JP2005530125A - 遠方領域の光学顕微鏡の透明インタフェイスを備えた複数プレートのチップまたはサンプルをスキャンする再現可能なスキャンプローブ顕微鏡 - Google Patents

遠方領域の光学顕微鏡の透明インタフェイスを備えた複数プレートのチップまたはサンプルをスキャンする再現可能なスキャンプローブ顕微鏡 Download PDF

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JP2005530125A
JP2005530125A JP2003524047A JP2003524047A JP2005530125A JP 2005530125 A JP2005530125 A JP 2005530125A JP 2003524047 A JP2003524047 A JP 2003524047A JP 2003524047 A JP2003524047 A JP 2003524047A JP 2005530125 A JP2005530125 A JP 2005530125A
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Japan
Prior art keywords
microscope
probe
tip
scanning
sample
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JP2003524047A
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Japanese (ja)
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JP2005530125A5 (enExample
Inventor
アーロン・ルイス
アナトリー・コミッサール
ヒシャム・タハ
アレキサンダー・ラトナー
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Nanonics Imaging Ltd
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Nanonics Imaging Ltd
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Publication of JP2005530125A5 publication Critical patent/JP2005530125A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G01Q30/025—Optical microscopes coupled with SPM
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/10—Thermal environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2003524047A 2001-08-27 2002-08-27 遠方領域の光学顕微鏡の透明インタフェイスを備えた複数プレートのチップまたはサンプルをスキャンする再現可能なスキャンプローブ顕微鏡 Pending JP2005530125A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IL14513601A IL145136A0 (en) 2001-08-27 2001-08-27 Multiple plate tip or sample scanning reconfigurable scanning probe microscope with transparent interfacing of far-field optical microscopes
PCT/US2002/025947 WO2003019238A2 (en) 2001-08-27 2002-08-27 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011016791A Division JP2011107157A (ja) 2001-08-27 2011-01-28 遠方領域の光学顕微鏡の透明インタフェイスを備えた複数プレートのチップまたはサンプルをスキャンする再現可能なスキャンプローブ顕微鏡

Publications (2)

Publication Number Publication Date
JP2005530125A true JP2005530125A (ja) 2005-10-06
JP2005530125A5 JP2005530125A5 (enExample) 2006-01-05

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Family Applications (2)

Application Number Title Priority Date Filing Date
JP2003524047A Pending JP2005530125A (ja) 2001-08-27 2002-08-27 遠方領域の光学顕微鏡の透明インタフェイスを備えた複数プレートのチップまたはサンプルをスキャンする再現可能なスキャンプローブ顕微鏡
JP2011016791A Pending JP2011107157A (ja) 2001-08-27 2011-01-28 遠方領域の光学顕微鏡の透明インタフェイスを備えた複数プレートのチップまたはサンプルをスキャンする再現可能なスキャンプローブ顕微鏡

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2011016791A Pending JP2011107157A (ja) 2001-08-27 2011-01-28 遠方領域の光学顕微鏡の透明インタフェイスを備えた複数プレートのチップまたはサンプルをスキャンする再現可能なスキャンプローブ顕微鏡

Country Status (6)

Country Link
US (1) US7047796B2 (enExample)
EP (1) EP1427983A4 (enExample)
JP (2) JP2005530125A (enExample)
AU (1) AU2002327461A1 (enExample)
IL (1) IL145136A0 (enExample)
WO (1) WO2003019238A2 (enExample)

