MY145528A - Method and apparatus for reducing or eliminating stray light in an optical test head - Google Patents

Method and apparatus for reducing or eliminating stray light in an optical test head

Info

Publication number
MY145528A
MY145528A MYPI20055873A MYPI20055873A MY145528A MY 145528 A MY145528 A MY 145528A MY PI20055873 A MYPI20055873 A MY PI20055873A MY PI20055873 A MYPI20055873 A MY PI20055873A MY 145528 A MY145528 A MY 145528A
Authority
MY
Malaysia
Prior art keywords
optical
light
reducing
test head
paths
Prior art date
Application number
MYPI20055873A
Other languages
English (en)
Inventor
David Treves
Thomas A O'dell
Original Assignee
Wd Media Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wd Media Inc filed Critical Wd Media Inc
Publication of MY145528A publication Critical patent/MY145528A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N2021/473—Compensating for unwanted scatter, e.g. reliefs, marks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9506—Optical discs

Landscapes

  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Optical Head (AREA)
MYPI20055873A 2005-01-13 2005-12-14 Method and apparatus for reducing or eliminating stray light in an optical test head MY145528A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US64374805P 2005-01-13 2005-01-13
US11/112,044 US7375362B2 (en) 2005-01-13 2005-04-22 Method and apparatus for reducing or eliminating stray light in an optical test head

Publications (1)

Publication Number Publication Date
MY145528A true MY145528A (en) 2012-02-29

Family

ID=36652376

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20055873A MY145528A (en) 2005-01-13 2005-12-14 Method and apparatus for reducing or eliminating stray light in an optical test head

Country Status (3)

Country Link
US (1) US7375362B2 (enExample)
JP (1) JP2006194898A (enExample)
MY (1) MY145528A (enExample)

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Also Published As

Publication number Publication date
US7375362B2 (en) 2008-05-20
JP2006194898A (ja) 2006-07-27
US20060151726A1 (en) 2006-07-13

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