TWM539057U - Anti-collision system of optical microscope - Google Patents

Description

Optical microscope collision avoidance system

The present invention relates to an anti-collision system for an optical microscope, and more particularly to an anti-collision system having an optical microscope that prevents an objective lens from directly colliding with a test object.

In general, when measuring with an optical microscope, the image of the current object to be tested can only be indirectly viewed through the screen of the display. Therefore, if the objective lens is moved closer to the object to be tested, if the distance between the objective lens and the object to be tested is not observed, Collisions are highly likely to occur, causing unnecessary damage to the objective lens or the object to be tested.

The objective lens and the object to be tested of the optical microscope are high-priced items such as the probe card of the semiconductor industry test wafer yield. In order to avoid collision and cause loss, the optical microscope must be matched with one during the measurement. Anti-collision system to avoid collision between the objective lens and the object to be tested. Some practitioners have proposed to install a contact sensor on an optical microscope to detect whether the objective lens will hit the object to be tested. However, for some sensitive and unbearable test objects, contact sensors are not applicable.

Some manufacturers have proposed to install non-contact sensors such as optical fibers on optical microscopes; however, such non-contact sensors are susceptible to the material of the object to be tested. In addition, the external sensor cannot be aligned with the image being viewed by the lens, especially when the microscope's object to be tested is small or very thin, the sensor may not be able to sense the relationship between the objective and the object to be tested. Distance, and can not play the anti-collision function. Furthermore, the additional mounting of the sensor on the optical microscope also adds cost.

As mentioned above, the creators of this creation think about and design an anti-collision system for optical microscopes, and painstakingly study them to improve the lack of existing technologies, thereby enhancing the implementation and utilization of the industry.

In view of the above-mentioned problems of the prior art, one of the purposes of the present invention is to provide an anti-collision system for an optical microscope, using the threshold of image sharpness to judge the function of stopping the objective lens to continue to approach the object to be tested, and avoiding direct contact of the objective lens. The object to be tested causes damage to the objective lens or the object to be tested, effectively reducing the cost of the damage and improving the efficiency of the work.

Based on the above objects, the present invention provides an anti-collision system for an optical microscope, which comprises an optical microscope and an image processing device. The optical microscope has a pillar portion, at least one objective lens and a base, the pillar portion has a control unit and a motor therein, and the control unit controls the motor to move at least one objective lens and the image processing device, including the display and the collision avoidance determining unit, and the image processing device is The optical microscope is connected to the image of the object to be tested on the pedestal by at least one objective lens. When the motor adjusts at least one objective lens to approach the object to be tested, the collision avoidance determining unit determines whether the brightness of the image is changed according to one of the images. The stop motor drives at least one objective lens to move toward the object to be tested.

Preferably, the number of at least one objective lens is plural, and the plurality of objective lenses have different magnifications, and the objective lenses of different magnifications correspond to different resolution ranges.

Preferably, the anti-collision determining unit stores a threshold value corresponding to at least one objective lens. When the resolution of the image falls from a maximum value beyond the threshold value, the anti-collision determining unit transmits an instruction to the control unit to stop the motor. Move at least one objective lens.

Preferably, the sharpness of the image includes the sharpness or edge value of the image.

Preferably, the sharpness or edge value is related to the threshold value.

Preferably, the control unit has a digital control interface, and displays the digital control interface through the display, and operates the motor and the image processing device through the digital control interface, and when the collision avoidance determination unit determines to stop at least one objective lens to be tested When the object moves, the collision avoidance determining unit generates a warning signal to be displayed on the digital control interface.

Preferably, a turntable is disposed between the pillar portion and the at least one objective lens, and the top of the turntable has a pivotal connection pillar portion so that at least one objective lens is rotated by the turntable relative to the pillar portion.

Preferably, the base has means for adjusting the orientation to facilitate lateral, longitudinal and pivotal movement of the test object on the base relative to the at least one objective lens.

