CN102628811A - Verifying device of grating groove defect - Google Patents
Verifying device of grating groove defect Download PDFInfo
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- CN102628811A CN102628811A CN201210088493XA CN201210088493A CN102628811A CN 102628811 A CN102628811 A CN 102628811A CN 201210088493X A CN201210088493X A CN 201210088493XA CN 201210088493 A CN201210088493 A CN 201210088493A CN 102628811 A CN102628811 A CN 102628811A
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Abstract
A verifying device of a grating groove defect aims at resolving the problem that a main ruler has the conditions of stain and inconsistency of front and back phases in the manufacture process of a grating ruler, and a manual method cannot finish verifying of the grating ruler. A first shifting driving device of the verifying device drives a signal detection head to move along the detection direction, the signal detection head detects light transmitted by a light source and modulated by a grating to be measured and a standard grating, the light is converted into electric signals through a photoelectric detector, amplification processing and analog-digital conversion are conducted through a signal processing module on the electric signals, finally a pulse detection module is used for detecting and scoring the defect and copying existence and position of the defect through pulse signals, a second shifting driving device moves the position of the standard grating, and the processing is repeated till the detection finished. The verifying device is used for measuring the defect of long grating, groove evenness detection and phase consistency detection of a length grating ruler.
Description
Technical field
The present invention relates to a kind of grating chi groove fault detection device.
Background technology
The top priority that realizes the grating displacement sensor high-acruracy survey is delineation and the accuracy of repetition that guarantees master grating, and the delineation precision is usually than higher, but also exists black and white than situation such as undesirable; Exist owing to the not high stain that causes of environment clean level in the reproduction process, perhaps light exists certain situation such as distortion can have influence on phase equalization etc., and these all can have a strong impact on the precision of last grating chi.Moreover, the spreading error that in grating spreading process, exists also can reduce the precision and the performance of whole grating chi greatly.
After general grating chi delineation is perhaps duplicated,, utilize general microscope, the precision of complete detection delineation with the naked eye because data volume is bigger.Simultaneously; Phase place inconsistent with the naked eye observation in front and back can't be accomplished; If can make specific checkout equipment, utilize effective detection means, focus the stain and the inconsistent record that carries out of front and back phase place that exist on the grid chi main scale automatically; Can effectively improve the precision of finished product grating chi so, enhance productivity and the quality of production.
Summary of the invention
There are situation such as stain and front and back phase place be inconsistent in the present invention for solving in the existing grating chi manufacture process main scale, leans on the artificial problem that the grating chi is checked of can't accomplishing, and a kind of grating line fault detection device is provided.
Grating line fault detection device, this device comprise master grating, acquisition of signal head, first shift drive, second shift drive, signal processing module and pulse detection module; Said first shift drive is along the length direction of scanning movable signal detecting head of master grating, and said acquisition of signal head writes down the intensity signal after the modulation,
Second shift drive is used to drive the shift position of master grating, and said signal processing module receives the displacement information of first shift drive, the intensity signal of acquisition of signal head output and the positional information of the master grating that second shift drive is exported; And said positional information is carried out signal amplify and the digital-to-analog conversion processing, export the pulse detection module to; Said pulse detection module detects the signal that receives, and analyzes the positional information of grating line defective to be measured.
Beneficial effect of the present invention: the present invention provides a kind of principle simple, can effectively detect stain and the inconsistent device of phase place.Device of the present invention is noted the performance of grating chi to be measured automatically, thereby judges fast and accurately whether grating chi to be measured satisfies the requirement of producing.
Description of drawings
Fig. 1 is a grating line fault detection schematic representation of apparatus of the present invention;
Fig. 2 be in the grating line fault detection device of the present invention pulse detection module detection signal output amplitude with the synoptic diagram of variable in distance;
Fig. 3 be in the grating line fault detection device of the present invention pulse detection module detected phase deviation with the variable in distance synoptic diagram;
Fig. 4 is the synoptic diagram of acquisition of signal head in the grating line fault detection device of the present invention.
Embodiment
In conjunction with Fig. 1 this embodiment is described; Grating line fault detection device; This pick-up unit comprises master grating 3, acquisition of signal head 1, first shift drive 7, second shift drive 9, signal processing module 8, pulse detection module 10, and acquisition of signal head 1 further comprises light source 5, optical system 6, input chip 2.First shift drive 7, drive signal detecting head 1 shift position; Second shift drive 9 drives master grating 3 shift positions; 8 pairs of signal processing modules carry out conversion process from the information that acquisition of signal head 1, first shift drive 7, second shift drive 9 obtain; Pulse detection module 10 is used for the PHASE DISTRIBUTION of analytical calculation grating 4 to be measured; Master grating 3 is the standardized components that are used to detect grating to be measured; It has higher graduating accuracy; Normally through the qualified master grating of standard test; Its pitch equates that with the target pitch of grating to be measured its black and white also is up to the standards than deviation, and the quality of master grating 3 has determined the precision that detects.This light source 5 can be laser diode, sends coherent light.Optical system 6 changes into collimated ray with the light that light source sends, and shines on the grating 4 to be measured.The position of acquisition of signal head 1 is by 7 controls of first shift drive, and first shift drive 7 moves acquisition of signal head 1 on the direction of scanning.Acquisition of signal head 1 detects that light source 5 sends; And by the light signal of grating to be measured 4, master grating 3 modulation, and be converted into electric signal, carry out processing and amplifying and analog to digital conversion by signal processing module 8; Detect the existence and the position thereof of delineation defective and replication defective at last through pulse signal by pulse detection module 10; Change the position of master grating 3 then through second shift drive 9, repeat above the processing, finish up to detection.
