DK1507628T3 - System til overföring af reaktionskraft - Google Patents

System til overföring af reaktionskraft

Info

Publication number
DK1507628T3
DK1507628T3 DK03731372T DK03731372T DK1507628T3 DK 1507628 T3 DK1507628 T3 DK 1507628T3 DK 03731372 T DK03731372 T DK 03731372T DK 03731372 T DK03731372 T DK 03731372T DK 1507628 T3 DK1507628 T3 DK 1507628T3
Authority
DK
Denmark
Prior art keywords
reaction force
transfer system
force transfer
carriage
frame
Prior art date
Application number
DK03731372T
Other languages
Danish (da)
English (en)
Inventor
Philip M Greene
Scott Hero
Douglas E Bittner
Original Assignee
Kollmorgen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kollmorgen Corp filed Critical Kollmorgen Corp
Application granted granted Critical
Publication of DK1507628T3 publication Critical patent/DK1507628T3/da

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0032—Arrangements for preventing or isolating vibrations in parts of the machine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/28—Electric drives

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Linear Motors (AREA)
  • Machine Tool Units (AREA)
  • Vibration Prevention Devices (AREA)
  • Steering Control In Accordance With Driving Conditions (AREA)
  • Power Steering Mechanism (AREA)
  • Radio Relay Systems (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
  • Types And Forms Of Lifts (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DK03731372T 2002-05-24 2003-05-23 System til overföring af reaktionskraft DK1507628T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/155,058 US6844635B2 (en) 2002-05-24 2002-05-24 Reaction force transfer system

Publications (1)

Publication Number Publication Date
DK1507628T3 true DK1507628T3 (da) 2006-12-04

Family

ID=29548993

Family Applications (1)

Application Number Title Priority Date Filing Date
DK03731372T DK1507628T3 (da) 2002-05-24 2003-05-23 System til overföring af reaktionskraft

Country Status (14)

Country Link
US (1) US6844635B2 (ja)
EP (1) EP1507628B1 (ja)
JP (1) JP4509774B2 (ja)
KR (2) KR20100090814A (ja)
CN (1) CN1675023A (ja)
AT (1) ATE333339T1 (ja)
AU (1) AU2003241622A1 (ja)
CA (1) CA2485482C (ja)
DE (1) DE60306923T2 (ja)
DK (1) DK1507628T3 (ja)
ES (1) ES2270040T3 (ja)
HK (1) HK1070321A1 (ja)
PT (1) PT1507628E (ja)
WO (1) WO2003099514A1 (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7268504B2 (en) * 2002-05-24 2007-09-11 Kollomorgen Corporation Stator position feedback controller
US7119884B2 (en) * 2003-12-24 2006-10-10 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP2005331402A (ja) * 2004-05-20 2005-12-02 Sumitomo Heavy Ind Ltd ステージ装置
ES2321033T3 (es) * 2006-06-23 2009-06-01 The Gleason Works Maquina herramienta.
KR20100056125A (ko) * 2008-11-19 2010-05-27 주식회사 탑 엔지니어링 반력상쇄장치 및 이를 구비한 페이스트 디스펜서
US8016010B2 (en) * 2009-09-02 2011-09-13 Asm Assembly Automation Ltd Rotary bonding tool which provides a large bond force
KR101052491B1 (ko) * 2009-12-18 2011-07-29 주식회사 탑 엔지니어링 어레이 테스트 장치
KR101703717B1 (ko) * 2010-05-13 2017-02-08 주식회사 탑 엔지니어링 반력상쇄장치 및 이를 구비한 페이스트 디스펜서
KR101139292B1 (ko) * 2010-06-18 2012-04-26 순환엔지니어링 주식회사 엔코더 피드백 및 에러 맵핑과 에어 압력 조절을 이용한 에러 보상 시스템
DE102011018910B4 (de) * 2011-04-21 2015-02-26 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Technologie, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahrtisch sowie Verfahren zum Bewegen einer Arbeitsplatte
TWI616269B (zh) * 2016-08-01 2018-03-01 Reaction force elimination platform device
JP7283964B2 (ja) * 2019-04-22 2023-05-30 株式会社ディスコ 加工装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2714502B2 (ja) * 1991-09-18 1998-02-16 キヤノン株式会社 移動ステージ装置
US5528118A (en) 1994-04-01 1996-06-18 Nikon Precision, Inc. Guideless stage with isolated reaction stage
US5874820A (en) 1995-04-04 1999-02-23 Nikon Corporation Window frame-guided stage mechanism
US6246204B1 (en) * 1994-06-27 2001-06-12 Nikon Corporation Electromagnetic alignment and scanning apparatus
US6008500A (en) 1995-04-04 1999-12-28 Nikon Corporation Exposure apparatus having dynamically isolated reaction frame
DE69629087T2 (de) * 1995-05-30 2004-04-22 Asml Netherlands B.V. Positionierungsgerät mit einem referenzrahmen für ein messsystem
JP3635600B2 (ja) 1996-08-29 2005-04-06 キヤノン株式会社 送り装置
JPH10328954A (ja) * 1997-05-23 1998-12-15 Canon Inc 位置決めテーブル装置および初期位置推定方法
JPH11189332A (ja) * 1997-12-26 1999-07-13 Canon Inc ステージ装置およびこれを用いた露光装置ならびにデバイス製造方法
JP3554186B2 (ja) * 1998-04-08 2004-08-18 キヤノン株式会社 露光装置、デバイス製造方法および反力受け方法
US6378672B1 (en) * 1998-10-13 2002-04-30 Canon Kabushiki Kaisha Active vibration isolation device and its control method
JP2000309125A (ja) * 1999-04-28 2000-11-07 Mitsubishi Electric Corp 光プリント装置
US6654095B1 (en) * 1999-10-18 2003-11-25 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
US6603531B1 (en) * 2000-11-16 2003-08-05 Nikon Corporation Stage assembly including a reaction assembly that is connected by actuators

Also Published As

Publication number Publication date
US20030218398A1 (en) 2003-11-27
DE60306923D1 (de) 2006-08-31
ATE333339T1 (de) 2006-08-15
AU2003241622A1 (en) 2003-12-12
ES2270040T3 (es) 2007-04-01
KR20100090814A (ko) 2010-08-17
HK1070321A1 (en) 2005-06-17
CA2485482C (en) 2011-01-11
PT1507628E (pt) 2006-12-29
JP2005527392A (ja) 2005-09-15
EP1507628A1 (en) 2005-02-23
EP1507628B1 (en) 2006-07-19
CA2485482A1 (en) 2003-12-04
DE60306923T2 (de) 2007-03-15
CN1675023A (zh) 2005-09-28
US6844635B2 (en) 2005-01-18
KR20050003426A (ko) 2005-01-10
JP4509774B2 (ja) 2010-07-21
WO2003099514A1 (en) 2003-12-04

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