JPH10116779A5 - - Google Patents

Info

Publication number
JPH10116779A5
JPH10116779A5 JP1996289109A JP28910996A JPH10116779A5 JP H10116779 A5 JPH10116779 A5 JP H10116779A5 JP 1996289109 A JP1996289109 A JP 1996289109A JP 28910996 A JP28910996 A JP 28910996A JP H10116779 A5 JPH10116779 A5 JP H10116779A5
Authority
JP
Japan
Prior art keywords
stage
driving
measuring
driving means
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1996289109A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10116779A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP28910996A priority Critical patent/JPH10116779A/ja
Priority claimed from JP28910996A external-priority patent/JPH10116779A/ja
Publication of JPH10116779A publication Critical patent/JPH10116779A/ja
Publication of JPH10116779A5 publication Critical patent/JPH10116779A5/ja
Pending legal-status Critical Current

Links

JP28910996A 1996-10-11 1996-10-11 ステージ装置 Pending JPH10116779A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28910996A JPH10116779A (ja) 1996-10-11 1996-10-11 ステージ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28910996A JPH10116779A (ja) 1996-10-11 1996-10-11 ステージ装置

Publications (2)

Publication Number Publication Date
JPH10116779A JPH10116779A (ja) 1998-05-06
JPH10116779A5 true JPH10116779A5 (enExample) 2004-10-14

Family

ID=17738913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28910996A Pending JPH10116779A (ja) 1996-10-11 1996-10-11 ステージ装置

Country Status (1)

Country Link
JP (1) JPH10116779A (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999016113A1 (en) * 1997-09-19 1999-04-01 Nikon Corporation Stage device, a scanning aligner and a scanning exposure method, and a device manufactured thereby
WO2004090952A1 (ja) 2003-04-09 2004-10-21 Nikon Corporation 露光方法及び装置、並びにデバイス製造方法
JP4394500B2 (ja) 2003-04-09 2010-01-06 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置、デバイス製造方法、及びコンピュータ・プログラム
TWI360158B (en) 2003-10-28 2012-03-11 Nikon Corp Projection exposure device,exposure method and dev
TWI519819B (zh) 2003-11-20 2016-02-01 尼康股份有限公司 光束變換元件、光學照明裝置、曝光裝置、以及曝光方法
JP2005164878A (ja) * 2003-12-02 2005-06-23 Tadahiro Omi 露光装置
TW201809727A (zh) 2004-02-06 2018-03-16 日商尼康股份有限公司 偏光變換元件
KR101544336B1 (ko) 2005-05-12 2015-08-12 가부시키가이샤 니콘 투영 광학계, 노광 장치 및 노광 방법
JP5267029B2 (ja) 2007-10-12 2013-08-21 株式会社ニコン 照明光学装置、露光装置及びデバイスの製造方法
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9116346B2 (en) 2007-11-06 2015-08-25 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
US10192773B2 (en) * 2016-06-20 2019-01-29 Nexperia B.V. Semiconductor device positioning system and method for semiconductor device positioning

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