TWI542865B - Method for detecting probe card by dff/d technology and the structure thereof - Google Patents

Description

Method and structure for detecting probe card by using DFF/D technology

The present invention relates to a detection structure, and more particularly to a detection structure suitable for use in a probe card.

The invention further relates to a detection method, and in particular to a detection method suitable for use in a probe card.

As shown in FIG. 1 , the conventional probe card detecting device comprises a fixture 90, a platform 91, and a signal microscope 92, a computer device 93 and a display 94. The fixture 90 is arranged. On the platform 91, the probe can be used to fix the probe on the platform 91 by using the fixture 90. The platform 91 has a position indication of each of the pads, and a microscope observer above the platform 91 The position of the pin of the observation probe card is in accordance with the position of each of the pads. At this time, the image observed by the microscope observer 92 is transmitted to the computer device 93, and the observed image is displayed by the display 94, and the detection is performed. If it is observed by the display 94 that the pin position of the probe card and the pin pad are incorrectly marked, the probe card is taken out from the platform 91 to the correcting device to adjust the pin to the correct position:

However, as can be seen from the foregoing, the prior art only measures the longitudinal and lateral directions of each probe, and cannot detect the height of the probe at the same time, and the probe card detecting device observes the pin of the probe card. When the position is small, the range that can be detected is small. All the pins of the entire probe card must be divided into a plurality of blocks to be tested and then examined one by one. The detector must record the order of block detection during the detection process. If the record of the personnel in the detection process is wrong, it may cause a certain block to be repeatedly tested or missed. The former causes waste of detection time and poor detection efficiency, while the latter causes the detection rate of the probe card to be unstable.

In summary, the conventional technique of using a microscope can only measure the longitudinal and lateral directions of each probe, and cannot effectively measure the average height of the probe and the extent of the probe loss, which will cause probe card detection. The blind spot on the top, therefore, how to solve the problem of the conventional probe card detecting device is the focus of the present invention.

The invention provides a structure for detecting a probe card by using a DFF/D technology, and the main purpose thereof is to provide a structure with a large detection range and capable of accurately and quickly detecting a probe card.

Another object of the present invention is to provide a method of using the above structure.

To achieve the foregoing objective, the present invention provides a structure for detecting a probe card by using a DFF/D technology for detecting a probe card having a plurality of detection areas, and the probe card is positioned and positioned for detection. Platform, which uses DFF/D technology to detect the structure of the probe card, including:

a bracket having a support portion, a moving portion and a transmission device, the support portion is erected on a working platform, the movable portion is movably coupled to the support portion, and the transmission device is dynamically connected to the moving portion;

An image capturing unit is fixedly coupled to the moving portion, and the image capturing unit has a lens control module, a lens and an image sensing device;

a judging unit, the judging unit is connected to the image capturing unit signal, the judging unit comprises an image sharpness analyzing module, a DFF/D computing module and a microprocessor, and the microprocessor The lens control module is connected to the signal, and the microprocessor is connected to the transmission signal. The image sharpness analysis module is connected to the image sensing device, and the detection area, the probe and the probe are disposed in the microprocessor. The preset coordinate of the center position and the focal length value of the best sharp point of the tip of the normal probe;

A monitoring device is coupled to the microprocessor signal.

To achieve the foregoing objective, the present invention further provides a method for detecting a probe card by using a DFF/D technology, including:

a central positioning and focusing step, wherein the monitoring device detects the coordinate position of the image capturing unit, and then compares the coordinates of the center position of the probe card preset in the microprocessor, so that the image capturing unit starts from The starting point moves to the center of the probe card, and the lens control module is controlled by the microprocessor to set the optimal sharp point of the lens focus to the position of the tip of the normal probe;

Reading the probe card coordinate step, the microprocessor reads the coordinate position of the preset probe card;

Moving to the detection area step, detecting the coordinate position of the image capturing unit by the monitoring device, and transmitting the coordinate position of the image capturing unit to the microprocessor, and detecting regions and probes in the microprocessor Comparing the positions of the preset coordinates, the microprocessor simultaneously transmits a signal to the transmission of the bracket, and drives the moving portion to move, so that the image capturing unit moves to the detection area of the probe card;

