JP2006032694A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
- Publication number
- JP2006032694A JP2006032694A JP2004210180A JP2004210180A JP2006032694A JP 2006032694 A JP2006032694 A JP 2006032694A JP 2004210180 A JP2004210180 A JP 2004210180A JP 2004210180 A JP2004210180 A JP 2004210180A JP 2006032694 A JP2006032694 A JP 2006032694A
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- conductive material
- interlayer insulating
- film
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
- H01L21/02074—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a planarization of conductive layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
- H01L21/76826—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. by contacting the layer with gases, liquids or plasmas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76835—Combinations of two or more different dielectric layers having a low dielectric constant
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/7684—Smoothing; Planarisation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
【解決手段】 半導体基板上に、3.5以下の比誘電率を有する疎水性の層間絶縁膜を形成する工程と、前記層間絶縁膜に凹部を設ける工程と、前記凹部が設けられた前記層間絶縁膜上に導電性材料を堆積して導電層を形成する工程と、前記層間絶縁膜上の前記導電性材料を研磨により除去して、前記導電性材料を前記凹部内に埋め込み、前記層間絶縁膜の表面を露出する工程と、前記導電性材料が埋め込まれた前記層間絶縁膜の表面を、無機アルカリを含有しpHが9を越えるアルカリ洗浄液を用いて樹脂製部材により加圧洗浄する工程とを具備することを特徴とする。
【選択図】 なし
Description
ポーラスHSQ系材料としては、例えばXLK(米Dow Corning Corp.製、比誘電率=2〜2.2)、OCL T−72(東京応化工業製、比誘電率=1.9〜2.2)、Nanoglass(米Honeywell Electronic Materials製、比誘電率=1.8〜2.2)、およびMesoELK(米Air Productsand Chemicals,Inc、比誘電率=2以下)等が挙げられる。
有機シリカガラス(SiOC系材料)としては、例えばBlack Diamond(米Applied Materials,Inc製、比誘電率=2.4〜3.0)、HSG−R7(日立化成工業製、比誘電率=2.8)、p−MTES(日立開発製、比誘電率=3.2)、CORAL(米Novellus Systems,Inc製、比誘電率=2.4〜2.7)、およびAurora2.7(日本エー・エス・エム社製、比誘電率=2.7)等が挙げられる。
MSQ系材料としては、例えばOCD T−9(東京応化工業製、比誘電率=2.7)、LKD−T200(JSR製、比誘電率=2.5〜2.7)、HOSP(米Honeywell Electronic Materials製、比誘電率=2.5)、およびHSG−RZ25(日立化成工業製、比誘電率=2.5)等がある。
14…銅拡散防止膜; 15…配線材料膜; 16…導電層; 17…層間絶縁膜
20…ターンテーブル; 21…研磨パッド; 22…半導体基板
23…トップリング; 24…スラリー供給ノズル; 25…スラリー
26…洗浄液供給ノズル; 27…ドレッサー
31a,31b,31c,31d…コロ; 32a,32b…ロール
A…コロの回転方向; B…半導体基板の回転方向; C…ロールの回転方向。
Claims (5)
- 半導体基板上に、3.5以下の比誘電率を有する疎水性の層間絶縁膜を形成する工程と、
前記層間絶縁膜に凹部を設ける工程と、
前記凹部が設けられた前記層間絶縁膜上に導電性材料を堆積して導電層を形成する工程と、
前記層間絶縁膜上の前記導電性材料を研磨により除去して、前記導電性材料を前記凹部内に埋め込み、前記層間絶縁膜の表面を露出する工程と、
前記導電性材料が埋め込まれた前記層間絶縁膜の表面を、無機アルカリを含有しpHが9を越えるアルカリ洗浄液を用いて樹脂製部材により加圧洗浄する工程と
を具備することを特徴とする
半導体装置の製造方法。 - 前記アルカリ洗浄液として、9を越え14未満のpHを有する水溶液を用いることを特徴とする請求項1記載の半導体装置の製造方法。
- 前記加圧洗浄は、前記導電性材料が埋め込まれた前記層間絶縁膜と前記樹脂製部材とを、20〜250gf/cm2の圧力で当接させて行なうことを特徴とする請求項1または2に記載の半導体装置の製造方法。
- 前記樹脂製部材は、研磨布であることを特徴とする請求項1乃至3のいずれか1項に記載の半導体装置の製造方法。
- 前記アルカリ洗浄液は、有機酸をさらに含有することを特徴とする請求項1乃至4のいずれか1項に記載の半導体装置の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004210180A JP2006032694A (ja) | 2004-07-16 | 2004-07-16 | 半導体装置の製造方法 |
US11/142,235 US20060012047A1 (en) | 2004-07-16 | 2005-06-02 | Method of manufacturing semiconductor device |
