JP2005334922A - Nozzle checking device in laser beam machine - Google Patents

Nozzle checking device in laser beam machine Download PDF

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Publication number
JP2005334922A
JP2005334922A JP2004155930A JP2004155930A JP2005334922A JP 2005334922 A JP2005334922 A JP 2005334922A JP 2004155930 A JP2004155930 A JP 2004155930A JP 2004155930 A JP2004155930 A JP 2004155930A JP 2005334922 A JP2005334922 A JP 2005334922A
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Prior art keywords
nozzle
laser processing
axis
laser beam
tip
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Tsunehiko Yamazaki
恒彦 山崎
Naotomi Miyagawa
直臣 宮川
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Yamazaki Mazak Corp
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Yamazaki Mazak Corp
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Priority to JP2004155930A priority Critical patent/JP2005334922A/en
Priority to US11/121,660 priority patent/US7679031B2/en
Priority to EP05009904A priority patent/EP1600247B1/en
Priority to CNB2005100738971A priority patent/CN100558498C/en
Publication of JP2005334922A publication Critical patent/JP2005334922A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles
    • B23K26/1494Maintenance of nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042Automatically aligning the laser beam
    • B23K26/043Automatically aligning the laser beam along the beam path, i.e. alignment of laser beam axis relative to laser beam apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/0869Devices involving movement of the laser head in at least one axial direction
    • B23K26/0876Devices involving movement of the laser head in at least one axial direction in at least two axial directions
    • B23K26/0884Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles
    • B23K26/1482Detachable nozzles, e.g. exchangeable or provided with breakaway lines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/94Investigating contamination, e.g. dust

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Robotics (AREA)
  • Laser Beam Processing (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device for optically checking the tip end of a nozzle in a laser beam machine. <P>SOLUTION: A camera unit 450 is vertically moved to a position facing a nozzle 65 of a laser machining tool. The camera unit has a camera chamber 454 housing a CCD camera main body 460 and a lens 462, and the camera chamber is hermetically sealed with a protection glass 456. A ring light 470 illuminates the surface of the nozzle 65, and the CCD camera main body 460 optically checks the nozzle 65. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、レーザ加工機のノズルの先端形状に異常がないか(異物が付着していないか、変形していないか、または、先端にキズがついていないか)どうかを、カメラ等の形状及び性状認識装置により、検査する装置に関する。   The present invention determines whether the tip shape of the nozzle of the laser processing machine is abnormal (whether foreign matter is not attached, is not deformed, or the tip is not scratched) and the shape of the camera and the like. The present invention relates to an apparatus for inspecting by a property recognition apparatus.

従来のレーザ加工機は、材質及び板厚によって、予め定められた標準加工条件がNC装置に登録されている。
標準加工条件によって、レーザ加工を行っていくと、加工トーチ先端に装着されたノズルの異常によりドロスの発生などの加工不良が発生する。最適な加工条件を維持するためには、作業者が異常を事前に察知し、機械を停止し、ノズルの異常を調べ、異常を認識した場合は、手動でノズルを交換したり、清掃したり、変形を修正したり、または、加工条件を変更したりする作業が必要であった。
また、ワークの切断加工部をCCDカメラで撮像して、ワークの加工不良を検出できるようにしたものが知られている(特許文献1参照)。
特開平10−258376号公報
In a conventional laser processing machine, predetermined standard processing conditions are registered in the NC apparatus according to the material and the plate thickness.
When laser processing is performed according to standard processing conditions, processing defects such as dross occur due to an abnormality in the nozzle attached to the tip of the processing torch. In order to maintain the optimum machining conditions, the operator must detect the abnormality in advance, stop the machine, investigate the nozzle abnormality, and if the abnormality is recognized, manually replace the nozzle or clean it. It is necessary to correct the deformation or change the processing conditions.
In addition, there is known a technique in which a workpiece cutting defect is imaged with a CCD camera so that a machining defect of the workpiece can be detected (see Patent Document 1).
Japanese Patent Laid-Open No. 10-258376