When acquisition of signal head 1 been scanned, first shift drive 7 and second shift drive 9 will be adjusted the position of acquisition of signal head 1 and master grating 3 respectively, make acquisition of signal head 1 on the new position of grating to be measured 4, rescan.Input chip 2 can be selected silicon photocell as optical detection device.
Pulse detection module 10 described in this embodiment is noted all scan-datas, treats the been scanned this time to this segment standard grating 3, analyzes the existence and the position thereof of grating 4 delineation defectives to be measured and replication defective again.
Pulse detection module 10 described in this embodiment is noted all scan-datas, to be scannedly all finishes, and analyzes the existence and the position thereof of grating 4 delineation defectives to be measured and replication defective again.
The workflow of apparatus of the present invention is: at first on device, place grating 4 to be measured, place initial position to acquisition of signal head 1, master grating 3, the position of first shift drive 7 movable signal detecting head 1 along the direction of scanning; Speed can be set, and acquisition of signal head 1 is noted the intensity signal in the moving process, the positional information of the master grating 3 that signal processing module 8 obtains according to the displacement information of first shift drive 7, from second shift drive 9 and the output information of acquisition of signal head 1; And through base conditioning such as signal amplification and digital-to-analog conversions; Obtaining in master grating 3 length is the relation of position and amplitude in the L scope, and exports to pulse detection module 10, and 10 pairs of signal detection information of pulse detection module are analyzed; Second shift drive 9 moves master grating 3 to new assigned address then; First shift drive, 7 adjustment acquisition of signal heads 1 repeat above-mentioned scan operation to new initial position, treat the scanning work of photometry grid 4 until completion; What be worth proposition is; 10 pairs of signal detection information analyses of top pulse detection module can be carried out piecemeal, also can finish up to scanning work and analyze, as being analysis piecemeal; Need one section overlapping part so between the adjacent segment, so that the phase equalization information between the section of obtaining and the section.
Analytic process in the face of the input data specifies down.
One section detection distance that obtains for scanning in conjunction with Fig. 2 and the relation curve between the signal output amplitude at first change with phase differential through the amplitude of demarcating in advance and are expressed as with formula one:
Here the output valve of A expression signal processing module 8, A
0, B
0Be constant, π representes circular constant, and T representes the groove cycle of master grating 3, and as 20 microns, x is the offset deviation equivalent with phase differential.
At first all points of reading are averaged, obtain mean value M, know that the phase differential mean difference is expressed as with formula two:
Here phase differential:
And then the pairing phase place of amplitude of each point of point-to-point analysis, because inverse cosine function has two results, still, because the continuity between the consecutive point only need be got a wherein value arbitrarily, we still can calculate the pairing phase differential of magnitude.Through calculating, we just know that phase differential is along with the variation of distance, in conjunction with Fig. 3 on any one section; Whether only need require just to judge grating to be measured according to given reference phase difference qualified; Such as, be 5 ° when setting the phase differential requirement, Fig. 3 mid point A place is defective place just so; Can judge so, can not be owing to treat dipping to have pollution or spot at A point place through detecting.
Below the method that detects whole chi front and back phase equalization is introduced.
In conjunction with Fig. 1, when first shift drive 7 is accomplished the scanning first time to master grating 3, pulse detection module 10 simultaneously can be before and after being divided at sweep length L two sections, and ask two sections of front and back on average to phase place, obtain θ respectively
2And θ
1Thereby, obtain the phase difference between preceding half section and second half section
1,
Wherein: Δ
1=θ
2-θ
1
Move master grating 3 through second shift drive 9, displacement does
First shift drive, 7 drive signal detecting heads 1 are accomplished the scanning second time to master grating 3, ask preceding half section mode with the second half section phase differential to obtain in the scanning for the second time through top, preceding half section phase difference with the second half section
2, so, obtain whenever separated up to treating photometry grid 4 been scanned
The phase differential of distance, Δ
1, Δ
2, Δ
3, Δ
4, Δ
5....
If phase differential curve before and after requiring; Only need add up piecemeal to above phase place; Such as the phase difference that requires between the 1st section to the 5th section; Here every
distance is one section, obtains formula:
Claims (3)
1. grating line fault detection device, this device comprises master grating (3), acquisition of signal head (1), first shift drive (7), second shift drive (9), signal processing module (8) and pulse detection module (10); It is characterized in that,
Said first shift drive (7) is along the length direction of scanning movable signal detecting head (1) of master grating (3); Intensity signal after the modulation of said acquisition of signal head (1) record; Second shift drive (9) is used to drive the shift position of master grating (3), and said signal processing module (8) receives the displacement information of first shift drive (7), the intensity signal of acquisition of signal head (1) output and the positional information of the master grating (3) that second shift drive (9) is exported; And said positional information is carried out signal amplify and the digital-to-analog conversion processing, export pulse detection module (10) to;
Said pulse detection module (10) detects the signal that receives, and analyzes the positional information of grating to be measured (4) groove defective.
