JP3219171U - System for finding circuit and pixel defects in a display panel - Google Patents

Abstract

An inspection apparatus for a display panel such as an OLED panel that suppresses the cost of panel manufacture is provided.
SOLUTION: a. An optical system 100 comprising a camera 101, a lens 102, and defect inspection and alignment optics 106, wherein the camera is configured to acquire an image of at least one electrical circuit on the display panel; b. A chuck for supporting the display panel, c. A probe block comprising a plurality of probe pins positioned to electrically engage a plurality of cell contact pads on the display panel simultaneously; d. A plurality of scrubbers for aligning the display panel on the chuck; e. A controller for analyzing the image of at least one electric circuit on the display panel and detecting a defect based on the analyzed image;
[Selection] Figure 1

Description

  This invention relates generally to, but not limited to, the field of inspection of electronic equipment including display panels, and in one specific application is used for inspection of, and inspection of, organic light emitting diode (OLED) displays. Related mechanical, optical and electronic systems.

  Most modern electronic devices contain an organic light emitting diode (OLED) display. The OLED is a kind of light emitting diode (LED), and a radioactive electroluminescent layer that emits light in response to an electric current is a film of an organic compound. The organic semiconductor layer is disposed between two electrodes, and usually at least one of these electrodes is transparent. OLEDs are used to form digital displays in devices such as television screens, computer monitors, portable systems such as cell phones, portable game machines, and PDAs.

  Manufacturing defects can occur at various stages of OLED panel production. Currently, OLED panels are inspected for defects at the module level after the panel is cut and assembled into a final display configuration. Modules are inspected by humans in their final form, are subject to human judgment, and are prone to errors. The current method is also very time consuming because it takes several minutes for humans to turn on the display and try to find defects by visual observation.

  Therefore, in view of the above and other deficiencies in the conventional OLED display inspection technology, the OLED panel is inspected early in the production cycle, and defects are identified and produced before the OLED panel is assembled into the final display module. What is needed is a system and method that can identify problems associated with setup or production facility anomalies.

  The method according to the present invention is directed to a method and system that substantially eliminates one or more of the above and other problems associated with the prior art to facilitate the inspection of electronic equipment.

  According to one aspect of the embodiments described in this specification, an inspection apparatus for inspecting a display panel, which is an optical system including a camera, a lens, and a defect inspection and alignment optical system, the camera being a display The electrical system configured to acquire an image of at least one electrical circuit on the panel, a chuck supporting the display panel, and a plurality of cell contact pads on the display panel simultaneously electrically Aligning the display panel on the chuck with a probe block comprising a plurality of probe pins positioned to engage with each other. ) Multiple scrubbers and at least one electricity on the display panel Analyzing the image of the road, and a control device for detecting defects based on the analyzed image, the inspection apparatus comprising a are provided.

  In one or a plurality of embodiments, the inspection apparatus further includes a lower (lower) frame and a stage mounted on the lower frame.

  In one or a plurality of embodiments, the stage is mounted on the lower frame using a plurality of vibration isolators.

  In one or a plurality of embodiments, the stage is mounted on the lower frame using a plurality of airbags.

  In one or more embodiments, the optical system comprises at least one electric motor configured to move at least the camera relative to the display panel.

  In one or more embodiments, the optical system comprises at least one electric motor configured to move at least the camera and the lens relative to the display panel.

  In one or more embodiments, the optical system comprises at least one electric motor configured to focus the camera.

  In one or more embodiments, the alignment optics are configured to facilitate alignment of the display panel on the chuck.

  In one or more embodiments, the inspection apparatus further includes a probe bar that stores the probe block.

  In one or more embodiments, the optical system is movably mounted on a movable gantry.

  In one or more embodiments, the gantry is configured to move relative to the chuck.

  In one or a plurality of embodiments, the inspection apparatus further includes a second optical system.

  In one or a plurality of embodiments, the inspection apparatus further includes a robot for loading and unloading the display panel on the chuck.

