CN112271151B - Machine pollution monitoring device and processing equipment - Google Patents
Machine pollution monitoring device and processing equipment Download PDFInfo
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- CN112271151B CN112271151B CN202011248081.9A CN202011248081A CN112271151B CN 112271151 B CN112271151 B CN 112271151B CN 202011248081 A CN202011248081 A CN 202011248081A CN 112271151 B CN112271151 B CN 112271151B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Abstract
A machine pollution monitoring device and processing equipment relate to the technical field of semiconductor processing equipment. The machine pollution monitoring device comprises a plurality of monitoring modules and a controller which is respectively and electrically connected with the monitoring modules, wherein the monitoring modules are respectively configured in a plurality of operation machines of processing equipment and used for collecting pollutant information in each operation machine, and the controller is used for receiving the pollutant information collected by each monitoring module and judging whether each operation machine is in a pollution state according to the pollutant information of each operation machine. The machine pollution monitoring device can improve the pollution inspection efficiency of the machine.
Description
Technical Field
The invention relates to the technical field of semiconductor processing equipment, in particular to a machine pollution monitoring device and processing equipment.
Background
Semiconductor wafers are carriers used in the production of integrated circuits. In the process flow of manufacturing semiconductor integrated circuits, semiconductor wafers are subjected to photolithography, etching, deposition, polishing, and other processes, and each process may generate particle (particle) contamination on the front surface, the back surface, or both the front and back surfaces of the semiconductor wafer, which may cause defects (defocus) and failure of components once exceeding the standard.
For example, in the semiconductor processing using the semiconductor device, impurities that may contaminate the wafer due to coolant, dust, and the like during the processing may remain on parts of the semiconductor device, thereby possibly causing contamination of the semiconductor device. The contamination condition inside the machine is an important factor affecting the production efficiency and the product yield of the machine, especially, the spin coater has more than one hundred production units, so that the occurrence of contamination must be strictly controlled, if the machine is not cleaned in time after the occurrence of contamination, the subsequent semiconductor wafers entering the machine will be polluted again, thereby leading to batch failure of the produced wafers. However, at present, there is no device for cleaning the surface of the machine, and the parts of the machine that need to be cleaned are accurately positioned, so that the whole machine is directly stopped during cleaning and inspection, so that each unit of the whole machine is cleaned and inspected one by one, the stop time is increased, the resource waste is caused, and the inspection efficiency is reduced.
Disclosure of Invention
The invention aims to provide a machine pollution monitoring device and processing equipment, which can improve the pollution inspection efficiency of a machine.
Embodiments of the present invention are implemented as follows:
in one aspect of the present invention, a machine pollution monitoring device is provided, where the machine pollution monitoring device includes a plurality of monitoring modules and a controller electrically connected to the monitoring modules, the plurality of monitoring modules are respectively configured in a plurality of operation machines of a processing apparatus, and are used for collecting pollutant information in each operation machine, and the controller is used for receiving the pollutant information collected by each monitoring module, and determining whether each operation machine is in a pollution state according to the pollutant information of each operation machine. The machine pollution monitoring device can improve the pollution inspection efficiency of the machine.
Optionally, the monitoring module is a shooting unit.
Optionally, the machine pollution monitoring device further comprises a temporary storage, and the temporary storage is respectively and electrically connected with the monitoring module and the controller and is used for receiving pollutant information detected by the monitoring module and extracting the pollutant information by the controller.
Optionally, the machine pollution monitoring device further comprises a conveying unit, and the conveying unit is connected with the monitoring module and used for driving the monitoring module to move in the operation machine.
Optionally, the transfer unit is a robot.
Optionally, the machine pollution monitoring device further comprises an alarm, wherein the alarm is electrically connected with the controller and is used for responding to a control signal of the controller to give an alarm when the pollutant information exceeds a threshold value.
Optionally, the machine pollution monitoring device further comprises a display electrically connected with the controller, wherein the display is used for displaying pollutant information in the machine.
In another aspect of the present invention, a processing apparatus is provided, where the processing apparatus includes a plurality of operation machines and the machine pollution monitoring device, and a plurality of monitoring modules of the machine pollution monitoring device are disposed in the plurality of operation machines in a one-to-one correspondence manner. The processing equipment can improve the pollution inspection efficiency of the machine.
Optionally, a charging device is arranged in the operating machine, and the monitoring module is electrically connected with the charging device.
Optionally, the monitoring module is connected with the charging device by wireless communication.