Preferably, the surface of the pillar portion has a plurality of knobs, and the digital control interface is switched to a manual mode for rotating a plurality of knobs to adjust the distance of at least one objective lens relative to the base.

Preferably, in the manual mode of the optical microscope, when the collision avoidance determining unit determines to stop moving at least one objective lens to the object to be tested, the collision avoidance determining unit generates a warning signal to be displayed on the digital control interface.

As mentioned above, an optical microscope collision avoidance system of the present invention may have one or more of the following advantages:

(1) Using the threshold range of image sharpness, judge the function of stopping the objective lens to continue to approach the object to be tested, and avoid the damage of the objective lens or the object to be tested by directly touching the object to be tested.

(2) The optical microscope can realize the anti-collision function without installing an additional sensor, so there is no increase in cost.

(3) The user can switch to the manual mode through the digital control interface, and use the coarse adjustment knob and the fine adjustment knob to adjust the distance of the objective lens relative to the object to be tested, and the warning signal prompts the user to stop turning the plurality of knobs to avoid The objective lens directly touches the object to be tested.

In order to understand the technical characteristics, content and advantages of the creation and the effects that can be achieved by the examiner, the author will use the drawings in detail and explain the following in the form of the examples, and the drawings used therein The subject matter is only for the purpose of illustration and supplementary explanation. It is not necessarily the true proportion and precise configuration after the implementation of the original creation. Therefore, the scope and configuration relationship of the attached drawings should not be interpreted or limited. First described.

The collision avoidance system of the optical microscope of the present invention will be described below with reference to the related drawings. For ease of understanding, the same components in the following embodiments are denoted by the same reference numerals.

Please refer to FIG. 1 , which is a schematic diagram of an anti-collision system for an optical microscope according to an embodiment of the present invention. In Fig. 1, the optical microscope 10 has a pillar portion 101, a turntable 102, at least one objective lens 103, and a susceptor 105. When the number of the objective lenses 103 is plural, they may have different magnifications, and the objective lenses of different magnifications correspond to different resolution ranges.

The inside of the pillar portion 101 has a control unit and a motor. The control unit can control the motor to move the objective lens 103 to approach or away from the object to be tested 12. The turntable 102 is disposed between the pillar portion 101 and the objective lens 103. The top of the turntable 102 has a pivot. The shaft system is connected to the pillar portion 101 so that the objective lens 103 can be rotated by the turntable 102 relative to the pillar portion 101, and the turntable 102 has the objective lens 103 of different magnifications, and the user can rotate the turntable 102 according to the needs thereof. The objective lens 103 of different magnifications is switched.

The base 105 is used to place the object to be tested 12. The image processing device includes a display 11 and an anti-collision judging unit. The image processing device is connected to the optical microscope 10, and the objective lens 103 is displayed on the display 11 to capture an image of the object to be tested 12 on the susceptor 105, and the control unit has a digital position. The control interface is displayed through the display 11 to display the digital control interface, so that the user can easily operate the optical microscope collision avoidance system through the digital control interface.

In the process of the motor adjustment objective lens 103 approaching the object to be tested 12, the anti-collision determination unit determines whether to stop the movement of the motor-driven objective lens 103 toward the object to be tested 12 according to the change of the sharpness of the image, so as to prevent the objective lens 103 from directly touching the object to be tested. Matter 12.

Please refer to FIG. 2 , which is an operation flowchart of an optical microscope anti-collision system according to an embodiment of the present invention, and an image diagram of a subject to be tested, and the operation flow thereof can be further described in detail. As shown in FIG. 2 and in conjunction with FIG. 1 above, in step S1, the user activates the optical microscope 10 and the image processing apparatus, and places the to-be-side object 12 on the base 105, at which time the side object 12 is separated from the objective lens 103. a suitable distance; in step S2, the user selects a target lens 103 of a specific magnification through the digital control interface, and presets a range of threshold values corresponding to the image resolution of the specific magnification objective lens 103, wherein the image sharpness includes the image The sharpness or edge value, and the sharpness or edge value is related to the threshold value.

