JP2006194898A - 光学的テストヘッドの漂遊光を減少又は排除する方法及び装置 - Google Patents

光学的テストヘッドの漂遊光を減少又は排除する方法及び装置 Download PDF

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Publication number
JP2006194898A
JP2006194898A JP2006033040A JP2006033040A JP2006194898A JP 2006194898 A JP2006194898 A JP 2006194898A JP 2006033040 A JP2006033040 A JP 2006033040A JP 2006033040 A JP2006033040 A JP 2006033040A JP 2006194898 A JP2006194898 A JP 2006194898A
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Japan
Prior art keywords
light
workpiece
detector
platter
lens
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Pending
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JP2006033040A
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English (en)
Japanese (ja)
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JP2006194898A5 (enExample
Inventor
David Treves
トリーヴス ディヴィッド
Thomas O'dell
オーデル トーマス
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WD Media LLC
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Komag Inc
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Application filed by Komag Inc filed Critical Komag Inc
Publication of JP2006194898A publication Critical patent/JP2006194898A/ja
Publication of JP2006194898A5 publication Critical patent/JP2006194898A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N2021/473—Compensating for unwanted scatter, e.g. reliefs, marks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9506—Optical discs

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  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Optical Head (AREA)
JP2006033040A 2005-01-13 2006-01-13 光学的テストヘッドの漂遊光を減少又は排除する方法及び装置 Pending JP2006194898A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US64374805P 2005-01-13 2005-01-13
US11/112,044 US7375362B2 (en) 2005-01-13 2005-04-22 Method and apparatus for reducing or eliminating stray light in an optical test head

Publications (2)

Publication Number Publication Date
JP2006194898A true JP2006194898A (ja) 2006-07-27
JP2006194898A5 JP2006194898A5 (enExample) 2009-04-23

Family

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Family Applications (1)

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JP2006033040A Pending JP2006194898A (ja) 2005-01-13 2006-01-13 光学的テストヘッドの漂遊光を減少又は排除する方法及び装置

Country Status (3)

Country Link
US (1) US7375362B2 (enExample)
JP (1) JP2006194898A (enExample)
MY (1) MY145528A (enExample)