The beneficial effects of the invention include:
the machine pollution monitoring device provided by the embodiment comprises a plurality of monitoring modules and a controller electrically connected with the monitoring modules respectively, wherein the monitoring modules are respectively arranged in a plurality of operation machines of processing equipment and used for collecting pollutant information in each operation machine, and the controller is used for receiving the pollutant information collected by each monitoring module and judging whether each operation machine is in a pollution state according to the pollutant information of each operation machine. In this way, in actual application, when the processed product is found to be polluted and the operation machine where the pollution source is located cannot be determined, each detection module can be controlled to be started by the controller (of course, the detection module can also be selected to be in a normally open state according to the requirement so as to detect the pollution state in each operation machine in real time), and each detection module correspondingly detects the pollutant information of the operation machine where the detection module is located and sends the detected pollutant information to the controller; the controller receives the pollutant information detected by each monitoring module and judges whether each operating machine is in a pollution state according to the pollutant information of the operating machine to which the monitoring module belongs. For example, the pollutant information of the operation machine to which each monitoring module belongs and the preset threshold value of the operation machine to which each monitoring module belongs are compared, so that the judgment can be performed according to the comparison result. Therefore, the operation machine table with pollution can be found, so that the operator can clean the operation machine table in time in a targeted manner, and the situation that the normal production efficiency is affected due to the fact that the operation machine table with pollution cannot be determined specifically and all operation machine tables have to be opened for one-to-one inspection can be avoided. Therefore, the machine pollution monitoring device provided by the application can timely and accurately position the polluted operating machine, so that the pollution inspection efficiency of the machine can be improved, and the downtime is reduced.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a pollution monitoring device of a machine according to an embodiment of the present invention;
fig. 2 is a second schematic structural diagram of a machine pollution monitoring device according to an embodiment of the present invention.
Icon: 10-a monitoring module; 20-a controller; 30-a temporary storage; 40-alarm; a 50-display; 210-operating a machine; 220-charging means.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present invention, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present invention and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal," "vertical," and the like do not denote a requirement that the component be absolutely horizontal or overhang, but rather may be slightly inclined. As "horizontal" merely means that its direction is more horizontal than "vertical", and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Referring to fig. 1 and 2, the present embodiment provides a machine pollution monitoring device, which includes a plurality of monitoring modules 10 and a controller 20 electrically connected to the monitoring modules 10, wherein the plurality of monitoring modules 10 are respectively configured in a plurality of operation machines 210 of a processing apparatus, and are used for collecting pollutant information in each operation machine 210, and the controller 20 is used for receiving the pollutant information collected by each monitoring module 10, and determining whether each operation machine 210 is in a pollution state according to the pollutant information of each operation machine 210. The machine pollution monitoring device can improve the pollution inspection efficiency of the machine.
It should be noted that, the machine pollution monitoring device provided by the application is mainly used for detecting pollution information of the operation machine 210 of the semiconductor processing equipment, so that the pollution condition in the operation machine 210 is conveniently controlled, when pollution occurs, the operation machine 210 where a pollution source is located is conveniently and timely positioned, and data assistance is provided for cleaning of the pollution source in the subsequent operation machine 210. Of course, it should be understood that the apparatus for monitoring tool contamination may be applied not only to detecting contaminants in semiconductor processing equipment, but also to detecting a contamination state inside the operating tool 210 of any processing equipment. Particularly, when there are many operating machines 210 (e.g., multiple operating procedures), the positioning of the operating machine 210 where the contaminant is located cannot be accurately performed.
The monitoring module 10 that this application provided includes a plurality ofly, and a plurality of monitoring module 10 locate respectively in a plurality of operation machines 210 of processing equipment, and every operation machine 210 and monitoring module 10 one-to-one, like this, the inside pollutant information of every operation machine 210 can all carry out real-time detection through its monitoring module 10 that corresponds the setting to the staff of being convenient for in time master the pollutant information of every operation machine 210 inside.
The controller 20 is configured to receive the contaminant information of each operation machine 210 sent from the monitoring module 10, so as to determine whether each operation machine 210 is in a contaminated state according to the contaminant information of each operation machine 210. Specifically, there may be various ways to determine whether each operation machine 210 is in a contaminated state according to the contaminant information of each operation machine 210, and the embodiment is not limited in particular.
For example, the determination may be made by comparing the contaminant information of each operation machine 210 with a preset threshold value of its corresponding operation machine 210. It should be noted that, each operation machine 210 has a preset threshold value of the contaminant corresponding to the operation machine 210. For example, when the monitoring module 10 detects the number of particles in the operating platform 210 to determine the pollution state, the corresponding preset threshold value may be the maximum value of the number of particles in the platform, and when the number of particles detected by the monitoring module 10 is greater than the maximum value of the number of particles, the operating platform 210 is determined to be in the pollution state, otherwise, the operating platform is determined to be in the non-pollution state; when the detection module determines that the pollution state is determined by detecting whether the operation machine 210 is contaminated by external pollutants, the corresponding preset threshold is an image or a corresponding parameter in the operation machine 210 when no pollutant is present, and when the monitoring module 10 detects the pollutant, the detection module determines that the operation machine is in the pollution state, otherwise, the operation machine is in the non-pollution state. It should be understood that the above particle count or external contaminants and the like are merely two examples of the determination provided in the embodiments of the present application, and are not limiting of the parameters detected by the monitoring module 10. The pollution sources in the operation machine 210 include upper volatile matters, lateral dust or small fragments below, and for each pollution source, a person skilled in the art can select specific parameters to be detected by the monitoring module 10 according to actual requirements.
