JP2006194898A5 - - Google Patents

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Publication number
JP2006194898A5
JP2006194898A5 JP2006033040A JP2006033040A JP2006194898A5 JP 2006194898 A5 JP2006194898 A5 JP 2006194898A5 JP 2006033040 A JP2006033040 A JP 2006033040A JP 2006033040 A JP2006033040 A JP 2006033040A JP 2006194898 A5 JP2006194898 A5 JP 2006194898A5
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JP
Japan
Prior art keywords
light
workpiece
communicating
tube
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006033040A
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English (en)
Japanese (ja)
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JP2006194898A (ja
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Publication date
Priority claimed from US11/112,044 external-priority patent/US7375362B2/en
Application filed filed Critical
Publication of JP2006194898A publication Critical patent/JP2006194898A/ja
Publication of JP2006194898A5 publication Critical patent/JP2006194898A5/ja
Pending legal-status Critical Current

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JP2006033040A 2005-01-13 2006-01-13 光学的テストヘッドの漂遊光を減少又は排除する方法及び装置 Pending JP2006194898A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US64374805P 2005-01-13 2005-01-13
US11/112,044 US7375362B2 (en) 2005-01-13 2005-04-22 Method and apparatus for reducing or eliminating stray light in an optical test head

Publications (2)

Publication Number Publication Date
JP2006194898A JP2006194898A (ja) 2006-07-27
JP2006194898A5 true JP2006194898A5 (enExample) 2009-04-23

Family

ID=36652376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006033040A Pending JP2006194898A (ja) 2005-01-13 2006-01-13 光学的テストヘッドの漂遊光を減少又は排除する方法及び装置

Country Status (3)

Country Link
US (1) US7375362B2 (enExample)
JP (1) JP2006194898A (enExample)
MY (1) MY145528A (enExample)

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