JP2005514309A5 - - Google Patents
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- Publication number
- JP2005514309A5 JP2005514309A5 JP2003557958A JP2003557958A JP2005514309A5 JP 2005514309 A5 JP2005514309 A5 JP 2005514309A5 JP 2003557958 A JP2003557958 A JP 2003557958A JP 2003557958 A JP2003557958 A JP 2003557958A JP 2005514309 A5 JP2005514309 A5 JP 2005514309A5
- Authority
- JP
- Japan
- Prior art keywords
- silica glass
- fused silica
- glass article
- wavelength
- ppb
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000005350 fused silica glass Substances 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 230000003287 optical Effects 0.000 claims 1
- 238000002834 transmittance Methods 0.000 claims 1
Claims (1)
- １９０から３００ｎｍの波長範囲の紫外線による光学損傷に耐性のある溶融シリカガラス物品であって、約１００ｐｐｂより多い量のアルミニウムおよび３×１０17分子／ｃｍ3未満の水素を含有し、１９３ｎｍの波長で９９．７５％／ｃｍ以上の最小内部透過率を有することを特徴とする溶融シリカガラス物品。
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/034,971 US6630418B2 (en) | 2001-12-21 | 2001-12-21 | Fused silica containing aluminum |
| US10/158,688 US6689706B2 (en) | 2001-12-21 | 2002-05-29 | Fused silica containing aluminum |
| PCT/US2002/037718 WO2003057637A1 (en) | 2001-12-21 | 2002-11-25 | Fused silica containing aluminum |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005514309A JP2005514309A (ja) | 2005-05-19 |
| JP2005514309A5 true JP2005514309A5 (ja) | 2006-01-19 |
| JP4323319B2 JP4323319B2 (ja) | 2009-09-02 |
Family
ID=26711616
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003557958A Expired - Fee Related JP4323319B2 (ja) | 2001-12-21 | 2002-11-25 | アルミニウムを含有する溶融シリカ |
| JP2003562048A Pending JP2005515147A (ja) | 2001-12-21 | 2002-11-25 | アルミニウムを含有する溶融シリカ |
| JP2003559942A Pending JP2005514317A (ja) | 2001-12-21 | 2002-12-19 | 屈折率均一性が改善された溶融シリカ |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003562048A Pending JP2005515147A (ja) | 2001-12-21 | 2002-11-25 | アルミニウムを含有する溶融シリカ |
| JP2003559942A Pending JP2005514317A (ja) | 2001-12-21 | 2002-12-19 | 屈折率均一性が改善された溶融シリカ |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6946416B2 (ja) |
| EP (3) | EP1456142B1 (ja) |
| JP (3) | JP4323319B2 (ja) |
| CN (3) | CN1604878A (ja) |
| AU (1) | AU2002359872A1 (ja) |
| DE (1) | DE60218736T2 (ja) |
| WO (3) | WO2003062161A1 (ja) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7506521B2 (en) | 2004-12-29 | 2009-03-24 | Corning Incorporated | High transmission synthetic silica glass and method of making same |
| US7506522B2 (en) * | 2004-12-29 | 2009-03-24 | Corning Incorporated | High refractive index homogeneity fused silica glass and method of making same |
| JP4316589B2 (ja) * | 2006-06-16 | 2009-08-19 | 東京電波株式会社 | 人工水晶部材およびその製造方法、ならびにそれを用いた光学素子 |
| US9399000B2 (en) | 2006-06-20 | 2016-07-26 | Momentive Performance Materials, Inc. | Fused quartz tubing for pharmaceutical packaging |
| US8261578B2 (en) * | 2007-10-31 | 2012-09-11 | Corning Incorporated | Hydrogen loading of near net shape optics |
| KR20200105514A (ko) | 2018-01-18 | 2020-09-07 | 코닝 인코포레이티드 | Ag-Na 이온 교환을 이용한 고-전송 유리에 형성된 저-손실 도파관 |
| US10690858B2 (en) | 2018-02-28 | 2020-06-23 | Corning Incorporated | Evanescent optical couplers employing polymer-clad fibers and tapered ion-exchanged optical waveguides |
