CN110618138B - Method for detecting defects in display screen by using equal-thickness interference principle - Google Patents
Method for detecting defects in display screen by using equal-thickness interference principle Download PDFInfo
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- CN110618138B CN110618138B CN201911041444.9A CN201911041444A CN110618138B CN 110618138 B CN110618138 B CN 110618138B CN 201911041444 A CN201911041444 A CN 201911041444A CN 110618138 B CN110618138 B CN 110618138B
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract
The invention discloses a system and a method for detecting defects in a display screen by using an equal-thickness interference principle, and belongs to the technical field of optical interference detection. According to the invention, an air wedge is formed between the glass slide to be detected and the flat glass slide, parallel light penetrates through the air wedge to generate interference fringes, when a defect or impurity exists in the glass slide to be detected, the interference fringes are distorted, the fringe stage number and the fringe width are respectively calculated in the x direction and the y direction to obtain the specific position coordinate of the defect, and then the specific position coordinate is subjected to subsequent processing and cutting, so that higher detection precision can be realized, the operation is simple and convenient, the missing detection of the defect or impurity is effectively prevented, and the complete defect-free glass display screen is obtained.
Description
Technical Field
The invention belongs to the technical field of optical detection, and particularly relates to a system and a method for detecting defects in a display screen by using an equal-thickness interference principle.
Background
In order to enable a user to visually learn the running state of the electronic equipment or enable the user to conveniently control the electronic equipment, different display screens are usually arranged on the electronic equipment, the quality of the display screens is related to the quality of glass sheets, the requirements of the terminal user on the size of the glass are various, the glass sheets are changed and cut after impurity detection, and then a series of processing is carried out to obtain the display screens meeting the requirements. And because impurity may remain on the display screen in the course of equipment manufacture installation, influence the quality of display screen, for example, carry out the pad pasting on the display screen, can leave over impurity such as dust glue, consequently, after the display screen is made the completion, or install the display screen on equipment, need detect the quality of display screen. Whether the staff has obvious impurity on the display screen of visual detection product, is difficult for perceiving some slight impurity, and the testing result is accurate inadequately, and under the condition of long-time work moreover, the people's eye can produce visual fatigue to increase the risk of lou examining, in addition, artifical detection also greatly increased the cost.
In order to improve the detection efficiency and quality, the prior art uses a computer image detection method to detect impurities, such as the following patent application numbers: 2018215036160, filing date: in 2018, 9, 13 months, the name of invention creation is: the application discloses a device for detecting impurities of an original glass sheet on line, which comprises a transmission table for placing the original glass sheet to be detected, a macroscopic observation linear array for finding the impurities of the original glass sheet and acquiring specific coordinates of the impurities, a horizontal sliding table capable of horizontally moving, a computer sliding table control module for receiving the coordinate information of the impurities acquired by the macroscopic observation linear array and controlling the horizontal sliding table to move to a position right facing the impurities, an outline identification component fixedly connected with the horizontal sliding table and a computer image processing module connected with the outline identification component; the contour recognition component is used for acquiring contour image data of impurities of the original glass sheet found by the low power observation linear array, and the computer image processing module is used for acquiring the contour image data acquired by the contour recognition component and judging the characteristic defect type contour; the device easy operation is convenient, and detection effect is good, but not only need detect the existence of impurity, still need detect the position size and the profile form of impurity, and the testing process is various.
Again as in patent application No.: 2018106457926, filing date: in 2018, 6 and 21 months, the invention and creation name is as follows: the detection method and device of the impurity of the display screen, the detection method of this application includes: obtaining a minimum external rectangle of a target display screen to obtain a first target image: acquiring noise information of a first target image, wherein the noise information at least comprises the size of noise and the position of the noise in the first target image, the type of the noise information at least comprises impurity information and background information, the impurity information at least comprises dust information, and the background information is an area outside a target display screen in a minimum circumscribed rectangle: removing noise information in areas where four corners of the first image are located from noise information of the first target image to obtain first target information: impurity information of the target display screen is determined based on the first target information. This scheme only carries out impurity detection to the rectangle display screen that has the arc angle, has improved the effect of impurity information in the detection fillet display screen, but need acquire the noise information in the minimum external rectangle image who contains the target display screen earlier, and the target display screen is the background all around, gets rid of the noise information in four angles place region again, and the detection step is many, and mainly detects to the display screen that the size is than littleer.
