JP2006201476A5 - - Google Patents
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- Publication number
- JP2006201476A5 JP2006201476A5 JP2005013033A JP2005013033A JP2006201476A5 JP 2006201476 A5 JP2006201476 A5 JP 2006201476A5 JP 2005013033 A JP2005013033 A JP 2005013033A JP 2005013033 A JP2005013033 A JP 2005013033A JP 2006201476 A5 JP2006201476 A5 JP 2006201476A5
- Authority
- JP
- Japan
- Prior art keywords
- light source
- exposure apparatus
- exposure
- image
- optical element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 7
- 238000005259 measurement Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005013033A JP4587170B2 (ja) | 2005-01-20 | 2005-01-20 | 露光装置及びデバイスの製造方法 |
| TW095101065A TWI342985B (en) | 2005-01-20 | 2006-01-11 | Exposure apparatus and device manufacturing method |
| KR1020060005146A KR100724637B1 (ko) | 2005-01-20 | 2006-01-18 | 노광장치 및 디바이스의 제조방법 |
| US11/336,754 US8035668B2 (en) | 2005-01-20 | 2006-01-19 | Exposure apparatus and device manufacturing method |
| CN2006100064047A CN1808282B (zh) | 2005-01-20 | 2006-01-20 | 曝光设备及器件制造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005013033A JP4587170B2 (ja) | 2005-01-20 | 2005-01-20 | 露光装置及びデバイスの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006201476A JP2006201476A (ja) | 2006-08-03 |
| JP2006201476A5 true JP2006201476A5 (enExample) | 2008-03-06 |
| JP4587170B2 JP4587170B2 (ja) | 2010-11-24 |
Family
ID=36683423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005013033A Expired - Fee Related JP4587170B2 (ja) | 2005-01-20 | 2005-01-20 | 露光装置及びデバイスの製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8035668B2 (enExample) |
| JP (1) | JP4587170B2 (enExample) |
| KR (1) | KR100724637B1 (enExample) |
| CN (1) | CN1808282B (enExample) |
| TW (1) | TWI342985B (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7802910B2 (en) * | 2008-01-29 | 2010-09-28 | Dymax Corporation | Light guide exposure device |
| JP5131129B2 (ja) * | 2008-09-30 | 2013-01-30 | ウシオ電機株式会社 | 光源ユニット及び該光源ユニットを具備した露光装置 |
| JP5345443B2 (ja) * | 2009-04-21 | 2013-11-20 | 株式会社日立ハイテクノロジーズ | 露光装置、露光光照射方法、及び表示用パネル基板の製造方法 |
| KR20120056094A (ko) * | 2010-11-24 | 2012-06-01 | 삼성전기주식회사 | 노광 파장 조절 장치 및 그를 이용한 노광기 |
| KR20120060018A (ko) * | 2010-12-01 | 2012-06-11 | 삼성전자주식회사 | 마스크리스 노광 장치 |
| JP2012174810A (ja) * | 2011-02-18 | 2012-09-10 | Fuji Xerox Co Ltd | 発光部品、プリントヘッドおよび画像形成装置 |
| KR101532352B1 (ko) * | 2013-10-30 | 2015-06-29 | 주식회사 인피테크 | 노광용 led 광원 장치 및 노광용 led 광원장치 관리시스템 |
| US20160327433A1 (en) * | 2014-09-08 | 2016-11-10 | Empire Technology Development Llc | Title: integrated packaging for multi-component sensors |
| KR101689836B1 (ko) * | 2015-09-25 | 2016-12-27 | 주식회사 리텍 | 고출력 uv led 광원의 펄스제어를 이용한 dmd 과열 저감 시스템 |
| JP6406201B2 (ja) * | 2015-10-02 | 2018-10-17 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び記憶媒体 |
| CN106502059A (zh) * | 2016-12-30 | 2017-03-15 | 俞庆平 | 一种适用于曲面手机玻璃的直写曝光系统及方法 |
| CN106647185A (zh) * | 2016-12-31 | 2017-05-10 | 江苏九迪激光装备科技有限公司 | 一种丝网印刷直接制版系统及制版方法 |
| KR102688206B1 (ko) * | 2017-11-16 | 2024-07-24 | 고쿠리츠다이가쿠호진 나가오카기쥬츠가가쿠다이가쿠 | 광 발생 장치, 광 발생 장치를 구비하는 노광 장치, 노광 시스템, 광 발생 방법, 및 노광 포토 레지스트 제조 방법 |
