JP2005340777A - ボンディングワイヤのループ形状及びそのループ形状を備えた半導体装置並びにワイヤボンディング方法 - Google Patents
ボンディングワイヤのループ形状及びそのループ形状を備えた半導体装置並びにワイヤボンディング方法 Download PDFInfo
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Abstract
【解決手段】 リードフレーム3上に搭載された半導体チップ1のパッド2とリード4との間をボンディングワイヤ5で接続した半導体装置において、ワイヤ5を第1ボンディング点たるパッド2上において複数回折り返し、該折り返したワイヤ5を上下方向に積み重ねた状態で第1ボンディング点たるパッド2に接続すると共に、該上下方向に積み重ねられたワイヤ5をそのまま水平もしくはほぼ水平方向に引き出し、第2ボンディング点たるリード4に向けて配線した。
【選択図】 図1
Description
前記ワイヤテール形成工程は、キャピラリを第1ボンディング点と第2ボンディング点を結ぶ線を基準として三次元方向に自在に移動制御することにより、ワイヤ先端に形成される略L字形をしたワイヤテールの水平部の向きを自在にコントロールするものであることを特徴とするものである。
図1(a)は、本発明のループ形状を採用して構成した半導体装置の一実施の形態を示す略示側面図である。なお、従来例(図11)と同一若しくは相当部分には同一の符号を付して示した。
図2のワイヤボンディング方法は、ワイヤ先端の略L字形をしたワイヤテール5eを第1ボンディング点たるパッド2にボンディングする第1ボンディング工程(図2(a)(b))と、第1ボンディング点にボンディングされたワイヤ5を繰り出しながらループコントロールすることによって複数回折り返し、この複数回折り返されたワイヤ5を上下方向に積み重ねた状態で押し潰すかまたはボンディングすることにより定位置に固定するワイヤ折りたたみ工程(図2(c)〜(g))と、上下方向に積み重ねられたワイヤ5を繰り出しながらループコントロールすることによって第2のボンディング点に向けて水平若しくはほぼ水平に引き出し、第2ボンディング点たるリード4にボンディングする第2ボンディング工程(図2(h)〜(k))と、第2ボンディング点にボンディングされたワイヤ5を繰り出しながらループコントロールすることによってワイヤ5の先端部分に略L字形をしたワイヤテール5eを形成するワイヤテール形成工程(図2(l)〜(n))とからなる。
1.第1ボンディング工程(図2(a)(b))
図1(a)に示すように、キャピラリ6をパッド2に向けて下降していき、ワイヤ5の先端に形成されている略L字形をしたワイヤテール5eを第1ボンディング点たるパッド2にボンディングする(図2(b))。
次に、図2(c)に示すように、キャピラリ6をA点まで上昇させ、ワイヤ5を所定長さ繰り出した後、図2(d)に示すように、B点までリバースさせる。さらに、図2(e)に示すように、キャピラリ6をC点まで上昇した後、図2(f)に示すように、パッド2にボンディングされているワイヤ5に向けて下降していく。これにより、ワイヤ5は2回折り返された状態となる。そして、図2(g)に示すように、この2回折り返されて上下に重ねられたワイヤ5を上から押し潰すか或いはボンディングすることによって上下に積み重ねられたワイヤ5を定位置に固定し、型くずれを防止する。
次に、図2(h)に示すように、キャピラリ6をD点まで上昇させ、ワイヤ5を所定長さ繰り出した後、図2(i)に示すように、E点までリバースさせる。これにより、ワイヤ5はE点まで傾斜した形状となる。このE点まで繰り出された部分が図1(a)中の水平部Lとなる。
上記のようにしてパッド2とリード4間のボンディングが終了したら、図2(l)に示すように、キャピラリ6をG点まで上昇させ、ワイヤ5を所定長さ繰り出す。このG点まで繰り出されたワイヤ部分が後述するL字形をしたワイヤテール5eの水平部5fとなる。
2 パッド(第1ボンディング点)
2’ 次のボンディング個所のパッド
3 リードフレーム
4 リード(第2ボンディング点)
4’ 次のボンディング個所のリード
5 ボンディングワイヤ
5e ワイヤテール