Disclosure of Invention
1. Technical problem to be solved by the invention
The invention provides a system and a method for detecting defects in a display screen by using an equal thickness interference principle, which take the width of an optical equal thickness interference fringe as a unit, obtain the specific position coordinates of the defects by calculating the number of the fringe stages and the width of the fringe, and then carry out subsequent processing and cutting on the specific position coordinates, thereby realizing higher detection precision, effectively preventing the missed detection of the defects or impurities and obtaining the complete defect-free glass display screen.
2. Technical scheme
In order to achieve the purpose, the technical scheme provided by the invention is as follows:
a method for detecting defects in a display screen by using an equal-thickness interference principle comprises the following steps:
the method comprises the following steps: placing a flat glass slide on a measuring platform, arranging a clamping block with a certain thickness between the flat glass slide and a glass slide to be measured to form an air wedge, and forming an interference system among the flat glass slide, the glass slide to be measured and the clamping block, wherein the interference system is provided with a scanning system;
step two: the positions of a light source part and a camera part are adjusted by adjusting a scanning bracket in a scanning system, so that emergent light of the light source part scans the slide to be detected along the direction of increasing the thickness of the air wedge and generates interference fringes;
step three: the method comprises the following steps that interference fringes at the defect part of a slide to be detected are abnormal in the scanning process, the transverse distance x from the defect part corresponding to the abnormal fringes to the edge of the slide to be detected is calculated through an optical microscope module, and the optical microscope module is connected with a camera shooting part in a scanning system;
step four: and taking out the clamping block and placing the clamping block on the adjacent side edge of the slide to be detected to form another air wedge, and repeating the second step and the third step to obtain the longitudinal distance y from the defect position corresponding to the abnormal stripe to the edge of the slide to be detected.
As a further improvement of the invention, the fringe level n and the fringe width l from zero-order fringe to abnormal fringe are calculated0Obtaining the distance nl from the corresponding defect of the abnormal stripe to the edge of the slide to be detected0。
As a further improvement of the invention, the optional primary normal stripe is defined by its coordinate xkAnd defining the coordinate of the normal stripe of the next 20 levels as xk+20The total width of 20 normal stripes is measured as | xk-xk+20L, calculating the width of a single stripe as l0＝|xk-xk+20|/20。
As a further improvement of the invention, a fringe counter in the optical microscope module is used for measuring the fringe order n from the edge zero-order fringe to the corresponding distortion fringe at the defect.
As a further improvement of the invention, the height h of the clamping block is set according to the length a of the slide to be tested, and h/a is 0.005-0.015.
The invention discloses a system for detecting defects in a display screen by using an equal-thickness interference principle, which comprises a scanning system, an interference system and an optical microscopic module, wherein the scanning system comprises a scanning support, a light source part and a camera part, the light source part and the camera part are connected with the scanning support, emergent light of the light source part is used for irradiating the interference system to generate interference fringes, the interference system comprises a slide to be detected and a flat slide placed at the bottom of the slide to be detected, a clamping block is arranged between the slide to be detected and the flat slide to form an air wedge, the scanning support is used for adjusting the emergent light and scanning the slide to be detected transversely and longitudinally, and the optical microscopic module is connected with the camera part to observe and record the change condition of the interference fringes.
As a further improvement of the invention, the scanning bracket comprises a sliding support rod arranged horizontally and a telescopic support rod arranged vertically, wherein the bottom of the telescopic support rod is provided with a fixed rod, the fixed rod is used for installing the light source part and the camera shooting part, and the telescopic support rod horizontally moves along the sliding support rod so that emergent light can transversely scan the slide to be detected.
As a further improvement of the invention, the sliding support rod is connected with the guide rail, and the sliding support rod is perpendicular to the telescopic support rod along the moving direction of the sliding support rod along the sliding direction of the guide rail, so that the emergent light can longitudinally scan the slide to be detected.
