JP2006156915A5 - - Google Patents

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Publication number
JP2006156915A5
JP2006156915A5 JP2004362776A JP2004362776A JP2006156915A5 JP 2006156915 A5 JP2006156915 A5 JP 2006156915A5 JP 2004362776 A JP2004362776 A JP 2004362776A JP 2004362776 A JP2004362776 A JP 2004362776A JP 2006156915 A5 JP2006156915 A5 JP 2006156915A5
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JP
Japan
Prior art keywords
laser beam
power
ltp laser
ltp
convection
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Application number
JP2004362776A
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English (en)
Japanese (ja)
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JP5031984B2 (ja
JP2006156915A (ja
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Priority claimed from US11/001,954 external-priority patent/US7731798B2/en
Application filed filed Critical
Publication of JP2006156915A publication Critical patent/JP2006156915A/ja
Publication of JP2006156915A5 publication Critical patent/JP2006156915A5/ja
Application granted granted Critical
Publication of JP5031984B2 publication Critical patent/JP5031984B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004362776A 2004-12-01 2004-12-15 レーザー熱処理のための加熱チャック Expired - Fee Related JP5031984B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/001,954 2004-12-01
US11/001,954 US7731798B2 (en) 2004-12-01 2004-12-01 Heated chuck for laser thermal processing

Publications (3)

Publication Number Publication Date
JP2006156915A JP2006156915A (ja) 2006-06-15
JP2006156915A5 true JP2006156915A5 (https=) 2012-07-12
JP5031984B2 JP5031984B2 (ja) 2012-09-26

Family

ID=36566421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004362776A Expired - Fee Related JP5031984B2 (ja) 2004-12-01 2004-12-15 レーザー熱処理のための加熱チャック

Country Status (4)

Country Link
US (1) US7731798B2 (https=)
JP (1) JP5031984B2 (https=)
KR (1) KR20060061198A (https=)
TW (1) TWI257158B (https=)

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US12320841B2 (en) 2020-11-19 2025-06-03 Advantest Test Solutions, Inc. Wafer scale active thermal interposer for device testing
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US11573262B2 (en) 2020-12-31 2023-02-07 Advantest Test Solutions, Inc. Multi-input multi-zone thermal control for device testing
US11587640B2 (en) 2021-03-08 2023-02-21 Advantest Test Solutions, Inc. Carrier based high volume system level testing of devices with pop structures
US12583043B2 (en) * 2021-08-31 2026-03-24 Yield Engineering Systems, Inc. Process chamber with UV irradiance
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