JP2006207781A - 弁装置 - Google Patents
弁装置 Download PDFInfo
- Publication number
- JP2006207781A JP2006207781A JP2005024278A JP2005024278A JP2006207781A JP 2006207781 A JP2006207781 A JP 2006207781A JP 2005024278 A JP2005024278 A JP 2005024278A JP 2005024278 A JP2005024278 A JP 2005024278A JP 2006207781 A JP2006207781 A JP 2006207781A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- magnet
- valve body
- drive
- valve device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
- F16K31/08—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid using a permanent magnet
- F16K31/086—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid using a permanent magnet the magnet being movable and actuating a second magnet connected to the closing element
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/36—Valve members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7837—Direct response valves [i.e., check valve type]
- Y10T137/7876—With external means for opposing bias
- Y10T137/7877—With means for retaining external means in bias opposing position
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetically Actuated Valves (AREA)
- Details Of Reciprocating Pumps (AREA)
Abstract
【解決手段】 弁ブロック11に形成された弁収容室14内には、流入孔12と流出孔13とを連通させる連通開口部15を開閉する弁体21が設けられ、弁体21には弁磁石22が設けられている。空気圧シリンダ24によって駆動用磁石32が弁体21に接近離反移動自在となっており、駆動用磁石32を弁体21に接近させると弁体21は連通開口部15を閉じる閉位置に移動する。駆動用磁石32を弁体21から離反させると弁体21はこれに設けられた弁磁石22が磁性体33に吸引されて開位置を保持する。
【選択図】 図1
Description
11 弁ブロック
12 流入孔
13 流出孔
14 弁収容室
15 連通開口部
16 弁座面
17,18 ジョイント部
19 取付孔
20 隔壁カバー
21 弁体
22 弁磁石
23 磁石収容体
24 空気圧シリンダ
25 ピストンロッド
26 ピストン
27 後退用圧力室
28 カバー
29 ばね収容室
30 コイルばね
31 空気圧ポート
32 駆動用磁石
33 磁性体
34 本体部
35 接触部
36 突起部
38 薬液供給装置
39 可撓性チューブ
40 ポンプ室
41 薬液貯留槽
42 薬液ノズル
43 薬液ポンプ
44 薬液吸引路
45 薬液吐出路
46,47 弁装置
53,54 固定端部
55 弾性変形部
56 ベローズ
57,58 固定ディスク
59 大径ベローズ部
60 小径ベローズ部
61 作動ディスク
62 非圧縮性媒体
67 磁石弁
68 磁石収容体
69 本体部
70 接触部
71 止め付け部
72 弾性支持片
73 弁ブロック
74 第1ブロック
75 第2ブロック
Claims (6)
- 流体の流入孔と流出孔とを連通させる連通開口部を有する弁収容室が形成される弁ブロックと、
前記弁収容室に組み込まれ、前記連通開口部を閉じる閉位置と開く開位置とに移動するとともに弁磁石が設けられた弁体と、
前記弁磁石に駆動用磁石を接近させて前記弁体を前記開位置と前記閉位置との一方に駆動する接近位置、および前記駆動用磁石を前記弁磁石から離反させる離反位置に移動させる駆動手段と、
前記弁ブロックに設けられ、前記駆動用磁石が離反位置となったときに前記弁磁石を引き寄せて前記弁体を前記開位置と前記閉位置の他方に駆動する磁性体とを有することを特徴とする弁装置。 - 請求項1記載の弁装置において、前記駆動用磁石が前記弁磁石に接近したときに前記弁磁石を反発させて前記弁体を前記閉位置に駆動し、前記駆動用磁石が前記弁磁石から離反したときに前記弁磁石が前記磁性体に接近して前記弁体を開位置に駆動することを特徴とする弁装置。
- 請求項1または2記載の弁装置において、前記弁体は前記弁磁石が封入される樹脂製の磁石収容体を有し、前記弁体が開閉動作する際に前記弁体室の内周面に接触する複数の突起を前記磁石収容体の外周面に設けることを特徴とする弁装置。
- 請求項1または2記載の弁装置において、前記弁体は前記弁磁石が封入される樹脂製の磁石収容体と、前記弁ブロックに固定される止め付け部とを有し、前記磁石収容体と前記止め付け部とを複数の弾性支持片により連結し、前記磁石収容体と前記止め付け部との間に流体の通路を形成することを特徴とする弁装置。
- 請求項1〜4のいずれか1項に記載の弁装置において、前記駆動手段は先端部に前記駆動用磁石が設けられたピストンを往復動自在に駆動する空気圧シリンダであることを特徴とする弁装置。
- 請求項1〜5のいずれか1項に記載の弁装置において、ポンプ室内の容積を増減させることにより薬液貯留槽内の薬液を吸引し薬液ノズルに吐出する薬液ポンプに接続される流入側流路及び流出側流路のうち少なくともいずれか一方に装着することを特徴とする弁装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005024278A JP4422040B2 (ja) | 2005-01-31 | 2005-01-31 | 弁装置 |
US11/340,922 US7320456B2 (en) | 2005-01-31 | 2006-01-27 | Valve device |
