most tired Labor and suspend rest, simultaneously detection work whether be normally carried out also being somewhat dependent upon the excellent degree of working environment Deng, all can shorten the effective time, reduce detection efficiency.

Artificial subjective error is big.Whole detection process, staff is leader, the identification of defect, classify, screening etc. all Being artificial subjective determination, and everything depends on staff and has good work mood, suitable working environment is with normal The detection equipment run.

Testing cost is high.Staff's labour remuneration, equipment purchase and maintenance, grating reinspection rate is high causes testing cost Increase.

High-speed production cannot be met.Manual detection can only adapt to small lot, low precision produces, and is limited to workman's muscle power, inspection Degree of testing the speed and precision, and equipment Inspection ability, all cannot realize high-speed production.

Contact, damage detection.Manual detection needs workman manually to take grating, and unavoidable occur scratching grating to be checked as artificial Deng error, cause unnecessary loss.

Summary of the invention:

It is an object of the invention to provide a kind of grating surface defect detecting device, improve grating surface defect detecting device Precision, resolving power, automatization, detection efficiency.

The object of the present invention is achieved like this:

A kind of grating surface defect detecting device, its composition includes: column, control module, and described column connects galianconism, Described galianconism both sides are connected to a pair thick Fine adjustment knob, and described galianconism connects long-armed, described long-armed pass through through hole Connecting grating surface image acquisition device, industrial computer outfan connection control system input, the signal of described control system is defeated Go out end and connect driving motor and light source, drive motor to connect grating sorting mechanism, raster image two-dimension translational platform and grating and clean The input of mechanism, described light source is placed on raster image monitor station;

Grating surface image acquisition device includes: microlens, CCD video camera, image pick-up card, projection source and light source Controller, described microlens connects ccd video camera through described long-armed through hole, and described ccd video camera passes through spiral shell Bolt is fixed on long-armed, and the outfan of described ccd video camera connects the input of grating surface image pick-up card, described figure As the outfan of capture card connects industrial computer input;

Described control module includes two-dimension translational platform step motor control module, grating development mechanism step motor control Module, wiper mechanism control module and grating sorting mechanism control module, grating development mechanism has grating clamp system, machinery Bindiny mechanism and described driving motor, described grating clamp system connects driving motor and mechanical link, described Mechanical link connects two-dimension translational platform, and described two-dimension translational platform connects grating defects detection platform, described grating defect Monitor station connects column, and described industrial computer has data processing module.

Described grating surface defect detecting device, described raster image two-dimension translational platform includes: driven by motor Dynamic X, Y two-dimensional movement displacement platform controlled, makes grating to be checked move along X, Y in horizontal plane, is accurately aimed at microcobjective, with Treat grating surface defect image collection;Described grating development mechanism includes: grating clamping device and grating surface development mechanism Machinery, it is achieved the clamping of grating and the expansion of grating surface information.

Described grating surface defect detecting device, process is tied by described grating sorting mechanism through data processing module Fruit transmission is to control module, then has control module to send instruction, controls grating sorting mechanism to " qualified grating " and " defective light Grid " carry out classification storage;Described control module includes: light source control module, two-dimension translational platform step motor control module, light Grid development mechanism step motor control module, wiper mechanism control module and grating sorting mechanism control module, it is achieved light source control System, the alignment of stop position to be checked, the expansion of grating surface information to be checked, the cleaning of grating surface and " qualified " and " defective " The screening of grating.

Described grating surface defect detecting device, described raster image monitor station includes: support chassis and adjustable vertical Post, described adjustable stand column supports and fixes other detection parts, regulation CCD video camera and the vertical dimension of detection platform;Institute The data processing module stated carries out associated picture process to the grating surface defect image collected, and obtains a width and schemes clearly Picture, then utilizes related software to detect, finally obtains testing result.

Beneficial effect:

1. the image capture device resolution that the present invention uses is higher, it is higher to operate more automatization, reliability.

The raster image monitor station that the present invention uses, area occupied is little, compact conformation, can image with up-down adjustment CCD Machine.

The two-dimentional motorized precision translation stage that the present invention uses, more convenient operation, running precision be higher, blindly randomness lower.

The grating development mechanism that the present invention uses, grating surface information is launched more steadily, is launched more completely, precision of expansion more High, controllability is higher, simultaneously grating clamp more firmly, more steady.

The light source that the present invention uses, color and intensity are the most adjustable, it is possible to according to circumstances change different types of light source, simultaneously Can at utmost avoid launching at grating surface generation minute surface, obtain the more uniform image acquisition condition of brightness.