| CN108646521A (zh) * | 2018-06-19 | 2018-10-12 | 上海频微电子科技有限公司 | 一种光源直接成像聚焦光刻装置及光刻方法 |
| US10901253B2 (en) * | 2018-10-02 | 2021-01-26 | Aristocrat Technologies Australia Pty Limited | Button deck assembly for an electronic gaming machine and method for making the same |
| US11288912B2 (en) | 2020-03-04 | 2022-03-29 | Aristocrat Technologies, Inc. | Electronic gaming machine including hybrid virtual and physical button area |
| CN112051711A (zh) * | 2020-08-20 | 2020-12-08 | 江苏迪盛智能科技有限公司 | 一种曝光设备 |
| KR20250036881A (ko) | 2022-08-18 | 2025-03-14 | 가부시키가이샤 니콘 | 광원 유닛, 조명 유닛, 노광 장치, 및 노광 방법 |
| CN119948408A (zh) | 2022-10-24 | 2025-05-06 | 株式会社尼康 | 合成光学元件、照明单元、曝光装置、以及曝光方法 |
| WO2024209586A1 (ja) | 2023-04-05 | 2024-10-10 | 株式会社ニコン | 光源ユニット、照明ユニット、露光装置、及び露光方法 |
| JP2025037489A (ja) * | 2023-09-06 | 2025-03-18 | 株式会社Screenホールディングス | 露光装置 |
| WO2025094252A1 (ja) * | 2023-10-31 | 2025-05-08 | 株式会社ニコン | 露光装置 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5561365A (en) * | 1986-07-07 | 1996-10-01 | Karel Havel | Digital color display system |
| JP2585083Y2 (ja) * | 1993-08-27 | 1998-11-11 | 大日本スクリーン製造株式会社 | 画像出力装置 |
| JP2001500628A (ja) * | 1996-02-28 | 2001-01-16 | ケニス シー ジョンソン | マイクロリトグラフィ用マイクロレンズスキャナ及び広フィールド共焦顕微鏡 |
| JP2942230B2 (ja) * | 1998-01-12 | 1999-08-30 | キヤノン株式会社 | 画像形成装置及び発光装置 |
| SE516347C2 (sv) * | 1999-11-17 | 2001-12-17 | Micronic Laser Systems Ab | Laserskanningssystem och metod för mikrolitografisk skrivning |
| JP4892128B2 (ja) * | 2000-09-25 | 2012-03-07 | ジーエルサイエンス株式会社 | 液体クロマトグラフィーの試料導入方法及び装置 |
| JP4310056B2 (ja) * | 2001-09-25 | 2009-08-05 | 株式会社オーク製作所 | 露光装置 |
| US6927018B2 (en) * | 2001-10-29 | 2005-08-09 | Hewlett-Packard Development Company, L.P. | Three dimensional printing using photo-activated building materials |
| CN101446773A (zh) | 2001-11-07 | 2009-06-03 | 应用材料有限公司 | 无掩膜光子电子点格栅阵列光刻机 |
| IL164483A0 (en) * | 2002-04-10 | 2005-12-18 | Fujinon Corp | Exposure head, exposure apparatus, and applicationthereof |
| JP4546019B2 (ja) | 2002-07-03 | 2010-09-15 | 株式会社日立製作所 | 露光装置 |
| JP2004109658A (ja) * | 2002-09-19 | 2004-04-08 | Ricoh Co Ltd | 光走査装置及び光路調整方法並びに画像形成装置 |
| JP2004274011A (ja) * | 2003-01-16 | 2004-09-30 | Nikon Corp | 照明光源装置、照明装置、露光装置、及び露光方法 |
| JP2004327660A (ja) * | 2003-04-24 | 2004-11-18 | Nikon Corp | 走査型投影露光装置、露光方法及びデバイス製造方法 |
| EP1482373A1 (en) * | 2003-05-30 | 2004-12-01 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| CN1637589A (zh) * | 2003-12-26 | 2005-07-13 | 富士胶片株式会社 | 图像曝光方法和装置 |
| JP2005309380A (ja) * | 2004-03-26 | 2005-11-04 | Fuji Photo Film Co Ltd | 画像露光装置 |
-
2005
- 2005-01-20 JP JP2005013033A patent/JP4587170B2/ja not_active Expired - Fee Related
-
2006
- 2006-01-11 TW TW095101065A patent/TWI342985B/zh not_active IP Right Cessation
- 2006-01-18 KR KR1020060005146A patent/KR100724637B1/ko not_active Expired - Fee Related
- 2006-01-19 US US11/336,754 patent/US8035668B2/en not_active Expired - Fee Related
- 2006-01-20 CN CN2006100064047A patent/CN1808282B/zh not_active Expired - Fee Related
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