KR1020060009211A KR100780466B1 (ko) | 2005-01-31 | 2006-01-31 | 밸브 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005024278A JP4422040B2 (ja) | 2005-01-31 | 2005-01-31 | 弁装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006207781A true JP2006207781A (ja) | 2006-08-10 |
JP4422040B2 JP4422040B2 (ja) | 2010-02-24 |
Family
ID=36755540
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005024278A Expired - Fee Related JP4422040B2 (ja) | 2005-01-31 | 2005-01-31 | 弁装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7320456B2 (ja) |
JP (1) | JP4422040B2 (ja) |
KR (1) | KR100780466B1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008303808A (ja) * | 2007-06-08 | 2008-12-18 | Nippon Pillar Packing Co Ltd | 液体ポンプシステム |
JP2009209736A (ja) * | 2008-03-03 | 2009-09-17 | Nippon Pillar Packing Co Ltd | 液体ポンプシステム |
JP2011027112A (ja) * | 2010-09-08 | 2011-02-10 | Nippon Pillar Packing Co Ltd | 液体ポンプシステム |
JP2012522942A (ja) * | 2009-04-01 | 2012-09-27 | フォッケ・ウント・コンパニー(ゲゼルシャフト・ミト・べシュレンクテル・ハフツング・ウント・コンパニー・コマンデイトゲゼルシャフト) | 接着剤バルブ |
JP2017002939A (ja) * | 2015-06-05 | 2017-01-05 | Ckd株式会社 | 流体制御弁 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007029064A1 (de) * | 2007-06-21 | 2008-12-24 | Focke & Co.(Gmbh & Co. Kg) | Ventil, insbesondere Leimventil |
US8224481B2 (en) * | 2009-01-19 | 2012-07-17 | Access Business Group International Llc | Method and apparatus for dispensing fluid compositions |
US8850872B2 (en) | 2009-05-08 | 2014-10-07 | Opw Fuel Management Systems, Inc. | Line leak detector and method of using same |
KR101274113B1 (ko) * | 2009-09-01 | 2013-06-13 | 한국전자통신연구원 | 금속볼을 이용한 자기력 마이크로밸브 및 그 제조방법 |
US8500087B2 (en) * | 2010-11-16 | 2013-08-06 | Chi-Han Cheng | Magnetic control valve |
CN104583655A (zh) * | 2012-07-09 | 2015-04-29 | 诺格伦公司 | 电磁体辅助的压力致动阀 |
US20170122456A1 (en) * | 2014-01-09 | 2017-05-04 | Hans-Jörgen Beyer | Valve comprising a variable flow opening |
EP3292332B1 (en) * | 2015-05-02 | 2021-03-10 | Aerojet Rocketdyne, Inc. | Magnetic latch valve |
IT201800004433A1 (it) * | 2018-04-12 | 2019-10-12 | Dispositivo antiallagamento di sicurezza per una macchina di lavaggio, del tipo che comprende magneti girevoli | |
JP7232344B2 (ja) * | 2019-09-17 | 2023-03-02 | トリニティ工業株式会社 | バルブモジュール、バルブ装置、バルブシステム |
KR20220013736A (ko) * | 2020-07-27 | 2022-02-04 | 주성엔지니어링(주) | 기판처리장치용 블록밸브 및 기판처리장치 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4792113A (en) * | 1982-07-16 | 1988-12-20 | Integrated Flow Systems, Inc. | Fluid flow control valve |
US4705070A (en) | 1986-02-04 | 1987-11-10 | Eidsmore Paul G | Isolation on/off valve |
US5445184A (en) * | 1994-09-26 | 1995-08-29 | Racine; Raymond P. | Magnetic valve reset mechanism |
JPH08285125A (ja) | 1995-04-12 | 1996-11-01 | Koganei Corp | 弁装置および弁装置を有する薬液供給装置 |
US6164322A (en) * | 1999-01-15 | 2000-12-26 | Saturn Electronic & Engineering, Inc. | Pressure relief latching solenoid valve |
