JP2006086180A5 - - Google Patents

Download PDF

Info

Publication number
JP2006086180A5
JP2006086180A5 JP2004266631A JP2004266631A JP2006086180A5 JP 2006086180 A5 JP2006086180 A5 JP 2006086180A5 JP 2004266631 A JP2004266631 A JP 2004266631A JP 2004266631 A JP2004266631 A JP 2004266631A JP 2006086180 A5 JP2006086180 A5 JP 2006086180A5
Authority
JP
Japan
Prior art keywords
substrate
platform
changing
relative position
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004266631A
Other languages
English (en)
Japanese (ja)
Other versions
JP4086826B2 (ja
JP2006086180A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004266631A priority Critical patent/JP4086826B2/ja
Priority claimed from JP2004266631A external-priority patent/JP4086826B2/ja
Publication of JP2006086180A publication Critical patent/JP2006086180A/ja
Publication of JP2006086180A5 publication Critical patent/JP2006086180A5/ja
Application granted granted Critical
Publication of JP4086826B2 publication Critical patent/JP4086826B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2004266631A 2004-09-14 2004-09-14 基板の処理方法 Expired - Lifetime JP4086826B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004266631A JP4086826B2 (ja) 2004-09-14 2004-09-14 基板の処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004266631A JP4086826B2 (ja) 2004-09-14 2004-09-14 基板の処理方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007181729A Division JP2007266638A (ja) 2007-07-11 2007-07-11 基板の処理方法

Publications (3)

Publication Number Publication Date
JP2006086180A JP2006086180A (ja) 2006-03-30
JP2006086180A5 true JP2006086180A5 (enExample) 2007-08-09
JP4086826B2 JP4086826B2 (ja) 2008-05-14

Family

ID=36164460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004266631A Expired - Lifetime JP4086826B2 (ja) 2004-09-14 2004-09-14 基板の処理方法

Country Status (1)

Country Link
JP (1) JP4086826B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5511273B2 (ja) 2008-09-12 2014-06-04 株式会社日立国際電気 基板処理装置及び基板処理方法
JP4703749B2 (ja) 2008-09-17 2011-06-15 株式会社日立国際電気 基板処理装置及び基板処理方法
JP2011071293A (ja) * 2009-09-25 2011-04-07 Tokyo Electron Ltd プロセスモジュール、基板処理装置、および基板搬送方法
CN106409739B (zh) * 2016-09-29 2019-12-06 中国电子科技集团公司第四十八研究所 一种晶片真空自动传输系统及传输方法

Similar Documents

Publication Publication Date Title
WO2006081104A3 (en) Semiconductor wafer boat for a vertical furnace
EP1860693A3 (en) Substrate transfer apparatus, substrate process system, and substrate transfer method
WO2009069224A1 (ja) 移載装置
KR101321690B1 (ko) 진공 처리 장치, 기판과 얼라인먼트 마스크의 이동 방법 및 위치 맞춤 방법 그리고 성막 방법
JP2010153467A5 (enExample)
KR940022784A (ko) 옮겨싣기 장치
WO2009075261A1 (ja) 基板搬送装置、基板搬送方法及び真空処理装置
JP2007123810A5 (enExample)
JP2008502134A5 (enExample)
WO2008126454A1 (ja) 基板搬送装置
CN106627697A (zh) 一种能减震的化工原料运输装置
TW200739793A (en) Vertical boat and vertical heat processing apparatus for semiconductor process
JP2006086180A5 (enExample)
TW200607038A (en) Contacts to semiconductor fin device and method for manufacturing the same
TW200715465A (en) Substrate processing unit, substrate transfer method, substrate cleansing process unit, and substrate plating apparatus
DK1437283T3 (da) Transportvogn til genstande, især rengöringsredskaber
TW200721358A (en) Substrate processing apparatus and manufacturing method for a semiconductor device
JP2012164716A5 (enExample)
CN201397821Y (zh) 石墨载板
JPH1140509A5 (ja) 半導体製造装置
JP2007266638A5 (enExample)
JP4809392B2 (ja) 熱処理装置、ボート、熱処理方法、及び半導体の製造方法
US8847122B2 (en) Method and apparatus for transferring substrate
JP2006319345A5 (enExample)
JP4635350B2 (ja) 搬送装置