In summary, the machine pollution monitoring device provided in this embodiment includes a plurality of monitoring modules 10 and a controller 20 electrically connected to the monitoring modules 10, where the plurality of monitoring modules 10 are respectively configured in a plurality of operation machines 210 of the processing equipment, for collecting pollutant information in each operation machine 210, and the controller 20 is configured to receive the pollutant information collected by each monitoring module 10, and determine whether each operation machine 210 is in a pollution state according to the pollutant information of each operation machine 210 (for example, may compare the pollutant information of the operation machine 210 to which each monitoring module 10 belongs detected with a preset threshold of the operation machine 210, so as to determine according to a comparison result). In this way, in practical application, when it is found that the processed product is polluted and the operation machine 210 where the pollution source is located cannot be determined, each detection module can be controlled to be started by the controller 20 (of course, the detection module 10 can also be selected to be in a normally open state according to the need so as to detect the pollution state in each operation machine 210 in real time), and each detection module correspondingly detects the pollutant information of the operation machine 210 where it is located and sends the detected pollutant information to the controller 20; the controller 20 receives the pollutant information detected by each monitoring module 10, and compares the pollutant information of the operating machine 210 to which the monitoring module 10 belongs detected by each monitoring module 10 with a preset threshold of the operating machine 210 to determine whether each operating machine 210 is in a polluted state according to the comparison result. In this way, the operation machine 210 with pollution can be found, so that the operator can clean the operation machine 210 in time in a targeted manner, and the situation that the normal production efficiency is affected due to the fact that the specific operation machine 210 with pollution cannot be determined and all the operation machines 210 have to be opened for one-to-one inspection can be avoided. Therefore, the machine pollution monitoring device provided by the application can timely and accurately position the polluted operating machine 210, so that the pollution inspection efficiency of the machine can be improved, and the downtime is reduced.
In this embodiment, the monitoring module 10 may be a shooting unit, for example, a camera, or a distance sensor. When the pollutant mainly enters the external pollutant in the machine table (and is convenient for shooting the perceived pollutant), the shooting unit can be selected for detection; when the contaminant is an object having a certain height or thickness, and length, then the distance sensor may be selected for detection. It should be understood that the above-mentioned photographing unit and the distance sensor are examples, and in other embodiments, those skilled in the art may select other monitoring components as needed, which is not limited herein.
Optionally, the machine pollution monitoring device further includes a temporary storage 30, where the temporary storage 30 is electrically connected to the monitoring module 10 and the controller 20, respectively, and is configured to receive the pollutant information detected by the monitoring module 10, and provide the controller 20 with the pollutant information. In this way, the contaminant information detected by the monitoring module 10 may be pre-stored in the register 30, and the controller 20 may extract the contaminant information of the operating platform 210 according to the requirement when the contaminant information needs to be called for inspection, so as to reduce the pressure of the controller 20.
In order to facilitate the omnidirectional detection of the monitoring module 10 in the operation machine 210, in this embodiment, optionally, the machine pollution monitoring device further includes a transmission unit, and the transmission unit is connected to the monitoring module 10 and is used for driving the monitoring module 10 to move in the operation machine 210.
Thus, when the operation machine 210 needs to be detected, the monitoring module 10 can be driven by the transmission unit to move in the operation machine 210, so as to perform a comprehensive inspection in the operation machine 210. The activation of the transfer unit may be either manual or controlled by the controller 20, and is not limited herein. Also, in the present embodiment, the above-described transfer unit may be a robot, for example.
Optionally, the machine pollution monitoring device further includes an alarm 40, where the alarm 40 is electrically connected to the controller 20, and the alarm 40 is configured to respond to a control signal from the controller 20 when the pollutant information exceeds a threshold value. Thus, when the operation machine 210 is polluted, the controller 20 controls the alarm 40 to give an alarm, and the operator can be prompted to process in time, so that batch faults are avoided.
The setting position of the alarm 40 may be the top of the operating machine 210, so that the operator can easily find the setting position in time, and the setting position may be the audible and visual alarm 40, or the audible and visual alarm 40, etc.