  In one or more embodiments, the inspection apparatus further comprises an environmental chamber that substantially surrounds the inspection apparatus.

  In one or a plurality of embodiments, the inspection apparatus further includes a power source that supplies power to the inspection apparatus.

  In one or more embodiments, the power source is an uninterruptible power source (UPS).

  In one or a plurality of embodiments, the inspection apparatus further includes a plurality of pneumatic valves.

  In one or more embodiments, the optical system is movable relative to the chuck.

  In one or more embodiments, the plurality of scrubbers are configured to press banker scrubbers configured to hold their positions and the display panel against the bunker scrubber. With pusher scrubbers.

  In one or more embodiments, the display panel is configured to be oriented in a portrait or landscape manner on the chuck.

  In one or more embodiments, the optical system defect review and alignment optics further comprises a defect review camera configured to generate a high resolution image of the defect.

  In one or a plurality of embodiments, the defect inspection and alignment optical system of the optical system further includes an alignment optical system camera.

  Other aspects associated with the present invention are set forth in part in the following description, and in part will be apparent from the description below, or may be taught by practice of the invention. Each aspect of the invention may be realized and attained by means of the elements particularly recited in the following detailed description and the appended claims and combinations of various elements and aspects.

  It should be understood that the above and following descriptions are merely illustrative and explanatory, and do not limit the claimed invention or its application in any way.

  The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with the following description, explain the technical principles of the invention. And useful for illustration.

1 illustrates an exemplary embodiment of an optical system used in a display panel inspection apparatus. 1 is a front top view of an exemplary embodiment of a display inspection device. FIG. 1 is a top view of an exemplary embodiment of a display inspection apparatus. FIG. 1 illustrates an exemplary embodiment of an inspection apparatus with an ambient chamber. 1 is a front view of an exemplary embodiment of a display panel inspection apparatus without an ambient chamber. FIG. Fig. 4 illustrates an exemplary embodiment of a lower frame without a stage. 1 illustrates an exemplary embodiment of a vibration isolator. 1 illustrates an exemplary embodiment of a UPS. 2 illustrates an exemplary embodiment of a system air valve. 2 illustrates an exemplary embodiment of facility connection. 1 illustrates an exemplary embodiment of a chuck. Shows the location of various scrubbers on the chuck. FIG. 6 illustrates an exemplary embodiment of a scrubber that moves to align plates. FIG. The possible display glass orientations on the chuck are shown. 1 illustrates an exemplary embodiment of a movable optical gantry. Fig. 6 illustrates an exemplary embodiment of a movable optical head with the cover removed. 2 illustrates an exemplary embodiment of two optical heads mounted on a gantry. 1 illustrates an exemplary embodiment of an AOS and DRC camera. FIG. 6 illustrates an exemplary embodiment of an AOS and DRC camera and lens with the camera cover removed. 1 illustrates an exemplary embodiment of an electrical cabinet of a display panel inspection apparatus. Shows various electrical and pneumatic panels. Shows various electrical and pneumatic panels.

  In the following detailed description, reference will be made to the accompanying drawing (s), in which identical functional elements are numbered the same. The accompanying drawings show an example and are not intended to be limiting in any way, and specific embodiments and implementations are consistent with the principles of the invention. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It is also understood that other embodiments may be utilized and structural changes and / or substitutions of various elements may be made without departing from the scope and spirit of the invention. Accordingly, the following detailed description is not to be taken in a limiting sense.

  In one aspect of the embodiments described herein, an optical inspection system for a display panel, referred to herein as a “Light-on Imaging Optical System” or “LIOS” Is provided. The inspection system is designed to allow early detection of various manufacturing defects and can provide cost savings to panel manufacturers by identifying defective panels without having to go through an expensive module assembly process. The inspection results generated by the described embodiments can be used both in repairing defective panels and in correcting panel production lines. For example, in the case of repeated defect detection, the inspection results generated by the system embodiments can be used for analysis and adjustment of panel production line parameters that are considered to be the cause of the detected defects. In the following description, an OLED panel may be used as an example of a device under inspection, but it will be appreciated by those skilled in the art that the same inspection system and method can be applied to inspection of other types of display panels. Although not limited, it is also applicable to micro LED display panels and MEMS display panels. In one or more embodiments, in order to be able to perform the inspection described herein, the display panel under inspection shall be operated before being cut into individual electronic devices.

