TWI697664B - Mura quantifying system by laser crystallization facility and mura quantifying method by laser crystallization facility - Google Patents

Abstract

The present invention relates to Mura quantifying system and method, that is, a Mura quantifying system by a laser crystallization facility including a laser crystallization apparatus, in which the Mura quantifying apparatus is provided in the laser crystallization facility such that a substrate is crystallized by the laser crystallization apparatus and Mura is quantified in real time while the crystallized substrate is moved, and a Mura quantifying method by a laser crystallization facility.

Description

Moiré quantification system through laser crystallization equipment and moiré quantification method through laser crystallization equipment

The present invention relates to a moiré quantification system and method, and more specifically to a moiré quantification system through laser crystallization equipment, and a moiré quantification method through laser crystallization equipment. The system quantifies the clouds in a substrate The pattern is used to instantly determine the quality of the substrate to provide stable process management, where the substrate is crystallized in a laser crystallization device.

A process of crystallization of amorphous polycrystalline thin films such as amorphous silicon thin films is usually required to manufacture electrical/electronic components such as liquid crystal displays or solar devices.

It is necessary to irradiate a laser with a predetermined energy to crystallize the amorphous silicon film into a crystalline silicon film (hereafter, for convenience, the film to be crystallized is referred to as a "substrate"). The density of energy in the process is called energy density (hereinafter referred to as "ED"), and ED with conditions for optimizing the crystallization result is called optimized energy density (hereinafter referred to as "OPED").

When using a scanning electron microscope (SEM) to observe a product exposed to a laser with OPED, the orientation of the crystal grains is consistent, and the uniformity of the crystal grain size is also optimal. However, due to the time and manpower required for the manufacturing process, it is generally impossible to inspect all products with SEM.

The reason is that a standard for selecting OPED through visual inspection has been established, which is called moiré, and it is determined based on the intensity, frequency, and trend of the moiré. When visually inspecting a product that has undergone ED splitting (a test of crystallization of an area of tens of millimeters under different EDs), it will be difficult to observe the moiré, and it can be seen more clearly in the OPED area than in the ED area This product, and when moving from the OPED area to a higher ED area, will show a lot of moiré. OPED will be selected in this way.

On the other hand, the crystallization process using lasers is a scanning process, in which the laser pulses will overlap, and moiré will be generated in the overlap area due to the energy difference different from the surroundings. The fringes thus produced are called shot moiré.

In addition, when the substrate to be crystallized is scanned and the target film is crystallized, the unevenness of the linear laser beam will generate color spots, which is called scanning moiré.

In order to check the quality of the product after the crystallization device is used for crystallization, visual inspection has been used to visually inspect the product in a testing instrument.

However, visual detection of moiré has its limitations, and different types of moiré are generated depending on the location, and it is difficult to inspect the moiré. In addition, the detection personnel have detection differences, which makes the detection productivity, accuracy, and reproducibility low. Moreover, due to the need for inspection personnel, manpower and cost will be wasted.

An object of the present invention is to provide a moiré quantification system through laser crystallization equipment and a moiré quantification method through laser crystallization equipment. The system quantifies the moiré in a substrate to determine the quality of the substrate in real time. Provide stable process management, where the substrate is crystallized in a laser crystallization device.

In order to achieve the above objective, according to one concept of the present invention, there is provided a moiré quantization system through a laser crystallization device including a laser crystallization device, wherein the moiré quantization device is provided in the laser crystallization device so that a The substrate is crystallized by the laser crystallization device, and the moiré is instantly quantified while moving the crystallized substrate.

In addition, in order to achieve the above objective, according to another concept of the present invention, a method for quantifying moiré through a laser crystallization device is provided, which includes: a first step of loading a substrate, and a second step of crystallizing the loaded substrate using a laser , The third step of real-time quantification of moiré while moving the crystallized substrate, and the fourth step of unloading the substrate that has undergone crystallization and moiré quantization.

The laser crystallization apparatus may include: a processing chamber; a laser beam generator arranged at one side end of the processing chamber and radiating the laser beam toward the substrate; and a platform arranged in the processing chamber and Used to load and unload the substrate.