As a further improvement of the invention, the light source part is fixedly connected with the fixed rod through a first connecting rod, and the image pickup part is fixedly connected with the fixed rod through a second connecting rod.
As a further improvement of the invention, displacement sensors are arranged in the sliding support rod and the telescopic support rod.
3. Advantageous effects
Compared with the prior art, the technical scheme provided by the invention has the following remarkable effects:
(1) according to the method for detecting the defects in the display screen by using the equal-thickness interference principle, an air wedge is formed between a glass slide to be detected and a flat glass slide, parallel light penetrates through the air wedge to generate interference fringes, when the glass slide to be detected has the defects or impurities, the interference fringes are distorted, the fringe level and the fringe width are respectively calculated in the x direction and the y direction to obtain the specific position coordinates of the defects, and then the specific position coordinates are subjected to subsequent processing and cutting, so that high detection precision can be realized, and the operation is simple and convenient.
(2) According to the method for detecting the defects in the display screen by using the equal-thickness interference principle, the height h of the clamping block is set according to the length a of the glass slide to be detected, and h/a is 0.005-0.015, so that a sufficient number of light and dark stripes can be obtained, the stripes are small in width and distributed, the observation and the recording of an optical microscopic module are facilitated, and the measurement error is reduced.
(3) According to the system for detecting the defects in the display screen by using the equal-thickness interference principle, the light source part and the camera shooting part are respectively and fixedly connected with the fixed rod through the connecting rod, the fixed rod is in sliding connection with the sliding support rod through the telescopic support rod, and the slide to be detected is subjected to comprehensive scanning detection on a slide to be detected by adjusting the sliding support rod and the telescopic support rod, so that the missing detection of the defects or impurities can be effectively prevented, the complete defect-free glass display screen is obtained, and the detection efficiency is high.
(4) According to the system for detecting the defects in the display screen by using the equal-thickness interference principle, the displacement sensors are further arranged in the sliding support rod and the telescopic support rod and can be used for assisting in judging the coordinates of the defects in the display screen, so that the stability of the detection process is guaranteed.
Drawings
FIG. 1 is a schematic diagram of a system for detecting defects in a display screen according to the present invention using the principle of uniform thickness interference;
FIG. 2 is a schematic view of a light source part according to the present invention;
FIG. 3 is a schematic plane coordinate diagram of a defect of a display panel according to the present invention.
FIG. 4 is a schematic plan view of defining the number of fringe levels according to the present invention.
Reference numerals: 1-1, sliding support rod; 1-2, telescopic supporting rods; 1-3, fixing a rod; 2-1, a light source housing; 2-2, fixing the base; 2-3, a first connecting rod; 2-4, a laser; 2-5, fixing frame; 2-6, short focal length lens; 2-7, long focal length lens; 3-1, a camera lens; 3-2, ocular lens; 3-3, lens barrel; 3-4, an objective lens; 3-5, a reflector plate; 3-6, a second connecting rod; 4-1, a slide to be detected; 4-2, flattening the glass slide; 4-3, interference fringes; 4-4, a gasket; 4-5, clamping blocks.
Detailed Description
For a further understanding of the invention, reference should be made to the following detailed description taken in conjunction with the accompanying drawings and examples.
Example 1
With reference to fig. 1 to 3, the system for detecting defects in a display screen by using the principle of uniform thickness interference of the present embodiment includes a scanning system, an interference system and an optical microscopy module, the scanning system includes a scanning support, and a light source portion and a camera portion connected to the scanning support, the emergent light of the light source portion is used for irradiating the interference system to generate interference fringes, the interference system includes a slide 4-1 to be detected and a flat slide 4-2 placed at the bottom of the slide 4-1 to be detected, a clamping block 4-5 is disposed between the slide 4-1 to be detected and the flat slide 4-2 to form an air wedge, the scanning support is used for adjusting the emergent light and performing horizontal and vertical scanning on the slide 4-1 to be detected, and the optical microscopy module is connected to the camera portion to observe and record the change condition of the interference fringes.
