JP2005506562A - プラズマを用いて基板上に塗布された有機配向膜を除去し、これを再生する方法 - Google Patents

プラズマを用いて基板上に塗布された有機配向膜を除去し、これを再生する方法 Download PDF

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Publication number
JP2005506562A
JP2005506562A JP2003527507A JP2003527507A JP2005506562A JP 2005506562 A JP2005506562 A JP 2005506562A JP 2003527507 A JP2003527507 A JP 2003527507A JP 2003527507 A JP2003527507 A JP 2003527507A JP 2005506562 A JP2005506562 A JP 2005506562A
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JP
Japan
Prior art keywords
plasma
alignment film
organic alignment
substrate
glass substrate
Prior art date
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Pending
Application number
JP2003527507A
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English (en)
Japanese (ja)
Inventor
セウン−ホ リー，
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INNOVATION FOR CREATIVE DEVICES CO Ltd
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INNOVATION FOR CREATIVE DEVICES CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by INNOVATION FOR CREATIVE DEVICES CO Ltd filed Critical INNOVATION FOR CREATIVE DEVICES CO Ltd
Publication of JP2005506562A publication Critical patent/JP2005506562A/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133711—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1313—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/02—Materials and properties organic material

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
  • Drying Of Semiconductors (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP2003527507A 2001-08-27 2001-10-08 プラズマを用いて基板上に塗布された有機配向膜を除去し、これを再生する方法 Pending JP2005506562A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020010051632A KR20030018084A (ko) 2001-08-27 2001-08-27 플라즈마를 이용하여 기판 위에 도포된 유기 배향막을제거하고 이를 재생하는 방법
PCT/KR2001/001683 WO2003023507A1 (en) 2001-08-27 2001-10-08 Method for removing organic alignment layer coated on substrates and recovering the substrates using plasma

Publications (1)

Publication Number Publication Date
JP2005506562A true JP2005506562A (ja) 2005-03-03

Family

ID=19713573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003527507A Pending JP2005506562A (ja) 2001-08-27 2001-10-08 プラズマを用いて基板上に塗布された有機配向膜を除去し、これを再生する方法

Country Status (4)

Country Link
JP (1) JP2005506562A (ko)
KR (1) KR20030018084A (ko)
CN (1) CN100394556C (ko)
WO (1) WO2003023507A1 (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101187744B1 (ko) 2005-07-12 2012-10-05 삼성디스플레이 주식회사 액정 표시 장치, 그의 제조 방법 및 제조 장치
CN101556439B (zh) * 2008-04-10 2012-07-18 北京京东方光电科技有限公司 去除模拟基板上聚酰亚胺膜的方法
CN102004348B (zh) * 2009-08-28 2013-07-17 上海天马微电子有限公司 液晶显示装置及该液晶显示装置的阵列基板的制造方法
CN102310063A (zh) * 2010-06-29 2012-01-11 中国科学院微电子研究所 蜂窝形状等离子体自由基清洗系统
WO2012083542A1 (zh) * 2010-12-23 2012-06-28 深圳市华星光电技术有限公司 配向膜修补设备及其修补方法
CN116535108B (zh) * 2023-07-05 2023-09-22 上海传芯半导体有限公司 衬底回收方法、再生的光掩模基版及光掩模版的制造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05224203A (ja) * 1992-02-14 1993-09-03 Toshiba Corp 液晶表示装置の配向方法
KR19980027503U (ko) * 1996-11-16 1998-08-05 박병재 차동장치의 사이드기어 고정용 스냅링 구조
KR19980049918U (ko) * 1996-12-30 1998-10-07 김영귀 자동 개도되는 커버가 부착된 물품보관함
KR100268303B1 (ko) * 1997-07-14 2000-10-16 구본준 액정표시장치 및 그 제조방법
JP3707269B2 (ja) * 1998-10-28 2005-10-19 セイコーエプソン株式会社 液晶装置の製造方法
JP2000241819A (ja) * 1998-12-25 2000-09-08 Internatl Business Mach Corp <Ibm> 紫外線による有機分子除去装置及び有機高分子膜の除去方法
KR20010028673A (ko) * 1999-09-22 2001-04-06 윤종용 반응성 이온 식각을 이용한 반도체 소자의 컨택 홀 형성 방법
KR100415611B1 (ko) * 2001-05-24 2004-01-24 엘지.필립스 엘시디 주식회사 액정표시소자 및 그 제조방법과 이를 이용한 배향막재생방법

Also Published As

Publication number Publication date
CN1545636A (zh) 2004-11-10
CN100394556C (zh) 2008-06-11
KR20030018084A (ko) 2003-03-06
WO2003023507A1 (en) 2003-03-20

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