JP2005308675A5 - - Google Patents
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- Publication number
- JP2005308675A5 JP2005308675A5 JP2004129383A JP2004129383A JP2005308675A5 JP 2005308675 A5 JP2005308675 A5 JP 2005308675A5 JP 2004129383 A JP2004129383 A JP 2004129383A JP 2004129383 A JP2004129383 A JP 2004129383A JP 2005308675 A5 JP2005308675 A5 JP 2005308675A5
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- JP
- Japan
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Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004129383A JP4521482B2 (ja) | 2004-04-26 | 2004-04-26 | Ｓｐｍカンチレバー及びその製造方法 |
| PCT/JP2005/007946 WO2005103648A1 (ja) | 2004-04-26 | 2005-04-20 | Ｓｐｍカンチレバー及びその製造方法 |
| EP05734701.5A EP1742034B8 (en) | 2004-04-26 | 2005-04-20 | Method of fabrication of a SPM thin line probe |
| US11/587,207 US7735357B2 (en) | 2004-04-26 | 2005-04-20 | SPM cantilever and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004129383A JP4521482B2 (ja) | 2004-04-26 | 2004-04-26 | Ｓｐｍカンチレバー及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005308675A JP2005308675A (ja) | 2005-11-04 |
| JP2005308675A5 true JP2005308675A5 (enExample) | 2007-05-31 |
| JP4521482B2 JP4521482B2 (ja) | 2010-08-11 |
Family
ID=35197089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004129383A Expired - Lifetime JP4521482B2 (ja) | 2004-04-26 | 2004-04-26 | Ｓｐｍカンチレバー及びその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7735357B2 (enExample) |
| EP (1) | EP1742034B8 (enExample) |
| JP (1) | JP4521482B2 (enExample) |
| WO (1) | WO2005103648A1 (enExample) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4761129B2 (ja) * | 2005-11-30 | 2011-08-31 | 株式会社ユニソク | プローブ顕微鏡用探針の作製方法、及びプローブ顕微鏡 |
| KR100722555B1 (ko) | 2005-12-23 | 2007-05-28 | 한국기계연구원 | 개구부와 나노 스케일의 팁을 구비하는 다기능 주사 탐침의제조 방법 |
| TWI322792B (en) * | 2006-01-11 | 2010-04-01 | Ind Tech Res Inst | Methods for fabricating carbon nano-tubes and field emission displays |
| JP4806762B2 (ja) | 2006-03-03 | 2011-11-02 | 国立大学法人 名古屋工業大学 | Ｓｐｍカンチレバー |
| US7572300B2 (en) * | 2006-03-23 | 2009-08-11 | International Business Machines Corporation | Monolithic high aspect ratio nano-size scanning probe microscope (SPM) tip formed by nanowire growth |
| JP4863460B2 (ja) * | 2006-06-16 | 2012-01-25 | 独立行政法人物質・材料研究機構 | 半導体ナノ細線を用いたプローブ及びその製造方法 |
| WO2008028521A1 (en) * | 2006-09-07 | 2008-03-13 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | A probe, a raman spectrometer and a method of manufacturing a probe |
| JP2008122330A (ja) * | 2006-11-15 | 2008-05-29 | Japan Advanced Institute Of Science & Technology Hokuriku | 走査型プローブ顕微鏡用半導体・セラミックス複合カンチレバー |
| JP2008151673A (ja) * | 2006-12-19 | 2008-07-03 | Japan Advanced Institute Of Science & Technology Hokuriku | 走査型プローブ顕微鏡用化合物半導体カンチレバー、及びその製造法 |
| FR2912426B1 (fr) * | 2007-02-09 | 2009-05-29 | Centre Nat Rech Scient | Procede de croissance d'un nanotube de carbone sur pointe nanometrique |
| US7955486B2 (en) * | 2007-02-20 | 2011-06-07 | The Board Of Trustees Of The University Of Illinois | Electrochemical deposition platform for nanostructure fabrication |
| JP5174896B2 (ja) * | 2008-04-17 | 2013-04-03 | オリンパス株式会社 | カーボンナノファイバー探針カンチレバー |
| JP5178297B2 (ja) * | 2008-04-17 | 2013-04-10 | オリンパス株式会社 | Ｃｎｆ探針カンチレバー |
| KR101097217B1 (ko) * | 2008-09-17 | 2011-12-22 | 한국기계연구원 | 카본 나노 튜브가 코팅된 프로브 카드용 미세 접촉 프로브 및 그 제조방법 |