レーザ加工機のノズルに異物が付着することによってノズル先端と加工物上面との間隙を一定、且つ安定的に維持することができず、加工品質の低下、等の加工不良を発生させ、更には加工不能を引き起こす。
また、ノズルの先端に付着した異物により、ノズルの先端の出口の真円が変化することによって、アシストガスの噴出流速分布が乱れ、加工品質の低下等の加工不良を発生させ、更には加工不能を引き起こす。
上記の問題を回避し、最適な加工を維持するためには、非熟練者では対応できず、長年の経験を有する熟練者が必要であり、さらに、長時間無人化運転の実現を阻害していた。
本発明は以上の問題を解決するレーザ加工機におけるノズルチェック装置を提供するものである。
Due to foreign matter adhering to the nozzle of the laser processing machine, the gap between the nozzle tip and the upper surface of the workpiece cannot be maintained constantly and stably, causing processing defects such as deterioration in processing quality, and Causes inability to process.
In addition, due to foreign matter adhering to the tip of the nozzle, the perfect circle at the outlet of the nozzle tip changes, disturbing the flow velocity distribution of the assist gas, causing processing defects such as deterioration in processing quality, and further inability to process cause.
In order to avoid the above problems and maintain optimum machining, unskilled workers cannot cope with it, and skilled workers with many years of experience are required, and further, the realization of unmanned operation for a long time is impeded. It was.
The present invention provides a nozzle check device in a laser beam machine that solves the above problems.

本発明のレーザ加工機は、基本的な手段として、ベッドと、ベッド上に配設されてワークを支持するパレットと、ベッドの長手方向の軸線であるX軸に沿って移動制御されるコラムと、コラムに支持されてX軸に直交するY軸に沿って移動制御されるサドルと、サドルに支持されてX軸とY軸が形成する平面に対して垂直なZ軸に沿って移動制御される加工ヘッドを備えるものである。
そして、レーザ加工工具の先端に装着されるノズルを光学的に検査する手段を装備する。
レーザ加工工具は、集光レンズを含む光学系の手段を備えるトーチと、トーチの先端に交換自在に装着されるノズルを備える。
また、ノズルを光学的に検査する手段は、CCDカメラ本体と、レンズと、ノズルを照明する照明装置を備え、ノズルを光学的に検査する手段をノズルに対向して昇降させる装置を備える。
The laser beam machine according to the present invention includes, as basic means, a bed, a pallet that is disposed on the bed and supports a workpiece, and a column that is controlled to move along the X axis that is the longitudinal axis of the bed. A saddle supported by the column and controlled in movement along the Y axis perpendicular to the X axis; and controlled in movement along the Z axis supported by the saddle and perpendicular to the plane formed by the X and Y axes. A processing head is provided.
Then, a means for optically inspecting a nozzle attached to the tip of the laser processing tool is provided.
The laser processing tool includes a torch having an optical system means including a condenser lens, and a nozzle that is replaceably attached to the tip of the torch.
The means for optically inspecting the nozzle includes a CCD camera main body, a lens, and an illumination device for illuminating the nozzle, and includes an apparatus for raising and lowering the means for optically inspecting the nozzle so as to face the nozzle.

本発明は、ノズルの真円度が常に公差範囲内で維持されるので、アシストガスの噴出流速分布が乱れることなく、加工品質が高精度に維持できる。
さらに、ノズル先端に異物の付着あるいは打痕等がない状態で維持されるため、ノズル先端と加工物上面との間隙を一定、且つ安定的に維持することができ、加工品質を高精度に維持することができる。
従って、非熟練者でも高品位・高精度加工が可能になり、さらに、長時間無人化運転も可能になる。
In the present invention, since the roundness of the nozzle is always maintained within a tolerance range, the processing quality can be maintained with high accuracy without disturbing the jet flow velocity distribution of the assist gas.
Furthermore, since the nozzle tip is maintained with no foreign matter attached or dents, the gap between the nozzle tip and the workpiece top surface can be maintained constant and stable, and the machining quality is maintained with high accuracy. can do.
Therefore, even a non-skilled person can perform high-quality and high-precision machining, and further, unmanned operation can be performed for a long time.