In step S3, the actual image diagram of the object to be tested 12 can be synchronously taken (steps S31 to S35), and the user operates the motor through the digital control interface to drive the objective lens 103 to start approaching the object to be tested 12 (steps). S31, the threshold value is 3.09 at this time, in the process of approaching, the display 11 displays that the image of the object to be tested 12 is gradually clear, and the corresponding threshold value also becomes larger (step S32, the threshold value is 3.20). Continue to drive the objective lens 103 close to the object to be tested 12. When the maximum threshold value is obtained, the corresponding image is the clearest (step S33, the threshold value is 5.13), and if it continues to approach the object to be tested 12, its corresponding The image will be blurred and the threshold value will be lower and lower (step S34 to step S35). If the threshold of image sharpness exceeds the preset range (for example, the threshold value is lower than 3.0), the collision avoidance judgment unit It is immediately determined that the stopping objective lens 103 continues to approach the object to be tested 12, and transmits a command to the control unit for stopping the motor from continuing to drive the objective lens 103 to move to the object to be tested 12, and displaying an alert signal on the digital control interface to prompt the user. note

At this time, the user can adjust the objective lens 103 to return to the position where the image is most clear for the image capturing operation or perform the next step S4 according to the measurement; in step S4, the user needs to obtain a higher image clarity. The degree or resolution can be rotated by the digital control interface to switch the objective lens of the higher magnification, and the subsequent operation flow is repeated in step S2 to obtain the desired image sharpness of the object 12 to be tested.

Please refer to FIG. 3, which is a schematic diagram of an optical microscope 10 of another embodiment of the present invention. As shown in FIG. 3, the surface of the pillar portion 101 has a plurality of knobs 104. After the user can switch to the manual mode through the digital control interface, the plurality of knobs 104 and the dial 102 can be manually rotated to adjust the relative orientation of the objective lens 103. The distance between the base 105 and the object to be tested 12 is switched with the objective lens 103 of different magnifications, and the plurality of knobs 104 are stopped by the warning signal to prevent the objective lens 103 from directly touching the object to be tested 12.

In addition, the plurality of knobs 104 have at least one coarse adjustment knob 104a and a fine adjustment knob 104b for user operation, such as the coarse adjustment knob 104a provides the objective lens 103 to quickly move to a preset position, and the fine adjustment knob 104b Then, the objective lens 103 is provided to slowly approach the object to be tested 12. The base 105 can be mounted with a device 108 for adjusting the orientation, so that the object 12 on the base 105 can be moved laterally or longitudinally relative to the objective lens 103 or pivoted. Further, the base 105 has a light source therein. And the surface of the pedestal 105 is a light transmissive material, which can be used to illuminate the object to be tested 12.

In the optical microscope collision avoidance system of the present embodiment, as shown in FIG. 3, the surface of the base 105 may be provided with a level 106 to ensure whether the object 12 is measured on the flat base 105. The surface edge of the base 105 may have a fixing member 107 for fixing the relative position of the object to be tested 12 and the base 105, and ensuring that the object to be tested 12 does not have a relative positional deviation due to adjustment of other components or external force factors.

The optical microscope anti-collision system of the present invention can be applied to a wide range of industries, such as the manufacturing process of the semiconductor industry, and particularly can be applied to the semiconductor industry before the integrated circuit (IC) is not packaged, that is, under the optical microscope The probe card performs a preliminary functional test on the bare crystal. This test process is useful for screening out defective products and performing subsequent operation procedures, which has a considerable impact on the manufacturing cost of the semiconductor industry, and general wafer level probes. The card is a high unit price product. Therefore, the optical microscope anti-collision system of the present invention facilitates the following probe process in the test process to avoid collision of the probe card, thereby effectively reducing the cost of damage and thereby increasing the cost. Productivity efficiency.