  Thus, the following description is not limited to testing OLED panels or any other particular type of display panel.

  An inspection system according to an embodiment of the above-described device is configured to test all types of display panels for defects including, but not limited to, luminance uniformity. In one embodiment, the optical testing of the display panel described in this specification is performed primarily with the panel under test being turned on electrically. In one or a plurality of embodiments, the inspection system can handle a glass sheet carrying a plurality of panels. In one embodiment, the inspection system is configured to turn on only the panel to be inspected and keep the other panels on the same glass off. In various embodiments, the panel pixels can be turned on one color pixel (R, G, and B) at a time, or any combination of R, G, and B pixels.

  In one or more embodiments, the system can also allow the manufacturer to measure the power consumption of each display panel. For this reason, the inspection system includes a current and voltage measuring device. The power consumption measurement allows the manufacturer to determine the amount of time that the display unit can be powered with a particular battery charge. In one or more embodiments, the user can control the power supplied to the display panel and measure the uniformity of panel brightness under various power settings. In addition to this, the user can use the above inspection system to perform a life cycle test over a period of time and evaluate the quality of the panel as a function of time.

  In one or a plurality of embodiments, but not limited to, the tests performed using the inspection system include the following tests.

  1. Identifying dead pixels

  2. Identify weak pixels

  3. Identify bright pixels

  4). The brightness of multiple pixels in the panel can be compared to identify non-uniformities in the panel

  5. Multiple panels in glass can be compared to identify variations between panels

  6). Identifying dead lines

  7). Identify weak lines

  8). Identify bright lines

  9. Detection of Mura effect

  In one or more embodiments, the above exemplary tests can identify any process-related issues in the production of display panels. The information gathered from these tests can be used to modify downstream processes and as a final quality assurance for each panel and glass. In one or more embodiments, the information gathered in the panel inspection test can be used to repair defective panels. In various embodiments, the system can be used in a vacuum or atmospheric environment.

  In one or more embodiments, the information collected by the inspection system is then processed by one or more processors executing inspection software. In one or more embodiments, the software used in the inspection system is configured to:

  1. Identify the defective pixel and its position on the panel

  2. Identify the type of defect

  3. Generate and provide detailed inspection reports for individual display panels as well as glass with multiple display panels

Optics Figure 1 shows an exemplary embodiment of the display panel inspection optical system used in the apparatus (optical system) 100. With reference to FIG. 1, in one or more embodiments, the optical system 100 of the inspection system is configured to adjust a camera 101, a lens 102, and a distance between the lens 102 and the camera 101. Alternatively, a plurality of electric motors 103 are incorporated. In various embodiments, the electric motor 103 is additionally configured to adjust the distance between the lens 102 and the glass 104 including the display panel to be inspected, as well as to control the zoom of the lens 102. May be. The one or more electric motors 103 are configured to perform the function in response to an electrical signal received from a control device of the display panel inspection system. In one or more embodiments, the electric motor 103 can be used to control the focusing of the optical system 100 along the focusing Z-axis 105.

  As will be appreciated by those skilled in the art, the one or more electric motors can be used to acquire low magnification images and evaluate the entire display panel simultaneously, and to change the magnification of the optical inspection system to increase the magnification. A detailed image of individual pixel defects on the display panel can be observed under magnification. In one or more embodiments, the optical magnification can be adjusted by controlling the electric motor. In addition to or instead of this, the inspection system also has a function capable of performing the inspection using the inspection software by digitally expanding the image.

  The optical system 100 is also provided with a defect review and glass alignment optical system 106, which aligns the glass including the display panel on the gantry, and Used to perform a review of detected defects.