図1は、本発明のレーザ加工機の全体構成を示す斜視図、図2は平面図、図3は正面図、図4は要部の斜視図、図5は側面図である。
全体を符号1で示すレーザ加工機は、ベッド10上に配設されるパレット(テーブル)20を有し、板状のワークWが載置される。ベッド10の長手方向の延長線上にはパレット交換装置12が配置され、次加工用のワークWを載置したパレット20aが用意されている。
1 is a perspective view showing an overall configuration of a laser beam machine according to the present invention, FIG. 2 is a plan view, FIG. 3 is a front view, FIG. 4 is a perspective view of a main part, and FIG.
A laser beam machine, generally denoted by reference numeral 1, has a pallet (table) 20 which is disposed on a bed 10, a plate-like workpiece W 1 is placed. A pallet exchanging device 12 is arranged on an extension line in the longitudinal direction of the bed 10, and a pallet 20 a on which a workpiece W 2 for next processing is placed is prepared.

ベッド10上の両側には、長手方向に沿って一対のガイドレール34が取付けられており、ガイドレール34上には、コラム30がX軸方向に移動自在に装備される。   A pair of guide rails 34 are attached to both sides of the bed 10 along the longitudinal direction, and a column 30 is mounted on the guide rails 34 so as to be movable in the X-axis direction.

コラム30のX軸上の駆動手段は、例えば、リニアモータが使用されており、ガイドレール34に設けた固定子と直動ガイド32に設けた移動子との間でリニアモータが形成される。   As the driving means on the X axis of the column 30, for example, a linear motor is used, and a linear motor is formed between a stator provided on the guide rail 34 and a mover provided on the linear guide 32.

コラム30には、X軸に直交するY軸に沿ってガイドレール44が設けてあり、サドル40がY軸上で移動自在に装備される。サドル40は、ガイドレール44に係合する直動ガイド42を備え、ガイドレール44と直動ガイド42との間でリニアモータが形成される。   The column 30 is provided with a guide rail 44 along the Y axis orthogonal to the X axis, and the saddle 40 is mounted so as to be movable on the Y axis. The saddle 40 includes a linear motion guide 42 that engages with the guide rail 44, and a linear motor is formed between the guide rail 44 and the linear motion guide 42.

サドル40は、X軸、Y軸が形成する平面に垂直なZ軸方向にガイドレールが設けあり、加工ヘッド50がZ軸に沿って移動自在に装備される。加工ヘッド50は、レーザ発振装置72から送られてくるレーザ光が導入される光学系を備える。   The saddle 40 is provided with a guide rail in the Z-axis direction perpendicular to the plane formed by the X-axis and the Y-axis, and the machining head 50 is mounted so as to be movable along the Z-axis. The processing head 50 includes an optical system into which the laser beam sent from the laser oscillation device 72 is introduced.

加工ヘッド50には、レーザ加工工具60が交換自在に装備される。加工エリアは、カバー90で覆われ、安全が確保される。ベッド10に隣接して強電盤70やレーザ発振装置72が配設される。オペレータが様々な駆動を指示する操作盤80は、ベッド10上の長手方向の端部に配設される。ベッド10上の操作盤80に近い方の端部には、レーザ加工工具の段取りステーション100が装備される。   The machining head 50 is equipped with a laser machining tool 60 in a replaceable manner. The processing area is covered with a cover 90, and safety is ensured. A high voltage board 70 and a laser oscillation device 72 are disposed adjacent to the bed 10. The operation panel 80 instructed by the operator to perform various driving operations is disposed at the end of the bed 10 in the longitudinal direction. A laser processing tool setup station 100 is provided at the end of the bed 10 closer to the operation panel 80.

図6は、レーザ加工工具の段取りステーション100をテーブル側からみた正面図、図7は平面図である。
レーザ加工工具の段取りステーション100は、トーチとノズルを備えたレーザ加工工具のツールチェンジマガジン220を備えた工具ステーション200とレーザ加工工具のノズルのノズルチェンジマガジンを備えたノズルステーション300を備える。
6 is a front view of the laser processing tool setup station 100 as viewed from the table side, and FIG. 7 is a plan view.
The laser processing tool setup station 100 includes a tool station 200 including a tool change magazine 220 for a laser processing tool including a torch and a nozzle, and a nozzle station 300 including a nozzle change magazine for a laser processing tool nozzle.

