JP2006245110A5 - - Google Patents

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Publication number
JP2006245110A5
JP2006245110A5 JP2005055944A JP2005055944A JP2006245110A5 JP 2006245110 A5 JP2006245110 A5 JP 2006245110A5 JP 2005055944 A JP2005055944 A JP 2005055944A JP 2005055944 A JP2005055944 A JP 2005055944A JP 2006245110 A5 JP2006245110 A5 JP 2006245110A5
Authority
JP
Japan
Prior art keywords
substrate
thermal processing
heaters
processing apparatus
substrate transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005055944A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006245110A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005055944A priority Critical patent/JP2006245110A/ja
Priority claimed from JP2005055944A external-priority patent/JP2006245110A/ja
Priority to TW095106655A priority patent/TWI295415B/zh
Priority to KR1020060019378A priority patent/KR101237092B1/ko
Publication of JP2006245110A publication Critical patent/JP2006245110A/ja
Publication of JP2006245110A5 publication Critical patent/JP2006245110A5/ja
Pending legal-status Critical Current

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JP2005055944A 2005-03-01 2005-03-01 熱的処理装置 Pending JP2006245110A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005055944A JP2006245110A (ja) 2005-03-01 2005-03-01 熱的処理装置
TW095106655A TWI295415B (en) 2005-03-01 2006-02-27 Thermal processing unit
KR1020060019378A KR101237092B1 (ko) 2005-03-01 2006-02-28 열적 처리 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005055944A JP2006245110A (ja) 2005-03-01 2005-03-01 熱的処理装置

Publications (2)

Publication Number Publication Date
JP2006245110A JP2006245110A (ja) 2006-09-14
JP2006245110A5 true JP2006245110A5 (enrdf_load_stackoverflow) 2007-04-19

Family

ID=37051248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005055944A Pending JP2006245110A (ja) 2005-03-01 2005-03-01 熱的処理装置

Country Status (3)

Country Link
JP (1) JP2006245110A (enrdf_load_stackoverflow)
KR (1) KR101237092B1 (enrdf_load_stackoverflow)
TW (1) TWI295415B (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100811695B1 (ko) * 2006-11-28 2008-03-11 엔티엠 주식회사 기판 건조장치
JP2008160011A (ja) * 2006-12-26 2008-07-10 Tokyo Electron Ltd 基板処理装置
JP2008172104A (ja) * 2007-01-12 2008-07-24 Tokyo Electron Ltd リフロー処理装置およびリフロー処理方法
JP4341978B2 (ja) * 2007-03-02 2009-10-14 東京エレクトロン株式会社 基板処理装置
JP5401015B2 (ja) * 2007-03-15 2014-01-29 光洋サーモシステム株式会社 連続式焼成炉
JP2008311250A (ja) * 2007-06-12 2008-12-25 Tokyo Electron Ltd リフローシステムおよびリフロー方法
KR101052758B1 (ko) * 2008-11-18 2011-08-01 세메스 주식회사 평판 디스플레이 소자 제조 장치
JP4936567B2 (ja) * 2009-09-18 2012-05-23 東京エレクトロン株式会社 熱処理装置
WO2011148716A1 (ja) * 2010-05-25 2011-12-01 シャープ株式会社 ベーク装置
KR102410492B1 (ko) * 2015-07-23 2022-06-20 삼성디스플레이 주식회사 글라스 성형 장치
JP6814570B2 (ja) * 2016-08-18 2021-01-20 株式会社アルバック 搬送装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09237965A (ja) * 1996-02-29 1997-09-09 Furukawa Electric Co Ltd:The リフロー炉
JP3756402B2 (ja) * 2000-12-08 2006-03-15 富士写真フイルム株式会社 基板搬送装置及び方法
JP2003332727A (ja) * 2002-05-15 2003-11-21 Sony Corp 熱遮蔽部分材及びリフロー装置

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