JP2010107735A5 - - Google Patents

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Publication number
JP2010107735A5
JP2010107735A5 JP2008279652A JP2008279652A JP2010107735A5 JP 2010107735 A5 JP2010107735 A5 JP 2010107735A5 JP 2008279652 A JP2008279652 A JP 2008279652A JP 2008279652 A JP2008279652 A JP 2008279652A JP 2010107735 A5 JP2010107735 A5 JP 2010107735A5
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JP
Japan
Prior art keywords
optical element
supporting
support member
force
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008279652A
Other languages
English (en)
Japanese (ja)
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JP2010107735A (ja
JP5335372B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2008279652A priority Critical patent/JP5335372B2/ja
Priority claimed from JP2008279652A external-priority patent/JP5335372B2/ja
Priority to US12/608,796 priority patent/US8456614B2/en
Publication of JP2010107735A publication Critical patent/JP2010107735A/ja
Publication of JP2010107735A5 publication Critical patent/JP2010107735A5/ja
Application granted granted Critical
Publication of JP5335372B2 publication Critical patent/JP5335372B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008279652A 2008-10-30 2008-10-30 光学要素の支持装置、それを用いた露光装置及びデバイスの製造方法 Expired - Fee Related JP5335372B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008279652A JP5335372B2 (ja) 2008-10-30 2008-10-30 光学要素の支持装置、それを用いた露光装置及びデバイスの製造方法
US12/608,796 US8456614B2 (en) 2008-10-30 2009-10-29 Optical element supporting device, exposure apparatus using same, and device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008279652A JP5335372B2 (ja) 2008-10-30 2008-10-30 光学要素の支持装置、それを用いた露光装置及びデバイスの製造方法

Publications (3)

Publication Number Publication Date
JP2010107735A JP2010107735A (ja) 2010-05-13
JP2010107735A5 true JP2010107735A5 (enExample) 2011-12-15
JP5335372B2 JP5335372B2 (ja) 2013-11-06

Family

ID=42130976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008279652A Expired - Fee Related JP5335372B2 (ja) 2008-10-30 2008-10-30 光学要素の支持装置、それを用いた露光装置及びデバイスの製造方法

Country Status (2)

Country Link
US (1) US8456614B2 (enExample)
JP (1) JP5335372B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150107991A (ko) 2014-03-14 2015-09-24 삼성전자주식회사 광학계 고정유닛 및 이를 구비하는 광학 설비
BR102016020900A2 (pt) * 2016-09-09 2018-03-20 Cnpem Centro Nac De Pesquisa Em Energia E Materiais método de controle de grau de liberdade em sistemas mecatrônicos e monocromador de duplo cristal
CN109991713A (zh) * 2019-04-05 2019-07-09 马浩鑫 分体式三自由度微透镜阵列支架
JP2021051182A (ja) * 2019-09-25 2021-04-01 株式会社ニコン レンズ鏡筒及びレンズ鏡筒の調芯方法
JP2022114974A (ja) * 2021-01-27 2022-08-08 キヤノン株式会社 光学系、露光装置および物品製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001284226A (ja) * 2000-03-31 2001-10-12 Nikon Corp 光学部材保持装置及び露光装置並びにマイクロデバイスの製造方法。
JP3805323B2 (ja) * 2003-05-21 2006-08-02 キヤノン株式会社 露光装置、収差低減方法及び光学部材調整機構
JP2006113414A (ja) * 2004-10-18 2006-04-27 Canon Inc 光学素子保持装置、鏡筒、露光装置及びマイクロデバイスの製造方法
JP2007322709A (ja) * 2006-05-31 2007-12-13 Tamron Co Ltd 光学部材支持機構、光学装置、および間隔調整部材
KR101507622B1 (ko) * 2006-12-01 2015-03-31 칼 짜이스 에스엠티 게엠베하 이미지 수차들을 감소시키기 위한, 교환가능하고 조작가능한 보정 배열을 구비하는 광학 시스템

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