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KR101101698B1 (ko) 2002-10-21 2011-12-30 나노잉크, 인크. 나노미터-수준으로 제어된 구조, 이의 제작을 위한 방법 및장치, 및 마스크 복구, 강화, 및 제작에의 적용
WO2006012893A1 (de) * 2004-08-05 2006-02-09 Jpk Instruments Ag Vorrichtung zum aufnehmen einer messprobe
JP4323412B2 (ja) 2004-11-02 2009-09-02 株式会社ミツトヨ 表面性状測定用探針およびこれを用いた顕微鏡
US7472576B1 (en) 2004-11-17 2009-01-06 State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Portland State University Nanometrology device standards for scanning probe microscopes and processes for their fabrication and use
GB2443674B (en) * 2006-10-04 2008-11-26 Oxford Instr Superconductivity Flow-cooled magnet system
US7692138B1 (en) 2006-10-23 2010-04-06 David James Ray Integrated scanning probe microscope and confocal microscope
US7842920B2 (en) 2006-12-14 2010-11-30 Dcg Systems, Inc. Methods and systems of performing device failure analysis, electrical characterization and physical characterization
US8720256B2 (en) * 2007-02-20 2014-05-13 Wayne Allen Bonin Off-axis imaging for indentation instruments
WO2008131416A1 (en) * 2007-04-24 2008-10-30 The University Of Akron Method and apparatus for performing apertureless near-field scanning optical microscopy
IL197329A0 (en) * 2009-03-01 2009-12-24 David Lewis A scanned probe microscope without interference or geometric constraint for single or multiple probe operation in air or liquid
FR2955938B1 (fr) 2010-01-29 2012-08-03 Commissariat Energie Atomique Dispositif electronique de pilotage et d'amplification pour une sonde locale piezoelectrique de mesure de force sous un faisceau de particules
CN103616532B (zh) * 2013-11-06 2015-10-28 中国科学技术大学 低回差高重复扫描探针显微镜独立扫描器
KR101675489B1 (ko) * 2014-12-24 2016-11-14 한국표준과학연구원 헤드 일체형 원자간력 현미경 및 이를 포함한 융합 현미경
JP2018510364A (ja) * 2015-02-26 2018-04-12 クサレント リミテッド ライアビリティー カンパニー 集積マルチチップ走査型プローブ顕微鏡
KR102012577B1 (ko) 2015-02-26 2019-08-20 살렌트, 엘엘씨 나노-전자-기계적-시스템 프로브들을 제작하기 위한 방법들 및 시스템들
CN104749160B (zh) * 2015-03-06 2017-09-12 华南师范大学 一种并列双针尖增强的拉曼光谱扫描成像方法
US10866273B2 (en) 2016-03-09 2020-12-15 Xallent, LLC Functional prober chip
WO2018089022A1 (en) * 2016-11-11 2018-05-17 Aaron Lewis Enhancing optical signals with probe tips optimized for chemical potential and optical characteristics
US10784054B2 (en) 2017-04-06 2020-09-22 Kwame Amponsah Nanoelectromechanical devices with metal-to-metal contacts
US10663484B2 (en) 2018-02-14 2020-05-26 Xallent, LLC Multiple integrated tips scanning probe microscope with pre-alignment components
CN120142699B (zh) * 2025-05-16 2025-08-22 南京大学 用于约瑟夫森探针显微镜的原子力显微成像装置及方法

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JPH05141961A (ja) * 1991-11-21 1993-06-08 Olympus Optical Co Ltd 原子間力顕微鏡
JPH0612907U (ja) * 1992-07-15 1994-02-18 オリンパス光学工業株式会社 走査型トンネル顕微鏡およびその試料台
JPH0835972A (ja) * 1994-07-21 1996-02-06 Olympus Optical Co Ltd 簡易型ｓｐｍ装置

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US5289004A (en) 1990-03-27 1994-02-22 Olympus Optical Co., Ltd. Scanning probe microscope having cantilever and detecting sample characteristics by means of reflected sample examination light
JP3202303B2 (ja) 1992-02-20 2001-08-27 セイコーインスツルメンツ株式会社 原子間力顕微鏡
JPH07504749A (ja) * 1992-03-13 1995-05-25 サーモマイクロスコープス　コーポレーション 走査型プローブ電子顕微鏡
JP3081979B2 (ja) 1992-05-08 2000-08-28 セイコーインスツルメンツ株式会社 顕微鏡
US5440920A (en) * 1994-02-03 1995-08-15 Molecular Imaging Systems Scanning force microscope with beam tracking lens
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JPH09218211A (ja) * 1996-02-13 1997-08-19 Horiba Ltd カンチレバー走査プローブ顕微鏡
JPH10283972A (ja) 1997-04-10 1998-10-23 Seiko Instr Inc 走査型プローブ顕微鏡を用いた加工、記録、再生装置
US6246054B1 (en) 1997-06-10 2001-06-12 Olympus Optical Co., Ltd. Scanning probe microscope suitable for observing the sidewalls of steps in a specimen and measuring the tilt angle of the sidewalls
JPH1114636A (ja) * 1997-06-26 1999-01-22 Olympus Optical Co Ltd 透過照明装置
JP3511361B2 (ja) 1997-08-04 2004-03-29 セイコーインスツルメンツ株式会社 走査プローブ顕微鏡
JP2000009624A (ja) * 1998-06-22 2000-01-14 Seiko Instruments Inc 走査型プローブ顕微鏡
JP3905254B2 (ja) 1998-06-22 2007-04-18 エスアイアイ・ナノテクノロジー株式会社 走査型プローブ顕微鏡
JP3784570B2 (ja) * 1999-04-02 2006-06-14 日本電子株式会社 走査型プローブ顕微鏡
JP4526626B2 (ja) * 1999-12-20 2010-08-18 独立行政法人科学技術振興機構 電気特性評価装置

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JPH05141961A (ja) * 1991-11-21 1993-06-08 Olympus Optical Co Ltd 原子間力顕微鏡
JPH0612907U (ja) * 1992-07-15 1994-02-18 オリンパス光学工業株式会社 走査型トンネル顕微鏡およびその試料台
JPH0835972A (ja) * 1994-07-21 1996-02-06 Olympus Optical Co Ltd 簡易型ｓｐｍ装置

Also Published As

Publication number Publication date
US7047796B2 (en) 2006-05-23
JP2011107157A (ja) 2011-06-02
EP1427983A4 (en) 2008-01-23
WO2003019238A2 (en) 2003-03-06
WO2003019238A3 (en) 2003-10-09
AU2002327461A1 (en) 2003-03-10
EP1427983A2 (en) 2004-06-16
US20040216518A1 (en) 2004-11-04
IL145136A0 (en) 2002-06-30

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