Further, the scanning support in this embodiment comprises a sliding support rod 1-1 arranged horizontally and a telescopic support rod 1-2 arranged vertically, the bottom of the telescopic support rod 1-2 is provided with a fixed rod 1-3, the fixed rod 1-3 is used for installing a light source part and a camera part, the light source part and the camera part are arranged in parallel, and the telescopic support rod 1-2 in this embodiment moves horizontally along the sliding support rod 1-1 to enable emergent light to scan the slide 4-1 to be measured transversely; the sliding support rod 1-1 is connected with the guide rail, the sliding support rod 1-1 is perpendicular to the telescopic support rod 1-2 along the moving direction of the sliding support rod 1-1 along the sliding direction of the guide rail, so that the emergent light can longitudinally scan the slide 4-1 to be detected, the transverse direction and the longitudinal direction are respectively parallel to two adjacent side edges of the slide 4-1 to be detected, and the light can scan and detect the interference system along the direction of increasing the air splitting thickness.
Specifically, in the embodiment, the light source part comprises a light source shell 2-1, a laser 2-4, a short-focus lens 2-6 and a long-focus lens 2-7 are arranged in the light source shell 2-1, and light emitted by the laser 2-4 sequentially passes through the short-focus lens 2-6 and the long-focus lens 2-7 to obtain parallel light with an expanded light spot diameter; the image pickup part comprises an image pickup lens 3-1, an ocular 3-2, a lens barrel 3-3 and an objective 3-4 which are sequentially connected from top to bottom, a reflector 3-5 is obliquely arranged at the bottom of the objective 3-4, the inclination angle is 45 degrees, so that parallel light is irradiated on the reflector 3-5 of the image pickup part, and the reflector 3-5 reflects a beam of parallel light to an interference system at the bottom to generate interference fringes. In the embodiment, an automatic focusing system is arranged in the image pickup part and is used for controlling the telescopic displacement of the telescopic supporting rod 1-2 so as to ensure that the observation field obtains the optimal focusing state.
The detection principle is that in the embodiment, two glass display screens are overlapped, one end of each glass display screen is in contact with the other end of each glass display screen, a clamping block 4-5 is clamped at the other end of each glass display screen, a wedge-shaped air film is formed between the two glass display screens, when parallel light irradiates an interference system, interference fringes with the same thickness are generated on the upper surface of the air film, and the interference fringes are parallel fringes which are mutually equal in width, equal in interval and light and shade at intervals. When the upper layer of the slide to be detected 4-1 has defects or impurities, the interference fringes can be distorted, the distorted shape is related to the shape of the defects in the display screen, the optical microscope module in the embodiment can record the positions of the distortion fringes corresponding to the defects, the defects or impurities in the display screen are detected through the change of the interference fringes, the omission can be prevented, and the detection precision is improved.
The scheme also provides a method for detecting defects in the display screen by using the equal-thickness interference principle, which comprises the following steps of:
the method comprises the following steps: placing a flat glass slide 4-2 on a measuring platform, arranging a clamping block 4-5 with a certain thickness between the flat glass slide 4-2 and a glass slide 4-1 to be measured to form an air wedge, forming an interference system between the flat glass slide 4-2, the glass slide 4-1 to be measured and the clamping block 4-5, and arranging a scanning system on the interference system;
step two: the positions of a light source part and a camera part are adjusted by adjusting a scanning bracket in a scanning system, so that emergent light of the light source part scans the slide 4-1 to be tested along the direction of increasing the thickness of the air wedge and generates interference fringes;
step three: the interference fringes at the defect part of the slide 4-1 to be detected are abnormal in the scanning process, the transverse distance x from the defect part corresponding to the abnormal fringes to the edge of the slide 4-1 to be detected is calculated through an optical microscope module, and the optical microscope module is connected with a camera part in a scanning system;
step four: and taking out the clamping block 4-5, placing the clamping block on the adjacent side edge of the slide 4-1 to be tested to form another air wedge, and repeating the second step and the third step to obtain the longitudinal distance y from the defect position corresponding to the abnormal stripe to the edge of the slide 4-1 to be tested.
