JP2006245274A - 磁気検出素子 - Google Patents
磁気検出素子 Download PDFInfo
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- JP2006245274A JP2006245274A JP2005058729A JP2005058729A JP2006245274A JP 2006245274 A JP2006245274 A JP 2006245274A JP 2005058729 A JP2005058729 A JP 2005058729A JP 2005058729 A JP2005058729 A JP 2005058729A JP 2006245274 A JP2006245274 A JP 2006245274A
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3929—Disposition of magnetic thin films not used for directly coupling magnetic flux from the track to the MR film or for shielding
- G11B5/3932—Magnetic biasing films
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3268—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
- H01F10/3281—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn only by use of asymmetry of the magnetic film pair itself, i.e. so-called pseudospin valve [PSV] structure, e.g. NiFe/Cu/Co
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3295—Spin-exchange coupled multilayers wherein the magnetic pinned or free layers are laminated without anti-parallel coupling within the pinned and free layers
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
- H10N50/85—Magnetic active materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/18—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds
- H01F10/193—Magnetic semiconductor compounds
- H01F10/1936—Half-metallic, e.g. epitaxial CrO2 or NiMnSb films
Abstract
【解決手段】フリー磁性層16はフリー磁性層16は下からCoFe層16a、NiaFeb合金層16b(ただし、a、bは原子%であり0<a≦25、a+b=100である)及びCoFe16cが積層された3層構造を有している。フリー磁性層16中に存在するNiFe合金中のNiの原子%がこの範囲であるとスピン依存バルク散乱係数βが増加し、従来よりも磁気検出素子の抵抗変化量と素子面積の積ΔRAを大きくできる。
【選択図】図1
Description
前記フリー磁性層はNiaFeb合金層(a、bは原子%であり0<a≦25、a+b=100である)を有していることを特徴とするものである。
固定磁性層14は、磁性層14a、非磁性中間層14b、磁性層14cからなる3層構造である。前記反強磁性層13との界面での交換結合磁界及び非磁性中間層14bを介した反強磁性的交換結合磁界(RKKY的相互作用)により前記磁性層14aと磁性層14cの磁化方向は互いに反平行状態にされる。これは、いわゆる人工フェリ磁性結合状態と呼ばれ、この構成により固定磁性層14の磁化を安定した状態にでき、また前記固定磁性層14と反強磁性層13との界面で発生する交換結合磁界を見かけ上大きくすることができる。
フリー磁性層16は下からCoFe層16a、NiaFeb合金層16b(ただし、a、bは原子%であり0<a≦25、a+b=100である)及びCoFe層16cが積層された3層構造を有している。
図2に示される磁気検出素子の固定磁性層31は、磁性層31a、非磁性中間層31b、磁性層31c、ホイスラー合金層31dの4層構造である。磁性層31a及び磁性層31cはCoFeなどの強磁性材料によって形成され、ホイスラー合金層31dは後述するホイスラー合金によって形成されている。ホイスラー合金層31dは強磁性を有しており、強磁性結合によって磁性層31cとホイスラー合金層31dは同一の方向に磁化が向く。
12 シード層
13 反強磁性層
14、31、32 固定磁性層
15 非磁性材料層
16 フリー磁性層
17 保護層
18 ハードバイアス層
19 絶縁層
20 電極層
Claims (8)
- 磁化方向が一方向に固定される固定磁性層と、前記固定磁性層に非磁性材料層を介して形成されたフリー磁性層が設けられた多層膜を有し、前記多層膜の各層の膜面と垂直方向に電流が流れる磁気検出素子において、
前記フリー磁性層はNiaFeb合金層(a、bは原子%であり0<a≦25、a+b=100である)を有していることを特徴とする磁気検出素子。 - 前記フリー磁性層はNiaFeb合金層(a、bは原子%であり2≦a≦24、a+b=100である)を有している請求項1記載の磁気検出素子。
- 前記フリー磁性層が前記NiaFeb合金層の上下にCoFe層が積層された3層構造を有している請求項1または2記載の磁気検出素子。
- 前記固定磁性層がCo2YZ合金層(YはMn、Fe、Crのうち1種または2種以上の元素であり、前記ZはAl、Ga、Si、Ge、Sn、In、Sb、Pb、Znのうち1種または2種以上の元素)を有している請求項1ないし3のいずれかに記載の磁気検出素子。
- 前記固定磁性層が前記フリー磁性層の上側に設けられている請求項1ないし4のいずれかに記載の磁気検出素子。
- 前記固定磁性層が前記フリー磁性層の下側に設けられている請求項1ないし4のいずれかに記載の磁気検出素子。
- 前記フリー磁性層の下に前記非磁性材料層及び前記固定磁性層が設けられ、前記フリー磁性層の上にも非磁性材料層及び固定磁性層が設けられている請求項1ないし4のいずれかに記載の磁気検出素子。
- 前記固定磁性層に反強磁性層が重ねられている請求項5ないし7のいずれかに記載の磁気検出素子。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2005058729A JP2006245274A (ja) | 2005-03-03 | 2005-03-03 | 磁気検出素子 |
US11/364,533 US7558029B2 (en) | 2005-03-03 | 2006-02-27 | Magnetic detectible head comprising free layer |
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JP2005058729A JP2006245274A (ja) | 2005-03-03 | 2005-03-03 | 磁気検出素子 |
