JP2006221730A - 磁気ヘッドの製造方法 - Google Patents
磁気ヘッドの製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 239000010410 layer Substances 0.000 claims abstract description 508
- 238000000034 method Methods 0.000 claims abstract description 40
- 239000000956 alloy Substances 0.000 claims abstract description 13
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 13
- 229910052703 rhodium Inorganic materials 0.000 claims abstract description 12
- 239000002344 surface layer Substances 0.000 claims abstract description 12
- 239000011810 insulating material Substances 0.000 claims description 32
- 238000007747 plating Methods 0.000 claims description 20
- 238000004544 sputter deposition Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 4
- 238000005530 etching Methods 0.000 abstract description 23
- 238000007254 oxidation reaction Methods 0.000 abstract description 3
- 230000001681 protective effect Effects 0.000 description 15
- 238000010586 diagram Methods 0.000 description 14
- 239000010408 film Substances 0.000 description 11
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 6
- 239000004020 conductor Substances 0.000 description 6
- 230000001939 inductive effect Effects 0.000 description 5
- 239000011241 protective layer Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 238000004080 punching Methods 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49027—Mounting preformed head/core onto other structure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49037—Using reference point/surface to facilitate measuring
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49041—Fabricating head structure or component thereof including measuring or testing with significant slider/housing shaping or treating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49044—Plural magnetic deposition layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
- Y10T29/49052—Machining magnetic material [e.g., grinding, etching, polishing] by etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49073—Electromagnet, transformer or inductor by assembling coil and core
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
- Hall/Mr Elements (AREA)
Abstract
【解決手段】 コンタクト層36上に、少なくとも表面層がAu,Ru,Rhから選ばれる一種または二種以上の合金で形成されたコイル下地層47を形成する。これにより前記コイル下地層47の表面は大気暴露等によっても酸化せず、当然、前記コンタクト層36が酸化されることもない。このように前記コンタクト層36を前記コイル下地層47によって適切に保護することで、従来のように、前記酸化層を除去するエッチング工程が必要ないから、ギャップ層が前記エッチングによって削られることなく、前記ギャップ層の膜厚制御等を従来よりも向上させることができる。
【選択図】 図13
Description
記録媒体との対向面で、膜厚方向に、ギャップ層を介して対向する第1の磁性層と第2の磁性層と、前記第1の磁性層と第2の磁性層に記録磁界を与えるためのコイル層と、を有し、
(a) 前記第1の磁性層上に前記ギャップ層を介して形成される導電性のコイル下地層を、前記第1の磁性層の周囲を埋める絶縁材料層上から露出する導電性のコンタクト層上にも形成し、このとき前記コイル下地層の少なくとも表面層をAu,Ru,Rhから選ばれる一種または二種以上の合金で形成する工程と、
(b) 前記コイル下地層の所定域上にコイル層を形成する工程と、
(c) 前記コイル層をコイル絶縁層で覆う工程と、
(d) 前記コイル絶縁層よりも前記対向面側で露出している前記ギャップ層上から前記コイル絶縁層上にかけて導電性の下地層をスパッタ成膜し、前記下地層上に前記第2の磁性層をメッキ形成する工程と、
(e) 前記コンタクト層上に残された前記コイル下地層上に導電層をメッキ形成する工程と、を有することを特徴とするものである。
前記(b)工程で形成される前記コイル層を、前記第1の磁性層と第2の磁性層との間に設けられる上側コイル層として形成することが好ましい。
36 記録側コンタクト層
37 再生側コンタクト層
39 主磁極層
41 補助ヨーク層
42 ギャップ層
43 Gd決め層
44、46、49 保護レジスト層
45 絶縁下地層
47 上側コイル片下地層
48 上側コイル片
50 コイル絶縁層
51 リターンヨーク下地層
52 リターンヨーク層
53 第4持上げ層(導電層)
54 第5持上げ層(導電層)
55、56 バンプ
57、58 パッド部
59 保護層
Claims (5)
- 記録媒体との対向面で、膜厚方向に、ギャップ層を介して対向する第1の磁性層と第2の磁性層と、前記第1の磁性層と第2の磁性層に記録磁界を与えるためのコイル層と、を有し、
(a) 前記第1の磁性層上に前記ギャップ層を介して形成される導電性のコイル下地層を、前記第1の磁性層の周囲を埋める絶縁材料層上から露出する導電性のコンタクト層上にも形成し、このとき前記コイル下地層の少なくとも表面層をAu,Ru,Rhから選ばれる一種または二種以上の合金で形成する工程と、
(b) 前記コイル下地層の所定域上にコイル層を形成する工程と、
(c) 前記コイル層をコイル絶縁層で覆う工程と、