The moiré quantification device may include: an image acquisition unit arranged above the platform to instantly acquire the moiré in the crystallized substrate loaded by the platform without interfering with the laser beam; an illumination unit is arranged At one side of the image acquisition unit, and irradiate the crystallized substrate; an image processing unit implements image preprocessing and image processing to extract the contrast image on the acquired moiré image and analyze the process The processed image becomes data to quantify the moiré; and a central processing unit that controls the image acquisition unit, the lighting unit, and the image processing unit, displays the image acquired by the image acquisition unit, and the image processing unit Obtain the image data and determine the quality of the crystallized substrate.

The image acquisition unit may be an area camera, and the image acquisition unit adjusts a trigger by responding to the signal on the position of the platform to acquire the moiré image at a fixed interval.

The image obtaining unit can obtain a moiré image at a fixed interval by adjusting the trigger for each region with optimized energy density (OPED).

The image acquisition unit can be a linear scan camera.

A polarizer can still be arranged in front of the illumination unit or the image acquisition unit. By rotating the polarizer, only light in the same direction as the moiré can pass through, and a green filter can be placed in front of the illumination unit or the image acquisition unit.

The central processing unit can determine the quality of the crystallized substrate, and the central processing unit can change the energy density (ED) of the laser beam radiated to the substrate when a problem occurs.

According to the present invention, it is possible to achieve stable process management by quantifying the moiré in a substrate crystallized in a device and determining the quality of the crystallized substrate in real time, wherein the device includes a laser crystallization device.

In addition, it is possible to reduce the time it takes to detect moiré compared with the existing methods to ensure production yield. Furthermore, it is possible to obtain the objective data of the error and difference when judged by the inspector to ensure the reliable quality and objectivity of the crystallized substrate.

In addition, by using an area camera or a linear scanning camera to obtain an image, the time it takes to detect the moiré will be reduced, and the image can be obtained in response to the trigger signal, so that the moiré can be easily detected in each area of a substrate.

Moreover, by using a polarizer or a green filter to obtain more moiré images, the moiré can be easily detected and quantified.

The present invention relates to real-time determination of the quality of the substrate by quantifying the moiré in the substrate. The substrate is crystallized in a device that includes a laser crystallization device, where the moiré is detected by machine vision, and the data will be extracted and Quantify.

The present invention has been implemented to provide stable process management by real-time inspection of process quality in a device including a laser crystallization device.

Hereinafter, referring to the accompanying drawings, the present invention will be described in detail.

Figure 1 is a diagram showing the main components of the moiré quantification system through laser crystallization equipment according to the present invention, Figure 2 is a block diagram showing the moiré quantification method through laser crystallization equipment according to the present invention, and Figure 3 It is a diagram showing a moiré quantization system using an area camera according to a specific embodiment of the present invention. FIG. 4 is a diagram showing a method of extracting moiré quantization data using the area camera shown in FIG. 3. Figure 5 is a diagram showing a moiré quantization system using a linear scan camera according to a specific embodiment of the present invention, and Figure 6 shows a method for extracting moiré quantization data using the linear scan camera shown in Figure 5 Fig. 7A is a diagram showing a mechanism with a polarizer according to an embodiment of the present invention and Fig. 7B is a diagram showing a moiré image before and after using a polarizer, and Fig. 8A is a diagram showing when The moiré image obtained when using the green filter according to an embodiment of the present invention and Figure 8B are data diagrams showing the EPD crystal based on the moiré image.

As shown in the figure, the moiré quantization system through a laser crystallization device 10 according to the present invention is a moiré quantization system based on the laser crystallization device 10 including a laser crystallization device, wherein the laser crystallization device 100 is The substrate is crystallized, and the laser crystallization apparatus 10 includes a moiré quantization device 200. The moiré quantization device quantifies the moiré instantly while moving the crystallized substrate 20.

The present invention quantifies the moiré in the substrate 20 to determine the quality of the substrate 20 in real time. The substrate is crystallized in a laser crystallization device 10 that includes a laser crystallization device 100. The moiré is automatically detected by machine vision. Quantitative data, and real-time inspection of the process quality in the laser crystallization equipment 10 including the laser crystallization device 100 to manage the process stably.

