JP2005351756A - 蛍光体シート製造装置 - Google Patents
蛍光体シート製造装置 Download PDFInfo
- Publication number
- JP2005351756A JP2005351756A JP2004172708A JP2004172708A JP2005351756A JP 2005351756 A JP2005351756 A JP 2005351756A JP 2004172708 A JP2004172708 A JP 2004172708A JP 2004172708 A JP2004172708 A JP 2004172708A JP 2005351756 A JP2005351756 A JP 2005351756A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- phosphor
- evaporation
- manufacturing apparatus
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 title claims abstract description 156
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 51
- 239000000758 substrate Substances 0.000 claims abstract description 124
- 238000009834 vaporization Methods 0.000 claims abstract 2
- 230000008016 vaporization Effects 0.000 claims abstract 2
- 238000001704 evaporation Methods 0.000 claims description 99
- 230000008020 evaporation Effects 0.000 claims description 98
- 239000000463 material Substances 0.000 claims description 70
- 238000001771 vacuum deposition Methods 0.000 claims description 37
- 239000012190 activator Substances 0.000 claims description 17
- 238000007740 vapor deposition Methods 0.000 claims description 15
- 239000010410 layer Substances 0.000 claims 2
- 239000002365 multiple layer Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 abstract description 19
- 230000015572 biosynthetic process Effects 0.000 abstract description 13
- 238000003860 storage Methods 0.000 abstract description 12
- 239000011261 inert gas Substances 0.000 abstract description 6
- 238000007738 vacuum evaporation Methods 0.000 abstract description 3
- 238000009827 uniform distribution Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 description 50
- 230000032258 transport Effects 0.000 description 33
- 238000009826 distribution Methods 0.000 description 29
- LYQFWZFBNBDLEO-UHFFFAOYSA-M caesium bromide Chemical compound [Br-].[Cs+] LYQFWZFBNBDLEO-UHFFFAOYSA-M 0.000 description 25
- 238000000034 method Methods 0.000 description 14
- QEDFUJZRPHEBFG-UHFFFAOYSA-K europium(3+);tribromide Chemical compound Br[Eu](Br)Br QEDFUJZRPHEBFG-UHFFFAOYSA-K 0.000 description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 12
- 239000002585 base Substances 0.000 description 11
- 230000005855 radiation Effects 0.000 description 10
- 239000000126 substance Substances 0.000 description 10
- 238000000151 deposition Methods 0.000 description 9
- 230000008021 deposition Effects 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 239000004519 grease Substances 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 229910052693 Europium Inorganic materials 0.000 description 4
- 239000003513 alkali Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 150000004820 halides Chemical class 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 230000006698 induction Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000004020 luminiscence type Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 2
- 229910052688 Gadolinium Inorganic materials 0.000 description 2
- 229910052689 Holmium Inorganic materials 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- 229910052771 Terbium Inorganic materials 0.000 description 2
- 229910052769 Ytterbium Inorganic materials 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 2
- 239000011112 polyethylene naphthalate Substances 0.000 description 2
- -1 polyethylene terephthalate Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000002601 radiography Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 241001422033 Thestylus Species 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 229910052789 astatine Inorganic materials 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Images
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- Conversion Of X-Rays Into Visible Images (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004172708A JP2005351756A (ja) | 2004-06-10 | 2004-06-10 | 蛍光体シート製造装置 |
| US11/149,424 US20050279285A1 (en) | 2004-06-10 | 2005-06-10 | Phosphor sheet manufacturing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004172708A JP2005351756A (ja) | 2004-06-10 | 2004-06-10 | 蛍光体シート製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005351756A true JP2005351756A (ja) | 2005-12-22 |
| JP2005351756A5 JP2005351756A5 (enExample) | 2007-04-19 |
Family
ID=35586363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004172708A Withdrawn JP2005351756A (ja) | 2004-06-10 | 2004-06-10 | 蛍光体シート製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005351756A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014214379A (ja) * | 2013-04-26 | 2014-11-17 | ジージェイエム カンパニーリミテッド | 量産用蒸発装置および方法 |
| JP2018529029A (ja) * | 2015-07-31 | 2018-10-04 | ヒルバーグ アンド パートナー ゲーエムベーハー | 誘導気化器、気化器システムおよび帯状の基板をコーティングするための気化方法 |
| KR20200115029A (ko) * | 2019-03-29 | 2020-10-07 | 캐논 톡키 가부시키가이샤 | 성막 장치 및 성막 방법 |
-
2004
- 2004-06-10 JP JP2004172708A patent/JP2005351756A/ja not_active Withdrawn
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014214379A (ja) * | 2013-04-26 | 2014-11-17 | ジージェイエム カンパニーリミテッド | 量産用蒸発装置および方法 |
| JP2018529029A (ja) * | 2015-07-31 | 2018-10-04 | ヒルバーグ アンド パートナー ゲーエムベーハー | 誘導気化器、気化器システムおよび帯状の基板をコーティングするための気化方法 |
| KR20200115029A (ko) * | 2019-03-29 | 2020-10-07 | 캐논 톡키 가부시키가이샤 | 성막 장치 및 성막 방법 |
| JP2020164920A (ja) * | 2019-03-29 | 2020-10-08 | キヤノントッキ株式会社 | 成膜装置及び成膜方法 |
| JP7301578B2 (ja) | 2019-03-29 | 2023-07-03 | キヤノントッキ株式会社 | 成膜装置及び成膜方法 |
| KR102788953B1 (ko) | 2019-03-29 | 2025-03-28 | 캐논 톡키 가부시키가이샤 | 성막 장치 및 성막 방법 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A711 | Notification of change in applicant |
Effective date: 20061208 Free format text: JAPANESE INTERMEDIATE CODE: A712 |
|
| A521 | Written amendment |
Effective date: 20070301 Free format text: JAPANESE INTERMEDIATE CODE: A523 |
|
| A621 | Written request for application examination |
Effective date: 20070301 Free format text: JAPANESE INTERMEDIATE CODE: A621 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20080711 |
|
| A761 | Written withdrawal of application |
Effective date: 20090520 Free format text: JAPANESE INTERMEDIATE CODE: A761 |