JP2005527392A - 反力移動システム - Google Patents
反力移動システム Download PDFInfo
- Publication number
- JP2005527392A JP2005527392A JP2004507023A JP2004507023A JP2005527392A JP 2005527392 A JP2005527392 A JP 2005527392A JP 2004507023 A JP2004507023 A JP 2004507023A JP 2004507023 A JP2004507023 A JP 2004507023A JP 2005527392 A JP2005527392 A JP 2005527392A
- Authority
- JP
- Japan
- Prior art keywords
- reaction force
- bearing
- freedom
- frame
- machine base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/0032—Arrangements for preventing or isolating vibrations in parts of the machine
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/28—Electric drives
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Linear Motors (AREA)
- Machine Tool Units (AREA)
- Vibration Prevention Devices (AREA)
- Steering Control In Accordance With Driving Conditions (AREA)
- Power Steering Mechanism (AREA)
- Radio Relay Systems (AREA)
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
- Types And Forms Of Lifts (AREA)
- Auxiliary Devices For Machine Tools (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Description
12 機械ベース
14 リニア軸受
16 モーター
18 可動子
19 固定子
20 受動防振体
22 フレーム
24 リニア軸受セット
26 (フレームの)拡張部
28 自在継手
30 平面軸受
Claims (13)
- 反力移動システムであって、
フレームと、
受動防振構造体を通じてフレームによって支持された機械ベースと、
機械ベースに対する運動のために支持される往復台と、
前記フレームに連結された固定子及び往復台に連結された可動子を有し、かつ機械ベースに対して往復台を移動させるモーターとを備える反力移動システム。 - 前記モーターはリニアモーターである請求項1の反力移動システム。
- 前記往復台は、機械ベースに対し単一の自由度の運動に拘束される請求項1の反力移動システム。
- 前記モーター固定子は、機械ベース上のリニア軸受によって単一の自由度に拘束される請求項3の反力移動システム。
- 前記固定子を、フレームに対する単一の自由度の運動のみ拘束し、他の五自由度における自由運動を許容するように、固定子がフレームに連結される請求項1の反力移動システム。
- 前記固定子は、球面軸受、自在継手、回転軸受、リニア軸受、平面軸受、及び曲げ部材からなる群から選択される一又は複数の構成要素によってフレームに連結される請求項5の反力移動システム。
- 前記固定子は、二自由度継手と三自由度継手との直列結合によってフレームに連結される請求項5の反力移動システム。
- 前記2自由度継手は自由継手であり、三自由度継手は平面軸受である請求項7の反力移動システム。
- 前記曲げ部材は、軸上の高剛性及び他の5自由度における高コンプライアンスを有するノッチ付きヒンジたわみ部材である請求項6の反力移動システム。
- 前記往復台は、リニア軸受により、機械ベースに対し単一の自由度の運動に拘束される請求項3の反力移動システム。
- 前記リニア軸受セットは、ボール軸受、ローラー軸受、気体静力学的軸受、又は流体静力学的軸受からなる群から選択される請求項10の反力移動システム。
- 前記リニア軸受セットは、ボール軸受、ローラー軸受、気体静力学的軸受、流体静力学的軸受、又は滑り軸受からなる群から選択される請求項4の反力移動システム。
- 前記機械ベースに対する往復台の位置に対応するエンコーダーを更に含む請求項1の反力移動システム。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/155,058 US6844635B2 (en) | 2002-05-24 | 2002-05-24 | Reaction force transfer system |
PCT/US2003/016529 WO2003099514A1 (en) | 2002-05-24 | 2003-05-23 | Reaction force transfer system |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005527392A true JP2005527392A (ja) | 2005-09-15 |
JP4509774B2 JP4509774B2 (ja) | 2010-07-21 |
Family
ID=29548993
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004507023A Expired - Fee Related JP4509774B2 (ja) | 2002-05-24 | 2003-05-23 | 反力移動システム |
Country Status (14)
Country | Link |
---|---|
US (1) | US6844635B2 (ja) |
EP (1) | EP1507628B1 (ja) |
JP (1) | JP4509774B2 (ja) |
KR (2) | KR20100090814A (ja) |
CN (1) | CN1675023A (ja) |
AT (1) | ATE333339T1 (ja) |
AU (1) | AU2003241622A1 (ja) |
CA (1) | CA2485482C (ja) |