Generally, the laser crystallization device 100 includes a processing chamber 110, a laser beam generator 120, and a platform 130, and the moiré quantization device 200 is included in the laser crystallization device 100. The laser beam generator 120 is disposed at one side end of the processing chamber 110 and radiates the laser beam toward the substrate 20. The platform is set in the processing chamber 110 to load and unload the substrate 20.

According to the present invention, the configuration for obtaining the moiré image is contained in the laser crystallization device 100, and the configuration for processing the detected moiré image, the data for making the moiré, and the control components are set in the laser The configuration other than the crystallization device 100 and including all the laser crystallization devices 100 and the device for quantifying the moiré is called the laser crystallization device 10, and the laser crystallization device includes the laser crystallization device 100. That is, laser crystallization, moiré detection, and quantification can be implemented in the laser crystallization device 10.

The processing chamber 110 of the laser crystallization apparatus 100 for general crystallization may be a vacuum chamber, which has a gate at the side end for placing the substrate 20 into it.

The laser beam generator 120 for radiating the laser beam to crystallize the substrate 20 is arranged at one side of the processing chamber 110 and is designed to use an optical module and an optical power detector module (OPDM), The linear laser beam is radiated to the substrate 20 efficiently.

Generally, the substrate 20 has a silicon thin film deposited on glass, wherein the silicon thin film is an amorphous material, and the substrate 20 mentioned herein refers to an amorphous silicon thin film on a base substrate such as glass crystallization. For ease of description, it is assumed in the present invention that the substrate 20 includes a thin film to be crystallized and a base substrate below the thin film.

The energy density of the laser beam used for crystallization is called the energy density (hereinafter referred to as "ED"), and the ED with the state of optimizing the crystallization result is called the optimized energy density (hereinafter referred to as "OPED") "). The reason is to provide laser beams under the established OPED.

The laser beam generator, for example, uses an excimer laser beam to crystallize the substrate 20, and a platform 130 is disposed in the processing chamber 110 and the substrate 20 is installed to load and unload the substrate 20.

The platform 130 moves the substrate 20 to be crystallized relative to the laser beam so that the laser beam radiates to the entire area of the substrate 20. In this configuration, it is possible to supply the encoder signal at the position of the platform 130 to the image acquisition unit 210 of the moiré quantization device 200 described below, and then use these signals as the trigger signal of the image acquisition unit 210, Instead, images must be acquired at fixed intervals. This is to obtain the moiré image and quantify the moiré according to the position of the platform 130, and therefore, it is possible to accurately find the place where the moiré has been generated.

The moiré quantification device 200 is installed in the laser crystallization device 10 to quantify the moiré in real time while moving the crystallized substrate 20.

The moiré quantization device 200 includes: an image acquisition unit 210, which is arranged above the platform 130 to instantly acquire the moiré in the crystallized substrate 20 loaded by the platform 130 without interfering with the laser beam; an illumination unit 220, Is arranged at one side of the image acquisition unit 210 and irradiates the crystallization substrate 20; an image processing unit 230 performs image preprocessing and image processing to extract the contrast image on the acquired moiré image, and borrow Quantify the moiré by analyzing the processed image into data; and a central processing unit 240, which controls the image acquisition unit 210, the lighting unit 220, and the image processing unit 230, and displays the image obtained by the image acquisition unit 210 and the image The image data obtained by the processing unit 230 and the quality of the crystallized substrate 20 are determined.

As mentioned above, the image acquisition unit 210 of the moiré quantization device 200 and the illumination unit 220 can be set in the processing chamber 110 of the laser crystallization device 100, and the image processing unit 230 and the central processing unit for processing the acquired images 240 can be provided outside the processing chamber 110.

The image acquisition unit 210 for acquiring the moiré image of the crystallized substrate 20 is a commonly used charge coupled device (CCD) camera, which is connected to the central processing unit 240 for opening/closing, angle (θ) and operation control, among which An area camera 211 (Figure 3) and a linear scan camera 212 (Figure 5) reduce the time it takes to detect the moiré, and other cameras that can obtain images can be used.

