JP2006086244A5 - - Google Patents

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Publication number
JP2006086244A5
JP2006086244A5 JP2004267800A JP2004267800A JP2006086244A5 JP 2006086244 A5 JP2006086244 A5 JP 2006086244A5 JP 2004267800 A JP2004267800 A JP 2004267800A JP 2004267800 A JP2004267800 A JP 2004267800A JP 2006086244 A5 JP2006086244 A5 JP 2006086244A5
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JP
Japan
Prior art keywords
manufacturing
semiconductor device
probes
cleaning step
semiconductor
Prior art date
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Application number
JP2004267800A
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English (en)
Japanese (ja)
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JP2006086244A (ja
JP4574302B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2004267800A priority Critical patent/JP4574302B2/ja
Priority claimed from JP2004267800A external-priority patent/JP4574302B2/ja
Publication of JP2006086244A publication Critical patent/JP2006086244A/ja
Publication of JP2006086244A5 publication Critical patent/JP2006086244A5/ja
Application granted granted Critical
Publication of JP4574302B2 publication Critical patent/JP4574302B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004267800A 2004-09-15 2004-09-15 半導体装置の製造方法 Expired - Fee Related JP4574302B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004267800A JP4574302B2 (ja) 2004-09-15 2004-09-15 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004267800A JP4574302B2 (ja) 2004-09-15 2004-09-15 半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JP2006086244A JP2006086244A (ja) 2006-03-30
JP2006086244A5 true JP2006086244A5 (enExample) 2007-10-25
JP4574302B2 JP4574302B2 (ja) 2010-11-04

Family

ID=36164508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004267800A Expired - Fee Related JP4574302B2 (ja) 2004-09-15 2004-09-15 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JP4574302B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009115720A (ja) * 2007-11-08 2009-05-28 Japan Electronic Materials Corp プローブのクリーニング方法およびプローブのクリーニング装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5840836A (ja) * 1981-09-03 1983-03-09 Seiko Epson Corp 半導体装置の製造方法
JPH0442944A (ja) * 1990-06-06 1992-02-13 Matsushita Electron Corp 半導体装置
JP2004228314A (ja) * 2003-01-22 2004-08-12 Renesas Technology Corp パッドを有する半導体装置

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