| EP2175286B1 (de) * | 2008-10-11 | 2015-04-08 | NanoWorld AG | Verfahren zur Herstellung einer SPM-Sonde mit Abtastspitze und mit einer der Abtastspitze gegenüberliegenden Justierhilfe |
| JP5452088B2 (ja) * | 2009-06-15 | 2014-03-26 | 株式会社日立ハイテクノロジーズ | 微小接触式プローバ |
| JP2012047539A (ja) * | 2010-08-25 | 2012-03-08 | Hitachi High-Technologies Corp | Ｓｐｍプローブおよび発光部検査装置 |
| KR101195202B1 (ko) * | 2011-04-21 | 2012-10-29 | 한국과학기술연구원 | 나노 와이어를 이용한 프로브, 및 프로브 제조방법 |
| WO2013028782A1 (en) * | 2011-08-23 | 2013-02-28 | Kansas State University Research Foundation | Electrochemically-grown nanowires and uses thereof |
| US9038269B2 (en) * | 2013-04-02 | 2015-05-26 | Xerox Corporation | Printhead with nanotips for nanoscale printing and manufacturing |
| TWI539164B (zh) | 2013-11-22 | 2016-06-21 | 財團法人工業技術研究院 | 塗佈探針及其製作方法 |
| KR101702323B1 (ko) * | 2015-04-13 | 2017-02-03 | 명지대학교 산학협력단 | 세포 전기 천공을 위한 탐침 제조 방법 및 이를 위한 홀더 |
| KR101681231B1 (ko) * | 2015-05-13 | 2016-12-02 | 서강대학교산학협력단 | 기능성 탐침을 갖는 미소 캔틸레버 제조방법 |
| WO2017006397A1 (ja) | 2015-07-03 | 2017-01-12 | 国立大学法人名古屋工業大学 | カンチレバー |
| US11105973B2 (en) | 2019-01-11 | 2021-08-31 | Schott Corporation | Optically enhanced high resolution image guides |
| EP4060200B1 (en) * | 2019-11-15 | 2025-07-23 | Eagle Industry Co., Ltd. | Sliding component |
| JP7396642B2 (ja) * | 2019-12-12 | 2023-12-12 | 国立研究開発法人物質・材料研究機構 | 金属ナノ粒子の製造方法およびナノプローブの製造方法 |
| CN111668474A (zh) * | 2020-05-06 | 2020-09-15 | 深圳市德方纳米科技股份有限公司 | 负极材料及其制备方法、二次电池 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5171992A (en) | 1990-10-31 | 1992-12-15 | International Business Machines Corporation | Nanometer scale probe for an atomic force microscope, and method for making same |
| US5611942A (en) * | 1995-03-02 | 1997-03-18 | Kabushiki Kaisha Toshiba | Method for producing tips for atomic force microscopes |
| JP3441397B2 (ja) | 1998-12-31 | 2003-09-02 | 喜萬 中山 | 電子装置の表面信号操作用融着プローブ及びその製造方法 |
| DE19825404C2 (de) | 1998-06-06 | 2001-09-13 | Bernd Irmer | Rastersondenmikroskop mit Sondeneinrichtung, Sondeneinrichtung sowie Verfahren zum Herstellen einer Sondeneinrichtung |
| KR100398276B1 (ko) * | 1998-12-03 | 2003-09-19 | 다이켄카가쿠 코교 가부시키가이샤 | 전자장치의 표면신호조작용 프로우브 및 그 제조방법 |
| US6755956B2 (en) * | 2000-10-24 | 2004-06-29 | Ut-Battelle, Llc | Catalyst-induced growth of carbon nanotubes on tips of cantilevers and nanowires |
| JP3811004B2 (ja) * | 2000-11-26 | 2006-08-16 | 喜萬 中山 | 導電性走査型顕微鏡用プローブ |
| JP2002162335A (ja) | 2000-11-26 | 2002-06-07 | Yoshikazu Nakayama | 垂直式走査型顕微鏡用カンチレバー及びこれを使用した垂直式走査型顕微鏡用プローブ |
| ES2312490T3 (es) * | 2000-12-11 | 2009-03-01 | President And Fellows Of Harvard College | Dispositivo que contiene manosensores para detectar un analito y su metodo de fabricacion. |
| JP2003090788A (ja) | 2001-09-19 | 2003-03-28 | Olympus Optical Co Ltd | Ｓｐｍカンチレバー及びその製造方法 |
| JP4688400B2 (ja) * | 2001-12-04 | 2011-05-25 | エスアイアイ・ナノテクノロジー株式会社 | 走査型プローブ顕微鏡用探針 |
| JP4096303B2 (ja) * | 2001-12-28 | 2008-06-04 | エスアイアイ・ナノテクノロジー株式会社 | 走査型プローブ顕微鏡 |
-
2004
- 2004-04-26 JP JP2004129383A patent/JP4521482B2/ja not_active Expired - Lifetime
-
2005
- 2005-04-20 WO PCT/JP2005/007946 patent/WO2005103648A1/ja not_active Ceased
- 2005-04-20 EP EP05734701.5A patent/EP1742034B8/en not_active Ceased
- 2005-04-20 US US11/587,207 patent/US7735357B2/en not_active Expired - Lifetime