When it is necessary to use the area camera 211 to obtain images, as shown in FIG. 4, it is possible to obtain images at fixed intervals by adjusting a synchronization trigger. For example, it is possible to adjust the triggering of the area camera 211 in response to the encoder signal about the position of the platform 130 to obtain the moiré image at a fixed interval. The reason is that it is possible to find the moiré image that has been obtained on the substrate 20, and it is possible to easily determine good and bad crystals based on multiple positions on the substrate 20.

In addition, it is possible to adjust the trigger for each OPED area, that is, each optimized energy density area, to obtain a moiré image at a fixed interval. That is, it is possible to determine where the crystallization is better performed by performing crystallization with different OPEDs for each area of the substrate 20 and inputting the OPED to the image acquisition unit 210 as a trigger.

The lighting unit 220 is arranged at one side end of the image acquisition unit 210 and illuminates the crystallized substrate 20 so that images can be appropriately acquired. The central processing unit 240 described below can control the angle and turn on of the lighting unit 220 /shut down.

If necessary, a plurality of illumination units 220 can be used, and a polarizer 250 or a green filter can be further arranged in front of the illumination unit 220 or the image acquisition unit 210 to obtain an image with significant moiré.

FIG. 7A is a diagram when the polarizer 250 is installed in front of the illuminating unit 220, wherein two illuminating units 220 are installed at one side of the image acquisition unit 210, and a plurality of polarizers 250 are provided. That is, a first polarizer 250 is arranged in front of a general lighting unit 220 that does not have polarized light to achieve a polarized light source; and a second polarizer 250 is arranged between the image acquisition unit 210 and the substrate 20. The reason is that by rotating the polarizer 250, only the light with the same direction as the moiré passes through, so as to obtain an image with significant moiré.

Moreover, as shown in FIG. 8B, a green filter can be arranged in front of the lighting unit 220 to obtain an image with significant moiré.

In addition, the image processing unit 230 performs image preprocessing and image processing to obtain a contrast image on the obtained moiré image, and analyzes the processed image into data to quantify the moiré.

It is usually difficult to visually recognize a moiré image, so it is necessary to extract a contrast image to increase the visibility of the moiré image. Therefore, a smooth image is created by averaging the local brightness values in the acquired image to obtain the contrast image.

By subtracting the reference image data value obtained through preprocessing from the initially obtained image, a contrast image will be obtained. By inputting selective conditions such as contrast ratio and line type based on the contrast image, an analysis image can be obtained. The reason is that the quantified image data of the final moiré detection will be obtained.

A personal computer is usually used as the central processing unit 240, which controls the image acquisition unit 210, the lighting unit 220, and the image processing unit 230, displays the data of the image acquired by the image acquisition unit 210, and the data acquired by the image processing unit 230 Image, and determine the quality of the crystallized substrate 20.

For example, the central processing unit 240 may be composed of a keyboard, a panel, and a controller. The keyboard is used to control the image acquisition unit 210, the lighting unit 220, and the image processing unit 230, and input setting values. This panel is used to display the acquired images and processed image data. The controller determines the quality of the crystallized substrate 20 based on the image data and is used to control all components.

The central processing unit 240 is provided outside the laser crystallization device 100. The central processing unit can control not only the moiré quantization device 200, but also the entire laser crystallization equipment 10 including the laser crystallization device 100. In addition, the central processing unit 240 can control the movement and position of the laser beam generator 120 and the platform 130 of the laser crystal device 100. The position of the platform 130 is input to the image acquisition unit 210 as a trigger signal to operate images at fixed intervals Obtaining unit 210.

The central processing unit 240 can use the acquired images to determine the quality of the crystallized substrate 20. When a problem occurs, the energy density of the laser beam irradiated to the substrate 20 can be changed. The ED can be automatically changed by a program that the user sets in advance or directly based on the result of determining the quality when necessary.

Hereinafter, the moiré quantification method through the laser crystallization device 10 according to the present invention will be explained.

Figure 2 is a diagram showing the moiré quantification method according to the present invention. As shown in Figure 2, the moiré quantification method through the laser crystallization device 10 includes the first step of loading the substrate 20, the second step of using the laser to crystallize the mounted substrate 20, and the moving of the crystallized substrate 20 At the same time, the third step of instant quantification of moiré and the fourth step of unloading the substrate 20 that has undergone crystallization and moiré quantification.