(d) 前記コイル絶縁層よりも前記対向面側で露出している前記ギャップ層上から前記コイル絶縁層上にかけて導電性の下地層をスパッタ成膜し、前記下地層上に前記第2の磁性層をメッキ形成する工程と、
(e) 前記コンタクト層上に残された前記コイル下地層上に導電層をメッキ形成する工程と、を有することを特徴とする磁気ヘッドの製造方法。 - 前記(b)工程時、前記コイル層を形成した後、前記コンタクト層上に形成された前記コイル下地層を保護した状態で、前記コイル層に覆われていない前記コイル下地層を除去する請求項1記載の磁気ヘッドの製造方法。
- 前記(a)工程よりも前に、前記第1の磁性層の下側に、下側コイル層を形成する工程、前記下側コイル層の所定部位上に前記コンタクト層を形成する工程、及び前記コンタクト層を前記絶縁材料層上から露出させる工程を含み、
前記(b)工程で形成される前記コイル層を、前記第1の磁性層と第2の磁性層との間に設けられる上側コイル層として形成する請求項1または2に記載の磁気ヘッドの製造方法。 - 前記(e)工程での前記導電層を前記第2の磁性層と同じ材質で形成し、前記(d)工程の第2の磁性層の形成と、前記(e)工程の導電層の形成とを同時に行なう請求項1ないし3のいずれかに記載の磁気ヘッドの製造方法。
- 前記(a)工程よりも前に、磁気検出素子とシールド層とを有する再生用ヘッド部を前記第1の磁性層よりも下側に形成する工程、前記磁気検出素子に電流を供給するための電極層上に前記コンタクト層を形成する工程、及び前記コンタクト層を前記絶縁材料層上から露出させる工程を含む請求項1ないし4のいずれかに記載の磁気ヘッドの製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2005033864A JP4190507B2 (ja) | 2005-02-10 | 2005-02-10 | 磁気ヘッドの製造方法 |
US11/345,112 US7249407B2 (en) | 2005-02-10 | 2006-02-01 | Method of manufacturing magnetic head |
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Application Number | Priority Date | Filing Date | Title |
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JP2005033864A JP4190507B2 (ja) | 2005-02-10 | 2005-02-10 | 磁気ヘッドの製造方法 |
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JP2006221730A true JP2006221730A (ja) | 2006-08-24 |
JP4190507B2 JP4190507B2 (ja) | 2008-12-03 |
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JP2005033864A Expired - Fee Related JP4190507B2 (ja) | 2005-02-10 | 2005-02-10 | 磁気ヘッドの製造方法 |
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US (1) | US7249407B2 (ja) |
JP (1) | JP4190507B2 (ja) |
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Publication number | Priority date | Publication date | Assignee | Title |
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US8449752B2 (en) * | 2009-09-30 | 2013-05-28 | HGST Netherlands B.V. | Trailing plated step |
US8724258B2 (en) * | 2009-09-30 | 2014-05-13 | HGST Netherlands B.V. | Slanted bump design for magnetic shields in perpendicular write heads and method of making same |
US20110075299A1 (en) * | 2009-09-30 | 2011-03-31 | Olson Trevor W | Magnetic write heads for hard disk drives and method of forming same |
US8233235B2 (en) * | 2009-12-09 | 2012-07-31 | Hitachi Global Storage Technologies Netherlands B.V. | PMR writer having a tapered write pole and bump layer and method of fabrication |
US8310787B1 (en) * | 2011-09-27 | 2012-11-13 | Headway Technologies, Inc. | Thin-film magnetic head, method of manufacturing the same, head gimbal assembly, and hard disk drive |
US8947828B1 (en) * | 2014-03-18 | 2015-02-03 | HGST Netherlands B.V. | Magnetic head having a double bump wrap around shield |
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JPS6320079A (ja) * | 1986-07-11 | 1988-01-27 | ヤンマー農機株式会社 | 穀粒などの粒状体の感知センサ−装置 |
JP2000322709A (ja) | 1999-05-13 | 2000-11-24 | Alps Electric Co Ltd | 薄膜素子およびその製造方法 |
JP3747135B2 (ja) * | 1999-08-06 | 2006-02-22 | アルプス電気株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
JP3569513B2 (ja) | 2002-03-01 | 2004-09-22 | アルプス電気株式会社 | 薄膜磁気ヘッド及びその製造方法 |
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2005
- 2005-02-10 JP JP2005033864A patent/JP4190507B2/ja not_active Expired - Fee Related
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- 2006-02-01 US US11/345,112 patent/US7249407B2/en not_active Expired - Fee Related
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JP4190507B2 (ja) | 2008-12-03 |
US7249407B2 (en) | 2007-07-31 |
US20060174471A1 (en) | 2006-08-10 |
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