図8は、本発明のノズル検査装置の説明図。図9はカメラユニットの説明図である。   FIG. 8 is an explanatory diagram of the nozzle inspection apparatus of the present invention. FIG. 9 is an explanatory diagram of the camera unit.

全体を符号400で示すノズル検査装置は、カバー401内に配設されるベース402にとりつけられる。
ベース402に固定されるシリンダ404はピストンロッド406を昇降させる。ピストンロッド406の上端には、カメラユニット450がとりつけられている。カメラユニット450は、常時、ゴミ等の埃の除去と浸入を防止するカバー401に格納されており、上面には、レーザ加工工具の段取りステーション100の全体を覆うカバー410で保護されている。
ノズルの検査時には、シリンダ404が作動してピストンロッド406とともに、カメラユニット450をノズル直下に対向する位置に上昇させる。
A nozzle inspection apparatus denoted as a whole by reference numeral 400 is attached to a base 402 disposed in a cover 401.
A cylinder 404 fixed to the base 402 moves the piston rod 406 up and down. A camera unit 450 is attached to the upper end of the piston rod 406. The camera unit 450 is always stored in a cover 401 that prevents the removal and intrusion of dust such as dust, and the upper surface is protected by a cover 410 that covers the entire setup station 100 of the laser processing tool.
When inspecting the nozzle, the cylinder 404 operates to raise the camera unit 450 together with the piston rod 406 to a position facing directly below the nozzle.

カメラユニット450は、ピストンロッド406の先端に取付けられるハウジング452を有し、ハウジング452の内部に設けられるカメラ室454内にCCDカメラ本体460が固定される。CCDカメラ本体460は、レンズ462を有し、レンズ462は調整ねじ464によりカメラの受光面との距離が調整できるように取付けられる。   The camera unit 450 has a housing 452 attached to the tip of the piston rod 406, and a CCD camera body 460 is fixed in a camera chamber 454 provided inside the housing 452. The CCD camera body 460 includes a lens 462, and the lens 462 is attached so that the distance from the light receiving surface of the camera can be adjusted by an adjustment screw 464.

カメラ室454の上部には、保護ガラス456で覆われ、内部のCCDカメラ本体460とレンズ462等に異物が付着することが防止される。
カメラ室454の上部には、ブラケット458が設けられ、ブラケット458の上部にリングライト470がとりつけられる。
The upper part of the camera room 454 is covered with a protective glass 456, and foreign matter is prevented from adhering to the internal CCD camera body 460, the lens 462, and the like.
A bracket 458 is provided in the upper part of the camera room 454, and a ring light 470 is attached to the upper part of the bracket 458.

リングライト470は、例えば、高輝度LED472を備え中央部に開口部474を有する。
リングライト470で照明されるノズル65の撮像をCCDカメラ本体460で撮影して、ノズル65を光学的に検査する。
The ring light 470 includes, for example, a high-intensity LED 472 and an opening 474 at the center.
An image of the nozzle 65 illuminated by the ring light 470 is taken by the CCD camera body 460, and the nozzle 65 is optically inspected.

図10は、本発明のインテリジェントノズルチェック装置によるノズルの検査の手法を示す。
ノズル65は、ノズル本体650を有し、先端面654の中心にノズル穴652が形成されている。
図の(b)は、ノズル65の先端面654のCCDカメラの撮像Eを示す。先端654の表面は正常な輝度を有し、ノズル穴652の影Hも正確に撮影されている。このノズル穴652の穴径寸法Dを検知することで、ノズル65の種別を特定することができる。
FIG. 10 shows a nozzle inspection method using the intelligent nozzle check device of the present invention.
The nozzle 65 has a nozzle body 650, and a nozzle hole 652 is formed at the center of the tip end surface 654.
(B) in the figure, showing an imaging E 1 of the CCD camera of the front end face 654 of the nozzle 65. Surface of the tip 654 has a normal luminance, shadow H 1 of the nozzle bore 652 is also accurately captured. By detecting the holes diameter D 1 of the nozzle holes 652, it is possible to identify the type of the nozzle 65.

