JP2005513406A - 光起電装置用ベーキングオーブン - Google Patents
光起電装置用ベーキングオーブン Download PDFInfo
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- JP2005513406A JP2005513406A JP2003555596A JP2003555596A JP2005513406A JP 2005513406 A JP2005513406 A JP 2005513406A JP 2003555596 A JP2003555596 A JP 2003555596A JP 2003555596 A JP2003555596 A JP 2003555596A JP 2005513406 A JP2005513406 A JP 2005513406A
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- JP
- Japan
- Prior art keywords
- baking oven
- semiconductor material
- oven according
- housing
- rolls
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Tunnel Furnaces (AREA)
- Photovoltaic Devices (AREA)
- Light Receiving Elements (AREA)
- Electric Stoves And Ranges (AREA)
Abstract
Description
(1)チェーンが、通常は、処理された半導体材料中の金属不純物の一部に汚染を生じさせることがある金属材料で作られ、
(2)半導体材料が曝される温度分布が、搬送チェーンに依存することである。チェーンは、一般的に、ベークされるべき半導体材料の温度より高い内部温度を有し、その結果、移動するときに、チェーンにより、かなりの量の熱が運ばれる。
(a)湾曲した、又は平らな側壁、天井、底、ロールの挿入を可能にする側通路によって構成されたハウジングと、
(b)シャフト及びベルト駆動装置を介して、ロールの同時運動を可能にする電動機と、
(c)ハウジングの内部の温度を一定に保つための装置と、
(d)ベーキング工程中に形成されたガスの除去装置と、を有する。
2 断熱材
3 抵抗体
4 抵抗体支持体
5 間接加熱室の天井
6 間接加熱室
7 ボールベアリング
8 軸受支持体
9 フレーム
10 シャフト支持体
11 クロスベルト
12 プーリー
13 シャフト
14 ピニオン
15 チェーン
16 電動機
17 クラウン
18 煙突
Claims (7)
- 半導体材料から出発する、光起電装置用ベーキングオーブンであって、前記ベーキングオーブンの内部での、前記半導体材料のエントレインメントが、セラミック材料で作られ、自身の軸線を中心に回転する一連のロールによって行われる、ベーキングオーブン。
- (a)湾曲した、或いは平らな側壁、天井、底、及びロールの挿入を可能にする横通路によって構成されたハウジングと、
(b)シャフト及ベルト駆動装置を介して、前記ロールの同時運動を可能にする電動機と、
(c)前記ハウジング(a)の内部の温度を一定に保つための装置と、
(d)ハウジング(a)の断熱装置と、
(e)ベーキング工程中に形成されたガスの除去装置と、を有する請求項1記載のベーキングオーブン。 - 前記ハウジング(a)は、セラミック材料からなる間接加熱室である、請求項2記載のベーキングオーブン。
- 前記セラミック材料は、焼結シリカ、石英、及び、シリコンと低い化学的相互作用を有する他の材料の中から選択される、請求項1記載のベーキングオーブン。
- 一方のロールと他方のロールとの間の距離は、半導体材料が、その回転移動中に、ロールの少なくとも三つに載るような距離である、請求項1記載のベーキングオーブン。
- 加熱は、電気抵抗体又は赤外線ランプで行われる、請求項1記載のベーキングオーブン。
- 光起電装置の準備に使用することができる半導体材料は、100〜500ミクロンの厚さを有するシリコンスライス、又は、厚さが数ミクロンから100ミクロンまで変化する薄膜(フィルム)の半導体材料から選択される、請求項1記載のベーキングオーブン。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITMI20012628 ITMI20012628A1 (it) | 2001-12-13 | 2001-12-13 | Forno di cottura di dispositivi fotovoltaici |
PCT/EP2002/013372 WO2003054975A2 (en) | 2001-12-13 | 2002-11-27 | Baking oven for photovoltaic devices |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005513406A true JP2005513406A (ja) | 2005-05-12 |
JP4511186B2 JP4511186B2 (ja) | 2010-07-28 |
Family
ID=11448688
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003555596A Expired - Fee Related JP4511186B2 (ja) | 2001-12-13 | 2002-11-27 | 光起電装置用ベーキングオーブン |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1454367A2 (ja) |
JP (1) | JP4511186B2 (ja) |
CN (1) | CN100356589C (ja) |
AU (1) | AU2002358050B2 (ja) |
IT (1) | ITMI20012628A1 (ja) |
WO (1) | WO2003054975A2 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008061537A1 (de) * | 2008-12-03 | 2010-06-10 | Aci-Ecotec Gmbh & Co. Kg | Aushärtevorrichtung für photovoltaische Dünnschicht-Solarzellen |
DE102009019127A1 (de) * | 2009-04-29 | 2011-05-05 | Eisenmann Anlagenbau Gmbh & Co. Kg | Ofen zur Herstellung von photovoltaischen Dünnschichtzellen |
DE102010016512A1 (de) | 2010-04-19 | 2011-10-20 | Roth & Rau Ag | Mehrtagen-Rollenofen |
