JP2005345383A5 - - Google Patents

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Publication number
JP2005345383A5
JP2005345383A5 JP2004167621A JP2004167621A JP2005345383A5 JP 2005345383 A5 JP2005345383 A5 JP 2005345383A5 JP 2004167621 A JP2004167621 A JP 2004167621A JP 2004167621 A JP2004167621 A JP 2004167621A JP 2005345383 A5 JP2005345383 A5 JP 2005345383A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2004167621A
Other versions
JP2005345383A (ja
JP4645068B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2004167621A external-priority patent/JP4645068B2/ja
Priority to JP2004167621A priority Critical patent/JP4645068B2/ja
Priority to EP05745755A priority patent/EP1750087B1/en
Priority to EP10014269A priority patent/EP2278270A3/en
Priority to PCT/JP2005/010191 priority patent/WO2005119172A1/ja
Priority to KR1020067017982A priority patent/KR100828981B1/ko
Priority to TW094118386A priority patent/TW200606399A/zh
Publication of JP2005345383A publication Critical patent/JP2005345383A/ja
Priority to US11/561,517 priority patent/US7394536B2/en
Publication of JP2005345383A5 publication Critical patent/JP2005345383A5/ja
Publication of JP4645068B2 publication Critical patent/JP4645068B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004167621A 2004-06-04 2004-06-04 表面形状の検査方法および検査装置 Expired - Lifetime JP4645068B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2004167621A JP4645068B2 (ja) 2004-06-04 2004-06-04 表面形状の検査方法および検査装置
KR1020067017982A KR100828981B1 (ko) 2004-06-04 2005-06-02 표면 형상의 검사 방법 및 검사 장치
EP10014269A EP2278270A3 (en) 2004-06-04 2005-06-02 Optical method and apparatus for inspecting the front surface shape of plate shaped transparent objects
PCT/JP2005/010191 WO2005119172A1 (ja) 2004-06-04 2005-06-02 表面形状の検査方法および検査装置
EP05745755A EP1750087B1 (en) 2004-06-04 2005-06-02 Method and apparatus for inspecting a front surface shape
TW094118386A TW200606399A (en) 2004-06-04 2005-06-03 Inspection method, and inspection device for surface shape
US11/561,517 US7394536B2 (en) 2004-06-04 2006-11-20 Method and apparatus for inspecting front surface shape

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004167621A JP4645068B2 (ja) 2004-06-04 2004-06-04 表面形状の検査方法および検査装置

Publications (3)

Publication Number Publication Date
JP2005345383A JP2005345383A (ja) 2005-12-15
JP2005345383A5 true JP2005345383A5 (ja) 2007-02-15
JP4645068B2 JP4645068B2 (ja) 2011-03-09

Family

ID=35463002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004167621A Expired - Lifetime JP4645068B2 (ja) 2004-06-04 2004-06-04 表面形状の検査方法および検査装置

Country Status (6)