Theoretically, parallel light on a glass slide 4-1 to be measured forms interference fringes 4-3 through equal thickness interference, the laser wavelength λ is known, the distance between two adjacent plain text or dark fringes is half-wavelength λ/2, when the thickness of a clamping block 4-5 for generating air wedge is 10mm, the thickness of a wedge-shaped air film corresponding to each added primary fringe is increased by λ/2, the shape of a general uncut glass display screen is a square with the side length a being 2m, for a laser with the wavelength λ being 532nm, the number of generated fringes is N ═ h/(λ/2) — (37593), the generated equal thickness wedge-shaped interference fringes are alternately bright and dark, have equal width and equal interval, and generate distortion at the position with defects or impurities, and the width calculation formula of the interference fringes is w ═ a/N ═ 0.0532 mm.
Therefore, the calculation of the stripe width is related to the size of the uncut display screen and the thickness of the air clamping blocks 4-5, on one hand, the stripe width calculated by a formula generates a larger error when the edge of the display screen is irregular due to the smaller thickness of the clamping blocks 4-5; on the other hand, because the specific position of the defect needs to be positioned, and the distance from the defect to two adjacent side edges of the display screen at least needs to be required, the positions of the clamping blocks 4-5 need to be moved to form two air wedges in different directions to respectively detect the two-dimensional coordinates of the defect of the display screen, the heights of the clamping blocks 4-5 are small, the positions of the two times of placing before and after are not guaranteed to be the same, the formed stripe levels are different, and if the stripe width generated by calculating the two air wedges according to the same formula is obviously inaccurate.
Specifically, in this embodiment, a clamp block 4-5 is disposed between a slide 4-1 to be tested and a flat slide 4-2 placed at the bottom thereof to form an air wedge, at this time, the telescopic support rod 1-2 is adjusted to move horizontally along the sliding support rod 1-1, parallel light is transversely scanned along the direction of increasing the thickness of the wedge, and interference fringes at a defect are distorted, specifically, the fringe order n and the fringe width l from zero-order fringes to abnormal distortion fringes are calculated in this embodiment0Obtaining the distance nl from the corresponding defect of the abnormal stripe to the edge of the slide to be detected 4-10. The calculation of the stripe width is as follows: optionally defining a primary normal stripe with x as its coordinatekAnd defining the coordinate of the normal stripe of the next 20 levels as xk+20Measure the total width of 20 normal stripes as | xk-xk+20L, calculating the width of the first-level stripe as l0＝|xk-xk+20L/20. Because the interference fringes of equal thickness wedge are alternately bright and dark and mutually equal in width and equal in spacing, the detection precision can be improved by calculating the average width of 20-level normal fringes to calculate the width of a single fringe, the interference fringes can generate distortion at a place with a defect or impurities, the fringe counter in the optical microscope module is used for measuring the fringe order n from the edge zero-order fringe to the distortion fringe corresponding to the defect, and the distance from the defect corresponding to the abnormal fringe to the edge of the slide to be detected 4-1 is X ═ nl0＝n|xk-xk+20|/20。
In this embodiment, after the interference system is transversely scanned, the clamping block 4-5 is taken out and placed on the adjacent side of the slide 4-1 to be measured to form another air wedge, the sliding support rod 1-1 is connected with the guide rail to longitudinally scan the reflected light of the image pickup part along the surface of the slide 4-1 to be measured, the distance from the defect to the adjacent side of the display screen can be obtained according to the same method, the longitudinal coordinate y of the defect in the display screen is obtained, specifically, as shown in fig. 3, the distance from the defect to the edge of the glass display screen is measured in the x and y directions, the plane position coordinates of the impurity or the defect can be positioned, and the complete defect-free glass display screen can be obtained by avoiding the impurity when the display screen is cut. And for the coordinate positioning of the defects, the display screen can be scanned transversely and longitudinally at one time, all the defect coordinates in the display screen can be obtained after the scanning is finished, and the reasonable cutting is carried out according to each defect coordinate, so that the processing efficiency is improved.
In the prior art, defects are detected by photographing and scanning and observing photos, or defects or impurities are determined by two-dimensional scanning of a CCD camera and mechanical coordinates of the camera.
