JP2005351756A5 - - Google Patents

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Publication number
JP2005351756A5
JP2005351756A5 JP2004172708A JP2004172708A JP2005351756A5 JP 2005351756 A5 JP2005351756 A5 JP 2005351756A5 JP 2004172708 A JP2004172708 A JP 2004172708A JP 2004172708 A JP2004172708 A JP 2004172708A JP 2005351756 A5 JP2005351756 A5 JP 2005351756A5
Authority
JP
Japan
Prior art keywords
sheet manufacturing
manufacturing apparatus
phosphor sheet
film forming
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004172708A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005351756A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004172708A priority Critical patent/JP2005351756A/ja
Priority claimed from JP2004172708A external-priority patent/JP2005351756A/ja
Priority to US11/149,424 priority patent/US20050279285A1/en
Publication of JP2005351756A publication Critical patent/JP2005351756A/ja
Publication of JP2005351756A5 publication Critical patent/JP2005351756A5/ja
Withdrawn legal-status Critical Current

Links

JP2004172708A 2004-06-10 2004-06-10 蛍光体シート製造装置 Withdrawn JP2005351756A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004172708A JP2005351756A (ja) 2004-06-10 2004-06-10 蛍光体シート製造装置
US11/149,424 US20050279285A1 (en) 2004-06-10 2005-06-10 Phosphor sheet manufacturing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004172708A JP2005351756A (ja) 2004-06-10 2004-06-10 蛍光体シート製造装置

Publications (2)

Publication Number Publication Date
JP2005351756A JP2005351756A (ja) 2005-12-22
JP2005351756A5 true JP2005351756A5 (enExample) 2007-04-19

Family

ID=35586363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004172708A Withdrawn JP2005351756A (ja) 2004-06-10 2004-06-10 蛍光体シート製造装置

Country Status (1)

Country Link
JP (1) JP2005351756A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5798171B2 (ja) * 2013-04-26 2015-10-21 ジージェイエム カンパニー リミテッド 量産用蒸発装置および方法
EP3124648B1 (de) * 2015-07-31 2018-03-28 Hilberg & Partner GmbH Verdampfersystem sowie verdampfungsverfahren für die beschichtung eines bandförmigen substrats
JP7301578B2 (ja) * 2019-03-29 2023-07-03 キヤノントッキ株式会社 成膜装置及び成膜方法

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