DE (1) | DE60306923T2 (ja) |
DK (1) | DK1507628T3 (ja) |
ES (1) | ES2270040T3 (ja) |
HK (1) | HK1070321A1 (ja) |
PT (1) | PT1507628E (ja) |
WO (1) | WO2003099514A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010120005A (ja) * | 2008-11-19 | 2010-06-03 | Top Engineering Co Ltd | 反力相殺装置及びそれを備えたペーストディスペンサー |
KR20110125543A (ko) * | 2010-05-13 | 2011-11-21 | 주식회사 탑 엔지니어링 | 반력상쇄장치 및 이를 구비한 페이스트 디스펜서 |
JP2020175490A (ja) * | 2019-04-22 | 2020-10-29 | 株式会社ディスコ | 加工装置 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7268504B2 (en) * | 2002-05-24 | 2007-09-11 | Kollomorgen Corporation | Stator position feedback controller |
US7119884B2 (en) * | 2003-12-24 | 2006-10-10 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP2005331402A (ja) * | 2004-05-20 | 2005-12-02 | Sumitomo Heavy Ind Ltd | ステージ装置 |
ES2321033T3 (es) * | 2006-06-23 | 2009-06-01 | The Gleason Works | Maquina herramienta. |
US8016010B2 (en) * | 2009-09-02 | 2011-09-13 | Asm Assembly Automation Ltd | Rotary bonding tool which provides a large bond force |
KR101052491B1 (ko) * | 2009-12-18 | 2011-07-29 | 주식회사 탑 엔지니어링 | 어레이 테스트 장치 |
KR101139292B1 (ko) * | 2010-06-18 | 2012-04-26 | 순환엔지니어링 주식회사 | 엔코더 피드백 및 에러 맵핑과 에어 압력 조절을 이용한 에러 보상 시스템 |
DE102011018910B4 (de) * | 2011-04-21 | 2015-02-26 | Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Technologie, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt | Verfahrtisch sowie Verfahren zum Bewegen einer Arbeitsplatte |
TWI616269B (zh) * | 2016-08-01 | 2018-03-01 | Reaction force elimination platform device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0577126A (ja) * | 1991-09-18 | 1993-03-30 | Canon Inc | 移動ステージ装置および該装置の駆動方法 |
JPH1074685A (ja) * | 1996-08-29 | 1998-03-17 | Canon Inc | 送り装置 |
JPH10328954A (ja) * | 1997-05-23 | 1998-12-15 | Canon Inc | 位置決めテーブル装置および初期位置推定方法 |
JPH11297587A (ja) * | 1998-04-08 | 1999-10-29 | Canon Inc | 露光装置およびデバイス製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5528118A (en) | 1994-04-01 | 1996-06-18 | Nikon Precision, Inc. | Guideless stage with isolated reaction stage |
US5874820A (en) | 1995-04-04 | 1999-02-23 | Nikon Corporation | Window frame-guided stage mechanism |
US6246204B1 (en) * | 1994-06-27 | 2001-06-12 | Nikon Corporation | Electromagnetic alignment and scanning apparatus |
US6008500A (en) | 1995-04-04 | 1999-12-28 | Nikon Corporation | Exposure apparatus having dynamically isolated reaction frame |
DE69629087T2 (de) * | 1995-05-30 | 2004-04-22 | Asml Netherlands B.V. | Positionierungsgerät mit einem referenzrahmen für ein messsystem |
JPH11189332A (ja) * | 1997-12-26 | 1999-07-13 | Canon Inc | ステージ装置およびこれを用いた露光装置ならびにデバイス製造方法 |
US6378672B1 (en) * | 1998-10-13 | 2002-04-30 | Canon Kabushiki Kaisha | Active vibration isolation device and its control method |
JP2000309125A (ja) * | 1999-04-28 | 2000-11-07 | Mitsubishi Electric Corp | 光プリント装置 |
US6654095B1 (en) * | 1999-10-18 | 2003-11-25 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method |
