JP2006084109A - 基板焼成装置 - Google Patents

基板焼成装置 Download PDF

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Publication number
JP2006084109A
JP2006084109A JP2004269353A JP2004269353A JP2006084109A JP 2006084109 A JP2006084109 A JP 2006084109A JP 2004269353 A JP2004269353 A JP 2004269353A JP 2004269353 A JP2004269353 A JP 2004269353A JP 2006084109 A JP2006084109 A JP 2006084109A
Authority
JP
Japan
Prior art keywords
substrate
baking
shelf
chamber
carry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2004269353A
Other languages
English (en)
Japanese (ja)
Inventor
Yasuyoshi Miyaji
恭祥 宮路
Yusuke Muraoka
祐介 村岡
Takahiro Kimura
貴弘 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP2004269353A priority Critical patent/JP2006084109A/ja
Priority to TW094120932A priority patent/TWI275121B/zh
Priority to CNA200510084932XA priority patent/CN1750219A/zh
Priority to KR1020050085252A priority patent/KR100749005B1/ko
Publication of JP2006084109A publication Critical patent/JP2006084109A/ja
Abandoned legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F27B17/0016—Chamber type furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F27B17/0016—Chamber type furnaces
    • F27B17/0025—Especially adapted for treating semiconductor wafers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens, or the like for the charge within the furnace
    • F27D5/0006—Composite supporting structures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens, or the like for the charge within the furnace
    • F27D5/0037—Supports specially adapted for semi-conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/46—Machines having sequentially arranged operating stations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/46—Machines having sequentially arranged operating stations
    • H01J9/48—Machines having sequentially arranged operating stations with automatic transfer of workpieces between operating stations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/26—Sealing parts of the vessel to provide a vacuum enclosure
    • H01J2209/261—Apparatus used for sealing vessels, e.g. furnaces, machines or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Tunnel Furnaces (AREA)
  • Furnace Details (AREA)
  • Furnace Charging Or Discharging (AREA)
JP2004269353A 2004-09-16 2004-09-16 基板焼成装置 Abandoned JP2006084109A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2004269353A JP2006084109A (ja) 2004-09-16 2004-09-16 基板焼成装置
TW094120932A TWI275121B (en) 2004-09-16 2005-06-23 Substrate baking device
CNA200510084932XA CN1750219A (zh) 2004-09-16 2005-07-25 基板烧成装置
KR1020050085252A KR100749005B1 (ko) 2004-09-16 2005-09-13 기판소성장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004269353A JP2006084109A (ja) 2004-09-16 2004-09-16 基板焼成装置

Publications (1)

Publication Number Publication Date
JP2006084109A true JP2006084109A (ja) 2006-03-30

Family

ID=36162755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004269353A Abandoned JP2006084109A (ja) 2004-09-16 2004-09-16 基板焼成装置

Country Status (4)

Country Link
JP (1) JP2006084109A (ko)
KR (1) KR100749005B1 (ko)
CN (1) CN1750219A (ko)
TW (1) TWI275121B (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115846159A (zh) * 2021-09-27 2023-03-28 芝浦机械电子装置株式会社 加热处理装置、搬入搬出夹具及加热处理装置的维护方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103057945B (zh) * 2012-08-08 2015-07-15 深圳市华星光电技术有限公司 一种多层基板存储装置
US9144901B2 (en) 2012-08-08 2015-09-29 Weibing Yang Storage device for multilayer substrate
JP2019029102A (ja) * 2017-07-26 2019-02-21 株式会社Ｓｃｒｅｅｎホールディングス 加熱装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100405909B1 (ko) * 1998-07-01 2003-11-14 포톤 다이나믹스, 인코포레이티드 대형 기판용 고속 열처리 시스템
JP2003165735A (ja) * 2001-11-29 2003-06-10 Showa Mfg Co Ltd ガラス基板用熱処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115846159A (zh) * 2021-09-27 2023-03-28 芝浦机械电子装置株式会社 加热处理装置、搬入搬出夹具及加热处理装置的维护方法
CN115846159B (zh) * 2021-09-27 2024-05-17 芝浦机械电子装置株式会社 加热处理装置、搬入搬出夹具及加热处理装置的维护方法

Also Published As

Publication number Publication date
TWI275121B (en) 2007-03-01
CN1750219A (zh) 2006-03-22
TW200611300A (en) 2006-04-01
KR100749005B1 (ko) 2007-08-13
KR20060051254A (ko) 2006-05-19

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Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20061221

A762 Written abandonment of application

Free format text: JAPANESE INTERMEDIATE CODE: A762

Effective date: 20090821