The image pick-up card that the present invention uses, can be by digital picture high-speed transfer to data processing module.

The control module that the present invention uses, it is possible to achieve to grating two-dimension translational platform, grating development mechanism, grating cleaning machine Structure, raster image collecting device and the high accuracy of grating sorting mechanism and Automated condtrol, reduce control manually low The drawback that efficiency, low precision and crudity are high.

The grating wiper mechanism that the present invention uses, can carry out automatization, totally-enclosed, nothing before testing to grating to be checked Dead angle and the high cleaning of cleanliness factor, reduce the adverse effect that detection is brought by outside contamination, compare manual cleaning more efficient, more clear Clean, more comprehensively.

The sorting mechanism that the present invention uses, can by control system be automatically obtained qualified and defective grating automatic Sorting, compares manual sorting more rapid, more accurate.

Accompanying drawing illustrates:

Accompanying drawing 1 is the schematic diagram of the present invention.

Accompanying drawing 2 is the workflow diagram of the present invention.

Detailed description of the invention:

Embodiment 1:

A kind of grating surface defect detecting device, its composition includes: column 1, control module, and described column connects galianconism 2, described galianconism both sides are connected to a pair thick Fine adjustment knob, and described galianconism connects long-armed 3, and described is long-armed by logical Hole connection grating surface image acquisition device, industrial computer 7 outfan connection control system 8 input, described control system Signal output part connects driving motor 9 and light source 10, drives motor to connect grating sorting mechanism 11, raster image two-dimension translational Platform 12 and the input of grating wiper mechanism 13, described light source is placed on raster image monitor station.

Embodiment 2:

According to the grating surface defect detecting device described in embodiment 1, grating surface image acquisition device includes: microscope 4, CCD video camera 5, image pick-up card 6, projection source and light source controller, described microlens is through described long-armed Through hole connect CCD video camera, described CCD video camera is bolted on long-armed, described CCD video camera Outfan connects the input of grating surface image pick-up card, the outfan of described image pick-up card connects industrial computer 7 and inputs End.

Embodiment 3:

According to the grating surface defect detecting device described in embodiment 1 or 2, described control module has two-dimension translational Platform step motor control module, grating development mechanism step motor control module, wiper mechanism control module and grating screening machine Structure control module, grating development mechanism 14 has grating clamp system, mechanical link and described driving motor, described Grating clamp system connects driving motor and mechanical link, and described mechanical link connects two-dimension translational platform, described Two-dimension translational platform connect grating defects detection platform 15, described grating defects detection platform connects column, described industry control facility There is data processing module.

Embodiment 4:

According to the grating surface defect detecting device described in embodiment 3, described raster image two-dimension translational platform includes: X, Y two-dimensional movement displacement platform controlled by step motor drive, makes grating to be checked move along X, Y in horizontal plane, the most right Quasi-microcobjective, to treat grating surface defect image collection;Described grating development mechanism includes: grating clamping device and grating The machinery of unfolded surface mechanism, it is achieved the clamping of grating and the expansion of grating surface information.

Embodiment 5

According to the grating surface defect detecting device described in embodiment 3, described grating sorting mechanism processes through data Result is transmitted to control module by module, then has control module to send instruction, controls grating sorting mechanism to " qualified light Grid " and " defective grating " carry out classification storage;Described control module includes: light source control module, two-dimension translational platform stepping Motor control module, grating development mechanism step motor control module, wiper mechanism control module and grating sorting mechanism control Module, it is achieved light source control, the alignment of stop position to be checked, the expansion of grating surface information to be checked, the cleaning of grating surface and The screening of " qualified " and " defective " grating.

Embodiment 6:

Grating surface defect detecting device described in embodiment 3, described raster image monitor station includes: support chassis And adjustable stand column, described adjustable stand column supports and fixes other detection parts, and regulation CCD video camera hangs down with detection platform Straight distance;Described data processing module carries out associated picture process to the grating surface defect image collected, and obtains a width Image clearly, then utilizes related software to detect, finally obtains testing result.