The image capturing step is performed by aligning the tip of the probe with the image capturing unit and capturing the image, and the image is mapped by the lens to the image sensing device, and the image sensing device converts the image into a digital signal and digitizes the digital image. The signal is transmitted to the image sharpness analysis module;

Determine whether it is the best clear step, so that the image clarity analysis module analyzes and analyzes to form an analysis information, and then transmits the analysis information to the DFF/D operation module, and the DFF/D operation module calculates a clear image based on the analysis information. Information, by means of sharpness information, to determine whether the captured image is an image taken at the best sharp point;

The step of the lens module to the new focus position step, if the judgment of whether the step of the best clear point is negative, the DFF/D operation module transmits the sharpness information to the microprocessor, so that the microprocessor controls the lens control. The module adjusts the focal length, and repeats the image capturing step after the focal length adjustment;

In the information comparison step, if it is judged whether the step of the best clear point is yes, the lens control module returns a feedback signal to the microprocessor after adjusting the focal length, and the microprocessor compares the feedback signal with the preset. The best clear point; and

The positioning and focusing steps, after completing the detection of the area to be tested of the previous probe card, the microprocessor reads the preset coordinate position of the other detection areas of the probe card, and controls the image capturing unit to move to other detections. The area is caused to focus on the preset focus position, and the image capturing step is repeated to perform the detection operation of the next area to be tested.

As can be seen from the foregoing, the method and structure for detecting a probe card by using the DFF/D technology are mainly performed by setting the image of the needle tip of the normal probe to be the clearest by setting the image capturing unit before the detection, and then making the image 撷The unit captures the image of the probe to be tested, and then transmits the image of the probe to the determining unit to determine whether the captured image is clear, and determines that the image capturing unit is looking for a new focus position until the image is captured. The image is presented in the clearest state, and the state of each probe is calculated by comparing the difference between the new focus position and the preset specification position by the judging unit, and the method and structure of the present invention using the DFF/D technology to detect the probe card The range that can be checked depends on the magnification of the lens, thereby achieving a method and structure that provides a large detection range, high speed, and accurate detection of the loss of the probe card.

In order to enable your review committee to have a better understanding and understanding of the purpose, features and effects of the present invention, please refer to the following for a brief description of the following:

The term "DFF/D" as used in the present invention refers to the abbreviation of Depth Form Focus/Defocus, and the Chinese is a 3D information technology for obtaining an object using image focusing or defocusing characteristics, and the following descriptions are all expressed by DFF/D.

The invention uses the DFF/D (Depth From Focus/Defocus) technology to detect the structure of the probe card, as shown in FIG. 2 to FIG. 4, for detecting a probe card A, the probe card has a plurality of detection areas A1, The probe card A is positioned and disposed on a detection platform B, and the structure of the probe card is detected by using the DFF/D technology, including:

A bracket 10 has a support portion 11 , a moving portion 12 and a transmission device 13 . The support portion 11 is mounted on a working platform T, and the moving portion 12 is coupled to the support portion 11 in a relatively movable manner. The transmission device 13 is dynamically connected to the moving portion 12, thereby driving the moving portion 12 to perform three-dimensional displacement;

An image capturing unit 20 is fixedly coupled to the moving portion 12. The image capturing unit 20 has a signal connection module 21, a lens 22 and an image sensing device 23, and the lens 22 is used for imaging and Mapping the image to the image sensing device 23, the range that the image capturing unit 20 can check depends on the magnification of the lens 22, and the image sensing device 23 is configured to convert the image into a digital signal. The lens control module 21 is used to control the position of the lens 22 to focus, preferably, the image sensing device 23 can be a photosensitive coupling element or a complementary metal oxide semiconductor;

a judging unit 30, the judging unit 30 is connected to the image capturing unit 20, and the judging unit 30 includes an image sharpness analyzing module 31, a DFF/D computing module 32 and a microprocessor 33. The microprocessor 33 is connected to the lens control module 21, and the microprocessor 33 is connected to the transmission device 13. The image sharpness analysis module 31 is connected to the image sensing device 23, and the microprocessor is connected. 33 is provided with a focal length value of each of the detection area A1, the probe A2 and the preset position of the center position and the tip of the normal probe A2, and the microprocessor 33 is used for analyzing and controlling the transmission. The image clarity analysis module 31 is configured to analyze the digital signal. The DFF/D operation module 32 is configured to receive the information analyzed by the image sharpness analysis module 31, and calculate the lens according to the focus curve of the lens. Displacement and direction, find the clearest focus position, and then get a terminal information;