Families Citing this family (70)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5117895B2 (ja) 2008-03-17 2013-01-16 ダブリュディ・メディア・シンガポール・プライベートリミテッド 磁気記録媒体及びその製造方法
JP2009238299A (ja) 2008-03-26 2009-10-15 Hoya Corp 垂直磁気記録媒体および垂直磁気記録媒体の製造方法
JP5453666B2 (ja) 2008-03-30 2014-03-26 ダブリュディ・メディア・シンガポール・プライベートリミテッド 磁気ディスク及びその製造方法
WO2010038773A1 (ja) 2008-09-30 2010-04-08 Hoya株式会社 磁気ディスク及びその製造方法
US8877359B2 (en) 2008-12-05 2014-11-04 Wd Media (Singapore) Pte. Ltd. Magnetic disk and method for manufacturing same
WO2010116908A1 (ja) 2009-03-28 2010-10-14 Hoya株式会社 磁気ディスク用潤滑剤化合物及び磁気ディスク
JP2010257567A (ja) 2009-03-30 2010-11-11 Wd Media Singapore Pte Ltd 垂直磁気記録媒体およびその製造方法
US20100300884A1 (en) 2009-05-26 2010-12-02 Wd Media, Inc. Electro-deposited passivation coatings for patterned media
US8496466B1 (en) 2009-11-06 2013-07-30 WD Media, LLC Press system with interleaved embossing foil holders for nano-imprinting of recording media
US9330685B1 (en) 2009-11-06 2016-05-03 WD Media, LLC Press system for nano-imprinting of recording media with a two step pressing method
JP5643516B2 (ja) 2010-01-08 2014-12-17 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気記録媒体
JP5574414B2 (ja) 2010-03-29 2014-08-20 ダブリュディ・メディア・シンガポール・プライベートリミテッド 磁気ディスクの評価方法及び磁気ディスクの製造方法
JP5634749B2 (ja) 2010-05-21 2014-12-03 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気ディスク
JP5645476B2 (ja) 2010-05-21 2014-12-24 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気ディスク
JP2011248968A (ja) 2010-05-28 2011-12-08 Wd Media (Singapore) Pte. Ltd 垂直磁気ディスク
JP2011248969A (ja) 2010-05-28 2011-12-08 Wd Media (Singapore) Pte. Ltd 垂直磁気ディスク
JP2011248967A (ja) 2010-05-28 2011-12-08 Wd Media (Singapore) Pte. Ltd 垂直磁気ディスクの製造方法
JP2012009086A (ja) 2010-06-22 2012-01-12 Wd Media (Singapore) Pte. Ltd 垂直磁気記録媒体及びその製造方法
US8889275B1 (en) 2010-08-20 2014-11-18 WD Media, LLC Single layer small grain size FePT:C film for heat assisted magnetic recording media
US8743666B1 (en) 2011-03-08 2014-06-03 Western Digital Technologies, Inc. Energy assisted magnetic recording medium capable of suppressing high DC readback noise
US8711499B1 (en) 2011-03-10 2014-04-29 WD Media, LLC Methods for measuring media performance associated with adjacent track interference
US8491800B1 (en) 2011-03-25 2013-07-23 WD Media, LLC Manufacturing of hard masks for patterning magnetic media
US9028985B2 (en) 2011-03-31 2015-05-12 WD Media, LLC Recording media with multiple exchange coupled magnetic layers
US8565050B1 (en) 2011-12-20 2013-10-22 WD Media, LLC Heat assisted magnetic recording media having moment keeper layer
US9029308B1 (en) 2012-03-28 2015-05-12 WD Media, LLC Low foam media cleaning detergent
US9269480B1 (en) 2012-03-30 2016-02-23 WD Media, LLC Systems and methods for forming magnetic recording media with improved grain columnar growth for energy assisted magnetic recording
US8941950B2 (en) 2012-05-23 2015-01-27 WD Media, LLC Underlayers for heat assisted magnetic recording (HAMR) media
US8993134B2 (en) 2012-06-29 2015-03-31 Western Digital Technologies, Inc. Electrically conductive underlayer to grow FePt granular media with (001) texture on glass substrates
CN103076343B (zh) * 2012-12-27 2016-09-14 深圳市华星光电技术有限公司 素玻璃激光检查机及素玻璃检查方法
US9034492B1 (en) 2013-01-11 2015-05-19 WD Media, LLC Systems and methods for controlling damping of magnetic media for heat assisted magnetic recording
US10115428B1 (en) 2013-02-15 2018-10-30 Wd Media, Inc. HAMR media structure having an anisotropic thermal barrier layer
US9153268B1 (en) 2013-02-19 2015-10-06 WD Media, LLC Lubricants comprising fluorinated graphene nanoribbons for magnetic recording media structure
US9183867B1 (en) 2013-02-21 2015-11-10 WD Media, LLC Systems and methods for forming implanted capping layers in magnetic media for magnetic recording
US9196283B1 (en) 2013-03-13 2015-11-24 Western Digital (Fremont), Llc Method for providing a magnetic recording transducer using a chemical buffer
US9190094B2 (en) 2013-04-04 2015-11-17 Western Digital (Fremont) Perpendicular recording media with grain isolation initiation layer and exchange breaking layer for signal-to-noise ratio enhancement
US9093122B1 (en) 2013-04-05 2015-07-28 WD Media, LLC Systems and methods for improving accuracy of test measurements involving aggressor tracks written to disks of hard disk drives