DE102010016509A1 (de) | 2010-04-19 | 2011-10-20 | Roth & Rau Ag | Durchlaufanlage sowie Verfahren zum Gasmanagement und zur Temperatursteuerung in einer Durchlaufanlage |
DE202010013032U1 (de) * | 2010-12-01 | 2011-02-17 | Roth & Rau Ag | Transportrolle |
DE202011110836U1 (de) | 2011-02-21 | 2016-09-02 | Ctf Solar Gmbh | Vorrichtung zur Beschichtung von Substraten |
US8795785B2 (en) | 2011-04-07 | 2014-08-05 | Dynamic Micro System | Methods and apparatuses for roll-on coating |
US8739728B2 (en) | 2011-04-07 | 2014-06-03 | Dynamic Micro Systems, Semiconductor Equipment Gmbh | Methods and apparatuses for roll-on coating |
US8720370B2 (en) | 2011-04-07 | 2014-05-13 | Dynamic Micro System Semiconductor Equipment GmbH | Methods and apparatuses for roll-on coating |
CN102393139A (zh) * | 2011-11-16 | 2012-03-28 | 杨桂玲 | 一种辊道式太阳电池硅片烧结炉 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6332295U (ja) * | 1986-08-12 | 1988-03-02 | ||
JPH08176649A (ja) * | 1994-12-20 | 1996-07-09 | Koyo Rindobaagu Kk | ローラハース炉用ローラ |
JPH11108559A (ja) * | 1997-10-09 | 1999-04-23 | Matsushita Electric Ind Co Ltd | 焼成炉およびその制御方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2788957A (en) * | 1953-03-30 | 1957-04-16 | Drever Co | Refractory roller furnace conveyor system |
US3867748A (en) * | 1974-03-07 | 1975-02-25 | Libbey Owens Ford Co | Supporting and driving frangible rollers |
US4343395A (en) * | 1977-11-10 | 1982-08-10 | Holcroft & Co. | Roller hearth furnace |
JPH0714353Y2 (ja) * | 1988-07-08 | 1995-04-05 | 中外炉工業株式会社 | ローラハース型熱処理炉 |
DE3826523A1 (de) * | 1988-08-04 | 1990-02-08 | Juergen Gerlach | Waermebehandlungseinrichtung fuer fortlaufend bewegtes material |
US5266027A (en) * | 1992-08-12 | 1993-11-30 | Ngk Insulators, Ltd. | Roller-hearth continuous furnace |
NL1010836C2 (nl) * | 1998-12-17 | 2000-06-23 | O T B Engineering B V | Oven voor het vervaardigen van zonnecellen. |
CN1107618C (zh) * | 1999-09-03 | 2003-05-07 | 北新建材(集团)有限公司 | 板材自动包装线 |
-
2001
- 2001-12-13 IT ITMI20012628 patent/ITMI20012628A1/it unknown
-
2002
- 2002-11-27 JP JP2003555596A patent/JP4511186B2/ja not_active Expired - Fee Related
- 2002-11-27 EP EP02791725A patent/EP1454367A2/en not_active Ceased
- 2002-11-27 CN CNB028246241A patent/CN100356589C/zh not_active Expired - Fee Related
- 2002-11-27 WO PCT/EP2002/013372 patent/WO2003054975A2/en active Application Filing
- 2002-11-27 AU AU2002358050A patent/AU2002358050B2/en not_active Ceased
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6332295U (ja) * | 1986-08-12 | 1988-03-02 | ||
JPH08176649A (ja) * | 1994-12-20 | 1996-07-09 | Koyo Rindobaagu Kk | ローラハース炉用ローラ |
JPH11108559A (ja) * | 1997-10-09 | 1999-04-23 | Matsushita Electric Ind Co Ltd | 焼成炉およびその制御方法 |
Also Published As
Publication number | Publication date |
---|---|
AU2002358050B2 (en) | 2007-10-11 |
AU2002358050A1 (en) | 2003-07-09 |
WO2003054975A2 (en) | 2003-07-03 |
CN100356589C (zh) | 2007-12-19 |
WO2003054975A3 (en) | 2004-01-08 |
CN1602554A (zh) | 2005-03-30 |
ITMI20012628A1 (it) | 2003-06-13 |
JP4511186B2 (ja) | 2010-07-28 |
EP1454367A2 (en) | 2004-09-08 |
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