JP2005525548A5 - - Google Patents

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Publication number
JP2005525548A5
JP2005525548A5 JP2004503890A JP2004503890A JP2005525548A5 JP 2005525548 A5 JP2005525548 A5 JP 2005525548A5 JP 2004503890 A JP2004503890 A JP 2004503890A JP 2004503890 A JP2004503890 A JP 2004503890A JP 2005525548 A5 JP2005525548 A5 JP 2005525548A5
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JP
Japan
Prior art keywords
interferometer
measurement object
wafer
relative
defect
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004503890A
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English (en)
Japanese (ja)
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JP2005525548A (ja
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Publication date
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Priority claimed from PCT/US2003/014915 external-priority patent/WO2003095940A2/en
Publication of JP2005525548A publication Critical patent/JP2005525548A/ja
Publication of JP2005525548A5 publication Critical patent/JP2005525548A5/ja
Pending legal-status Critical Current

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JP2004503890A 2002-05-13 2003-05-13 平面ミラー干渉計におけるビーム・ミスアライメントの幾何学的影響の補償 Pending JP2005525548A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US37800402P 2002-05-13 2002-05-13
PCT/US2003/014915 WO2003095940A2 (en) 2002-05-13 2003-05-13 Compensation for geometric effects of beam misalignments in plane mirror interferometers

Publications (2)

Publication Number Publication Date
JP2005525548A JP2005525548A (ja) 2005-08-25
JP2005525548A5 true JP2005525548A5 (enExample) 2006-06-29

Family

ID=29420359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004503890A Pending JP2005525548A (ja) 2002-05-13 2003-05-13 平面ミラー干渉計におけるビーム・ミスアライメントの幾何学的影響の補償

Country Status (4)

Country Link
US (1) US7330274B2 (enExample)
JP (1) JP2005525548A (enExample)
AU (1) AU2003234413A1 (enExample)
WO (1) WO2003095940A2 (enExample)

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WO2004113826A2 (en) 2003-06-19 2004-12-29 Zygo Corporation Compensation for imperfections in a measurement object and for beam misalignments in plane mirror interferometers
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WO2006102234A2 (en) * 2005-03-18 2006-09-28 Zygo Corporation Multi-axis interferometer with procedure and data processing for mirror mapping
US7359057B2 (en) * 2005-08-26 2008-04-15 Ball Aerospace & Technologies Corp. Method and apparatus for measuring small shifts in optical wavelengths
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US8934104B2 (en) * 2010-01-22 2015-01-13 Universitaet Stuttgart Method and arrangement for robust interferometry for detecting a feature of an object
CN102834766B (zh) * 2010-04-01 2015-04-22 皇家飞利浦电子股份有限公司 激光扫描系统、毛发切割设备和相应的方法
US9213227B2 (en) * 2011-08-18 2015-12-15 Nikon Corporation Custom color or polarization sensitive CCD for separating multiple signals in autofocus projection system
DE102016014802B4 (de) 2016-12-13 2018-09-27 Universität Stuttgart Anordnung und Verfahren zur robusten Zweistrahl-Interferometrie mit einer Dreifach-Reflexions-Anordnung
US10883816B2 (en) 2017-03-22 2021-01-05 Asml Netherlands B.V. Position measurement system, zeroing method, lithographic apparatus and device manufacturing method
US10998163B2 (en) * 2018-05-11 2021-05-04 University Of Maryland, College Park Cryogenic trapped-ion system
CN112013972B (zh) * 2019-05-28 2024-03-01 中国科学院上海光学精密机械研究所 横向剪切干涉波前传感器的剪切量标定装置及方法
CN110553580B (zh) * 2019-06-04 2022-05-20 南京英特飞光电技术有限公司 一种倾斜入射相移干涉仪和直角棱镜大面测量方法
CN110441311B (zh) * 2019-07-22 2021-10-08 中国科学院上海光学精密机械研究所 用于多物面成像的多轴多焦镜头
CN111707616B (zh) * 2020-06-30 2023-02-21 西安工业大学 角分辨散射检测装置的多轴运动系统和检测方法
US20240053136A1 (en) * 2020-12-18 2024-02-15 Rapid Phenotyping Pty Limited Method of Processing Interferometry Signal, and Associated Interferometer
CN113607047B (zh) * 2021-08-04 2022-04-22 中国科学院长春光学精密机械与物理研究所 外差干涉信号模拟系统

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