US8947987B1 (en) 2013-05-03 2015-02-03 WD Media, LLC Systems and methods for providing capping layers for heat assisted magnetic recording media
US8867322B1 (en) 2013-05-07 2014-10-21 WD Media, LLC Systems and methods for providing thermal barrier bilayers for heat assisted magnetic recording media
US9296082B1 (en) 2013-06-11 2016-03-29 WD Media, LLC Disk buffing apparatus with abrasive tape loading pad having a vibration absorbing layer
US9406330B1 (en) 2013-06-19 2016-08-02 WD Media, LLC Method for HDD disk defect source detection
US9607646B2 (en) 2013-07-30 2017-03-28 WD Media, LLC Hard disk double lubrication layer
US9389135B2 (en) 2013-09-26 2016-07-12 WD Media, LLC Systems and methods for calibrating a load cell of a disk burnishing machine
US9177585B1 (en) 2013-10-23 2015-11-03 WD Media, LLC Magnetic media capable of improving magnetic properties and thermal management for heat-assisted magnetic recording
US9581510B1 (en) 2013-12-16 2017-02-28 Western Digital Technologies, Inc. Sputter chamber pressure gauge with vibration absorber
US9382496B1 (en) 2013-12-19 2016-07-05 Western Digital Technologies, Inc. Lubricants with high thermal stability for heat-assisted magnetic recording
US9824711B1 (en) 2014-02-14 2017-11-21 WD Media, LLC Soft underlayer for heat assisted magnetic recording media
US9447368B1 (en) 2014-02-18 2016-09-20 WD Media, LLC Detergent composition with low foam and high nickel solubility
US9431045B1 (en) 2014-04-25 2016-08-30 WD Media, LLC Magnetic seed layer used with an unbalanced soft underlayer
US9042053B1 (en) 2014-06-24 2015-05-26 WD Media, LLC Thermally stabilized perpendicular magnetic recording medium
US9159350B1 (en) 2014-07-02 2015-10-13 WD Media, LLC High damping cap layer for magnetic recording media
US10054363B2 (en) 2014-08-15 2018-08-21 WD Media, LLC Method and apparatus for cryogenic dynamic cooling
US9082447B1 (en) 2014-09-22 2015-07-14 WD Media, LLC Determining storage media substrate material type
US9227324B1 (en) 2014-09-25 2016-01-05 WD Media, LLC Mandrel for substrate transport system with notch
US8995078B1 (en) 2014-09-25 2015-03-31 WD Media, LLC Method of testing a head for contamination
US9685184B1 (en) 2014-09-25 2017-06-20 WD Media, LLC NiFeX-based seed layer for magnetic recording media
US9449633B1 (en) 2014-11-06 2016-09-20 WD Media, LLC Smooth structures for heat-assisted magnetic recording media
US9818442B2 (en) 2014-12-01 2017-11-14 WD Media, LLC Magnetic media having improved magnetic grain size distribution and intergranular segregation
US9401300B1 (en) 2014-12-18 2016-07-26 WD Media, LLC Media substrate gripper including a plurality of snap-fit fingers
US9218850B1 (en) 2014-12-23 2015-12-22 WD Media, LLC Exchange break layer for heat-assisted magnetic recording media
US9257134B1 (en) 2014-12-24 2016-02-09 Western Digital Technologies, Inc. Allowing fast data zone switches on data storage devices
US9990940B1 (en) 2014-12-30 2018-06-05 WD Media, LLC Seed structure for perpendicular magnetic recording media
US9280998B1 (en) 2015-03-30 2016-03-08 WD Media, LLC Acidic post-sputter wash for magnetic recording media
US9822441B2 (en) 2015-03-31 2017-11-21 WD Media, LLC Iridium underlayer for heat assisted magnetic recording media
US9275669B1 (en) 2015-03-31 2016-03-01 WD Media, LLC TbFeCo in PMR media for SNR improvement
US11074934B1 (en) 2015-09-25 2021-07-27 Western Digital Technologies, Inc. Heat assisted magnetic recording (HAMR) media with Curie temperature reduction layer
US10236026B1 (en) 2015-11-06 2019-03-19 WD Media, LLC Thermal barrier layers and seed layers for control of thermal and structural properties of HAMR media
US9406329B1 (en) 2015-11-30 2016-08-02 WD Media, LLC HAMR media structure with intermediate layer underlying a magnetic recording layer having multiple sublayers
US10121506B1 (en) 2015-12-29 2018-11-06 WD Media, LLC Magnetic-recording medium including a carbon overcoat implanted with nitrogen and hydrogen
US11249319B2 (en) * 2016-05-04 2022-02-15 Mac Cal Inc. Reduced footprint collimator device to focus light beam over length of optical path
CN212621375U (zh) * 2020-05-27 2021-02-26 三赢科技（深圳）有限公司 测试光箱

