JP2006156915A5 - - Google Patents

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Publication number
JP2006156915A5
JP2006156915A5 JP2004362776A JP2004362776A JP2006156915A5 JP 2006156915 A5 JP2006156915 A5 JP 2006156915A5 JP 2004362776 A JP2004362776 A JP 2004362776A JP 2004362776 A JP2004362776 A JP 2004362776A JP 2006156915 A5 JP2006156915 A5 JP 2006156915A5
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JP
Japan
Prior art keywords
laser beam
power
ltp laser
ltp
convection
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JP2004362776A
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English (en)
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JP2006156915A (ja
JP5031984B2 (ja
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Priority claimed from US11/001,954 external-priority patent/US7731798B2/en
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Publication of JP2006156915A publication Critical patent/JP2006156915A/ja
Publication of JP2006156915A5 publication Critical patent/JP2006156915A5/ja
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Publication of JP5031984B2 publication Critical patent/JP5031984B2/ja
Expired - Fee Related legal-status Critical Current
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ＬＴＰレーザービーム８１８がウェハの表面３１２に入射すると、電源１８０からヒーターモジュール１５０に供給される電力８５０をそれに比例して減少させる。一定のバックグラウンド温度ＴＣの電気的な制御を維持するためには、絶縁体層１００を介した冷却板２０への定常状態の熱損失は、放射及び対流による損失が差し引かれたＬＴＰレーザービームからの最大供給エネルギーよりも大きくなければならない。
JP2004362776A 2004-12-01 2004-12-15 レーザー熱処理のための加熱チャック Expired - Fee Related JP5031984B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/001,954 US7731798B2 (en) 2004-12-01 2004-12-01 Heated chuck for laser thermal processing
US11/001,954 2004-12-01

Publications (3)

Publication Number Publication Date
JP2006156915A JP2006156915A (ja) 2006-06-15
JP2006156915A5 true JP2006156915A5 (ja) 2012-07-12
JP5031984B2 JP5031984B2 (ja) 2012-09-26

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ID=36566421

Family Applications (1)

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JP2004362776A Expired - Fee Related JP5031984B2 (ja) 2004-12-01 2004-12-15 レーザー熱処理のための加熱チャック

Country Status (4)

Country Link
US (1) US7731798B2 (ja)
JP (1) JP5031984B2 (ja)
KR (1) KR20060061198A (ja)
TW (1) TWI257158B (ja)

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