JP2005311333A5 - - Google Patents
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- Publication number
- JP2005311333A5 JP2005311333A5 JP2005082449A JP2005082449A JP2005311333A5 JP 2005311333 A5 JP2005311333 A5 JP 2005311333A5 JP 2005082449 A JP2005082449 A JP 2005082449A JP 2005082449 A JP2005082449 A JP 2005082449A JP 2005311333 A5 JP2005311333 A5 JP 2005311333A5
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film integrated
- integrated circuit
- substrate
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims 45
- 239000000758 substrate Substances 0.000 claims 21
- 238000004519 manufacturing process Methods 0.000 claims 14
- 238000000034 method Methods 0.000 claims 13
- 239000000853 adhesive Substances 0.000 claims 11
- 230000001070 adhesive effect Effects 0.000 claims 11
- 239000010408 film Substances 0.000 claims 3
- 229910052736 halogen Inorganic materials 0.000 claims 3
- -1 halogen fluoride Chemical class 0.000 claims 3
- 239000007788 liquid Substances 0.000 claims 3
- 238000003825 pressing Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920002050 silicone resin Polymers 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005082449A JP5030388B2 (ja) | 2004-03-22 | 2005-03-22 | 薄膜集積回路の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004083664 | 2004-03-22 | ||
| JP2004083664 | 2004-03-22 | ||
| JP2005082449A JP5030388B2 (ja) | 2004-03-22 | 2005-03-22 | 薄膜集積回路の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005311333A JP2005311333A (ja) | 2005-11-04 |
| JP2005311333A5 true JP2005311333A5 (https=) | 2008-04-24 |
| JP5030388B2 JP5030388B2 (ja) | 2012-09-19 |
Family
ID=35439681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005082449A Expired - Fee Related JP5030388B2 (ja) | 2004-03-22 | 2005-03-22 | 薄膜集積回路の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5030388B2 (https=) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5008299B2 (ja) * | 2005-11-30 | 2012-08-22 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| US7875530B2 (en) | 2005-12-02 | 2011-01-25 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| US7504317B2 (en) | 2005-12-02 | 2009-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
| KR101430587B1 (ko) * | 2006-09-20 | 2014-08-14 | 더 보오드 오브 트러스티스 오브 더 유니버시티 오브 일리노이즈 | 전사가능한 반도체 구조들, 디바이스들 및 디바이스 컴포넌트들을 만들기 위한 릴리스 방안들 |
| KR101519038B1 (ko) | 2007-01-17 | 2015-05-11 | 더 보오드 오브 트러스티스 오브 더 유니버시티 오브 일리노이즈 | 프린팅기반 어셈블리에 의해 제조되는 광학 시스템 |
| JP5216716B2 (ja) * | 2008-08-20 | 2013-06-19 | 株式会社半導体エネルギー研究所 | 発光装置及びその作製方法 |
| KR101026040B1 (ko) * | 2008-11-13 | 2011-03-30 | 삼성전기주식회사 | 박막소자 제조방법 |
| KR101046064B1 (ko) * | 2008-12-11 | 2011-07-01 | 삼성전기주식회사 | 박막소자 제조방법 |
| JP2010205943A (ja) * | 2009-03-04 | 2010-09-16 | Canon Inc | 機能性領域の移設方法、ｌｅｄアレイ、ｌｅｄプリンタヘッド、及びｌｅｄプリンタ |
| EP2457256B1 (en) | 2009-07-18 | 2020-06-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000020665A (ja) * | 1998-06-30 | 2000-01-21 | Toshiba Corp | 半導体装置 |
| JP4748859B2 (ja) * | 2000-01-17 | 2011-08-17 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| JP4244120B2 (ja) * | 2001-06-20 | 2009-03-25 | 株式会社半導体エネルギー研究所 | 発光装置及びその作製方法 |
| US6887650B2 (en) * | 2001-07-24 | 2005-05-03 | Seiko Epson Corporation | Transfer method, method of manufacturing thin film devices, method of manufacturing integrated circuits, circuit board and manufacturing method thereof, electro-optical apparatus and manufacturing method thereof, ic card, and electronic appliance |
| JP4211256B2 (ja) * | 2001-12-28 | 2009-01-21 | セイコーエプソン株式会社 | 半導体集積回路、半導体集積回路の製造方法、電気光学装置、電子機器 |
-
2005
- 2005-03-22 JP JP2005082449A patent/JP5030388B2/ja not_active Expired - Fee Related
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