A monitoring device 40 is connected to the microprocessor 33. The monitoring device 40 is configured to monitor the coordinates and displacement of the image capturing unit 20. In the preferred embodiment of the present invention, the monitoring device 40 It is an optical ruler or an encoder.

The principle of the DFF/D technology detection technology is as follows. Normally, the height of each probe A2 on the probe card A should be the same. However, after the probe card A is repeatedly used, some probes A2 will be In the case of abnormal conditions such as wear, wear, bending and skew, the height of the probe A2 of the loss, bending and skew will be different from the height of the original normal probe A2, due to the tip of each probe A2. The height of the lens 22 is different, so that the focal length of the lens 22 is different, so that when the lens control module 21 is focused on the tip of the wear probe A2, the focal length must be adjusted to achieve the clearest image. The adjusted focal length will have a focal length difference from the preset focal length, and the focal length difference will be proportional to the height difference between the normal probe A2 and the worn probe A2, thereby obtaining the height difference information of each probe A2. The purpose of detecting the state of each probe A2 is achieved.

The method for detecting a probe card by using the DFF/D technology, as shown in FIG. 5, includes:

The central positioning and focusing step S1 is performed by the monitoring device 40 detecting the coordinate position of the image capturing unit 20, and then comparing the coordinates of the center position of the probe card A preset in the microprocessor 33 to the image. The capturing unit 20 moves from the starting point to the center position of the probe card A, the center position is located at the center of the probe card A, and the lens control module 21 is controlled by the microprocessor 33 to make the lens 22 The best clear point of focus is set at the tip of the normal probe A2 to ensure the correctness of the value;

Reading the probe card coordinate step S2, the microprocessor 33 reads the preset coordinates of the detection area A1 and the probes A2, and further knows the relative positions of the image capturing unit 20 and the detection areas A1 and A2;

Moving to the detection area step S3, the monitoring device 40 detects the coordinate position of the image capturing unit 20, and transmits the coordinate position of the image capturing unit 20 to the microprocessor 33, and the microprocessor 33 The positions of the preset detection areas A1 and the probes A2 are compared, and the microprocessor 33 simultaneously transmits signals to the transmission 13 of the bracket 10, and drives the moving part 12 to move, thereby controlling the image capture. The unit 20 moves to the detection area A1 of the probe card A;

When the image capturing unit 20 is moved to the detection area A1, the image capturing unit 20 is aligned with the tip of the probes A2 and the image is captured, and the image is captured by the lens 22 The image is mapped to the image sensing device 23, and the image sensing device 23 converts the image into a digital signal and transmits the digital signal to the image sharpness analysis module 31;

Determining whether it is the best clear point step S5, after the digital signal is transmitted to the image sharpness analysis module 31, the image sharpness analysis module 31 performs analysis and statistics to form an analysis information, and then transmits the analysis information to the DFF/D. The computing module 32, the DFF/D computing module 32 calculates a sharpness information according to the analysis information, and determines whether the captured image is an image captured at an optimal clear point by using the sharpness information;

When the lens module is brought to a new focus position step S6, if it is determined whether the step of the best clear point step S5 is NO, the DFF/D operation module 32 transmits the sharpness information to the microprocessor 33 again. The microprocessor 33 controls the lens control module 21 to adjust the focal length. After the focus adjustment, the image capturing step S4 is repeated. Preferably, the focal length can be adjusted in this step by adjusting the lens of the image capturing unit 20 The internal mechanism of the lens 22 can adjust the focal length to adjust the focal length. The height of the moving portion 12 can be adjusted to adjust the height of the image capturing unit 20 relative to the height of the probe A2.

