JP4190507B2 - 磁気ヘッドの製造方法 - Google Patents
磁気ヘッドの製造方法 Download PDFInfo
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- JP4190507B2 JP4190507B2 JP2005033864A JP2005033864A JP4190507B2 JP 4190507 B2 JP4190507 B2 JP 4190507B2 JP 2005033864 A JP2005033864 A JP 2005033864A JP 2005033864 A JP2005033864 A JP 2005033864A JP 4190507 B2 JP4190507 B2 JP 4190507B2
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49027—Mounting preformed head/core onto other structure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49037—Using reference point/surface to facilitate measuring
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49041—Fabricating head structure or component thereof including measuring or testing with significant slider/housing shaping or treating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49044—Plural magnetic deposition layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
- Y10T29/49052—Machining magnetic material [e.g., grinding, etching, polishing] by etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49073—Electromagnet, transformer or inductor by assembling coil and core
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
- Hall/Mr Elements (AREA)
Description
記録媒体との対向面で、膜厚方向に、ギャップ層を介して対向する第1の磁性層と第2の磁性層と、前記第1の磁性層と第2の磁性層に記録磁界を与えるためのコイル層と、を有し、
絶縁材料層上及び導電性のコンタクト層上を平坦化処理し、前記絶縁材料層の表面から前記コンタクト層の上面を露出させる工程と、
前記絶縁材料層上に前記第1の磁性層を形成する工程と、
前記第1の磁性層上に前記ギャップ層を形成する工程と、
前記ギャップ層のコイル形成領域上に絶縁下地層を形成し、露出している前記対向面側の前記ギャップ層上を第1保護レジストで覆った状態で、前記コンタクト層の上面をエッチングにてクリーニング処理し、前記コンタクト層の上面に形成された酸化層を除去する工程と、
前記絶縁下地層上及び前記絶縁材料層上から前記コンタクト層上にかけて、導電性のコイル下地層を形成し、このとき前記コイル下地層の少なくとも表面層をAu,Ru,Rhから選ばれる一種または二種以上の合金で形成する工程と、
前記コイル下地層の所定域上にコイル層を形成する工程と、
前記コンタクト層上の前記コイル下地層上を第2保護レジストで覆い、前記第2保護レジストで覆われていない前記コイル下地層をエッチングにて除去する工程と、
前記第1保護レジスト及び前記第2保護レジストを除去する工程と、
前記コイル層をコイル絶縁層で覆う工程と、
前記コイル絶縁層よりも前記対向面側で露出している前記ギャップ層上から前記コイル絶縁層上にかけて導電性の下地層をスパッタ成膜し、前記下地層上に前記第2の磁性層をメッキ形成し、このとき、前記コンタクト層上に残された前記コイル下地層上に導電層を前記第2の磁性層と同じ材質で前記第2の磁性層の形成と同時に行なう工程と、を有することを特徴とするものである。
前記第1の磁性層よりも上側に形成される前記コイル層を、前記第1の磁性層と第2の磁性層との間に設けられる上側コイル層として形成することが好ましい。
36 記録側コンタクト層
37 再生側コンタクト層
39 主磁極層
41 補助ヨーク層
42 ギャップ層
43 Gd決め層
44、46、49 保護レジスト層
45 絶縁下地層
47 上側コイル片下地層
48 上側コイル片
50 コイル絶縁層
51 リターンヨーク下地層
52 リターンヨーク層
53 第4持上げ層(導電層)
54 第5持上げ層(導電層)
55、56 バンプ
57、58 パッド部
59 保護層
Claims (3)
- 記録媒体との対向面で、膜厚方向に、ギャップ層を介して対向する第1の磁性層と第2の磁性層と、前記第1の磁性層と第2の磁性層に記録磁界を与えるためのコイル層と、を有し、
絶縁材料層上及び導電性のコンタクト層上を平坦化処理し、前記絶縁材料層の表面から前記コンタクト層の上面を露出させる工程と、
前記絶縁材料層上に前記第1の磁性層を形成する工程と、
前記第1の磁性層上に前記ギャップ層を形成する工程と、
前記ギャップ層のコイル形成領域上に絶縁下地層を形成し、露出している前記対向面側の前記ギャップ層上を第1保護レジストで覆った状態で、前記コンタクト層の上面をエッチングにてクリーニング処理し、前記コンタクト層の上面に形成された酸化層を除去する工程と、
前記絶縁下地層上及び前記絶縁材料層上から前記コンタクト層上にかけて、導電性のコイル下地層を形成し、このとき前記コイル下地層の少なくとも表面層をAu,Ru,Rhから選ばれる一種または二種以上の合金で形成する工程と、
前記コイル下地層の所定域上にコイル層を形成する工程と、
前記コンタクト層上の前記コイル下地層上を第2保護レジストで覆い、前記第2保護レジストで覆われていない前記コイル下地層をエッチングにて除去する工程と、
前記第1保護レジスト及び前記第2保護レジストを除去する工程と、
前記コイル層をコイル絶縁層で覆う工程と、