Panel drive, image capture, and reporting In one or more embodiments, the display panel under test must provide the correct electrical signals to the electrical contact pads on the individual panels. Selectively turned on. Electrical panel drive signals and camera image capture are controlled by panel drive electronics. The image captured by the camera is then analyzed using a specially developed software algorithm to identify and classify defective pixels on the display panel. The defects are then classified into several categories and the defects and their determined locations are included in the generated report and sent to the customer through factory automation.

  In one or more embodiments, detected defects are reported in individual pixel locations on each display panel. A luminance map is generated using the individual pixel luminance measurement results. In the luminance map, any mura on each panel can be visually recognized. In one or more embodiments, the inspection system includes a light-on tester, which is an electrical non-destructive tester for flat panel displays. In one or a plurality of embodiments, the light incident tester includes two optical heads that are attached to the same gantry and operate independently, thereby speeding up an inspection process for a large glass plate. A light incident imaging optical system (LIOS) on each head detects an arbitrary defect on the plate and generates a defect map of each panel on the plate. It is also possible to select and examine defects by using the defect review camera (DRC: Defect Review Camera) of the defect inspection and glass alignment optical system 106 described above.

  FIG. 2 is a front top view of an exemplary embodiment of the display panel inspection apparatus 200, and FIG. 3 is a top view thereof. Referring to FIG. 3, in one embodiment, the inspection apparatus 200 is a one-side loading system that receives glass from a robot (not shown) from the front (front surface) side 301, and the robot chucks the glass ( on the chuck). When the inspection of the panel for defects on the glass is complete, the robot removes the glass from the chuck from the same side 301.

  In one or more embodiments, a cell contact system that incorporates a probe bar 204 is used to store a plurality of electrical probes. Here, the electrical probe incorporates one or more pins designed to engage individual electrical Q pads on the display panel under test, and the conventional shorting bar technology. An improved version of is provided. The probe bar in one embodiment uses 200 micron wide pins to directly contact the panel Q pad on the display panel, rather than the normal large pad driven by a shorting bar.

  Advantages of such a configuration include, but are not limited to:

  The wasteful glass area that is currently required in the shorting bar architecture and that is later cut and discarded is greatly reduced.

  Compared to the short bar architecture, in one embodiment of the contact system, the electrical resistance is reduced and the electrical response is improved.

  In one embodiment, the inspection apparatus 200 includes the following four main components.

  Process (test) station

  Electric cabinet

  Operator console

  Surrounding enclosure

  In one embodiment, the inspection device 200 comprises a robotic materials handler and two load ports.

  FIG. 4 illustrates an exemplary embodiment of an inspection apparatus 200 that includes an ambient chamber 401. Ambient chamber 401 surrounds the test station. The operator is protected from accidental contact with the moving part or the glass substrate under test. The robot passes the plate through a narrow opening in front of the enclosure. In one embodiment, a ceiling ionizer inside the chamber prevents charges from accumulating or causing damage on the substrate.

  In one or more embodiments, the ambient chamber 401 has a plurality of panels on its front side so that the test process can be observed. The remaining three removable panels of the system allow access to the system for maintenance and configuration. When any panel is removed, a safety interlock stops the granite stage. A standard ambient chamber 401 comprises eight ULPA filters disposed on the chamber. The ULPA filter provides a class 10 equivalent environment inside the surrounding chamber. In one or more embodiments, the chamber is controlled from an outer panel of the housing.

Process Station In one or more embodiments, the process station is a platform for the plate under test and controls the movement and positioning of the LIOS head on the plate under test. The process station has three sections:

  Lower frame and granite

  Chuck

  LIOS Gantry

Lower Frame FIG. 5 is a front view of an exemplary embodiment of a display panel inspection apparatus 200 without an ambient chamber 401. In one or more embodiments, the lower frame 505 supports the granite stage 510 of the process station. The granite stage 510 is isolated from impact and leveled by four vibration isolators 501 attached to each corner of the lower frame 505.