Example 2
The method for detecting defects in a display screen by using the equal-thickness interference principle in this embodiment is basically the same as that in embodiment 1, further, in this embodiment, the height h of the clamping block 4-5 is set according to the length a of the slide 4-1 to be detected, h/a is 0.005-0.015, specifically, in this embodiment, the slide 4-1 to be detected is a square with a side length of 2m, the height of the clamping block 4-5 is calculated to be 10 mm-30 mm according to the above formula, in this embodiment, the height of the clamping block 4-5 is 30mm, that is, the maximum thickness of the whole air wedge is 30mm, and in this embodiment, the laser 2-4 is a green laser with a wavelength of 532 nm.
Because the width of the fringes is reduced in proportion along with the increase of the thickness of the clamping blocks 4-5, in order to enable the interference fringes formed by the interference system to be easy to observe and calculate, the height of the clamping blocks 4-5 is not too large or too small, and the clamping blocks 4-5 are not easy to take and place when the height is smaller, so that the difference between the air wedges formed in the two previous and next processes is larger, the number of the formed fringes is reduced, the width of the fringes is increased, and the calculation error in the subsequent process is increased; the width of the stripes formed when the height of the clamping blocks 4-5 is larger is reduced, and although the calculation error is favorably reduced, the arrangement of light and dark stripes is dense, and the observation and the recording are difficult. Therefore, the height h of the clamping block 4-5 is reasonably set according to the length a of the slide 4-1 to be measured, so that the sufficient number of light and dark stripes can be obtained, the stripes have small width and are distributed dispersedly, the recording of the optical microscope module is facilitated, and the measurement error is reduced.
Example 3
The structure of the system for detecting defects in a display screen by using the principle of equal thickness interference is basically the same as that of embodiment 1, and further, the light source part of the system is fixedly connected with the fixing rod 1-3 through the first connecting rod 2-3, and the image pickup part is fixedly connected with the fixing rod 1-3 through the second connecting rod 3-6. Because the size of glass display screen is great, if adopt outside fixed light source, scan the detection to the square display screen of size about 2m, required fixed light source structure is great, consumes energy moreover, the extravagant energy. In the embodiment, the fixed rod 1-3 can horizontally move along the sliding support rod 1-1 along with the telescopic support rod 1-2, and the relative positions of the light source part and the camera part are kept unchanged, so that the light source part and the camera part synchronously move, the light source part can provide parallel light with stable light beams, interference fringes formed by the parallel light passing through an interference system have the same effect as an external large light source, energy is saved, and light pollution is reduced.
Example 4
The structure of the system for detecting defects in a display screen by using the equal-thickness interference principle is basically the same as that of embodiment 1, and further, in this embodiment, displacement sensors are further arranged in the sliding support rod 1-1 and the telescopic support rod 1-2, the telescopic support rod 1-2 includes a power line and a signal line, and the displacement sensors can be used for recording mechanical coordinates of a camera part and assisting in judging the positions of the defects corresponding to distortion fringes. Because the displacement sensor has return stroke errors and general sensitivity and stability, the defect position is judged by solely utilizing the displacement sensor inaccurately, and particularly when a circuit breaks down, the displacement sensor cannot detect the displacement of the supporting rod and cannot judge the position coordinate of the camera shooting part.
In the embodiment, the position of the image pickup part is determined by the mechanical coordinate calculated by the displacement sensor, the position of the image pickup part is compared with the defect coordinate measured by the optical interference principle, and when the calculation of the width of the fringe or the number of fringe levels is wrong, the difference between the calculation coordinate of the optical interference and the mechanical coordinate calculated by the displacement sensor is too large, so that a worker is prompted to scan and detect the part again. Consequently, this embodiment installation displacement sensor can be used for the supplementary defect coordinate of judging in the display screen in branch for testing process's stability obtains guaranteeing, takes light interference location and the dual positioning method of displacement sensor location, and uses the uniform thickness interference fringe width of light as the unit, detects the accurate position of display screen internal defect or impurity, rejects by follow-up cutting process again, and the detecting system simple structure of this embodiment, convenient operation, detection efficiency is high, and detection effect is good.