図11は、何らかの原因でノズル65の先端部に傷Kが生じた例を示す。
撮像Eに傷Kの形状が撮影され、またノズル穴652の影Hも変形する。
この撮像により、ノズルの不良が判別される。
Figure 11 shows an example of flaws K 1 is generated at the tip of the nozzle 65 for some reason.
The shape of the scratch K 1 is photographed on the imaging E 2, and the shadow H 2 of the nozzle hole 652 is also deformed.
By this imaging, a defective nozzle is determined.

図12は、ノズル65の先端面654に傷Kが生じた例を示す。
撮像Eに現われるノズル穴652の影Hは正常であるが、先端面654の反射輝度が低下する。この反射輝度の低下を検知して、ノズルの不良を検出する。
FIG. 12 shows an example in which a scratch K 2 is generated on the tip surface 654 of the nozzle 65.
Shadow H 3 of the nozzle holes 652 appearing on the imaging E 3 is normal, it reduced reflective brightness of the distal end surface 654. By detecting this decrease in reflection luminance, a defective nozzle is detected.

図13は、ノズル先端面654に、レーザ加工により加熱されたワーク材料が飛散して形成されるスパッタSが付着した状態を示す。
撮像E中にはノズル穴652の穴径は正常に現われるが、表面の反射輝度が大幅に低下する。この現象をとらえて、ノズルの不良を検出する。
FIG. 13 shows a state in which the sputter S 1 formed by scattering the workpiece material heated by laser processing is attached to the nozzle tip surface 654.
Hole diameter of the nozzle holes 652 in the imaging E 4 appears normally, the reflective brightness of the surface is greatly reduced. Detecting this phenomenon, the nozzle failure is detected.

図14は、本発明のノズルチェック装置による処理のフローチャートである。
ステップS10でスタートした処理は、ステップS11で段取りステーションのカバーを開く。ステップS12でカメラユニットをZ軸方向へ上昇させ、ステップS13で加工工具をカメラユニット上で移動させる。ステップS14で加工工具をカメラの焦点位置まで下降させる。
ステップS15でノズルからエアを噴射して、カメラユニットの保護ガラスの汚れを掃除する。ステップS17でカメラユニットの照明を点灯してノズル端面を照らして、ステップS18でカメラによりノズル端面を撮像する。
ステップS19では、撮像されたノズル端面の画像データを処理して、ノズル穴の重心位置を算出する。ステップS20で撮像された複数のノズル穴の直径寸法を測定し、ステップS21でノズル穴の平均値を演算する。
ステップS22で、演算されたノズルの真円度は公差範囲内かをチェックし、公差範囲内であれば、ステップS23でノズル端面の映像のコントラストを判定する。判定内容は、ノズル端面の傷やバリの有無、スパッタ等の付着物の検出、ノズル端面の変形・異形の検出等が含まれる。
上述した判定結果が良好であれば、ステップS24へ進み、加工工具を上昇させて段取りステーションから加工領域に戻す。ステップS25で加工を実行し、ステップS26で処理を終了する。
ステップS22でノズルの真円度が公差範囲外であると判定されると、ステップS30へ進み、アラームを出力して、その旨をオペレータに通知する。ステップS31で段取りステーション内に同径の良品ノズルが有するかをチェックし、有れば加工工具を上昇させ、ステップS33で良品ノズルと交換する。
ステップS34で加工を実行し、ステップS35で処理を終了する。
ステップS31で段取りステーション内に同径の良品ノズルが無いことが判明した時には、ステップS40へ進み、アラームを出力してオペレータに通知し、ステップS41でNC画面にノズルの追加請求を表示する。
ステップS42で加工工具を上昇させ、ステップS43で加工工具を原点位置に復帰させる。ステップS44で、オペレータによる追加ノズルとの交換を受ける。ステップS45で制御装置に追加ノズルの登録を行い、ステップS10に戻る。
ステップS23でノズル端面の判定結果が不良であると判断されると、ステップS50でノズル端面の研磨加工がチェックされ、良好であれば、ステップS18へ戻り、不良であれば、ステップS30に進む。
FIG. 14 is a flowchart of processing by the nozzle check device of the present invention.
In the process started in step S10, the cover of the setup station is opened in step S11. In step S12, the camera unit is raised in the Z-axis direction, and in step S13, the processing tool is moved on the camera unit. In step S14, the processing tool is lowered to the focal position of the camera.
In step S15, air is ejected from the nozzle to clean the protective glass of the camera unit. In step S17, the illumination of the camera unit is turned on to illuminate the nozzle end surface, and in step S18, the nozzle end surface is imaged by the camera.
In step S19, the imaged image data of the nozzle end face is processed to calculate the position of the center of gravity of the nozzle hole. The diameter dimension of the plurality of nozzle holes imaged in step S20 is measured, and the average value of the nozzle holes is calculated in step S21.
In step S22, it is checked whether the calculated roundness of the nozzle is within the tolerance range. If it is within the tolerance range, the contrast of the image on the nozzle end face is determined in step S23. The determination contents include the presence or absence of scratches or burrs on the nozzle end surface, detection of deposits such as spatter, detection of deformation / deformation of the nozzle end surface, and the like.
If the above-described determination result is good, the process proceeds to step S24, where the machining tool is raised and returned from the setup station to the machining area. Processing is executed in step S25, and the process ends in step S26.
If it is determined in step S22 that the roundness of the nozzle is outside the tolerance range, the process proceeds to step S30, an alarm is output, and the operator is notified accordingly. In step S31, it is checked whether or not a non-defective nozzle having the same diameter is present in the setup station. If there is a non-defective nozzle, the machining tool is raised, and the non-defective nozzle is replaced in step S33.
Processing is executed in step S34, and the process ends in step S35.
When it is determined in step S31 that there are no non-defective nozzles of the same diameter in the setup station, the process proceeds to step S40 to output an alarm to notify the operator, and in step S41, an additional request for nozzles is displayed on the NC screen.
In step S42, the machining tool is raised, and in step S43, the machining tool is returned to the origin position. In step S44, replacement with an additional nozzle by the operator is received. In step S45, an additional nozzle is registered in the control device, and the process returns to step S10.
If it is determined in step S23 that the determination result of the nozzle end surface is defective, the polishing of the nozzle end surface is checked in step S50. If it is satisfactory, the process returns to step S18, and if it is defective, the process proceeds to step S30.

