JP2006114225A5 - - Google Patents

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Publication number
JP2006114225A5
JP2006114225A5 JP2004297117A JP2004297117A JP2006114225A5 JP 2006114225 A5 JP2006114225 A5 JP 2006114225A5 JP 2004297117 A JP2004297117 A JP 2004297117A JP 2004297117 A JP2004297117 A JP 2004297117A JP 2006114225 A5 JP2006114225 A5 JP 2006114225A5
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JP
Japan
Prior art keywords
charged particle
particle beam
column
sample
drift tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004297117A
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English (en)
Japanese (ja)
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JP2006114225A (ja
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Publication date
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Priority to JP2004297117A priority Critical patent/JP2006114225A/ja
Priority claimed from JP2004297117A external-priority patent/JP2006114225A/ja
Priority to US11/196,399 priority patent/US7339167B2/en
Publication of JP2006114225A publication Critical patent/JP2006114225A/ja
Publication of JP2006114225A5 publication Critical patent/JP2006114225A5/ja
Withdrawn legal-status Critical Current

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JP2004297117A 2004-10-12 2004-10-12 荷電粒子線装置 Withdrawn JP2006114225A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004297117A JP2006114225A (ja) 2004-10-12 2004-10-12 荷電粒子線装置
US11/196,399 US7339167B2 (en) 2004-10-12 2005-08-04 Charged particle beam apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004297117A JP2006114225A (ja) 2004-10-12 2004-10-12 荷電粒子線装置

Publications (2)

Publication Number Publication Date
JP2006114225A JP2006114225A (ja) 2006-04-27
JP2006114225A5 true JP2006114225A5 (enExample) 2007-10-11

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ID=36144328

Family Applications (1)

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JP2004297117A Withdrawn JP2006114225A (ja) 2004-10-12 2004-10-12 荷電粒子線装置

Country Status (2)

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US (1) US7339167B2 (enExample)
JP (1) JP2006114225A (enExample)

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JP5102580B2 (ja) * 2007-10-18 2012-12-19 株式会社日立ハイテクノロジーズ 荷電粒子線応用装置
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EP2629317B1 (en) 2012-02-20 2015-01-28 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device with dynamic focus and method of operating thereof
KR101914231B1 (ko) * 2012-05-30 2018-11-02 삼성디스플레이 주식회사 주사 전자 현미경을 이용한 검사 시스템
JP2014041734A (ja) * 2012-08-22 2014-03-06 Hitachi High-Technologies Corp 複合荷電粒子線装置
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US9190241B2 (en) * 2013-03-25 2015-11-17 Hermes-Microvision, Inc. Charged particle beam apparatus
JP6124679B2 (ja) * 2013-05-15 2017-05-10 日本電子株式会社 走査荷電粒子顕微鏡および画像取得方法
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US9859097B2 (en) 2015-09-01 2018-01-02 The Board Of Trustees Of The Leland Stanford Junior University Vacuum tube electron microscope
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JP7017437B2 (ja) 2018-03-06 2022-02-08 Ｔａｓｍｉｔ株式会社 反射電子のエネルギースペクトルを測定する装置および方法
DE102018204683B3 (de) * 2018-03-27 2019-08-08 Carl Zeiss Microscopy Gmbh Elektronenstrahlmikroskop
JP7068117B2 (ja) * 2018-09-18 2022-05-16 株式会社日立ハイテク 荷電粒子線装置
JP7152757B2 (ja) * 2018-10-18 2022-10-13 株式会社日立ハイテクサイエンス 試料加工観察方法
US11984295B2 (en) 2020-01-06 2024-05-14 Asml Netherlands B.V. Charged particle assessment tool, inspection method
CN113692102B (zh) * 2020-05-19 2024-12-13 四川智研科技有限公司 减少电子加速器噪声的结构及方法
WO2021255886A1 (ja) * 2020-06-18 2021-12-23 株式会社日立ハイテク 荷電粒子線装置
ES2899769B2 (es) * 2020-09-14 2022-10-28 Consorcio Para La Construccion Equipamiento Y Explotacion Del Laboratorio De Luz De Sincrotron Dispositivo de conexion extraible para la excitacion de muestras con senales electricas de alta frecuencia a alto voltaje en microscopios de electrones
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