JP2006310577A5 - - Google Patents

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Publication number
JP2006310577A5
JP2006310577A5 JP2005131834A JP2005131834A JP2006310577A5 JP 2006310577 A5 JP2006310577 A5 JP 2006310577A5 JP 2005131834 A JP2005131834 A JP 2005131834A JP 2005131834 A JP2005131834 A JP 2005131834A JP 2006310577 A5 JP2006310577 A5 JP 2006310577A5
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JP
Japan
Prior art keywords
mirror
pressure
gas chamber
gas
partition wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005131834A
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English (en)
Japanese (ja)
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JP2006310577A (ja
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Publication date
Application filed filed Critical
Priority to JP2005131834A priority Critical patent/JP2006310577A/ja
Priority claimed from JP2005131834A external-priority patent/JP2006310577A/ja
Priority to US11/408,881 priority patent/US7453623B2/en
Publication of JP2006310577A publication Critical patent/JP2006310577A/ja
Publication of JP2006310577A5 publication Critical patent/JP2006310577A5/ja
Pending legal-status Critical Current

Links

JP2005131834A 2005-04-28 2005-04-28 反射ミラー装置およびそれを用いた露光装置 Pending JP2006310577A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005131834A JP2006310577A (ja) 2005-04-28 2005-04-28 反射ミラー装置およびそれを用いた露光装置
US11/408,881 US7453623B2 (en) 2005-04-28 2006-04-21 Reflecting mirror and exposure apparatus using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005131834A JP2006310577A (ja) 2005-04-28 2005-04-28 反射ミラー装置およびそれを用いた露光装置

Publications (2)

Publication Number Publication Date
JP2006310577A JP2006310577A (ja) 2006-11-09
JP2006310577A5 true JP2006310577A5 (enExample) 2008-05-22

Family

ID=37234160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005131834A Pending JP2006310577A (ja) 2005-04-28 2005-04-28 反射ミラー装置およびそれを用いた露光装置

Country Status (2)

Country Link
US (1) US7453623B2 (enExample)
JP (1) JP2006310577A (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007010906A1 (de) 2007-03-05 2008-09-11 Seereal Technologies S.A. Abbildungsvorrichtung zum Beeinflussen von auftreffendem Licht
WO2008122313A1 (en) * 2007-04-05 2008-10-16 Carl Zeiss Smt Ag Optical element module with imaging error and position correction
JP5025538B2 (ja) * 2008-03-21 2012-09-12 三菱電機株式会社 形状可変ミラーおよびその形状可変ミラーを用いたレーザ加工装置
WO2011002443A1 (en) * 2009-06-30 2011-01-06 Hewlett-Packard Development Company, L.P. Individually addressable nano-scale mechanical actuators
DE102011075316A1 (de) * 2011-05-05 2012-11-08 Carl Zeiss Smt Gmbh Optisches Modul mit einer Messeinrichtung
US9097577B2 (en) 2011-06-29 2015-08-04 KLA—Tencor Corporation Adaptive optics for compensating aberrations in light-sustained plasma cells
DE102012209309A1 (de) * 2012-06-01 2013-12-05 Carl Zeiss Smt Gmbh Lithographievorrichtung und Verfahren zur Herstellung einer Spiegelanordnung
KR102262448B1 (ko) 2013-01-28 2021-06-09 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치를 위한 방사선 소스, 거울 및 투영 시스템
EP2784566A1 (en) * 2013-03-25 2014-10-01 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Steerable MOEMS device comprising a micromirror
JP2014225639A (ja) * 2013-04-16 2014-12-04 キヤノン株式会社 ミラーユニット及び露光装置
CN104459986B (zh) * 2013-09-13 2017-02-15 上海微电子装备有限公司 一种微动变形像差校正装置
JP6231361B2 (ja) * 2013-11-25 2017-11-15 キヤノン電子株式会社 振動素子および光走査装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3860884A (en) * 1973-10-10 1975-01-14 Bell Telephone Labor Inc Optically pumped laser using N{HD 2{B O or similar gas mixed with energy-transferring CO{HD 2{B
US4162825A (en) * 1977-08-05 1979-07-31 Ford Aerospace & Communications Corp. Method for adjusting the radius of curvature of a spherical mirror
DE8703884U1 (de) * 1987-03-14 1987-04-23 FAG Kugelfischer Georg Schäfer KGaA, 97421 Schweinfurt Pneumatisch-hydraulischer Druckgeber
US5444566A (en) * 1994-03-07 1995-08-22 Texas Instruments Incorporated Optimized electronic operation of digital micromirror devices
JPH09152505A (ja) * 1995-11-30 1997-06-10 Sharp Corp 変形可能ミラー及びその製造方法及び光学装置並びに記録再生装置
US6014598A (en) 1996-06-28 2000-01-11 Arcelik A.S. Model-based fault detection system for electric motors
US6043863A (en) * 1996-11-14 2000-03-28 Nikon Corporation Holder for reflecting member and exposure apparatus having the same
JPH10144602A (ja) * 1996-11-14 1998-05-29 Nikon Corp 反射ミラー保持装置及び投影露光装置
JPH10256148A (ja) * 1997-03-13 1998-09-25 Nikon Corp 投影露光装置
US6398373B1 (en) 2000-08-09 2002-06-04 Asml Us, Inc. Pneumatic control system and method for shaping deformable mirrors in lithographic projection systems
JP4231220B2 (ja) * 2001-12-06 2009-02-25 株式会社リコー 形状可変鏡及びその制御方法並びに光ディスク情報入出力装置
JP3799275B2 (ja) * 2002-01-08 2006-07-19 キヤノン株式会社 走査露光装置及びその製造方法並びにデバイス製造方法
US6842277B2 (en) 2002-07-23 2005-01-11 Nikon Corporation Deformable mirror with high-bandwidth servo for rigid body control

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