JP2005508570A5 - - Google Patents

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Publication number
JP2005508570A5
JP2005508570A5 JP2003525891A JP2003525891A JP2005508570A5 JP 2005508570 A5 JP2005508570 A5 JP 2005508570A5 JP 2003525891 A JP2003525891 A JP 2003525891A JP 2003525891 A JP2003525891 A JP 2003525891A JP 2005508570 A5 JP2005508570 A5 JP 2005508570A5
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JP
Japan
Prior art keywords
vertical strut
container
port door
mounting surface
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003525891A
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English (en)
Japanese (ja)
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JP2005508570A (ja
JP4309264B2 (ja
Filing date
Publication date
Priority claimed from US10/087,092 external-priority patent/US7217076B2/en
Application filed filed Critical
Publication of JP2005508570A publication Critical patent/JP2005508570A/ja
Publication of JP2005508570A5 publication Critical patent/JP2005508570A5/ja
Application granted granted Critical
Publication of JP4309264B2 publication Critical patent/JP4309264B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2003525891A 2001-08-31 2002-08-30 半導体材料取扱い装置 Expired - Lifetime JP4309264B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US31672201P 2001-08-31 2001-08-31
US10/087,092 US7217076B2 (en) 2001-08-31 2002-03-01 Semiconductor material handling system
PCT/US2002/027769 WO2003021643A2 (en) 2001-08-31 2002-08-30 Semiconductor material handling system

Publications (3)

Publication Number Publication Date
JP2005508570A JP2005508570A (ja) 2005-03-31
JP2005508570A5 true JP2005508570A5 (enExample) 2006-02-09
JP4309264B2 JP4309264B2 (ja) 2009-08-05

Family

ID=26776585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003525891A Expired - Lifetime JP4309264B2 (ja) 2001-08-31 2002-08-30 半導体材料取扱い装置

Country Status (6)

Country Link
US (1) US7217076B2 (enExample)
JP (1) JP4309264B2 (enExample)
KR (1) KR100800612B1 (enExample)
CN (1) CN1327477C (enExample)
DE (1) DE10297169T5 (enExample)
WO (1) WO2003021643A2 (enExample)

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US7357256B2 (en) * 2005-03-31 2008-04-15 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer pod with working sheet holder
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US8821099B2 (en) 2005-07-11 2014-09-02 Brooks Automation, Inc. Load port module
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ITBO20060244A1 (it) * 2006-04-05 2007-10-06 Ima Spa Sistema e metodo per trasferire e movimentare elementi di una macchina automatica confezionatrice.
ITBO20060245A1 (it) * 2006-04-05 2007-10-06 Ima Spa Apparato per trasferire e movimentare elementi di una macchina operatrice.
KR100818044B1 (ko) * 2006-05-04 2008-03-31 위순임 기판 지지대와 기판 반송 장치 및 이를 이용한 기판 처리시스템
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US9117859B2 (en) 2006-08-31 2015-08-25 Brooks Automation, Inc. Compact processing apparatus
US8920097B2 (en) * 2006-11-02 2014-12-30 Globalfoundries Singapore Pte. Ltd. Wafer handling system for a loadlock
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US8500382B2 (en) * 2007-05-22 2013-08-06 Axcelis Technologies Inc. Airflow management for particle abatement in semiconductor manufacturing equipment
TWI379748B (en) * 2007-07-20 2012-12-21 Applied Materials Inc Dual-mode robot systems,substrate transfer apparatus and methods for electronic device manufacturing, and method of calibrating
US8757026B2 (en) 2008-04-15 2014-06-24 Dynamic Micro Systems, Semiconductor Equipment Gmbh Clean transfer robot
JP5168329B2 (ja) * 2010-08-31 2013-03-21 Ｔｄｋ株式会社 ロードポート装置
DE102010048909A1 (de) * 2010-10-11 2012-04-12 Ekra Automatisierungssysteme Gmbh Prozessmaschine, insbesondere zum Bearbeiten und/oder Inspizieren von Substraten
US9184078B2 (en) * 2011-05-07 2015-11-10 Brooks Automation, Inc. Narrow width loadport mechanism for cleanroom material transfer systems
JP5364769B2 (ja) * 2011-09-26 2013-12-11 株式会社安川電機 搬送ロボットおよび基板処理装置
US8944739B2 (en) * 2012-06-01 2015-02-03 Taiwan Semiconductor Manufacturing Co., Ltd. Loadport bridge for semiconductor fabrication tools
JP6219402B2 (ja) * 2012-12-03 2017-10-25 エーエスエム イーペー ホールディング ベー．フェー． モジュール式縦型炉処理システム
CN104375293B (zh) * 2014-11-20 2017-05-17 武汉精测电子技术股份有限公司 基于机器视觉的lcd屏自动检测机台
CN105668143B (zh) * 2016-03-23 2017-08-25 北京轩宇智能科技有限公司 一种密封操作系统及其磁耦合式密封输料装置
JP7177333B2 (ja) * 2018-07-04 2022-11-24 シンフォニアテクノロジー株式会社 ロードポート、および、ｅｆｅｍ
US11031265B2 (en) * 2018-11-28 2021-06-08 Brooks Automation, Inc. Load port module
US10916464B1 (en) * 2019-07-26 2021-02-09 Applied Materials, Inc. Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency
WO2022015863A1 (en) * 2020-07-14 2022-01-20 Vicarious Fpc, Inc. Method and system for monitoring a container fullness
US11545379B2 (en) * 2020-07-31 2023-01-03 Nanya Technology Corporation System and method for controlling semiconductor manufacturing equipment
US11735455B2 (en) 2021-03-12 2023-08-22 Taiwan Semiconductor Manufacturing Company, Ltd. Systems, devices, and methods for air flow optimization including adjacent a FOUP
US12076854B2 (en) * 2021-03-18 2024-09-03 Applied Materials, Inc. Increased number of load ports on factory interface with robot that moves on track
JP7660006B2 (ja) * 2021-03-24 2025-04-10 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、教示情報生成方法および教示セット
JP2024078532A (ja) * 2022-11-30 2024-06-11 株式会社安川電機 基板搬送ロボットシステムおよび基板搬送ロボットの教示方法
US20250069926A1 (en) * 2023-08-22 2025-02-27 Applied Materials, Inc. Integrated substrate processing system with advanced substrate handling robot
CN117116817B (zh) * 2023-09-22 2024-10-29 上海广川科技有限公司 一种尺寸兼容的晶圆缓存装置
CN117612986A (zh) * 2023-11-27 2024-02-27 上海诺银机电科技有限公司 一种晶圆传片机
CN119275144B (zh) * 2024-12-10 2025-02-25 北京和崎精密科技有限公司 晶片存储器

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