2. grating line fault detection device according to claim 1; It is characterized in that; Described acquisition of signal head (1) comprises light source (5), optical system (6) and input chip (2); The light signal that light source (5) sends is converted into collimated light through optical system (6), and input chip (2) is used for detecting the intensity signal after grating to be measured (4) and master grating (3) modulation.
3. grating line fault detection device according to claim 1 is characterized in that, said pulse detection module (10) is calculated the phase differential between each location point through signal amplitude.
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| CN201210088493.XA CN102628811B (en) | 2012-03-30 | 2012-03-30 | Verifying device of grating groove defect |
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| CN201210088493.XA CN102628811B (en) | 2012-03-30 | 2012-03-30 | Verifying device of grating groove defect |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102865822A (en) * | 2012-09-27 | 2013-01-09 | 中国科学院长春光学精密机械与物理研究所 | Automatic non-contact detection device for absolute code channel graduating accuracy of ruler board of grating ruler |
| CN103175847A (en) * | 2013-03-19 | 2013-06-26 | 哈尔滨理工大学 | Grating surface blemish detection device |
| CN103529047A (en) * | 2013-11-01 | 2014-01-22 | 哈尔滨理工大学 | Interactive semi-automatic grating surface defect detection device and method using device |
| CN104535579A (en) * | 2014-12-22 | 2015-04-22 | 中国科学院长春光学精密机械与物理研究所 | Etch defect detection device for steel belt grating |
| CN107014421A (en) * | 2017-04-19 | 2017-08-04 | 吉林宇恒光电仪器有限责任公司 | Based on two-way black and white than the uneven error detection method of photoelectric encoder code-disc |
| CN109211284A (en) * | 2017-06-29 | 2019-01-15 | 株式会社三丰 | For providing antipollution and the configuration of defect optical encoder of displacement signal |
| CN109959664A (en) * | 2019-04-10 | 2019-07-02 | 长春禹衡光学有限公司 | Contamination detection method, device and the readable storage medium storing program for executing of absolute grating ruler |
| CN115808197A (en) * | 2023-02-06 | 2023-03-17 | 长春长光启衡传感技术有限公司 | Grating inspection device |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102865822A (en) * | 2012-09-27 | 2013-01-09 | 中国科学院长春光学精密机械与物理研究所 | Automatic non-contact detection device for absolute code channel graduating accuracy of ruler board of grating ruler |
| CN102865822B (en) * | 2012-09-27 | 2015-10-28 | 中国科学院长春光学精密机械与物理研究所 | The non-contact automatic detection device of the absolute code channel graduating accuracy of grating scale chi plate |
| CN103175847A (en) * | 2013-03-19 | 2013-06-26 | 哈尔滨理工大学 | Grating surface blemish detection device |
| CN103175847B (en) * | 2013-03-19 | 2016-08-10 | 哈尔滨理工大学 | Grating surface defect detecting device |
| CN103529047A (en) * | 2013-11-01 | 2014-01-22 | 哈尔滨理工大学 | Interactive semi-automatic grating surface defect detection device and method using device |
| CN104535579A (en) * | 2014-12-22 | 2015-04-22 | 中国科学院长春光学精密机械与物理研究所 | Etch defect detection device for steel belt grating |
| CN107014421A (en) * | 2017-04-19 | 2017-08-04 | 吉林宇恒光电仪器有限责任公司 | Based on two-way black and white than the uneven error detection method of photoelectric encoder code-disc |
| CN107014421B (en) * | 2017-04-19 | 2023-04-28 | 吉林宇恒光电仪器有限责任公司 | Photoelectric encoder code disc non-uniform error detection method based on bidirectional black-white ratio |
| CN109211284A (en) * | 2017-06-29 | 2019-01-15 | 株式会社三丰 | For providing antipollution and the configuration of defect optical encoder of displacement signal |
| CN109211284B (en) * | 2017-06-29 | 2021-03-12 | 株式会社三丰 | Anti-contamination and defect optical encoder configuration for providing displacement signals |
| CN109959664A (en) * | 2019-04-10 | 2019-07-02 | 长春禹衡光学有限公司 | Contamination detection method, device and the readable storage medium storing program for executing of absolute grating ruler |
| CN109959664B (en) * | 2019-04-10 | 2021-12-28 | 长春禹衡光学有限公司 | Pollution detection method and device of absolute grating ruler and readable storage medium |
| CN115808197A (en) * | 2023-02-06 | 2023-03-17 | 长春长光启衡传感技术有限公司 | Grating inspection device |
| CN115808197B (en) * | 2023-02-06 | 2024-03-08 | 长春长光启衡传感技术有限公司 | Grating inspection device |
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| CN102628811B (en) | 2015-04-22 |
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