JP2006278505A5 - - Google Patents
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- Publication number
- JP2006278505A5 JP2006278505A5 JP2005092444A JP2005092444A JP2006278505A5 JP 2006278505 A5 JP2006278505 A5 JP 2006278505A5 JP 2005092444 A JP2005092444 A JP 2005092444A JP 2005092444 A JP2005092444 A JP 2005092444A JP 2006278505 A5 JP2006278505 A5 JP 2006278505A5
- Authority
- JP
- Japan
- Prior art keywords
- carbon nanotube
- electron beam
- substrate
- state
- irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 20
- 239000002041 carbon nanotube Substances 0.000 claims description 20
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 20
- 238000010894 electron beam technology Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 6
- 230000005684 electric field Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005092444A JP4627206B2 (ja) | 2005-03-28 | 2005-03-28 | ナノチューブトランジスタの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005092444A JP4627206B2 (ja) | 2005-03-28 | 2005-03-28 | ナノチューブトランジスタの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006278505A JP2006278505A (ja) | 2006-10-12 |
| JP2006278505A5 true JP2006278505A5 (enExample) | 2007-03-15 |
| JP4627206B2 JP4627206B2 (ja) | 2011-02-09 |
Family
ID=37212983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005092444A Expired - Fee Related JP4627206B2 (ja) | 2005-03-28 | 2005-03-28 | ナノチューブトランジスタの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4627206B2 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100877690B1 (ko) | 2006-12-05 | 2009-01-08 | 한국전자통신연구원 | 나노 와이어 배열 소자 제조방법 |
| US7846786B2 (en) | 2006-12-05 | 2010-12-07 | Korea University Industrial & Academic Collaboration Foundation | Method of fabricating nano-wire array |
| JP4666270B2 (ja) * | 2006-12-18 | 2011-04-06 | 日本電気株式会社 | 半導体装置及びその製造方法 |
| JP4988369B2 (ja) * | 2007-02-05 | 2012-08-01 | 日本電信電話株式会社 | カーボンナノチューブトランジスタの製造方法 |
| JP4737473B2 (ja) * | 2007-04-16 | 2011-08-03 | 日本電気株式会社 | 半導体装置及びその製造方法 |
| US9174847B2 (en) | 2008-05-01 | 2015-11-03 | Honda Motor Co., Ltd. | Synthesis of high quality carbon single-walled nanotubes |
| CN108023016B (zh) * | 2016-10-31 | 2020-07-10 | 清华大学 | 薄膜晶体管的制备方法 |
| CN108017048B (zh) * | 2016-10-31 | 2020-01-07 | 清华大学 | 半导体层的制备方法 |
| CN108020573B (zh) * | 2016-10-31 | 2019-12-17 | 清华大学 | 区分碳纳米管类型的方法 |
| CN113130620B (zh) * | 2020-01-15 | 2023-07-18 | 清华大学 | 场效应晶体管 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004347532A (ja) * | 2003-05-23 | 2004-12-09 | Japan Science & Technology Agency | バイオセンサー |
| US20050036905A1 (en) * | 2003-08-12 | 2005-02-17 | Matsushita Electric Works, Ltd. | Defect controlled nanotube sensor and method of production |
| EP1508926A1 (en) * | 2003-08-19 | 2005-02-23 | Hitachi, Ltd. | Nanotube transistor device |
-
2005
- 2005-03-28 JP JP2005092444A patent/JP4627206B2/ja not_active Expired - Fee Related
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