In addition, in the embodiment, the size of the flat glass slide 4-2 and the size of the glass slide 4-1 to be detected are larger, the gaskets 4-4 are arranged at the bottoms of the two ends of the flat glass slide 4-2, and the gaskets 4-4 are padded on the measuring platform to enable the display screen to be stably placed, so that the surface of the flat glass slide 4-2 is prevented from being abraded or polluted.
The above examples are only intended to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (1)
1. A method for detecting defects in a display screen by using an equal thickness interference principle is characterized by comprising the following steps: the system for detecting the defects comprises a scanning system, an interference system and an optical microscopic module, wherein the scanning system comprises a scanning support, a light source part and a camera part, the light source part and the camera part are connected with the scanning support, emergent light of the light source part is used for irradiating the interference system to generate interference fringes, the interference system comprises a slide to be detected (4-1) and a flat slide (4-2) placed at the bottom of the slide to be detected (4-1), a clamping block (4-5) is arranged between the slide to be detected (4-1) and the flat slide (4-2) to form an air wedge, the scanning support is used for adjusting the emergent light and transversely and longitudinally scanning the slide to be detected (4-1), and the optical microscopic module is connected with the camera part to observe and record the change condition of the interference fringes;
the scanning support comprises a sliding support rod (1-1) arranged horizontally and a telescopic support rod (1-2) arranged vertically, a fixing rod (1-3) is arranged at the bottom of the telescopic support rod (1-2), the fixing rod (1-3) is used for installing a light source part and a camera part, and the telescopic support rod (1-2) horizontally moves along the sliding support rod (1-1) to enable emergent light to transversely scan a slide (4-1) to be detected;
the sliding support rod (1-1) is connected with the guide rail, and the sliding support rod (1-1) is perpendicular to the telescopic support rod (1-2) along the moving direction of the sliding support rod (1-1) along the sliding direction of the guide rail so as to realize the longitudinal scanning of emergent light on the slide (4-1) to be detected;
the light source part is fixedly connected with the fixing rod (1-3) through a first connecting rod (2-3), and the camera shooting part is fixedly connected with the fixing rod (1-3) through a second connecting rod (3-6);
displacement sensors are arranged in the sliding support rod (1-1) and the telescopic support rod (1-2);
setting the height h of the clamping block (4-5) according to the length a of the slide (4-1) to be detected, wherein h/a is 0.005-0.015;
the defect detection comprises the following steps:
the method comprises the following steps: the method comprises the following steps that a flat glass slide (4-2) is placed on a measuring platform, a clamping block (4-5) with a certain thickness is arranged between the flat glass slide (4-2) and a glass slide to be measured (4-1) to form an air wedge, an interference system is formed among the flat glass slide (4-2), the glass slide to be measured (4-1) and the clamping block (4-5), and a scanning system is arranged on the interference system;
step two: the positions of a light source part and a camera part are adjusted by adjusting a scanning bracket in a scanning system, so that emergent light of the light source part scans a slide to be tested (4-1) along the direction of increasing the thickness of an air wedge and generates interference fringes;
step three: the interference fringes at the defect part of the slide (4-1) to be detected are abnormal in the scanning process, the transverse distance x from the defect part corresponding to the abnormal fringes to the edge of the slide (4-1) to be detected is calculated through an optical microscope module, and the optical microscope module is connected with a camera shooting part in a scanning system;
step four: taking out the clamping block (4-5), placing the clamping block on the adjacent side edge of the slide (4-1) to be detected to form another air wedge, and repeating the second step and the third step to obtain the longitudinal distance y from the defect position corresponding to the abnormal stripe to the edge of the slide (4-1) to be detected;
calculating the fringe level n and the fringe width l from the zero-order fringe to the abnormal fringe0Obtaining the distance nl from the corresponding defect of the abnormal stripe to the edge of the glass sheet (4-1) to be detected0；
Optionally defining a primary normal stripe with x as its coordinatekAnd defining the coordinate of the normal stripe of the next 20 levels as xk+20Measure the total width of 20 normal stripes as | xk-xk+20L, calculating the width of the first-level stripe as l0＝|xk-xk+20|/20；
And measuring the fringe order n from the edge zero-order fringe to the corresponding distortion fringe at the defect by using a fringe counter in the optical microscope module.
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