US12/289,271 US7825028B2 (en) | 2004-07-16 | 2008-10-23 | Method of manufacturing semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004210180A JP2006032694A (ja) | 2004-07-16 | 2004-07-16 | 半導体装置の製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2006032694A true JP2006032694A (ja) | 2006-02-02 |
Family
ID=35598612
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004210180A Pending JP2006032694A (ja) | 2004-07-16 | 2004-07-16 | 半導体装置の製造方法 |
Country Status (2)
Country | Link |
---|---|
US (2) | US20060012047A1 (ja) |
JP (1) | JP2006032694A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007234719A (ja) * | 2006-02-28 | 2007-09-13 | Sanyo Electric Co Ltd | 半導体装置およびその製造方法 |
JP2015026813A (ja) * | 2013-06-20 | 2015-02-05 | 東京エレクトロン株式会社 | 液処理方法、液処理装置及び記憶媒体 |
WO2015049829A1 (ja) * | 2013-10-03 | 2015-04-09 | 信越半導体株式会社 | 研磨布の洗浄方法及びウェーハの研磨方法 |
JP2016049612A (ja) * | 2014-09-01 | 2016-04-11 | 株式会社荏原製作所 | 研磨方法および研磨装置 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4493444B2 (ja) * | 2004-08-26 | 2010-06-30 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
US7947579B2 (en) * | 2006-02-13 | 2011-05-24 | Stc.Unm | Method of making dense, conformal, ultra-thin cap layers for nanoporous low-k ILD by plasma assisted atomic layer deposition |
CN102543845B (zh) * | 2010-12-29 | 2014-10-22 | 中芯国际集成电路制造(北京)有限公司 | 半导体器件及其制作方法 |
US20130061876A1 (en) * | 2011-09-14 | 2013-03-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor Device Surface Clean |
CN112436027A (zh) * | 2020-11-23 | 2021-03-02 | 长江先进存储产业创新中心有限责任公司 | 半导体结构及其制造方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08250455A (ja) * | 1995-02-15 | 1996-09-27 | Texas Instr Inc <Ti> | 化学機械的に研磨される半導体ウェーハ面から汚染粒子を除去する方法および装置 |
JP2001196339A (ja) * | 2000-01-11 | 2001-07-19 | Ind Technol Res Inst | オンラインのcmp後洗浄方法 |
JP2002079190A (ja) * | 2000-09-06 | 2002-03-19 | Dainippon Screen Mfg Co Ltd | 基板洗浄部材、ならびにこれを用いた基板洗浄装置および基板洗浄方法 |
JP2003179020A (ja) * | 2001-12-12 | 2003-06-27 | Sumitomo Mitsubishi Silicon Corp | 研磨布テクスチャの転写防止方法 |
JP2003289060A (ja) * | 2002-01-28 | 2003-10-10 | Mitsubishi Chemicals Corp | 半導体デバイス用基板の洗浄液および洗浄方法 |
JP2004022855A (ja) * | 2002-06-18 | 2004-01-22 | Shibaura Mechatronics Corp | 半導体装置の製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5466389A (en) * | 1994-04-20 | 1995-11-14 | J. T. Baker Inc. | PH adjusted nonionic surfactant-containing alkaline cleaner composition for cleaning microelectronics substrates |
JPH08107094A (ja) | 1994-10-05 | 1996-04-23 | Toshiba Corp | 基板の洗浄方法 |
JP2002110679A (ja) * | 2000-09-29 | 2002-04-12 | Hitachi Ltd | 半導体集積回路装置の製造方法 |
JP4713767B2 (ja) | 2001-05-30 | 2011-06-29 | 株式会社東芝 | 洗浄液および半導体装置の製造方法 |
-
2004
- 2004-07-16 JP JP2004210180A patent/JP2006032694A/ja active Pending
-
2005
- 2005-06-02 US US11/142,235 patent/US20060012047A1/en not_active Abandoned
-
2008