Claims (4)

1. a grating surface defect detecting device, its composition includes: column, control module, it is characterized in that: described column is even Connecing galianconism, described galianconism both sides are connected to a pair thick Fine adjustment knob, and described galianconism connects long-armed, and described is long-armed logical Cross through hole connect grating surface image acquisition device, industrial computer outfan connection control system input, described control system Signal output part connects driving motor and light source, drives motor to connect grating sorting mechanism, raster image two-dimension translational platform and light The input of grid wiper mechanism, described light source is placed on raster image monitor station;
Grating surface image acquisition device includes: microlens, CCD video camera, image pick-up card, projection source and light source control Device, described microlens connects ccd video camera through described long-armed through hole, and described ccd video camera is solid by bolt Being scheduled on long-armed, the outfan of described ccd video camera connects the input of grating surface image pick-up card, described image is adopted The outfan of truck connects industrial computer input;
Described control module includes two-dimension translational platform step motor control module, grating development mechanism step motor control mould Block, wiper mechanism control module and grating sorting mechanism control module, grating development mechanism has grating clamp system, machinery even Connection mechanism and described driving motor, described grating clamp system connects driving motor and mechanical link, described machine Tool bindiny mechanism connects two-dimension translational platform, and described two-dimension translational platform connects grating defects detection platform, described grating defect inspection Scaffold tower connects column, and described industrial computer has data processing module.
Grating surface defect detecting device the most according to claim 1, is characterized in that: described raster image two-dimension translational Platform includes: X, Y two-dimensional movement displacement platform controlled by step motor drive, makes grating to be checked move along X, Y in horizontal plane, It is accurately aimed at microcobjective, to treat grating surface defect image collection;Described grating development mechanism includes: grating clamping device Machinery with grating surface development mechanism, it is achieved the clamping of grating and the expansion of grating surface information.
3. according to the grating surface defect detecting device described in claim 1, it is characterized in that: described grating sorting mechanism warp Cross data processing module to transmit result to control module, then have control module to send instruction, control grating sorting mechanism " qualified grating " and " defective grating " is carried out classification storage;Described control module includes: light source control module, two dimension are flat Moving stage step motor control module, grating development mechanism step motor control module, wiper mechanism control module and grating screening Mechanism controls module, it is achieved light source control, the alignment of stop position to be checked, the expansion of grating surface information to be checked, grating surface Cleaning and the screening of " qualified " and " defective " grating.
Grating surface defect detecting device the most according to claim 1, is characterized in that: described raster image monitor station bag Including: support chassis and adjustable stand column, described adjustable stand column supports and fixes other detection parts, regulation CCD video camera and inspection Survey the vertical dimension of platform;The grating surface defect image collected is carried out at associated picture by described data processing module Reason, obtains width image clearly, then utilizes related software to detect, finally obtain testing result.
CN201310087706.1A 2013-03-19 2013-03-19 Grating surface defect detecting device CN103175847B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310087706.1A CN103175847B (en) 2013-03-19 2013-03-19 Grating surface defect detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310087706.1A CN103175847B (en) 2013-03-19 2013-03-19 Grating surface defect detecting device

Publications (2)

Publication Number Publication Date
CN103175847A CN103175847A (en) 2013-06-26
CN103175847B true CN103175847B (en) 2016-08-10

Family

ID=48635849

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310087706.1A CN103175847B (en) 2013-03-19 2013-03-19 Grating surface defect detecting device

Country Status (1)

Country Link
CN (1) CN103175847B (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104516098B (en) * 2013-09-30 2017-04-12 西门子公司 Microscopy device and imaging method
CN103529047B (en) * 2013-11-01 2015-08-05 哈尔滨理工大学 Interactive semi-automatic grating surface defect detecting device and use the method for this device
CN104698145A (en) * 2013-12-05 2015-06-10 珠海格力电器股份有限公司 Flaw detection device for U-shaped pipe
CN103808278B (en) * 2014-03-06 2016-08-17 西安电子科技大学 The measurement system of optical fiber pattern and measuring method
CN103886332A (en) * 2014-04-02 2014-06-25 哈尔滨工业大学 Method for detecting and identifying defects of metallic meshes
CN105716829B (en) * 2014-12-01 2019-08-06 深圳超多维科技有限公司 Light-splitting device detection system and detection method
CN105716543A (en) * 2014-12-17 2016-06-29 哈尔滨理工大学 Encoder raster eccentric adjustment image processing method based on machine vision
CN104535579A (en) * 2014-12-22 2015-04-22 中国科学院长春光学精密机械与物理研究所 Etch defect detection device for steel belt grating
CN104729999B (en) * 2015-03-20 2016-05-11 中国科学院近代物理研究所 The method of the laser measurement nucleopore membranes uniformity
CN104848894A (en) * 2015-05-05 2015-08-19 谢娟 Quality analyzer for circuit boards
CN105424714B (en) * 2015-12-21 2018-04-27 南京河豚自动化科技有限公司 The defects of based on multi-pipe pin detection device and its detection method