前記コイル絶縁層よりも前記対向面側で露出している前記ギャップ層上から前記コイル絶縁層上にかけて導電性の下地層をスパッタ成膜し、前記下地層上に前記第2の磁性層をメッキ形成し、このとき、前記コンタクト層上に残された前記コイル下地層上に導電層を前記第2の磁性層と同じ材質で前記第2の磁性層の形成と同時に行なう工程と、を有することを特徴とする磁気ヘッドの製造方法。 - 前記絶縁材料層内に、下側コイル層を形成する工程、前記下側コイル層の所定部位上に前記コンタクト層を形成する工程、を含み、
前記第1の磁性層よりも上側に形成される前記コイル層を、前記第1の磁性層と第2の磁性層との間に設けられる上側コイル層として形成する請求項1記載の磁気ヘッドの製造方法。 - 磁気検出素子とシールド層とを有する再生用ヘッド部を前記第1の磁性層よりも下側に形成する工程、前記磁気検出素子に電流を供給するための電極層上に前記コンタクト層を形成する工程、及び前記コンタクト層を前記絶縁材料層上から露出させる工程を含む請求項1又は2に記載の磁気ヘッドの製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005033864A JP4190507B2 (ja) | 2005-02-10 | 2005-02-10 | 磁気ヘッドの製造方法 |
US11/345,112 US7249407B2 (en) | 2005-02-10 | 2006-02-01 | Method of manufacturing magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005033864A JP4190507B2 (ja) | 2005-02-10 | 2005-02-10 | 磁気ヘッドの製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2006221730A JP2006221730A (ja) | 2006-08-24 |
JP4190507B2 true JP4190507B2 (ja) | 2008-12-03 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2005033864A Expired - Fee Related JP4190507B2 (ja) | 2005-02-10 | 2005-02-10 | 磁気ヘッドの製造方法 |
Country Status (2)
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US (1) | US7249407B2 (ja) |
JP (1) | JP4190507B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110075299A1 (en) * | 2009-09-30 | 2011-03-31 | Olson Trevor W | Magnetic write heads for hard disk drives and method of forming same |
US8724258B2 (en) * | 2009-09-30 | 2014-05-13 | HGST Netherlands B.V. | Slanted bump design for magnetic shields in perpendicular write heads and method of making same |
US8449752B2 (en) * | 2009-09-30 | 2013-05-28 | HGST Netherlands B.V. | Trailing plated step |
US8233235B2 (en) * | 2009-12-09 | 2012-07-31 | Hitachi Global Storage Technologies Netherlands B.V. | PMR writer having a tapered write pole and bump layer and method of fabrication |
US8310787B1 (en) * | 2011-09-27 | 2012-11-13 | Headway Technologies, Inc. | Thin-film magnetic head, method of manufacturing the same, head gimbal assembly, and hard disk drive |
US8947828B1 (en) * | 2014-03-18 | 2015-02-03 | HGST Netherlands B.V. | Magnetic head having a double bump wrap around shield |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS6320079A (ja) * | 1986-07-11 | 1988-01-27 | ヤンマー農機株式会社 | 穀粒などの粒状体の感知センサ−装置 |
JP2000322709A (ja) | 1999-05-13 | 2000-11-24 | Alps Electric Co Ltd | 薄膜素子およびその製造方法 |
JP3747135B2 (ja) * | 1999-08-06 | 2006-02-22 | アルプス電気株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
JP3569513B2 (ja) | 2002-03-01 | 2004-09-22 | アルプス電気株式会社 | 薄膜磁気ヘッド及びその製造方法 |
-
2005
- 2005-02-10 JP JP2005033864A patent/JP4190507B2/ja not_active Expired - Fee Related
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2006
- 2006-02-01 US US11/345,112 patent/US7249407B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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US7249407B2 (en) | 2007-07-31 |
US20060174471A1 (en) | 2006-08-10 |
JP2006221730A (ja) | 2006-08-24 |
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