- 2008-10-23 US US12/289,271 patent/US7825028B2/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08250455A (ja) * | 1995-02-15 | 1996-09-27 | Texas Instr Inc <Ti> | 化学機械的に研磨される半導体ウェーハ面から汚染粒子を除去する方法および装置 |
JP2001196339A (ja) * | 2000-01-11 | 2001-07-19 | Ind Technol Res Inst | オンラインのcmp後洗浄方法 |
JP2002079190A (ja) * | 2000-09-06 | 2002-03-19 | Dainippon Screen Mfg Co Ltd | 基板洗浄部材、ならびにこれを用いた基板洗浄装置および基板洗浄方法 |
JP2003179020A (ja) * | 2001-12-12 | 2003-06-27 | Sumitomo Mitsubishi Silicon Corp | 研磨布テクスチャの転写防止方法 |
JP2003289060A (ja) * | 2002-01-28 | 2003-10-10 | Mitsubishi Chemicals Corp | 半導体デバイス用基板の洗浄液および洗浄方法 |
JP2004022855A (ja) * | 2002-06-18 | 2004-01-22 | Shibaura Mechatronics Corp | 半導体装置の製造方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007234719A (ja) * | 2006-02-28 | 2007-09-13 | Sanyo Electric Co Ltd | 半導体装置およびその製造方法 |
JP2015026813A (ja) * | 2013-06-20 | 2015-02-05 | 東京エレクトロン株式会社 | 液処理方法、液処理装置及び記憶媒体 |
WO2015049829A1 (ja) * | 2013-10-03 | 2015-04-09 | 信越半導体株式会社 | 研磨布の洗浄方法及びウェーハの研磨方法 |
JP2016049612A (ja) * | 2014-09-01 | 2016-04-11 | 株式会社荏原製作所 | 研磨方法および研磨装置 |
Also Published As
Publication number | Publication date |
---|---|
US20090061626A1 (en) | 2009-03-05 |
US20060012047A1 (en) | 2006-01-19 |
US7825028B2 (en) | 2010-11-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP2539411B1 (en) | Chemical-mechanical planarization of substrates containing copper, ruthenium, and tantalum layers | |
KR101099721B1 (ko) | 모듈라 베리어 제거 연마 슬러리 | |
US6794285B2 (en) | Slurry for CMP, and method of manufacturing semiconductor device | |
KR101020613B1 (ko) | 탄탈 배리어 제거 용액 | |
US7825028B2 (en) | Method of manufacturing semiconductor device | |
US6001269A (en) | Method for polishing a composite comprising an insulator, a metal, and titanium | |
JP5329786B2 (ja) | 研磨液および半導体装置の製造方法 | |
US20020019202A1 (en) | Control of removal rates in CMP | |
JP4901301B2 (ja) | 研磨方法及び半導体装置の製造方法 | |
JP2000183003A (ja) | 銅系金属用研磨組成物および半導体装置の製造方法 | |
US6841479B2 (en) | Method of reducing in-trench smearing during polishing | |
JP4864402B2 (ja) | 半導体装置の製造方法 | |
WO2006112202A1 (ja) | 半導体装置及びその製造方法 | |
JP5369597B2 (ja) | Cmp研磨液及び研磨方法 | |
US7465668B2 (en) | Method of manufacturing semiconductor device | |
US6403468B1 (en) | Method for forming embedded metal wiring | |
JP4713767B2 (ja) | 洗浄液および半導体装置の製造方法 | |
JP2004022855A (ja) | 半導体装置の製造方法 | |
JP4984032B2 (ja) | 化学機械研磨用水系分散体および化学機械研磨方法 | |
JP2009076716A (ja) | 基板洗浄方法および半導体装置の製造方法 | |
JP2004022986A (ja) | 化学的機械的研磨後の洗浄液 | |
JP2004152785A (ja) | 銅拡散防止膜用研磨組成物および半導体装置の製造方法 | |
JP2009246228A (ja) | 研磨方法及び半導体装置の製造方法 | |
JP2006156519A (ja) | 半導体装置の製造方法 | |
Kondo et al. | Direct CMP on porous low-k film for damage-less Cu integration |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20061003 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090123 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090127 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090330 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20090714 |