| US10585242B1 (en) | 2018-09-28 | 2020-03-10 | Corning Research & Development Corporation | Channel waveguides with bend compensation for low-loss optical transmission |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2313327A1 (fr) | 1975-06-06 | 1976-12-31 | Quartz & Silice | Procede d'elaboration de verre de tres haute purete utilisable en particulier pour la fabrication de fibres optiques |
| US5086352A (en) | 1989-06-09 | 1992-02-04 | Shin-Etsu Quartz Products Co., Ltd. | Optical members and blanks or synthetic silica glass and method for their production |
| US5699183A (en) | 1993-02-10 | 1997-12-16 | Nikon Corporation | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production |
| US5332702A (en) | 1993-04-16 | 1994-07-26 | Corning Incorporated | Low sodium zircon refractory and fused silica process |
| US6235669B1 (en) * | 1993-06-01 | 2001-05-22 | General Electric Company | Viscosity tailoring of fused silica |
| JP3040315B2 (ja) * | 1994-08-03 | 2000-05-15 | 信越化学工業株式会社 | 高粘度合成石英ガラス部材およびその製造方法 |
| US5707908A (en) * | 1995-01-06 | 1998-01-13 | Nikon Corporation | Silica glass |
| EP0914301A4 (en) | 1996-07-26 | 2000-03-22 | Corning Inc | FUSED SILICA HAVING INCREASED RESISTANCE TO OPTICAL DAMAGE |
| JP3757476B2 (ja) | 1996-08-05 | 2006-03-22 | 株式会社ニコン | 石英ガラス光学部材、その製造方法、及び投影露光装置 |
| EP0835848A3 (en) * | 1996-08-21 | 1998-06-10 | Nikon Corporation | Fluorine-containing silica glass, its method of manufacture and a projection exposure apparatus comprising the glass |
| JPH10167735A (ja) | 1996-12-09 | 1998-06-23 | Nikon Corp | 合成石英ガラス製造装置 |
| JP4350168B2 (ja) | 1997-03-07 | 2009-10-21 | コーニング インコーポレイテッド | チタニアドープ溶融シリカの製造方法 |
| KR100554091B1 (ko) | 1997-12-08 | 2006-05-16 | 가부시키가이샤 니콘 | 엑시머레이저내성을향상시킨석영글래스의제조방법및석영글래스부재 |
| JP3832113B2 (ja) * | 1998-12-01 | 2006-10-11 | 三菱化学株式会社 | アルミニウム含有合成石英ガラス粉、アルミニウム含有石英ガラス成形体及びこれらの製造方法 |
| US6410192B1 (en) * | 1999-11-15 | 2002-06-25 | Corning Incorporated | Photolithography method, photolithography mask blanks, and method of making |
| JP2001180962A (ja) * | 1999-12-24 | 2001-07-03 | Asahi Glass Co Ltd | 合成石英ガラスとその製造方法 |
| JP2005503316A (ja) * | 2001-09-27 | 2005-02-03 | コーニング インコーポレイテッド | 石英ガラス生産のための改善された方法及び炉 |
| US6630418B2 (en) * | 2001-12-21 | 2003-10-07 | Corning Incorporated | Fused silica containing aluminum |
-
2002
- 2002-11-25 JP JP2003557958A patent/JP4323319B2/ja not_active Expired - Fee Related
- 2002-11-25 WO PCT/US2002/037719 patent/WO2003062161A1/en active Application Filing
- 2002-11-25 CN CNA028253299A patent/CN1604878A/zh active Pending
- 2002-11-25 DE DE60218736T patent/DE60218736T2/de not_active Expired - Fee Related
- 2002-11-25 CN CNA028253302A patent/CN1604879A/zh active Pending
- 2002-11-25 EP EP02794007A patent/EP1456142B1/en not_active Expired - Lifetime
- 2002-11-25 EP EP02794008A patent/EP1456143A1/en not_active Withdrawn
- 2002-11-25 JP JP2003562048A patent/JP2005515147A/ja active Pending
- 2002-11-25 WO PCT/US2002/037718 patent/WO2003057637A1/en active IP Right Grant
- 2002-12-13 US US10/319,739 patent/US6946416B2/en not_active Expired - Fee Related
- 2002-12-19 EP EP02794438A patent/EP1458651B1/en not_active Expired - Lifetime
- 2002-12-19 CN CNA028253310A patent/CN1604880A/zh active Pending
- 2002-12-19 WO PCT/US2002/041567 patent/WO2003059833A1/en active Application Filing
- 2002-12-19 JP JP2003559942A patent/JP2005514317A/ja active Pending
- 2002-12-19 AU AU2002359872A patent/AU2002359872A1/en not_active Abandoned
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