  In one or more embodiments, as shown in FIG. 5, further support and leveling is provided by an airbag 502 attached to the top of the lower frame 505 (see FIG. 5). In one embodiment, the rubber airbag 502 is kept inflated at a constant pressure by a regulator on the inspection apparatus 200 side. The lower frame 505 also houses a glass lifter, stage air pressure and motion control equipment.

  FIG. 6 illustrates an exemplary embodiment of the lower frame 505 without the granite stage 510. Shown is an airbag 502 that provides support and stability for the inspection system 200. FIG. 6 shows a vibration isolator 501.

  FIG. 7 shows an exemplary embodiment of a vibration isolator 501. In one or more embodiments, the lower frame 505 (FIG. 5) has four vibration isolators 501 (only two vibration isolators are shown in FIG. 5, one at each corner of the lower frame 505). To support granite. The vibration isolator 501 can be finely adjusted to level the granite precisely.

Power Configuration Options In one or more embodiments, multiple power configurations of the inspection system 200 based on the power source of the facility are possible. In the first embodiment, power is supplied to the inspection system using a single power connection, for example, three-phase power in a 5-wire Y configuration. In one or more embodiments, the display panel inspection apparatus 200 incorporates an uninterruptible power supply (UPS) for coping with power outage situations. The system 200 is also applicable to a three-phase four-wire delta power configuration. When delta power is supplied, the system 200 requires an independent power adjustment module to adjust the supply power to the required specifications.

  In another embodiment, two power connections are used in the system. In this embodiment, the system is also equipped with a UPS. The first power connection is for critical power (with UPS) and the second power connection is for non-critical power (without UPS) ). In an exemplary embodiment, three-phase power in a 5-wire Y configuration is used.

  In yet another embodiment, the system 200 is equipped with a UPS that accepts a Y power configuration directly or a three-phase four-wire delta power configuration. When delta power is supplied, the system requires an independent power adjustment module to adjust the supply power to the required specifications.

  In one or more embodiments, during any power failure, the uninterruptible power supply (UPS) sounds an alarm and shuts down the system and critical components. In all cases, a power cord for each connection is provided. In one embodiment, the UPS is a 25 kVA UPS that supplies clean AC power to the inspection system 200 for 5 minutes. System 200 converts the supplied AC voltage to a DC voltage. In one or more embodiments, the DC voltage charges a set of batteries and is reconverted to AC power to eliminate noise and voltage drops. In the event of a power failure, the DC battery supplies power for the converter that provides AC power. The UPS system includes power management software that monitors the UPS function and sounds an alarm if system power is reduced or lost. FIG. 8 illustrates an exemplary embodiment of a UPS 801 manufactured by APC and commercially available.

In one or more embodiments, the exhaust path from the E-cabinet is open through the bottom towards the floor. An 8 inch discharge flange is arbitrarily selected when the customer needs to use it for manufacturing factory discharge.

In one or more embodiments of nitrogen, nitrogen may be supplied to the inspection device 200 when the inspection device 200 includes an ionization device in order to suppress the accumulation of electrostatic charges. In this case, spare CDA is converted to a minimum flow nitrogen line. In one or more embodiments, air and vacuum equipment is connected to equipment boxes on the lower frame on the right side near the front of the system.

  In one or more embodiments, CDA and vacuum are provided to the inspection system 200 from the outside.

  FIG. 9 shows an exemplary embodiment of the system air valve 901.

  In one or more embodiments, the inspection apparatus 200 is paired with a robot. System, robot, and host server setup configurations will vary depending on customer equipment. FIG. 10 illustrates an exemplary embodiment of facility connection.

Granite Stage In one or more embodiments, a process station granite stage 510 is attached to a pneumatic vibration isolator 501 on the lower frame 505. This provides a platform for the optical bridge and test chuck. The isolator 501 prevents excessive movement of granite and chuck during acceleration and deceleration of the X-axis stage. The granite stage 510 is a smooth and horizontal base for the gantry. The chuck is attached to the flat surface of the granite.