なお、上述した実施例にあっては、X軸とY軸上の駆動手段には、リニアモータの例を説明したが、ボールねじを用いても本発明を適用することができる。   In the above-described embodiment, an example of a linear motor has been described as the driving means on the X axis and the Y axis. However, the present invention can also be applied using a ball screw.

また、上述した実施例にあっては、ノズルを照らす照明装置としては、中央部に開口部を有するリングライトの例を説明したが、ハロゲンライトを用いても本発明を適用することができる。   In the above-described embodiments, the example of the ring light having the opening at the center has been described as the illumination device for illuminating the nozzle. However, the present invention can also be applied using a halogen light.

本発明のレーザ加工機の全体の斜視図。The perspective view of the whole laser beam machine of the present invention. 本発明のレーザ加工機の平面図。The top view of the laser processing machine of this invention. 本発明のレーザ加工機の要部の正面図。The front view of the principal part of the laser beam machine of this invention. 本発明のレーザ加工機の要部の斜視図。The perspective view of the principal part of the laser beam machine of this invention. 本発明のレーザ加工機の要部の側面図。The side view of the principal part of the laser beam machine of this invention. レーザ加工工具の段取りステーションの正面図。The front view of the setup station of a laser processing tool. レーザ加工工具の段取りステーションの平面図。The top view of the setup station of a laser processing tool. ノズルチェック装置の説明図。Explanatory drawing of a nozzle check apparatus. ノズルチェック装置の説明図。Explanatory drawing of a nozzle check apparatus. ノズルの検査手法を示す説明図。Explanatory drawing which shows the test | inspection method of a nozzle. ノズルに傷が生じた例を示す説明図。Explanatory drawing which shows the example which the damage | wound produced in the nozzle. ノズルに傷が生じた例を示す説明図。Explanatory drawing which shows the example which the damage | wound produced in the nozzle. ノズルにスパッタが付着した例を示す説明図。Explanatory drawing which shows the example which sputter | spatter adhered to the nozzle. ノズルチェックの処理のフローチャート。The flowchart of a process of a nozzle check.