The substrate 20 is mounted on the platform 130 of the laser crystallization apparatus 100 and loaded to a laser crystallization position. The mounted substrate 20 is crystallized by the laser beam from the laser beam generator. By moving the crystallized substrate 20 while obtaining a moiré image from the crystallized substrate 20 through the image obtaining unit 210, and by processing these images, the moiré will be quantified in real time. Next, the substrate 20 that has undergone crystallization and moiré quantization is unloaded to complete the processing.

The third step is to obtain a moiré image from the crystallized substrate 20, perform image processing on the obtained moiré image, quantify the moiré by analyzing the image-processed image into data, and then quantify the moiré based on the quantized moiré A program for determining the quality of the degree of crystallization of the substrate 20.

In the step of obtaining the moiré image from the crystallized substrate 20, the moiré image is obtained at fixed intervals by adjusting the synchronization trigger.

A CCD camera can be used as the image obtaining unit 210 to obtain a moiré image from the crystallized substrate 20. When the area camera 211 is used to obtain images, as shown in FIG. 4, a position synchronization trigger is adjusted to obtain images at fixed intervals.

For example, it is possible to adjust the triggering of the area camera 211 in response to the encoder signal about the position of the platform 130 to obtain the moiré image at a fixed interval. The reason is that it is possible to find the moiré image that has been obtained on the substrate 20, and it is possible to easily determine good and bad crystals at multiple locations on the substrate 20.

In addition, it is possible to adjust the trigger for each OPED area, that is, each optimized energy density area, to obtain a moiré image at a fixed interval. That is, it is possible to determine where crystallization is better established by performing crystallization with different OPEDs for each area of the substrate 20 and inputting OPEDs to the image acquisition unit 210 as a trigger.

In addition, the image processing for the obtained moiré image is implemented by the image processing unit 230, wherein the image preprocessing and image processing for obtaining the contrast image can be performed on the obtained moire image, and can be analyzed The processed image becomes data to quantify the moiré.

For example, a smooth image is created by averaging the local brightness values in the acquired image to extract the contrast image. That is, by subtracting the reference image data value obtained through preprocessing from the initially obtained image, a contrast image will be obtained. By inputting selective conditions such as contrast ratio and line type based on the contrast image, an analysis image can be obtained. The reason is that the quantified image data of the final moiré detection will be obtained.

In addition, the quality of the crystallization degree of the substrate 20 is determined based on the quantified moiré, and when a problem occurs, the ED of the laser beam radiated to the substrate 20 will be changed, and the change is implemented by the central processing unit 240.

Hereinafter, a specific embodiment of the present invention will be explained.

Fig. 3 is a moiré quantization system using an area camera 211 according to a specific embodiment of the present invention, and Fig. 4 is a method for extracting moiré quantization data using the area camera 211 shown in Fig. 3 Diagram.

As shown in Figure 3, the moiré image of the substrate 20 crystallized by the area camera 211 is obtained. The central processing unit 240 controls the position and angle of the area camera 211 and the lighting unit 220 to obtain the best Optimized moiré image.

The area camera 211 obtains a moiré image of a specific area of the crystallized substrate 20, and transmits the moiré image to the central processing unit 240 and displays it on the panel.

As shown in Figure 4, the area camera 211 can be triggered in response to the encoder signal about the movement of the platform 130, and therefore can be at fixed intervals T ₁ , T ₂ , T ₃ , T ₄ , T ₅ , T ₆ and T ₇ Get the image.

Moiré can be selectively detected and quantified from a focus area of the acquired image, that is, an effective area except the defocus area, and can be compared with the reference level according to the characteristics of each area The absolute comparison type, or a relative comparison type that compares the characteristic difference of each area, is used to determine the quality of the substrate 20.

Fig. 5 is a moiré quantization system using a linear scan camera 212 according to an embodiment of the present invention, and Fig. 6 is a diagram showing a method of extracting moiré quantization data using the linear scan camera 212 of Fig. 5 .

As shown in Fig. 5, the moiré image of the substrate 20 crystallized by the linear scan camera 212 is obtained. The central processing unit 240 controls the position and angle θ of the linear scan camera 212 and the lighting unit 220, and obtains Optimized moiré image.