Chuck In one or more embodiments, the chuck holds the substrate during testing. The chuck surface is machined flat and is precisely leveled using a kinematics mounting system. FIG. 11 shows an exemplary embodiment of the chuck 1101.

  In one or more embodiments, during loading and unloading of the plate, lift pins extend upward through the chuck and hold the plate above the chuck surface. The robot end effector moves below the plate. After the plate is placed on the pin, the plate is positioned on the chuck by downward movement.

  In one or more embodiments, when the plate is positioned, airflow through the chuck causes the plate to float, thereby allowing easy movement of the plate by the scrubber. When the plate is positioned, the plate is securely held in place by the vacuum flow through the channel of the chuck.

Scrubber FIG. 12 shows the position of the scrubber on the chuck 1101. The scrubber is used to move and align the display plate on the chuck 1101. In one embodiment, the display panel inspection apparatus 200 incorporates two types of scrubbers: bankers and pushers. The bunker scrubber holds their position, while the pusher scrubber moves to press the plate against the bunker. In FIG. 12, the position of the bunker scrubber is indicated by the symbol B, while the position of the pusher scrubber is indicated by the symbol P.

  FIG. 13 illustrates an exemplary embodiment of a scrubber 1301 that moves to align the plate 1302. In one or more embodiments, referring to FIG. 12, there are seven scrubbers (denoted as B and P) along the side of the chuck 1101. A scrubber 1301 is used to precisely align the plate 1302 on the chuck.

Glass Orientation In one or more embodiments, depending on system options, the glass plate 1403 with the display panel can be oriented vertically (short edge first) (see 1401 in FIG. 14) or horizontally oriented (long edge first). ) (See 1402 in FIG. 14). In one embodiment, two sensors below the chuck determine the position of the glass and allow the system to adapt to orientation changes.

Air Zone In one or more embodiments, the chuck provides an air flow to the underside of the glass during plate movement. This allows release of the glass from the chuck and free movement of the glass on the chuck. During the test, the plate is held in place by vacuum operation. In one embodiment, there are three air zones on the chuck:

  The first air zone 1 includes the central portion of the chuck.

  The second and third air zones are automatically enabled depending on whether the system is in portrait mode or landscape mode. When the second zone is off, the third zone is on and vice versa.

  In one or more embodiments, tiles disposed in each of the air zones receive air and vacuum from the same tube regulated by a pneumatic panel. There is a pressure sensor for each of the zones on the pneumatic panel on the left side of the tool below the chuck. In one embodiment, each sub-zone is provided with a respective sensor.

Optical Gantry FIG. 15 shows an exemplary embodiment of a movable optics gantry 201. In one or more embodiments, two optical heads 202 and 203 (also shown in FIG. 2) are attached to the gantry 201. Optical heads 202 and 203 have two drive axes X and Z. Individual linear motors move the heads 202 and 203 across the bridge, thereby precisely positioning the left (X1) and right (X2) optical heads 202 and 203, respectively, on the plate. Each head also has an independent motor for moving the head up and down (Z1 and Z2) for focusing.

  In one or more embodiments, a linear optical encoder provides position feedback for both axes. Software limits and hard stop limits determine the movement of the optical head (depending on customer options).

Optical Head FIG. 16 shows an exemplary embodiment of the movable optical head 202 or 203 with the cover removed. There are two optical heads (202 and 203) on the inspection apparatus 200. Each head has a LIOS camera 1601 having a LIOS lens 1602, a main alignment optical system (AOS) camera 1604, and a defect inspection camera (DRC) 1603. In one or more embodiments, software restrictions prevent the two heads 202 and 203 from being closer to each other than a predetermined distance, eg, 450 millimeters. A hardware limit switch (not shown) is triggered when the head is separated by this distance.