In the information comparison step S7, if it is determined whether the step of the best clearing step S5 is YES, the lens control module S4 returns a feedback signal to the microprocessor 33 after adjusting the focal length to notify the microprocessor. 33 At present, the position of the best clear point focus, the microprocessor 33 compares the best clear point of the feedback signal with the preset, and then obtains the difference value and obtains the information of each probe.

The positioning and focusing step S8, after completing the detection of the previous area A1 to be tested, the microprocessor 33 reads the preset coordinate position of the other detection area A1 of the probe card A, and controls the image capturing unit 20 to move to The other detection area A1, and the lens 22 is focused on the preset focus position, and then the image capturing step is repeated to perform the detection operation of the next area to be tested.

Preferably, the step of reading the probe card coordinates S2, moving to the detection area step S3, capturing the image step S4, determining whether it is the best clear point step S5, and causing the lens module to the new focus position step S6, The information comparison step S7, the positioning and focusing step S8 is a looping step. When the center positioning and focusing step S1 is finished, the looping step is entered, and the looping step is repeated until all the detecting areas A1 of the probe card A are The test is completed.

As can be seen from the foregoing, the method and structure for detecting the probe card A by using the DFF/D technology are mainly performed by setting the image of the needle tip of the normal probe A2 to be the clearest by the image capturing unit 20 before the detection. The image capturing unit 20 is configured to capture the image of the probe A2 to be tested, and then transmit the image of the probe A2 to the determining unit 30 to determine whether the captured image is clear, and determine that the image capturing unit 20 is looking for a new one. The focus position is until the captured image shows the clearest state, and the state of each probe is calculated by judging the difference between the new focus position and the preset specification position by the unit ratio 30, and the present invention utilizes DFF/D The method and structure of the technology detection probe card A can be checked according to the magnification of the lens 22, thereby achieving a method and structure for providing a large detection range, high speed and accurate detection of the loss of the probe card.

"Knowledge Technology"
90‧‧‧ fixture
91‧‧‧ platform
92‧‧‧Microscope Observer
93‧‧‧Computer equipment
94‧‧‧ Display "The invention"
10‧‧‧ bracket
11‧‧‧Support
12‧‧‧Mobile Department
13‧‧‧Transmission
20‧‧‧Image capture unit
21‧‧‧Lens Control Module
22‧‧‧ lens
23‧‧‧Image sensing device
30‧‧‧judging unit
31‧‧‧Image Sharpness Analysis Module
32‧‧‧DFF/D computing module
33‧‧‧Microprocessor
40‧‧‧Monitor
A‧‧‧ probe card
A1‧‧‧Detection area
A2‧‧‧ probe
B‧‧‧Detection platform
T‧‧‧Working Platform
S1‧‧‧Center positioning and focusing steps
S2‧‧‧Read probe card coordinate steps
S3‧‧‧ Move to detection zone step
S4‧‧‧ Capture image steps
S5‧‧‧Determining whether it is the best clear step
S6‧‧‧Steps to the lens module to the new focus position
S7‧‧‧Information comparison steps
S8‧‧‧ Positioning and focusing steps

1 is a perspective view of a conventional probe card detecting device. 2 is a perspective view of the structure of the probe card detected by the DFF/D technology of the present invention. FIG. 3 is a partial enlarged view of the structure of the probe card detected by the DFF/D technology of the present invention. FIG. 4 is a partial schematic view showing the structure of a probe card detected by the DFF/D technology of the present invention. FIG. 5 is a flow chart of a method for detecting a probe card by using the DFF/D technology according to the present invention.