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1603791A (en) * 2003-09-19 2005-04-06 中国科学院上海光学精密机械研究所 Non-destructive test method and device for grating surface quality
CN1977177A (en) * 2004-11-24 2007-06-06 斯特拉图斯影像有限公司 Inspection device
CN101261234A (en) * 2008-03-26 2008-09-10 广州中国科学院工业技术研究院 Surface flaw detection device
CN102037348A (en) * 2008-05-22 2011-04-27 独立行政法人产业技术综合研究所 Method for inspecting defects, and defect inspecting apparatus
CN102628811A (en) * 2012-03-30 2012-08-08 中国科学院长春光学精密机械与物理研究所 Verifying device of grating groove defect
CN102680447A (en) * 2012-05-31 2012-09-19 中国科学院上海光学精密机械研究所 Device for detecting defects and laser induced damages of optical material

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002148029A (en) * 2000-11-08 2002-05-22 Ricoh Co Ltd Apparatus and method of inspecting cylindrical object surface irregularities
JP4706064B2 (en) * 2006-02-02 2011-06-22 独立行政法人 国立印刷局 OVD foil inspection apparatus and OVD foil inspection method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1603791A (en) * 2003-09-19 2005-04-06 中国科学院上海光学精密机械研究所 Non-destructive test method and device for grating surface quality
CN1977177A (en) * 2004-11-24 2007-06-06 斯特拉图斯影像有限公司 Inspection device
CN101261234A (en) * 2008-03-26 2008-09-10 广州中国科学院工业技术研究院 Surface flaw detection device
CN102037348A (en) * 2008-05-22 2011-04-27 独立行政法人产业技术综合研究所 Method for inspecting defects, and defect inspecting apparatus
CN102628811A (en) * 2012-03-30 2012-08-08 中国科学院长春光学精密机械与物理研究所 Verifying device of grating groove defect
CN102680447A (en) * 2012-05-31 2012-09-19 中国科学院上海光学精密机械研究所 Device for detecting defects and laser induced damages of optical material

Also Published As

Publication number Publication date
CN103175847A (en) 2013-06-26

Similar Documents

Publication Publication Date Title
CN103913468B (en) Many defects of vision checkout equipment and the method for large-scale LCD glass substrate on production line
CA2227815C (en) Apparatus and method for automated visual inspection of objects
KR101772673B1 (en) Multiple optics vision inspection system
CN103706575B (en) A kind of online classification sorting equipment of eyeglass based on two-stage image collection and method
CN204479490U (en) A kind of laser marking On-line Product testing and analysis system
CN106895961B (en) A kind of detection device and its detection method of backlight module
CN203124215U (en) Frame sealant coating machine
CN104534995B (en) Optical measuring apparatus
US20090238444A1 (en) Optical imaging apparatus and method for inspecting solar cells
US9274064B2 (en) Surface feature manager
CN104198157B (en) Automatic sorting device with lens detection function
CN104111260A (en) Nondestructive ceramic detection device and detection method thereof
CN1260800C (en) Semiconductor wafer inspection apparatus
CN1306582C (en) Ball-grating array semiconductor device quality detecting system based on dual-eye machine vision
CN104792793B (en) Optical defect detection method and system
CN100419410C (en) Defect inspection data processing system
CN101666923B (en) Processing method, processing system and maintenance equipment for defects of liquid crystal display panel
EP1995553A1 (en) System and method for identifying a feature of a workpiece
CN102601061B (en) Automatic sorting device for defective products of pole pieces of timers
WO2007062563A1 (en) On-line automatic inspection method for detecting surface flaws of steel during the pretreatment of the ship steel
CN105021628B (en) Method for detecting surface defects of optical fiber image inverter
CN104439695B (en) A kind of vision inspection apparatus of laser-processing system
CN104101608B (en) Intelligent detecting device for detecting defects of multi-type irregularly shaped product
US10851013B2 (en) Glass sheet acquisition and positioning system and associated method for an inline system for measuring the optical characteristics of a glass sheet
CN102621156B (en) Image-processing-based automatic micro part sorting system

Legal Events

Date Code Title Description
PB01 Publication
C06 Publication
SE01 Entry into force of request for substantive examination
C10 Entry into substantive examination
GR01 Patent grant
C14 Grant of patent or utility model
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160810

Termination date: 20170319

CF01 Termination of patent right due to non-payment of annual fee