  In one or more embodiments, the home position of the optical head relative to the front of the system is as follows:

  X: Leftmost left (0): A positive value of X acts to move the head away from 0.

  Y: behind the stage (0): a positive value of Y acts to move the head away from 0.

  Z: Move upward (0): A negative value of Z acts to move the head downward.

  FIG. 17 shows an exemplary embodiment of two optical heads 202 and 203 mounted on the gantry 201.

Head Vertical Movement In one or more embodiments, the movement of the head 202/203 in the Z axis is guided by four sets of crossed roller bearings that move on two linear rails. A linear motor moves the stage. Each Z axis is supported by a pneumatic counterbalance. A linear optical encoder with 50 nanometer resolution provides position feedback. Software limits and hard stop limits are positioned to allow about 200 millimeters of movement. The position accuracy of the stage is ± 2 microns. The stage repeatability is ± 1 micron. The LIOS is leveled with respect to the chuck by using spherical bearings attached to the LIOS lens housing. In one or more embodiments, each LIOS is provided with a high performance LIOS camera 1601.

AOS
FIG. 18 illustrates one exemplary embodiment of each of the DRC and AOS cameras 1603 (FIG. 16) and 1604 (FIG. 16). A main alignment optical system (AOS) 1604 attached to the side of the head 202/203 (FIG. 2) is used for plate alignment. In one or more embodiments, the AOS 1604 is integrated with a defect review camera (DRC) 1603 and included in the same camera housing 1701 as shown in FIG. Its position is controlled by the movement of the optical head 202/203.

  FIG. 19 shows an exemplary embodiment of each of the lenses 1801 and 1802 with the AOS and DRC camera and camera cover 1701 removed. In one or more embodiments, the AOS video camera 1604 acquires an image for aligning the LIOS with respect to the plate containing the display panel under test. In one or more embodiments, the AOS location is the main reference point of the system. The AOS, DRC, and probe bar positions are all calculated using the offset from the AOS.

Defect Review Camera (DRC)
In one or more embodiments, the DRC 1603 is a color camera used for defect inspection. Attached to the side of the LIOS mount. The camera 1603 has software controlled focus and zoom. The operator can select individual defects in the visual inspection and determine the characteristics of the defects. The image of the defect can be saved and written to a defect file.

Plate Square Ring In one or more embodiments, plate square ring represents detecting the position and rotation of the glass using an alignment camera. When glass is loaded on the chuck and the scrubber is centered on the chuck, the AOS camera is used to determine the position and rotation of the glass, thereby allowing the system to detect the LIOS for defect inspection. The camera can be accurately positioned, and the DRC camera can be accurately positioned for the defect inspection.

Image processing Image processing software manages all images from LIOS, AOS, and DRC. It runs on a PC using a Windows operating system. There are the following two image processing computers (IPPC).

  One IPPC for LIOS, AOS, and DRC on the left

  One IPPC for LIOS, AOS, and DRC on the right

A computer interconnect LIOS image is transmitted from the camera to the IPPC through a cable. The IPPC also receives AOS and DRC images via a cable. The image converted to gray scale is transmitted to the AC system controller computer via the Ethernet link.

Image processing functions Image processing functions include image acquisition, calibration and filtering of measured images, and analysis of luminance maps, defect images and optical calibration images.

Electrical cabinet
Most electrical components of the inspection device 200 are in the electrical cabinet shown in FIG. This cabinet is divided into three bays: an AC system controller stage cabinet 2001, an electric computer 2002, and a control panel 2003. The main components include, but are not limited to, the following.

  AC system controller computer

  Power distribution panel

  PG card cage

  Three image processing computers

  Two panel drive interface (PDN) card cages

  Two switching devices

  AC / DC power supply

  Electronic device switchboard

Electrical and Pneumatic Panels FIGS. 21 and 22 show various electrical and pneumatic panels. In particular, FIG. 21 shows a panel disposed on the left side of the inspection system 200, where a stage amplifier 2101, a stage regulator 2102, and a UMAC drawer 2103 are present. On the other hand, FIG. 22 shows a panel disposed on the right side of the inspection system 200, and a chuck air pressure panel 2201 and a system air pressure panel 2202 exist.