JP3853641B2 (ja) | 2001-11-15 | 2006-12-06 | 株式会社コガネイ | 薬液供給装置およびその製造方法 |
-
2005
- 2005-01-31 JP JP2005024278A patent/JP4422040B2/ja not_active Expired - Fee Related
-
2006
- 2006-01-27 US US11/340,922 patent/US7320456B2/en not_active Expired - Fee Related
- 2006-01-31 KR KR1020060009211A patent/KR100780466B1/ko not_active IP Right Cessation
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008303808A (ja) * | 2007-06-08 | 2008-12-18 | Nippon Pillar Packing Co Ltd | 液体ポンプシステム |
JP4610582B2 (ja) * | 2007-06-08 | 2011-01-12 | 日本ピラー工業株式会社 | 液体ポンプシステム |
JP2009209736A (ja) * | 2008-03-03 | 2009-09-17 | Nippon Pillar Packing Co Ltd | 液体ポンプシステム |
JP4701257B2 (ja) * | 2008-03-03 | 2011-06-15 | 日本ピラー工業株式会社 | 液体ポンプシステム |
JP2012522942A (ja) * | 2009-04-01 | 2012-09-27 | フォッケ・ウント・コンパニー(ゲゼルシャフト・ミト・べシュレンクテル・ハフツング・ウント・コンパニー・コマンデイトゲゼルシャフト) | 接着剤バルブ |
US8833732B2 (en) | 2009-04-01 | 2014-09-16 | Focke & Co. (Gmbh & Co. Kg) | Glue valve |
JP2011027112A (ja) * | 2010-09-08 | 2011-02-10 | Nippon Pillar Packing Co Ltd | 液体ポンプシステム |
JP2017002939A (ja) * | 2015-06-05 | 2017-01-05 | Ckd株式会社 | 流体制御弁 |
Also Published As
Publication number | Publication date |
---|---|
KR100780466B1 (ko) | 2007-11-28 |
JP4422040B2 (ja) | 2010-02-24 |
KR20060088065A (ko) | 2006-08-03 |
US7320456B2 (en) | 2008-01-22 |
US20060169935A1 (en) | 2006-08-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4422040B2 (ja) | 弁装置 | |
JP4566955B2 (ja) | 薬液供給装置および薬液供給方法 | |
JP2008101510A (ja) | 薬液供給装置 | |
JP6212463B2 (ja) | 小型電磁弁 | |
KR100842154B1 (ko) | 약액 공급 장치 | |
JP5114527B2 (ja) | 液体供給装置 | |
JPH08285125A (ja) | 弁装置および弁装置を有する薬液供給装置 | |
JP2020002881A (ja) | 液体供給装置および液体供給方法 | |
JP2011085087A (ja) | 往復動ポンプ及び逆止弁 | |
JP3619616B2 (ja) | 薬液供給装置の駆動方法 | |
US11090673B2 (en) | Fluid discharge mechanism and spray device for fluid | |
JP2016054273A (ja) | ソレノイド及びソレノイドバルブ | |
JP4563086B2 (ja) | 流体制御弁 | |
JP2007330702A (ja) | 搾乳器 | |
JP5902063B2 (ja) | 液体供給制御弁 | |
JP4406556B2 (ja) | 電磁式ポンプ | |
JP2010077912A (ja) | ポンプ | |
JP4566989B2 (ja) | 薬液供給装置 | |
JP2007278171A (ja) | ソレノイドおよび電磁式ポンプ | |
JP2019105350A (ja) | バルブ装置 | |
JP2005315326A (ja) | 小型電磁弁 | |
JP5438611B2 (ja) | 薬液供給装置 | |
JP4276757B2 (ja) | 液体吐出ポンプ | |
JPH0610831A (ja) | ソレノイドポンプ | |
JP2007239896A (ja) | ダイヤフラム弁 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070306 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090401 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090414 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090604 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090630 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090807 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20091117 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20091203 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121211 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121211 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131211 Year of fee payment: 4 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |