JP2006228942A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2006228942A JP2006228942A JP2005040499A JP2005040499A JP2006228942A JP 2006228942 A JP2006228942 A JP 2006228942A JP 2005040499 A JP2005040499 A JP 2005040499A JP 2005040499 A JP2005040499 A JP 2005040499A JP 2006228942 A JP2006228942 A JP 2006228942A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 87
- 239000000758 substrate Substances 0.000 claims abstract description 63
- 239000012535 impurity Substances 0.000 claims description 3
- 230000007257 malfunction Effects 0.000 abstract description 2
- 230000003071 parasitic effect Effects 0.000 description 13
- 238000000034 method Methods 0.000 description 4
- 230000001902 propagating effect Effects 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823878—Complementary field-effect transistors, e.g. CMOS isolation region manufacturing related aspects, e.g. to avoid interaction of isolation region with adjacent structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/761—PN junctions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823892—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the wells or tubs, e.g. twin tubs, high energy well implants, buried implanted layers for lateral isolation [BILLI]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
- H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
- H01L27/0928—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors comprising both N- and P- wells in the substrate, e.g. twin-tub
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Integrated Circuits (AREA)
- Element Separation (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
【解決手段】 N型ディープウェルの面積を小さくする。例えば本発明は、第1導電型である半導体基板と、前記半導体基板に設けられたデジタル回路部およびアナログ回路部と、前記アナログ回路部もしくは前記デジタル回路部の一方に形成された前記第1導電型の複数のウェルと、前記第1導電型と逆の第2導電型であり、前記複数のウェルのうち一部のウェルを前記半導体基板から分離する第1深ウェルと、を有することを特徴とする半導体装置である。
【選択図】 図1
Description
本発明の第1の実施の形態について、図1および図2を参照して説明する。図1は、本実施の形態に係る半導体装置100の模式平面図である。図2は、図1のA−A断面図である。
本発明の第2の実施の形態を、図4および図5を参照して説明する。図4は、本実施の形態に係る半導体装置100の模式平面図である。図5は、図4のB−B断面図である。
10 アナログ回路部
11 PLL回路
20 デジタル回路部
30,31 N型ディープウェル
4 P型ウェル
5 N型ウェル
60,70,80 電源
100 半導体装置
Claims (11)
- 第1導電型である半導体基板と、
前記半導体基板に設けられたデジタル回路部およびアナログ回路部と、
前記アナログ回路部もしくは前記デジタル回路部の一方に形成された前記第1導電型の複数のウェルと、
前記第1導電型と逆の第2導電型であり、前記複数のウェルのうち一部のウェルを前記半導体基板から分離する第1深ウェルと、
を有すること、
を特徴とする半導体装置。 - 前記第1深ウェルの面積が300000μm2より小さいことを特徴とする請求項1に記載の半導体装置。
- 前記第1深ウェルの面積が1000μm2より小さいことを特徴とする請求項1に記載の半導体装置。
- 前記複数のウェルのうち、前記一部のウェル以外のウェルを前記基板から分離し、前記第1深ウェルから分離独立した第2深ウェルをさらに有すること、
を特徴とする請求項1ないし請求項3のいずれか一に記載の半導体装置。 - 前記第1深ウェルにより前記半導体基板から分離されるウェルに接続される電源と、その他のウェルに接続される電源とが分離されていること、
を特徴とする請求項1ないし請求項4のいずれか一に記載の半導体装置。 - 第1導電型である半導体基板と、
前記半導体基板に設けられたデジタル回路部およびアナログ回路部と、
前記アナログ回路部もしくは前記デジタル回路部の一方に、前記第1導電型と逆の第2導電型を有し、互いに分離独立して形成された複数の深ウェルと、
を有すること、
を特徴とする半導体装置。 - 前記複数の深ウェルの各々により、前記半導体基板から分離される複数の回路領域を有し、
前記複数の回路領域の各々に接続される電源が互いに分離されていること、
を特徴とする請求項6に記載の半導体装置。 - 前記複数の深ウェルの各々の面積が300000μm2より小さいことを特徴とする請求項6もしくは請求項7に記載の半導体装置。
- 前記複数の深ウェルの各々の面積が1000μm2より小さいことを特徴とする請求項6ないし請求項8のいずれか一に記載の半導体装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005040499A JP2006228942A (ja) | 2005-02-17 | 2005-02-17 | 半導体装置 |
US11/338,641 US7554158B2 (en) | 2005-02-17 | 2006-01-25 | Semiconductor device having analog and digital circuits |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005040499A JP2006228942A (ja) | 2005-02-17 | 2005-02-17 | 半導体装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2006228942A true JP2006228942A (ja) | 2006-08-31 |
Family
ID=36814816
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005040499A Pending JP2006228942A (ja) | 2005-02-17 | 2005-02-17 | 半導体装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7554158B2 (ja) |
JP (1) | JP2006228942A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009119799A1 (ja) * | 2008-03-28 | 2009-10-01 | 日本電気株式会社 | ループ素子及びノイズ解析装置 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102117803B (zh) * | 2009-12-31 | 2014-10-08 | 无锡中星微电子有限公司 | 一种具有高静电释放性能的芯片 |
JP2018050218A (ja) | 2016-09-23 | 2018-03-29 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003152098A (ja) * | 2001-09-06 | 2003-05-23 | Programmable Silicon Solutions | 無線周波数用集積回路 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2953213B2 (ja) | 1992-08-22 | 1999-09-27 | 日本電気株式会社 | Cmos集積回路 |
JP3251735B2 (ja) | 1992-09-25 | 2002-01-28 | 株式会社東芝 | 半導体集積回路装置 |
JPH08115985A (ja) * | 1994-10-17 | 1996-05-07 | Nec Corp | 低雑音の半導体集積回路 |
JP2004111722A (ja) * | 2002-09-19 | 2004-04-08 | Toshiba Corp | 半導体装置 |
JP3713013B2 (ja) * | 2002-12-06 | 2005-11-02 | 松下電器産業株式会社 | 半導体集積回路装置の製造方法 |
US7176530B1 (en) * | 2004-03-17 | 2007-02-13 | National Semiconductor Corporation | Configuration and fabrication of semiconductor structure having n-channel channel-junction field-effect transistor |
-
2005
- 2005-02-17 JP JP2005040499A patent/JP2006228942A/ja active Pending
-
2006
- 2006-01-25 US US11/338,641 patent/US7554158B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003152098A (ja) * | 2001-09-06 | 2003-05-23 | Programmable Silicon Solutions | 無線周波数用集積回路 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009119799A1 (ja) * | 2008-03-28 | 2009-10-01 | 日本電気株式会社 | ループ素子及びノイズ解析装置 |
US8704531B2 (en) | 2008-03-28 | 2014-04-22 | Nec Corporation | Loop element and noise analyzer |
Also Published As
Publication number | Publication date |
---|---|
US7554158B2 (en) | 2009-06-30 |
US20060180871A1 (en) | 2006-08-17 |
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