Operator Console In one or more embodiments, the inspection system comprises a remote operator console. An LCD monitor, keyboard and mouse are arranged on the remote operator console. When the display panel inspection apparatus 200 is under local control, it operates through a graphical user interface (GUI) running on a system computer running on a UNIX operating system.

In conclusion , it should be understood that the processes and techniques described herein are not inherently related to any particular apparatus and can be implemented in any suitable combination of components. Furthermore, various types of general-purpose devices can be used according to the teaching contents described in this specification. It may also prove convenient to configure special equipment to perform the steps of the methods described herein. Although this invention has been described with reference to specific examples, it is intended in all respects to be illustrative rather than limiting.

  Moreover, other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed in this specification. Various aspects and / or components of the above embodiment may be used alone or in any combination in a system for testing a display device. The above specifications and examples are considered to be exemplary only, with the true scope and spirit of the invention being indicated by the following claims.

Claims (22)

An inspection device for inspecting a display panel,
a. An optical system comprising a camera, a lens, and defect inspection and alignment optics, wherein the camera is configured to acquire an image of at least one electrical circuit on the display panel;
b. A chuck for supporting the display panel,
c. A probe block comprising a plurality of probe pins positioned to electrically engage a plurality of cell contact pads on the display panel simultaneously;
d. A plurality of scrubbers for aligning the display panel on the chuck; and e. A control device for analyzing the image of the at least one electric circuit on the display panel and detecting a defect based on the analyzed image;
An inspection device comprising:   The inspection apparatus according to claim 1, further comprising a lower frame and a stage mounted on the lower frame.   The inspection apparatus according to claim 2, wherein the stage is mounted on the lower frame using a plurality of vibration isolators.   The inspection apparatus according to claim 2, wherein the stage is mounted on the lower frame using a plurality of airbags.   The inspection apparatus according to claim 1, wherein the optical system comprises at least one electric motor configured to move at least the camera relative to the display panel.   The inspection apparatus according to claim 1, wherein the optical system comprises at least one electric motor configured to move at least the camera and the lens relative to the display panel.   The inspection apparatus according to claim 1, wherein the optical system comprises at least one electric motor configured to focus the camera.   The inspection apparatus according to claim 1, wherein the alignment optical system is configured to facilitate alignment of the display panel on the chuck.   The inspection apparatus according to claim 1, further comprising a probe bar for storing the probe block.   The inspection apparatus according to claim 1, wherein the optical system is movably mounted on a movable gantry.   The inspection apparatus according to claim 10, wherein the gantry is configured to move with respect to the chuck.   The inspection apparatus according to claim 1, further comprising a second optical system.   The inspection apparatus according to claim 1, further comprising a robot that loads and unloads the display panel on the chuck.   The inspection apparatus of claim 1, further comprising a surrounding chamber that substantially surrounds the inspection apparatus.   The inspection apparatus according to claim 1, further comprising a power source that supplies electric power to the inspection apparatus.   The inspection apparatus according to claim 15, wherein the power supply is an uninterruptible power supply (UPS).   The inspection device according to claim 1, further comprising a plurality of air valves.   The inspection apparatus according to claim 14, wherein the optical system is movable with respect to the chuck.   The plurality of scrubbers comprise a bunker scrubber configured to hold their position and a pusher scrubber configured to press the display panel against the bunker scrubber. Item 15. The inspection apparatus according to Item 14.   The inspection apparatus according to claim 1, wherein the display panel is configured to be oriented vertically or horizontally on the chuck.   The inspection apparatus according to claim 1, wherein the defect inspection and alignment optical system of the optical system further comprises a defect inspection camera configured to generate a high-resolution image of the defect.   The inspection apparatus according to claim 1, wherein the defect inspection and alignment optical system of the optical system further includes an alignment optical system camera.

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