符号の説明Explanation of symbols

1 レーザ加工機
10 ベッド
20 パレット
30 コラム
40 サドル
50 加工ヘッド
60 レーザ加工工具
65 ノズル
70 強電盤
72 レーザ発振装置
80 制御盤
90 カバー
100 レーザ加工工具の段取りステーション
200 レーザ加工機の工具ステーション
300 レーザ加工機のノズルステーション
400 ノズル検査装置
404 シリンダ
450 カメラユニット
460 CCDカメラ本体
462 レンズ
456 保護ガラス
470 リングライト
DESCRIPTION OF SYMBOLS 1 Laser processing machine 10 Bed 20 Pallet 30 Column 40 Saddle 50 Processing head 60 Laser processing tool 65 Nozzle 70 High power board 72 Laser oscillator 80 Control panel 90 Cover 100 Laser processing tool setup station 200 Laser processing tool tool station 300 Laser processing Machine nozzle station 400 nozzle inspection device 404 cylinder 450 camera unit 460 CCD camera body 462 lens 456 protective glass 470 ring light

Claims (4)

ベッドと、ベッド上に配設されてワークを支持するパレットと、ベッドの長手方向の軸線であるX軸に沿って移動制御されるコラムと、コラムに支持されてX軸に直交するY軸に沿って移動制御されるサドルと、サドルに支持されてX軸とY軸が形成する平面に対して垂直なZ軸に沿って移動制御される加工ヘッドを備えるレーザ加工機において、
レーザ加工工具の先端に装着されるノズルを光学的に検査する手段を装備するレーザ加工機におけるノズルチェック装置。
A bed, a pallet arranged on the bed to support the workpiece, a column controlled to move along the X axis, which is the longitudinal axis of the bed, and a Y axis that is supported by the column and orthogonal to the X axis In a laser processing machine comprising a saddle that is controlled to move along, and a processing head that is supported by the saddle and controlled to move along the Z axis perpendicular to the plane formed by the X and Y axes,
A nozzle check device in a laser processing machine equipped with a means for optically inspecting a nozzle mounted on the tip of a laser processing tool.
レーザ加工工具は、集光レンズを含む光学系の手段を備えるトーチと、トーチの先端に交換自在に装着されるノズルを備える請求項1記載のレーザ加工機におけるノズルチェック装置。   2. The nozzle check device in a laser processing machine according to claim 1, wherein the laser processing tool includes a torch having an optical system means including a condensing lens, and a nozzle that is replaceably attached to a tip of the torch. ノズルを光学的に検査する手段は、CCDカメラ本体と、レンズと、ノズルを照らす照明装置を備える請求項1記載のレーザ加工機におけるノズルチェック装置。   2. The nozzle check device for a laser beam machine according to claim 1, wherein the means for optically inspecting the nozzle includes a CCD camera body, a lens, and an illumination device for illuminating the nozzle. ノズルを光学的に検査する手段をノズルに対向して昇降させる装置を備える請求項1記載のレーザ加工機におけるノズルチェック装置。
The nozzle check device in a laser beam machine according to claim 1, further comprising a device for raising and lowering means for optically inspecting the nozzle so as to face the nozzle.
JP2004155930A 2004-05-26 2004-05-26 Nozzle checking device in laser beam machine Pending JP2005334922A (en)

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US11/121,660 US7679031B2 (en) 2004-05-26 2005-05-04 Method for checking a nozzle for a laser beam machine
EP05009904A EP1600247B1 (en) 2004-05-26 2005-05-06 Nozzle checker for laser beam machine
CNB2005100738971A CN100558498C (en) 2004-05-26 2005-05-26 Nozzle checker in the laser machine

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JP2021003718A (en) * 2019-06-26 2021-01-14 株式会社アマダ Method for setting laser beam machine, and laser beam machine

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US20050263510A1 (en) 2005-12-01
EP1600247A2 (en) 2005-11-30

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