US6603531B1 (en) * | 2000-11-16 | 2003-08-05 | Nikon Corporation | Stage assembly including a reaction assembly that is connected by actuators |
-
2002
- 2002-05-24 US US10/155,058 patent/US6844635B2/en not_active Expired - Lifetime
-
2003
- 2003-05-23 DK DK03731372T patent/DK1507628T3/da active
- 2003-05-23 ES ES03731372T patent/ES2270040T3/es not_active Expired - Lifetime
- 2003-05-23 JP JP2004507023A patent/JP4509774B2/ja not_active Expired - Fee Related
- 2003-05-23 WO PCT/US2003/016529 patent/WO2003099514A1/en active IP Right Grant
- 2003-05-23 CN CNA038115492A patent/CN1675023A/zh active Pending
- 2003-05-23 EP EP03731372A patent/EP1507628B1/en not_active Expired - Lifetime
- 2003-05-23 DE DE60306923T patent/DE60306923T2/de not_active Expired - Lifetime
- 2003-05-23 KR KR1020107017012A patent/KR20100090814A/ko not_active Application Discontinuation
- 2003-05-23 CA CA2485482A patent/CA2485482C/en not_active Expired - Fee Related
- 2003-05-23 PT PT03731372T patent/PT1507628E/pt unknown
- 2003-05-23 AU AU2003241622A patent/AU2003241622A1/en not_active Abandoned
- 2003-05-23 KR KR10-2004-7018104A patent/KR20050003426A/ko active Search and Examination
- 2003-05-23 AT AT03731372T patent/ATE333339T1/de not_active IP Right Cessation
-
2005
- 2005-04-07 HK HK05102910A patent/HK1070321A1/xx not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0577126A (ja) * | 1991-09-18 | 1993-03-30 | Canon Inc | 移動ステージ装置および該装置の駆動方法 |
JP2714502B2 (ja) * | 1991-09-18 | 1998-02-16 | キヤノン株式会社 | 移動ステージ装置 |
JPH1074685A (ja) * | 1996-08-29 | 1998-03-17 | Canon Inc | 送り装置 |
JPH10328954A (ja) * | 1997-05-23 | 1998-12-15 | Canon Inc | 位置決めテーブル装置および初期位置推定方法 |
JPH11297587A (ja) * | 1998-04-08 | 1999-10-29 | Canon Inc | 露光装置およびデバイス製造方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010120005A (ja) * | 2008-11-19 | 2010-06-03 | Top Engineering Co Ltd | 反力相殺装置及びそれを備えたペーストディスペンサー |
KR20110125543A (ko) * | 2010-05-13 | 2011-11-21 | 주식회사 탑 엔지니어링 | 반력상쇄장치 및 이를 구비한 페이스트 디스펜서 |
KR101703717B1 (ko) * | 2010-05-13 | 2017-02-08 | 주식회사 탑 엔지니어링 | 반력상쇄장치 및 이를 구비한 페이스트 디스펜서 |
JP2020175490A (ja) * | 2019-04-22 | 2020-10-29 | 株式会社ディスコ | 加工装置 |
JP7283964B2 (ja) | 2019-04-22 | 2023-05-30 | 株式会社ディスコ | 加工装置 |
Also Published As
Publication number | Publication date |
---|---|
US20030218398A1 (en) | 2003-11-27 |
DE60306923D1 (de) | 2006-08-31 |
ATE333339T1 (de) | 2006-08-15 |
AU2003241622A1 (en) | 2003-12-12 |
ES2270040T3 (es) | 2007-04-01 |
KR20100090814A (ko) | 2010-08-17 |
HK1070321A1 (en) | 2005-06-17 |
CA2485482C (en) | 2011-01-11 |
PT1507628E (pt) | 2006-12-29 |
EP1507628A1 (en) | 2005-02-23 |
EP1507628B1 (en) | 2006-07-19 |
CA2485482A1 (en) | 2003-12-04 |
DK1507628T3 (da) | 2006-12-04 |
DE60306923T2 (de) | 2007-03-15 |
CN1675023A (zh) | 2005-09-28 |
US6844635B2 (en) | 2005-01-18 |
KR20050003426A (ko) | 2005-01-10 |
JP4509774B2 (ja) | 2010-07-21 |
WO2003099514A1 (en) | 2003-12-04 |
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