JP2005537141A5 - - Google Patents

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Publication number
JP2005537141A5
JP2005537141A5 JP2004531513A JP2004531513A JP2005537141A5 JP 2005537141 A5 JP2005537141 A5 JP 2005537141A5 JP 2004531513 A JP2004531513 A JP 2004531513A JP 2004531513 A JP2004531513 A JP 2004531513A JP 2005537141 A5 JP2005537141 A5 JP 2005537141A5
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JP
Japan
Prior art keywords
silicon
containing elastomer
pattern
substrate
elastomer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004531513A
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English (en)
Japanese (ja)
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JP2005537141A (ja
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Publication date
Priority claimed from US10/230,882 external-priority patent/US6805809B2/en
Application filed filed Critical
Publication of JP2005537141A publication Critical patent/JP2005537141A/ja
Publication of JP2005537141A5 publication Critical patent/JP2005537141A5/ja
Pending legal-status Critical Current

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JP2004531513A 2002-08-28 2003-08-28 転写微細加工 Pending JP2005537141A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/230,882 US6805809B2 (en) 2002-08-28 2002-08-28 Decal transfer microfabrication
PCT/US2003/026751 WO2004021084A2 (en) 2002-08-28 2003-08-28 Decal transfer microfabrication

Publications (2)

Publication Number Publication Date
JP2005537141A JP2005537141A (ja) 2005-12-08
JP2005537141A5 true JP2005537141A5 (https=) 2006-10-19

Family

ID=31976614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004531513A Pending JP2005537141A (ja) 2002-08-28 2003-08-28 転写微細加工

Country Status (9)

Country Link
US (2) US6805809B2 (https=)
EP (1) EP1539638A2 (https=)
JP (1) JP2005537141A (https=)
KR (1) KR20050052480A (https=)
CN (2) CN100413778C (https=)
AU (1) AU2003260094A1 (https=)
CA (1) CA2495978A1 (https=)
SG (1) SG170619A1 (https=)
WO (1) WO2004021084A2 (https=)

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