A line scan camera 212 is used to obtain a moiré image of a specific area of the crystallized substrate 20, and the moiré image is transmitted to the central processing unit 240 and displayed on the panel.

As shown in Figure 6, for the image obtained by the linear scan camera 212, the perspective angle is corrected, a processing area, that is, an effective area is extracted, and calculated by implementing histogram quantization or calculation based on cumulative profile Regional characteristics to determine the quality of the substrate 20.

By comparing the characteristics of each area with the reference level, or comparing the differences of the characteristics of each area, the substrate quality can be judged.

FIG. 7A is a diagram showing a mechanism with a polarizer 250 according to an embodiment of the present invention, and FIG. 7B is a diagram showing moiré images before and after the polarizer 250 is used.

FIG. 7A is a diagram when the polarizer 250 is installed in front of the illuminating unit 220, wherein two illuminating units 220 are installed at one side of the image acquisition unit 210, and a plurality of polarizers 250 are provided. That is, a first polarizer 250 is arranged in front of a general lighting unit 220 that does not have polarized light to achieve a polarized light source; and a second polarizer 250 is arranged between the image acquisition unit 210 and the substrate 20. The reason is that by rotating the polarizer 250, only the light with the same direction as the moiré passes through, so as to obtain an image with significant moiré.

FIG. 7B shows the moiré images before and after the polarizer 250 is used, and it can be seen that a clearer moiré image can be obtained after the polarizer 250 is used.

Fig. 8A shows a moiré image obtained when the green filter according to an embodiment of the present invention is used, and Fig. 8B shows a data diagram of EPD crystal based on the moiré image.

When the area camera is at a 40 ^o angle, the illumination unit is at a 30 ^o angle, and the laser beam of 415~505 millijoules/cm² (mJ/cm ² ) is sent to the substrate, a green filter is used, in 10 sections Moiré images are obtained at a predetermined energy density of. By performing image processing and quantitative analysis on the moiré image, it can be seen that the OPED is 470 mJ/cm².

10‧‧‧Laser crystallization equipment

20‧‧‧Substrate

100‧‧‧Laser crystal device

110‧‧‧Processing chamber

120‧‧‧Laser beam generator

130‧‧‧Platform

200‧‧‧Moiré quantization device

210‧‧‧Image Acquisition Unit

211‧‧‧Area Camera

212‧‧‧Line Scan Camera

220‧‧‧Lighting Unit

230‧‧‧Image Processing Unit

240‧‧‧Central Processing Unit

250‧‧‧Polarizer

θ‧‧‧angle

T ₁ ~T ₇ ‧‧‧ interval

The above and other objectives, features, and other advantages of the present invention can be understood more clearly from the following detailed description in conjunction with the accompanying drawings, among which:

Figure 1 is a diagram showing the main components of the moiré quantification system through laser crystallization equipment according to the present invention;

Figure 2 is a block diagram showing the moiré quantification method through laser crystallization equipment according to the present invention;

Figure 3 is a diagram showing a moiré quantization system using an area camera according to a specific embodiment of the present invention;

Figure 4 is a diagram showing the method of extracting quantitative data of moiré using the area camera shown in Figure 3;

Fig. 5 is a diagram showing a moiré quantization system using a linear scan camera according to a specific embodiment of the present invention;

Figure 6 is a diagram showing the method of extracting moiré quantitative data using the linear scan camera shown in Figure 5;

Fig. 7A is a diagram showing a mechanism with a polarizer according to an embodiment of the present invention, and Fig. 7B is a diagram showing the moiré images before and after using the polarizer; and

Fig. 8A shows a moiré image obtained when the green filter according to an embodiment of the present invention is used, and Fig. 8B shows a data diagram of EPD crystal based on the moiré image.

