JP2005517875A5 - - Google Patents

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Publication number
JP2005517875A5
JP2005517875A5 JP2003568738A JP2003568738A JP2005517875A5 JP 2005517875 A5 JP2005517875 A5 JP 2005517875A5 JP 2003568738 A JP2003568738 A JP 2003568738A JP 2003568738 A JP2003568738 A JP 2003568738A JP 2005517875 A5 JP2005517875 A5 JP 2005517875A5
Authority
JP
Japan
Prior art keywords
vibration
control drive
feedback
position control
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003568738A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005517875A (ja
Filing date
Publication date
Priority claimed from US10/074,059 external-priority patent/US6563128B2/en
Priority claimed from US10/112,443 external-priority patent/US6872961B2/en
Application filed filed Critical
Publication of JP2005517875A publication Critical patent/JP2005517875A/ja
Publication of JP2005517875A5 publication Critical patent/JP2005517875A5/ja
Pending legal-status Critical Current

Links

JP2003568738A 2002-02-11 2003-01-15 信号デトレンディングを利用した振動制御 Pending JP2005517875A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/074,059 US6563128B2 (en) 2001-03-09 2002-02-11 Base stabilization system
US10/112,443 US6872961B2 (en) 2000-01-27 2002-03-29 Vibration control utilizing signal detrending
PCT/US2003/001332 WO2003069733A1 (en) 2002-02-11 2003-01-15 Vibration control utilizing signal detrending

Publications (2)

Publication Number Publication Date
JP2005517875A JP2005517875A (ja) 2005-06-16
JP2005517875A5 true JP2005517875A5 (enExample) 2006-03-02

Family

ID=27736817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003568738A Pending JP2005517875A (ja) 2002-02-11 2003-01-15 信号デトレンディングを利用した振動制御

Country Status (5)

Country Link
US (1) US6872961B2 (enExample)
EP (1) EP1474844B1 (enExample)
JP (1) JP2005517875A (enExample)
AU (1) AU2003212805A1 (enExample)
WO (1) WO2003069733A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050271110A1 (en) * 2003-08-22 2005-12-08 Rainer Paetzel Excimer laser system with stable beam output
EP1857878B1 (de) * 2006-05-20 2010-01-20 Integrated Dynamics Engineering GmbH Aktives Schwingungsisolationssystem mit einem kombinierten Positionsaktor
US7782446B2 (en) 2007-03-01 2010-08-24 Asml Netherlands B.V. Stage system and lithographic apparatus comprising such stage system
WO2009070711A1 (en) * 2007-11-28 2009-06-04 My Music Machine Adaptive midi wind controller system
EP2119938A1 (en) * 2008-05-15 2009-11-18 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO A vibration sensor and a system to isolate vibrations.
DE102012004808A1 (de) * 2012-03-09 2013-09-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur Beeinflussung der Schwingungsübertragung zwischen zwei Einheiten
US9837939B1 (en) 2015-04-01 2017-12-05 Lockheed Martin Corporation System and method for providing vibration isolation by magnetic levitation
US9964966B1 (en) * 2015-09-28 2018-05-08 Amazon Technologies, Inc. Controlling mechanical vibrations
KR102566136B1 (ko) * 2016-10-14 2023-08-10 삼성전자주식회사 계측 시스템 및 이를 사용하는 스테이지 제어 장치
TWI728762B (zh) * 2020-03-27 2021-05-21 財團法人工業技術研究院 減低機械手臂振動之方法
CN113031669B (zh) * 2021-02-10 2022-04-22 国机集团科学技术研究院有限公司 一种高品质晶体培植类关键工艺环境振动控制技术分析方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL77057A (en) * 1985-03-26 1990-03-19 Wright Barry Corp Active vibration isolation system
US6959484B1 (en) * 1994-01-27 2005-11-01 Cymer, Inc. System for vibration control
US5811821A (en) * 1996-08-09 1998-09-22 Park Scientific Instruments Single axis vibration reducing system
JPH1089403A (ja) 1996-09-10 1998-04-07 Nikon Corp 防振装置
JP3825869B2 (ja) * 1997-03-19 2006-09-27 キヤノン株式会社 能動除振装置
WO1999026120A1 (fr) * 1997-11-18 1999-05-27 Nikon Corporation Eliminateur de vibrations, dispositif d'alignement et procede d'exposition par projection
US6260282B1 (en) * 1998-03-27 2001-07-17 Nikon Corporation Stage control with reduced synchronization error and settling time
JP4109747B2 (ja) * 1998-05-07 2008-07-02 キヤノン株式会社 アクティブ除振装置および露光装置
US6563128B2 (en) * 2001-03-09 2003-05-13 Cymer, Inc. Base stabilization system
US6650666B2 (en) 2000-02-09 2003-11-18 Cymer, Inc. Laser wavelength control unit with piezoelectric driver

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