The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of this creation shall be included in the scope of the appended patent application.

S1, S2, S3, S4, S31, S32, S33, S34, S35‧‧ steps
10‧‧‧Light microscope
101‧‧‧ Pillars
102‧‧‧ Turntable
103‧‧‧ Objective lens
104‧‧‧Multiple knobs
104a‧‧‧ coarse adjustment knob
104b‧‧‧ fine adjustment knob
105‧‧‧Base
106‧‧‧ level
107‧‧‧Fixed parts
108‧‧‧Azimuth adjustment device
11‧‧‧ Display
12‧‧‧Test object

The first figure is a schematic view of the appearance of the collision avoidance system of the optical microscope of the present invention.

The second figure is an operation flow chart of the collision avoidance system of the optical microscope of the present invention and an image diagram of the object to be tested.

Figure 3 is a schematic diagram of an optical microscope of the collision avoidance system of the optical microscope of the present invention.

10‧‧‧Light microscope

101‧‧‧ Pillars

102‧‧‧ Turntable

103‧‧‧ Objective lens

105‧‧‧Base

11‧‧‧ Display

12‧‧‧Test object

Claims (10)

An anti-collision system for an optical microscope, comprising: an optical microscope having a pillar portion, at least one objective lens and a base, wherein the pillar portion has a control unit and a motor therein, and the control unit controls the motor to move the At least one objective lens; and an image processing device comprising: a display and a collision avoidance determination unit, wherein the image processing device is coupled to the optical microscope, wherein the display is displayed by the display, and the at least one objective lens is photographed on the pedestal An image of the object, in the process of adjusting the at least one objective lens to approach the object to be tested, the collision avoidance determining unit determines whether to stop the motor to drive the at least one objective lens to the test according to a change in the sharpness of one of the images Object movement. The anti-collision system of the optical microscope of claim 1, wherein the number of the at least one objective lens is plural, the plurality of objective lenses have different magnifications, and the plurality of objective lenses of the different magnifications are different. The range of resolution. An anti-collision system for an optical microscope according to claim 1, wherein the anti-collision judging unit stores a threshold value corresponding to at least one objective lens, and when the resolution of the image falls from a maximum value, the threshold value is exceeded. When the threshold is thresholded, the collision avoidance determination unit transmits an instruction to the control unit to stop the motor from moving the at least one objective lens. An anti-collision system for an optical microscope according to claim 3, wherein the sharpness of the image comprises a sharpness or an edge value of the image. An anti-collision system for an optical microscope according to claim 4, wherein the sharpness or the edge value is related to the threshold value. The anti-collision system for an optical microscope according to claim 3, wherein the control unit has a digital control interface, and the digital control interface is displayed by the display, and the motor is operated by the digital control interface. And the image processing device, and when the collision avoidance determining unit determines to stop moving the at least one objective lens to the object to be tested, the collision avoidance determining unit generates a warning signal to be displayed on the digital control interface. An anti-collision system for an optical microscope according to claim 1, wherein a turntable is disposed between the pillar portion and the at least one objective lens, and a top of the turntable has a pivotal connection to the pillar portion to enable the At least one objective lens is rotated by the turntable relative to the pillar portion. An anti-collision system for an optical microscope according to claim 1, wherein the base has a device for adjusting an orientation, so that the object to be tested on the base is laterally, longitudinally and pivotally opposite to the at least one objective lens. Move around. The anti-collision system of the optical microscope of claim 6, wherein the surface of the pillar portion has a plurality of knobs, and when the optical microscope is switched to the manual mode, the user rotates the plurality of knobs to adjust the at least one objective lens. The distance from the base. An anti-collision system for an optical microscope according to claim 9, wherein in the manual mode of the optical microscope, when the collision avoidance determining unit determines to stop moving the at least one objective lens to the object to be tested, the defense The collision determination unit generates a warning signal to be displayed on the digital control interface.