JP4627206B2 - ナノチューブトランジスタの製造方法 - Google Patents

ナノチューブトランジスタの製造方法 Download PDF

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Publication number
JP4627206B2
JP4627206B2 JP2005092444A JP2005092444A JP4627206B2 JP 4627206 B2 JP4627206 B2 JP 4627206B2 JP 2005092444 A JP2005092444 A JP 2005092444A JP 2005092444 A JP2005092444 A JP 2005092444A JP 4627206 B2 JP4627206 B2 JP 4627206B2
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electron beam
carbon nanotube
nanotube
carbon nanotubes
manufacturing
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Japanese (ja)
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JP2006278505A (ja
JP2006278505A5 (enExample
Inventor
賢一 神崎
哲 鈴木
慶裕 小林
洋 猪川
行徳 小野
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NTT Inc
NTT Inc USA
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Nippon Telegraph and Telephone Corp
NTT Inc USA
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Publication of JP2006278505A5 publication Critical patent/JP2006278505A5/ja
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JP2005092444A 2005-03-28 2005-03-28 ナノチューブトランジスタの製造方法 Expired - Fee Related JP4627206B2 (ja)

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JP2005092444A JP4627206B2 (ja) 2005-03-28 2005-03-28 ナノチューブトランジスタの製造方法

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JP2005092444A JP4627206B2 (ja) 2005-03-28 2005-03-28 ナノチューブトランジスタの製造方法

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JP2006278505A JP2006278505A (ja) 2006-10-12
JP2006278505A5 JP2006278505A5 (enExample) 2007-03-15
JP4627206B2 true JP4627206B2 (ja) 2011-02-09

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Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100877690B1 (ko) 2006-12-05 2009-01-08 한국전자통신연구원 나노 와이어 배열 소자 제조방법
US7846786B2 (en) 2006-12-05 2010-12-07 Korea University Industrial & Academic Collaboration Foundation Method of fabricating nano-wire array
WO2008075642A1 (ja) * 2006-12-18 2008-06-26 Nec Corporation 半導体装置及びその製造方法
JP4988369B2 (ja) * 2007-02-05 2012-08-01 日本電信電話株式会社 カーボンナノチューブトランジスタの製造方法
JP4737473B2 (ja) * 2007-04-16 2011-08-03 日本電気株式会社 半導体装置及びその製造方法
US9174847B2 (en) 2008-05-01 2015-11-03 Honda Motor Co., Ltd. Synthesis of high quality carbon single-walled nanotubes
CN108023016B (zh) * 2016-10-31 2020-07-10 清华大学 薄膜晶体管的制备方法
CN108020573B (zh) * 2016-10-31 2019-12-17 清华大学 区分碳纳米管类型的方法
CN108017048B (zh) * 2016-10-31 2020-01-07 清华大学 半导体层的制备方法
CN113130620B (zh) * 2020-01-15 2023-07-18 清华大学 场效应晶体管

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004347532A (ja) * 2003-05-23 2004-12-09 Japan Science & Technology Agency バイオセンサー
US20050036905A1 (en) * 2003-08-12 2005-02-17 Matsushita Electric Works, Ltd. Defect controlled nanotube sensor and method of production
EP1508926A1 (en) * 2003-08-19 2005-02-23 Hitachi, Ltd. Nanotube transistor device

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JP2006278505A (ja) 2006-10-12

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