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JP2006245274A true JP2006245274A (ja) | 2006-09-14 |
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JP2005058729A Pending JP2006245274A (ja) | 2005-03-03 | 2005-03-03 | 磁気検出素子 |
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JP (1) | JP2006245274A (ja) |
Families Citing this family (3)
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JP4516086B2 (ja) * | 2007-03-01 | 2010-08-04 | 株式会社東芝 | 磁気抵抗効果素子及びその製造方法、磁気メモリ、磁気ヘッド並びに磁気記録装置 |
US20150221328A1 (en) * | 2014-01-31 | 2015-08-06 | HGST Netherlands B.V. | Magnetic read sensor with bar shaped afm and pinned layer structure and soft magnetic bias aligned with free layer |
JP2015179824A (ja) * | 2014-02-28 | 2015-10-08 | Tdk株式会社 | 磁性素子およびそれを備えた磁性高周波素子 |
Citations (4)
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JP2003060263A (ja) * | 2001-08-15 | 2003-02-28 | Toshiba Corp | 磁気抵抗効果素子、磁気ヘッド及び磁気再生装置 |
JP2003318463A (ja) * | 2002-04-23 | 2003-11-07 | Alps Electric Co Ltd | 交換結合膜及びこの交換結合膜の製造方法並びに前記交換結合膜を用いた磁気検出素子 |
JP2004146480A (ja) * | 2002-10-23 | 2004-05-20 | Hitachi Ltd | ホイスラー磁性層と体心立方構造の非磁性中間層を積層した磁気抵抗効果素子および磁気ヘッド |
JP2004524708A (ja) * | 2001-04-24 | 2004-08-12 | 松下電器産業株式会社 | 磁気抵抗効果素子とこれを用いた磁気抵抗効果型磁気ヘッド、磁気記録装置および磁気抵抗効果型メモリー装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
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US5923503A (en) * | 1995-03-15 | 1999-07-13 | Alps Electric Co., Ltd. | Thin-film magnetic head and production method thereof |
JP3269999B2 (ja) * | 1997-12-09 | 2002-04-02 | アルプス電気株式会社 | 薄膜磁気ヘッドの製造方法 |
JP3212569B2 (ja) * | 1999-01-27 | 2001-09-25 | アルプス電気株式会社 | デュアルスピンバルブ型薄膜磁気素子及び薄膜磁気ヘッド及びデュアルスピンバルブ型薄膜磁気素子の製造方法 |
JP4054142B2 (ja) * | 1999-09-28 | 2008-02-27 | 富士通株式会社 | スピンバルブ型磁気抵抗効果型素子 |
US6639762B2 (en) * | 2000-01-24 | 2003-10-28 | Alps Electric Co., Ltd. | Spin valve thin-film magnetic device having free magnetic layer in ferrimagnetic state and manufacturing method therefor |
US6767655B2 (en) * | 2000-08-21 | 2004-07-27 | Matsushita Electric Industrial Co., Ltd. | Magneto-resistive element |
JP2002076472A (ja) * | 2000-08-31 | 2002-03-15 | Alps Electric Co Ltd | スピンバルブ型薄膜磁気素子およびこのスピンバルブ型薄膜磁気素子を備えた薄膜磁気ヘッド |
JP2004079798A (ja) * | 2002-08-19 | 2004-03-11 | Alps Electric Co Ltd | 巨大磁気抵抗効果素子及びその製造方法 |
JP2004186659A (ja) * | 2002-10-07 | 2004-07-02 | Alps Electric Co Ltd | 磁気検出素子 |
JP4266692B2 (ja) * | 2003-04-23 | 2009-05-20 | Tdk株式会社 | 磁気検出素子の製造方法 |
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- 2005-03-03 JP JP2005058729A patent/JP2006245274A/ja active Pending
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- 2006-02-27 US US11/364,533 patent/US7558029B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004524708A (ja) * | 2001-04-24 | 2004-08-12 | 松下電器産業株式会社 | 磁気抵抗効果素子とこれを用いた磁気抵抗効果型磁気ヘッド、磁気記録装置および磁気抵抗効果型メモリー装置 |
JP2003060263A (ja) * | 2001-08-15 | 2003-02-28 | Toshiba Corp | 磁気抵抗効果素子、磁気ヘッド及び磁気再生装置 |
JP2003318463A (ja) * | 2002-04-23 | 2003-11-07 | Alps Electric Co Ltd | 交換結合膜及びこの交換結合膜の製造方法並びに前記交換結合膜を用いた磁気検出素子 |
JP2004146480A (ja) * | 2002-10-23 | 2004-05-20 | Hitachi Ltd | ホイスラー磁性層と体心立方構造の非磁性中間層を積層した磁気抵抗効果素子および磁気ヘッド |
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US7558029B2 (en) | 2009-07-07 |
US20060198061A1 (en) | 2006-09-07 |
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