10‧‧‧Laser crystallization equipment

20‧‧‧Substrate

100‧‧‧Laser crystal device

110‧‧‧Processing chamber

120‧‧‧Laser beam generator

130‧‧‧Platform

200‧‧‧Moiré quantization device

210‧‧‧Image Acquisition Unit

220‧‧‧Lighting Unit

230‧‧‧Image Processing Unit

240‧‧‧Central Processing Unit

Claims (11)

A moiré quantization system through a laser crystallization device including a laser crystallization device, in which a moiré quantization device is provided in the laser crystallization device, so that a substrate is crystallized by the laser crystallization device, and Moiré is instantly quantified while moving the crystallized substrate; wherein the laser crystallization device includes: a processing chamber; a laser beam generator, which is arranged at one side of the processing chamber and radiates the laser beam toward the substrate And a platform, which is set in the processing chamber and used for loading and unloading the substrate; wherein, the moiré quantification device includes an image acquisition unit, which is set above the platform to instantly obtain the loading by the platform The moiré in the crystallized substrate does not interfere with the laser beam; an illumination unit is arranged at one side of the image acquisition unit and illuminates the crystallized substrate; an image processing unit performs image preprocessing and image processing , To extract the contrast image on the obtained moiré image, and to quantify the moire by analyzing the processed image into data; and a central processing unit to control the image acquisition unit, the lighting unit, and the image The processing unit displays the image obtained by the image acquisition unit and the image data obtained by the image processing unit, and determines the quality of the crystallized substrate; wherein, the image acquisition unit is an area camera; among them, a polarized light The mirror is still arranged in front of the illumination unit or the image acquisition unit, and by rotating the polarizer, only the light rays having the same direction as the moiré pass through. For the system described in item 1 of the scope of patent application, the image acquisition unit adjusts a trigger by responding to the signal on the position of the platform to acquire the moiré image at a fixed interval. In the system described in the first item of the patent application, the image acquisition unit adjusts the trigger for each region with optimized energy density (OPED) to acquire moiré images at fixed intervals. In the system described in item 1 of the scope of patent application, the image acquisition unit is a linear scan camera. In the system described in item 1 of the scope of patent application, a green filter is still installed in front of the illumination unit or the image acquisition unit. In the system described in item 1 of the scope of the patent application, the central processing unit determines the quality of the crystallized substrate, and the central processing unit changes the energy density (ED) of the laser beam radiated to the substrate when a problem occurs. ). A method for quantifying moiré through a laser crystallization device. The method includes: a first step, loading a substrate; a second step, using a laser to crystallize the loaded substrate; a third step, moving the substrate While crystallizing the substrate, instant quantification of moiré; and a fourth step, unloading the substrate that has undergone crystallization and moiré quantification; wherein, the laser crystallization device includes: a processing chamber; a laser beam generator, Is arranged at a side end of the processing chamber and radiates a laser beam toward the substrate; and a platform is arranged in the processing chamber and is used for loading and unloading the substrate; wherein, the moiré quantization device includes an image acquisition The unit is arranged above the platform to instantly obtain the moiré in the crystallized substrate mounted on the platform without interfering with the laser beam; an illumination unit is arranged at a side end of the image acquisition unit, and Irradiating the crystallized substrate; An image processing unit that implements image preprocessing and image processing to extract the contrast image on the obtained moiré image and quantify the moiré by analyzing the processed image into data; and a central processing unit to control The image acquisition unit, the illumination unit, and the image processing unit display the image acquired by the image acquisition unit and the image data acquired by the image processing unit, and determine the quality of the crystallized substrate; wherein, the The image acquisition unit is an area camera; wherein, a polarizer is still arranged in front of the illumination unit or the image acquisition unit, and by rotating the polarizer, only light in the same direction as the moiré passes through. For example, the method described in item 7 of the scope of patent application, wherein the third step includes: obtaining a moiré image of the crystallized substrate; performing image processing on the obtained moiré images; and analyzing the past images The processed image becomes data to quantify the moiré; and based on the quantized moiré, the crystallization degree quality of the substrate is determined. According to the method described in item 7 of the scope of patent application, the person who obtains the moiré image of the crystalline substrate obtains the moiré image at a fixed interval by adjusting a position synchronization trigger. For the method described in item 8 of the scope of patent application, the person who performs image processing on the acquired moiré image performs image preprocessing and image processing to extract the contrast image of the acquired moiré image, And by analyzing the processed image into data to quantify the moiré. The method described in item 8 of the scope of patent application, wherein the method for determining the degree of crystallization of the substrate based on the quantized moiré is to change the laser beam radiated to the substrate when a problem occurs in determining the quality of the crystallized substrate The energy density (ED).

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