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53102792A (en) * 1977-02-21 1978-09-07 Hitachi Ltd Simultaneous inspecting apparatus of inside and outside of body to be inspected
JPS5879240A (ja) * 1981-11-06 1983-05-13 Nippon Kogaku Kk <Nikon> 異物検出装置
JPH02159544A (ja) * 1988-12-13 1990-06-19 Fuji Photo Film Co Ltd 生化学分析校正方法および生化学分析装置
JPH07286967A (ja) * 1994-04-15 1995-10-31 Sony Corp 光ディスクの検査方法と検査装置
JPH0933446A (ja) * 1995-07-19 1997-02-07 Fujitsu Ltd 表面欠陥検査装置
JP2002107597A (ja) * 2000-09-28 2002-04-10 Anritsu Corp レンズ鏡筒及びその製造方法
JP2003025625A (ja) * 2001-07-16 2003-01-29 Ricoh Co Ltd 光プリントヘッドおよび画像形成装置
JP2004163240A (ja) * 2002-11-13 2004-06-10 Silicon Technology Co Ltd 表面評価装置
JP2004332111A (ja) * 2003-04-16 2004-11-25 Anritsu Corp 黒色粒子、黒色粒子製造用メッキ装置および黒色粒子を用いた光吸収体

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3089484A (en) * 1961-01-26 1963-05-14 American Cystoscope Makers Inc Flexible optical instrument particularly for carrying out surgical procedures
US3335715A (en) * 1964-09-18 1967-08-15 American Optical Corp Fiber optic catheter
US4794265A (en) * 1987-05-08 1988-12-27 Qc Optics, Inc. Surface pit detection system and method
US4794264A (en) * 1987-05-08 1988-12-27 Qc Optics, Inc. Surface defect detection and confirmation system and method
US5637863A (en) * 1994-08-24 1997-06-10 Mdt Corporation Surgical light with touchless switch
US5649897A (en) * 1994-11-02 1997-07-22 Terumo Kabushiki Kaisha Endoscope apparatus for compensating for change in polarization state during image transmission
US5677769A (en) * 1995-05-30 1997-10-14 Imra America Optical sensor utilizing rare-earth-doped integrated-optic lasers
WO1997026529A1 (en) * 1996-01-19 1997-07-24 Phase Metrics Surface inspection apparatus and method
US5943130A (en) * 1996-10-21 1999-08-24 Insitec, Inc. In situ sensor for near wafer particle monitoring in semiconductor device manufacturing equipment
US5719840A (en) * 1996-12-30 1998-02-17 Phase Metrics Optical sensor with an elliptical illumination spot
US6624884B1 (en) * 1997-04-28 2003-09-23 International Business Machines Corporation Surface inspection tool
CA2303885A1 (en) * 1997-09-22 1999-04-01 Infineon Technologies Ag Optical system for injecting laser radiation into an optical conductor, and a method for its production
US7123357B2 (en) * 1997-09-22 2006-10-17 Candela Instruments Method of detecting and classifying scratches and particles on thin film disks or wafers
US6548821B1 (en) * 1999-06-21 2003-04-15 Komag, Inc. Method and apparatus for inspecting substrates
US6566674B1 (en) * 1999-06-21 2003-05-20 Komag, Inc. Method and apparatus for inspecting substrates
US7227817B1 (en) * 1999-12-07 2007-06-05 Dphi Acquisitions, Inc. Low profile optical head
US7079472B2 (en) * 1999-06-23 2006-07-18 Dphi Acquisitions, Inc. Beamshaper for optical head
US6630996B2 (en) * 2000-11-15 2003-10-07 Real Time Metrology, Inc. Optical method and apparatus for inspecting large area planar objects
US6597006B1 (en) * 2001-10-09 2003-07-22 Kla-Tencor Technologies Corp. Dual beam symmetric height systems and methods
US6686602B2 (en) * 2002-01-15 2004-02-03 Applied Materials, Inc. Patterned wafer inspection using spatial filtering
GB0201969D0 (en) * 2002-01-29 2002-03-13 Qinetiq Ltd Integrated optics devices
JP3936220B2 (ja) * 2002-03-28 2007-06-27 株式会社レイテックス 端部傷検査装置
US6888988B2 (en) * 2003-03-14 2005-05-03 Agilent Technologies, Inc. Small form factor all-polymer optical device with integrated dual beam path based on total internal reflection optical turn
US20050088748A1 (en) * 2003-10-28 2005-04-28 Leupold & Stevens, Inc. Molded baffles for controlling stray light in an optical system
US7605913B2 (en) * 2004-12-19 2009-10-20 Kla-Tencor Corporation System and method for inspecting a workpiece surface by analyzing scattered light in a front quartersphere region above the workpiece

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53102792A (en) * 1977-02-21 1978-09-07 Hitachi Ltd Simultaneous inspecting apparatus of inside and outside of body to be inspected
JPS5879240A (ja) * 1981-11-06 1983-05-13 Nippon Kogaku Kk <Nikon> 異物検出装置
JPH02159544A (ja) * 1988-12-13 1990-06-19 Fuji Photo Film Co Ltd 生化学分析校正方法および生化学分析装置
JPH07286967A (ja) * 1994-04-15 1995-10-31 Sony Corp 光ディスクの検査方法と検査装置
JPH0933446A (ja) * 1995-07-19 1997-02-07 Fujitsu Ltd 表面欠陥検査装置
JP2002107597A (ja) * 2000-09-28 2002-04-10 Anritsu Corp レンズ鏡筒及びその製造方法
JP2003025625A (ja) * 2001-07-16 2003-01-29 Ricoh Co Ltd 光プリントヘッドおよび画像形成装置
JP2004163240A (ja) * 2002-11-13 2004-06-10 Silicon Technology Co Ltd 表面評価装置
JP2004332111A (ja) * 2003-04-16 2004-11-25 Anritsu Corp 黒色粒子、黒色粒子製造用メッキ装置および黒色粒子を用いた光吸収体

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Publication number Publication date
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MY145528A (en) 2012-02-29
US20060151726A1 (en) 2006-07-13

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