JP2006113571A5 - - Google Patents
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- Publication number
- JP2006113571A5 JP2006113571A5 JP2005268910A JP2005268910A JP2006113571A5 JP 2006113571 A5 JP2006113571 A5 JP 2006113571A5 JP 2005268910 A JP2005268910 A JP 2005268910A JP 2005268910 A JP2005268910 A JP 2005268910A JP 2006113571 A5 JP2006113571 A5 JP 2006113571A5
- Authority
- JP
- Japan
- Prior art keywords
- conductive layer
- contact
- layer
- film
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010408 film Substances 0.000 claims 22
- 239000004065 semiconductor Substances 0.000 claims 20
- 239000000758 substrate Substances 0.000 claims 6
- 239000010409 thin film Substances 0.000 claims 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 229910052750 molybdenum Inorganic materials 0.000 claims 2
- 239000011733 molybdenum Substances 0.000 claims 2
- 239000010936 titanium Substances 0.000 claims 2
- 229910052719 titanium Inorganic materials 0.000 claims 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims 1
- 239000004973 liquid crystal related substance Substances 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 150000002736 metal compounds Chemical class 0.000 claims 1
- 238000009751 slip forming Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005268910A JP4974500B2 (ja) | 2004-09-15 | 2005-09-15 | 半導体装置、モジュール及び電子機器 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004267673 | 2004-09-15 | ||
| JP2004267673 | 2004-09-15 | ||
| JP2005268910A JP4974500B2 (ja) | 2004-09-15 | 2005-09-15 | 半導体装置、モジュール及び電子機器 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012051407A Division JP5427907B2 (ja) | 2004-09-15 | 2012-03-08 | 半導体装置、モジュール及び電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006113571A JP2006113571A (ja) | 2006-04-27 |
| JP2006113571A5 true JP2006113571A5 (enExample) | 2008-10-09 |
| JP4974500B2 JP4974500B2 (ja) | 2012-07-11 |
Family
ID=36382082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005268910A Expired - Lifetime JP4974500B2 (ja) | 2004-09-15 | 2005-09-15 | 半導体装置、モジュール及び電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4974500B2 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008096748A1 (ja) * | 2007-02-07 | 2008-08-14 | Kaneka Corporation | 平面発光装置 |
| JP5262069B2 (ja) * | 2007-11-01 | 2013-08-14 | カシオ計算機株式会社 | 電気素子デバイス及び電気素子デバイスの製造方法 |
| US8692455B2 (en) | 2007-12-18 | 2014-04-08 | Sony Corporation | Display device and method for production thereof |
| JP4600786B2 (ja) * | 2007-12-18 | 2010-12-15 | ソニー株式会社 | 表示装置およびその製造方法 |
| US7977678B2 (en) * | 2007-12-21 | 2011-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor display device |
| TWI424506B (zh) | 2008-08-08 | 2014-01-21 | Semiconductor Energy Lab | 半導體裝置的製造方法 |
| US8461582B2 (en) | 2009-03-05 | 2013-06-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
| JP5435260B2 (ja) | 2009-04-03 | 2014-03-05 | ソニー株式会社 | 表示装置およびその製造方法 |
| KR20120121931A (ko) * | 2010-02-19 | 2012-11-06 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
| JP5576862B2 (ja) | 2010-09-21 | 2014-08-20 | パナソニック株式会社 | 薄膜トランジスタアレイ装置、薄膜トランジスタアレイ装置の製造方法 |
| JP5579173B2 (ja) | 2010-09-21 | 2014-08-27 | パナソニック株式会社 | 薄膜トランジスタアレイ装置、薄膜トランジスタアレイ装置の製造方法 |
| JP5667868B2 (ja) * | 2010-12-24 | 2015-02-12 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP5907697B2 (ja) * | 2011-11-09 | 2016-04-26 | 三菱電機株式会社 | 配線構造及びそれを備える薄膜トランジスタアレイ基板並びに表示装置 |
| KR102042483B1 (ko) * | 2012-09-24 | 2019-11-12 | 한국전자통신연구원 | 박막 트랜지스터 및 그 제조 방법 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3587537B2 (ja) * | 1992-12-09 | 2004-11-10 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JPH06202146A (ja) * | 1992-12-28 | 1994-07-22 | Fujitsu Ltd | パターン形成方法 |
| JPH07312425A (ja) * | 1994-05-18 | 1995-11-28 | Hitachi Ltd | 薄膜トランジスタ、それに関連するテーパエッチング方法および多層膜形成方法ならびに画像表示装置 |
| JP4485078B2 (ja) * | 2000-01-26 | 2010-06-16 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP4522529B2 (ja) * | 2000-03-29 | 2010-08-11 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法 |
-
2005
- 2005-09-15 JP JP2005268910A patent/JP4974500B2/ja not_active Expired - Lifetime
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