5f ワイヤテールの水平部
6 ボールボンディング用キャピラリ
7 ボール
8 ワイヤクランパ
Claims (9)
- ボールボンディング用キャピラリを用いて第1ボンディング点と第2ボンディング点との間を接続したボンディングワイヤのループ形状において、ワイヤ先端にボールを形成することなしに第1ボンディング点と第2ボンディング点との間が接続されていることを特徴とするボンディングワイヤのループ形状。
- 請求項1記載のボンディングワイヤのループ形状において、
ボンディングワイヤが第1ボンディング点において1回または複数回折り返され、該折り返されたボンディングワイヤが上下方向に積み重ねられた状態で第1のボンディング点に接続されていると共に、該上下方向に積み重ねられたボンディングワイヤはそのまま水平若しくはほぼ水平方向に引き出され、第2ボンディング点に向けて配線されていることを特徴とするボンディングワイヤのループ形状。 - ボールボンディング用キャピラリを用いてリードフレーム上に搭載された半導体チップのパッドとリードフレームのリードとの間をボンディングワイヤで接続した半導体装置において、ワイヤ先端にボールを形成することなしに第1ボンディング点たるパッドと第2ボンディング点たるリードとの間が接続されていることを特徴とする半導体装置。
- 請求項3記載の半導体装置において、
ボンディングワイヤが第1ボンディング点たるパッド上において1回または複数回折り返され、該折り返されたボンディングワイヤは上下方向に積み重ねられた状態で第1ボンディング点たるパッドに接続されていると共に、該上下方向に積み重ねられたボンディングワイヤはそのまま水平若しくはほぼ水平方向に引き出され、第2ボンディング点たるリードに向けて配線されていることを特徴とする半導体装置。 - 請求項4記載の半導体装置において、
複数対のパッドとリードを有し、これら複数対のパッドとリードが平面視で一直線上に並んで配置されており、各パッドから水平若しくはほぼ水平方向に引き出された各ボンディングワイヤが平面視で左右に振り分けて引き引き出され、他のボンディングワイヤを迂回しながら対応するリード位置まで配線されていることを特徴とする半導体装置。 - ボールボンディング用キャピラリを用いて第1ボンディング点と第2ボンディング点との間をボンディングワイヤによってボンディングする方法において、ワイヤ先端にスパークによるボールを形成することなしに第1ボンディング点と第2ボンディング点との間を接続することを特徴とするワイヤボンディング方法。
- 請求項6記載のワイヤボンディング方法において、
ワイヤ先端に形成された略L字形のワイヤテールを第1ボンディング点にボンディングする第1ボンディング工程と、
第1ボンディング点にボンディングされたボンディングワイヤを繰り出しながらループコントロールすることによって1回または複数回折り返し、この1回または複数回折り返されたボンディングワイヤを上下方向に積み重ねた状態で押し潰しまたはボンディングすることにより定位置に固定するワイヤ折りたたみ工程と、
上下方向に積み重ねられたボンディングワイヤを繰り出しながらループコントロールすることによって第2のボンディング点に向けて水平若しくはほぼ水平に引き出し、第2ボンディング点にボンディングする第2ボンディング工程と、
第2ボンディング点にボンディングされたボンディングワイヤを繰り出しながらループコントロールして引き上げることによりボンディングワイヤの先端部分に略L字形をしたワイヤテールを形成するワイヤテール形成工程と
を備えたことを特徴とするワイヤボンディング方法。 - 請求項7記載のワイヤボンディング方法において、
前記ワイヤテール形成工程は、キャピラリを第1ボンディング点と第2ボンディング点を結ぶ線を基準として三次元方向に自在に移動制御することにより、ワイヤ先端に形成される略L字形をしたワイヤテールの水平部の向きを自在にコントロールするものであることを特徴とするワイヤボンディング方法。 - 請求項7または8記載のワイヤボンディング方法を用いてステッチボンディングすることを特徴とするワイヤボンディング方法。
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