In addition, a plurality of alarms 40 may be correspondingly disposed, and the plurality of alarms 40 are respectively disposed on the corresponding operating machine 210, and each alarm 40 is configured to perform targeted alarm according to the pollution status of the corresponding operating machine 210. That is, when the operation machine 210 where the alarm 40 is located is polluted, the controller 20 controls the alarm 40 provided on the operation machine 210 to give an alarm, so that a worker can conveniently find the operation machine 210 where pollution occurs.
In order to facilitate the observation of the staff, and thus to timely understand the pollution status of each operation machine 210, in this embodiment, the machine pollution monitoring device optionally further includes a display 50 electrically connected to the controller 20, where the display 50 is used to display the pollutant information in the machine.
In another aspect of the present invention, a processing apparatus is provided, where the processing apparatus includes a plurality of operation machines 210 and the machine pollution monitoring device, and a plurality of monitoring modules 10 of the machine pollution monitoring device are disposed in the plurality of operation machines 210 in a one-to-one correspondence manner. The processing equipment can improve the pollution inspection efficiency of the machine. The structure and the beneficial effects of the machine pollution monitoring device are described and illustrated in detail in the foregoing, so that the description is omitted here.
Optionally, a charging device 220 is disposed in the operation platform 210, and the monitoring module 10 is electrically connected to the charging device 220. The charging device 220 is used for charging the monitoring module 10 of the machine pollution monitoring device, so that the monitoring module 10 is in a long-time standby state.
In order to make the circuit in the operation platform 210 as simple as possible, in this embodiment, the monitoring module 10 is connected to the charging device 220 by wireless communication. Of course, those skilled in the art may choose to charge the monitoring module 10 by wired connection according to actual requirements.
The above description is only of alternative embodiments of the present invention and is not intended to limit the present invention, and various modifications and variations will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
In addition, the specific features described in the above embodiments may be combined in any suitable manner, and in order to avoid unnecessary repetition, various possible combinations are not described further.
Claims (8)
1. The machine pollution monitoring device is characterized by comprising a plurality of monitoring modules and a controller which is respectively and electrically connected with the monitoring modules, wherein the monitoring modules are respectively arranged in a plurality of operation machines of processing equipment and are used for collecting pollutant information in each operation machine, and the controller is used for receiving the pollutant information collected by each monitoring module and judging whether each operation machine is in a pollution state according to the pollutant information of each operation machine; the machine pollution monitoring device further comprises a conveying unit, wherein the conveying unit is connected with the monitoring module and used for driving the monitoring module to move in the operating machine; the conveying unit is a manipulator, and the manipulator is electrically connected with the controller.
2. The apparatus of claim 1, wherein the monitoring module is a camera unit.
3. The machine pollution monitoring device according to claim 1, further comprising a temporary storage device, wherein the temporary storage device is electrically connected to the monitoring module and the controller, and is configured to receive the pollutant information detected by the monitoring module, and provide the controller with the pollutant information extraction function.
4. The station contamination monitoring device of claim 1, further comprising an alarm electrically coupled to the controller, the alarm configured to issue an alarm in response to a control signal from the controller when the contaminant information exceeds a threshold.
5. The station contamination monitoring device of claim 1, further comprising a display electrically coupled to the controller, the display configured to display contaminant information within the station.
6. A processing apparatus, comprising a plurality of operation machines and the machine pollution monitoring device according to any one of claims 1 to 5, wherein a plurality of monitoring modules of the machine pollution monitoring device are disposed in a plurality of operation machines in one-to-one correspondence.
7. The processing apparatus of claim 6, wherein a charging device is disposed in the operating platform, and the monitoring module is electrically connected to the charging device.
8. The processing apparatus of claim 7, wherein the monitoring module is in wireless communication with the charging device.
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| CN202011248081.9A CN112271151B (en) | 2020-11-10 | 2020-11-10 | Machine pollution monitoring device and processing equipment |
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| CN113607765B (en) * | 2021-08-03 | 2024-04-12 | 亚翔系统集成科技（苏州）股份有限公司 | Pollution source searching method based on bad products in semiconductor production line |
| CN113937036B (en) * | 2021-10-15 | 2022-05-31 | 安徽耐科装备科技股份有限公司 | Feeding detection device and automatic packaging system |
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| FR2954583B1 (en) * | 2009-12-18 | 2017-11-24 | Alcatel Lucent | METHOD AND DEVICE FOR CONTROLLING THE MANUFACTURE OF SEMICONDUCTORS BY MEASURING CONTAMINATION |
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| CN104792942B (en) * | 2015-04-30 | 2018-01-30 | 深圳市华星光电技术有限公司 | VOC automatic checkout system and detection method |
| US11239099B2 (en) * | 2018-09-27 | 2022-02-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Tool monitoring device and method of monitoring tool |
| CN210775144U (en) * | 2019-09-30 | 2020-06-16 | 合肥晶合集成电路有限公司 | Semiconductor detection machine |
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