Country Link
US (1) US7394536B2 (ja)
EP (2) EP1750087B1 (ja)
JP (1) JP4645068B2 (ja)
KR (1) KR100828981B1 (ja)
TW (1) TW200606399A (ja)
WO (1) WO2005119172A1 (ja)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4924426B2 (ja) 2005-07-15 2012-04-25 旭硝子株式会社 形状検査方法および装置
US7589844B2 (en) * 2005-07-15 2009-09-15 Asahi Glass Company, Limited Shape inspection method and apparatus
JP4907201B2 (ja) * 2006-03-20 2012-03-28 株式会社神戸製鋼所 形状測定装置
DE102006015792A1 (de) 2006-04-05 2007-10-18 Isra Surface Vision Gmbh Verfahren und System zur Formmessung einer reflektierenden Oberfläche
EP1882896B1 (de) * 2006-07-24 2014-12-17 3D-Shape GmbH Dreidimensionale Vermessung der Form und der lokalen Oberflächennormalen von spiegelnden Objekten
US7471383B2 (en) * 2006-12-19 2008-12-30 Pilkington North America, Inc. Method of automated quantitative analysis of distortion in shaped vehicle glass by reflected optical imaging
US8284392B2 (en) 2007-03-13 2012-10-09 3D-Shape Gmbh Method and apparatus for the three-dimensional measurement of the shape and the local surface normal of preferably specular objects
JP5485889B2 (ja) 2007-08-17 2014-05-07 レニショウ パブリック リミテッド カンパニー 位相解析測定を行う装置および方法
US7843557B2 (en) 2007-09-28 2010-11-30 Cardinal Scientific, Inc. Method and system for detecting retroreflectors
JP5034891B2 (ja) * 2007-11-21 2012-09-26 旭硝子株式会社 透明板状体の形状測定装置及び板ガラスの製造方法
DE112009000272T5 (de) * 2008-07-30 2011-06-09 Aisin AW Co., Ltd., Anjo-shi Antriebseinheit und Fahrzeug
US8441532B2 (en) * 2009-02-24 2013-05-14 Corning Incorporated Shape measurement of specular reflective surface
GB0915904D0 (en) 2009-09-11 2009-10-14 Renishaw Plc Non-contact object inspection
FR2951544A1 (fr) * 2009-10-21 2011-04-22 Saint Gobain Procede d'analyse de la qualite d'un vitrage
CN102939512A (zh) 2010-06-07 2013-02-20 旭硝子株式会社 形状测定装置、形状测定方法及玻璃板的制造方法
KR20130090326A (ko) 2010-06-15 2013-08-13 아사히 가라스 가부시키가이샤 형상 측정 장치, 형상 측정 방법 및 유리판의 제조 방법
US8351051B2 (en) 2010-11-25 2013-01-08 Semisysco Co., Ltd. System and method of measuring irregularity of a glass substrate
KR101249758B1 (ko) * 2010-11-25 2013-04-02 (주)쎄미시스코 유리 기판의 불균일도 측정 시스템 및 방법
US20120133761A1 (en) * 2010-11-30 2012-05-31 Angstrom, Inc. Uneven area inspection system
JP5529829B2 (ja) * 2011-11-01 2014-06-25 株式会社神戸製鋼所 高さ測定装置及び高さ測定方法
US9349182B2 (en) * 2011-11-10 2016-05-24 Carestream Health, Inc. 3D intraoral measurements using optical multiline method
US9295532B2 (en) * 2011-11-10 2016-03-29 Carestream Health, Inc. 3D intraoral measurements using optical multiline method
JP5749150B2 (ja) * 2011-12-22 2015-07-15 株式会社Sumco シリカガラスルツボの赤外吸収スペクトルの三次元分布の決定方法、シリコン単結晶の製造方法
EP2860490A4 (en) * 2012-06-12 2016-03-02 Shima Seiki Mfg THREE-DIMENSIONAL MEASURING APPARATUS AND THREE-DIMENSIONAL MEASURING METHOD
CN105849503B (zh) * 2013-12-27 2019-04-16 Ａｇｃ株式会社 形状测定装置、形状测定方法及玻璃板的制造方法
CN103995000B (zh) * 2014-05-15 2017-01-11 京东方科技集团股份有限公司 一种显示基板的检查装置及检查系统
JP6694873B2 (ja) 2014-08-28 2020-05-20 ケアストリーム ヘルス インク 歯の表面に従ってセンサ画素配列を照射画素配列にマッピングするための装置の作動方法、及び、歯の表面輪郭画像を提供する装置の作動方法
JP5923644B2 (ja) * 2015-05-13 2016-05-24 株式会社Sumco シリカガラスルツボの赤外吸収スペクトルの三次元分布の決定方法、シリコン単結晶の製造方法
CN105091784A (zh) * 2015-06-30 2015-11-25 东莞市盟拓光电科技有限公司 用于表面为镜面或透明表面的被测物的三维成像系统
JP6642223B2 (ja) 2016-04-13 2020-02-05 Ａｇｃ株式会社 透明板表面検査装置、透明板表面検査方法、およびガラス板の製造方法
DE102016223671A1 (de) 2016-11-29 2018-05-30 Continental Automotive Gmbh Leuchtsystem zur Ermittlung geometrischer Eigenschaften sowie Fahrerassistenzsystem und Verfahren dazu
KR102199314B1 (ko) * 2019-03-07 2021-01-06 (주) 인텍플러스 디스플레이 패널 검사장치
JP7083856B2 (ja) * 2020-01-07 2022-06-13 日本電子株式会社 高さ測定装置、荷電粒子線装置、および高さ測定方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5475452A (en) * 1994-02-24 1995-12-12 Keravision, Inc. Device and method for mapping objects
DE19643018B4 (de) 1996-10-18 2010-06-17 Isra Surface Vision Gmbh Verfahren und Vorrichtung zum Messen des Verlaufs reflektierender Oberflächen
JP3411829B2 (ja) 1997-07-02 2003-06-03 旭硝子株式会社 表面形状の評価方法および評価装置
FR2817042B1 (fr) * 2000-11-22 2003-06-20 Saint Gobain Procede et dispositif d'analyse de la surface d'un substrat
JP2004167621A (ja) 2002-11-19 2004-06-17 Toyo Advanced Technologies Co Ltd ホーニング加工装置の砥石径拡縮部材の作動方法およびホーニング加工装置

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