S1‧‧‧Center positioning and focusing steps

S2‧‧‧Read probe card coordinate steps

S3‧‧‧ Move to detection zone step

S4‧‧‧ Capture image steps

S5‧‧‧Determining whether it is the best clear step

S6‧‧‧Steps to the lens module to the new focus position

S7‧‧‧Information comparison steps

S8‧‧‧ Positioning and focusing steps

Claims (6)

A DFF/D (Depth From Focus/Defocus) technology for detecting a probe card structure for detecting a probe card having a plurality of detection areas, the probe card being positioned and disposed on a detection platform The structure of the probe card is detected by using the DFF/D technology, comprising: a bracket having a support portion, a moving portion and a transmission device, the support portion is provided to stand on a working platform, and the moving portion is relatively movable In combination with the support portion, the transmission device is dynamically connected to the moving portion; an image capturing unit is fixedly coupled to the moving portion, and the image capturing unit has a lens control module, a lens and an image sensing a judging unit, the judging unit is connected to the image capturing unit signal, and the judging unit comprises an image sharpness analyzing module, a DFF/D computing module and a microprocessor. Connected to the lens control module signal, the microprocessor is connected to the transmission signal, and the image sharpness analysis module is connected to the image sensing device signal, and the microprocessor is internally provided. Each of the detection region, the optimum focus value of the clear point of the probe tip and the predetermined center position coordinate of the probe and the normal; and a monitoring device, which monitoring device is connected to the microprocessor signal. The structure for detecting a probe card by using the DFF/D technology according to the first aspect of the patent application, wherein the image sensing device is a photosensitive coupling element or a complementary oxidized metal semiconductor. The structure for detecting a probe card by using the DFF/D technology according to the first aspect of the patent application, wherein the monitoring device is an optical scale or an encoder. A method for detecting a probe card by using the DFF/D technology as described in claim 1, comprising: a center positioning and a focusing step, wherein the monitoring device detects a coordinate position of the image capturing unit, and then The coordinates of the center position of the probe card preset in the microprocessor are such that the image capturing unit moves from the starting point to the center position of the probe card, and the lens control module is controlled by the microprocessor. The best sharp point of the lens focus is set at the tip position of the normal probe; the probe card coordinate step is read, the microprocessor reads the detection area and the preset coordinate position of each probe; and moves to the detection area step by The monitoring device detects the coordinate position of the image capturing unit, and transmits the coordinate position of the transmission image capturing unit to the microprocessor, and compares with each detection area in the microprocessor and the position of the probe preset coordinate The microprocessor simultaneously transmits a signal to the transmission of the bracket, and drives the moving portion to move, so that the image capturing unit moves to the detection area of the probe card; the image capturing step is performed by the image The unit is aligned with the tip of the probe and the image is captured, and the image is mapped by the lens to the image sensing device, and the image sensing device converts the image into a digital signal and transmits the digital signal to the image sharpness analysis module; Determine whether it is the best clear step, so that the image clarity analysis module analyzes and analyzes to form an analysis information, and then transmits the analysis information to the DFF/D operation module, and the DFF/D operation module calculates a clear image based on the analysis information. Information, by the sharpness information to determine whether the captured image is the image captured at the best clear point; the lens module to the new focus position step, if it is judged whether it is the best clear point step If not, the DFF/D computing module transmits the sharpness information to the microprocessor, so that the microprocessor controls the lens control module to adjust the focal length, and repeats the image capturing step after the focal length adjustment; the information comparison step, If it is judged whether the step of the best clear point is YES, the lens control module returns a feedback signal to the microprocessor after adjusting the focal length, and the micro-processing Comparing the best clear point of the feedback signal with the preset; and the positioning and focusing steps, after completing the detection of the test area of the previous probe card, the microprocessor reads the pre-test area of the probe card. Set the coordinate position, and control the image capturing unit to move to other detection areas, and focus the lens on the preset focus position, and repeat the image capturing step to perform the detection operation of the next measurement area. The method for detecting a probe card by using the DFF/D technology according to the fourth aspect of the patent application, wherein the step of reading the probe card coordinates, moving to the detection zone, capturing the image, and determining whether it is the best is defined. The clear step, the lens module to the new focus position step, the information comparison step, and the positioning and focusing steps are a loop step, and when the center positioning and focusing steps are completed, the loop step is entered and the loop step is repeated. The method for detecting a probe card by using the DFF/D technology according to the fourth aspect of the patent application, wherein in the step of moving the lens module to a new focus position, adjusting the focal length by adjusting the lens of the image capturing unit The internal mechanism achieves the purpose of focusing sharpness, or by adjusting the height of the moving portion, thereby adjusting the height of the image capturing unit relative to the height of the probe to achieve a clear focus.