JP2005243368A - Fib/sem複合装置の画像ノイズ除去 - Google Patents
Fib/sem複合装置の画像ノイズ除去 Download PDFInfo
- Publication number
- JP2005243368A JP2005243368A JP2004050465A JP2004050465A JP2005243368A JP 2005243368 A JP2005243368 A JP 2005243368A JP 2004050465 A JP2004050465 A JP 2004050465A JP 2004050465 A JP2004050465 A JP 2004050465A JP 2005243368 A JP2005243368 A JP 2005243368A
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- fib
- sem
- image
- noise
- blanking period
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3005—Observing the objects or the point of impact on the object
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
- H01J37/222—Image processing arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3174—Etching microareas
Abstract
【解決手段】 本発明のFIB/SEM複合装置における画像ノイズ除去方法は、SEM2の走査周期をFIB1のそれと同期させるなどしてFIBブランキング期間の二次電子検出信号がSEM画像の画素に影響しないようにし、使用するFIB電流値に対してSEM電流を最適化することにより重畳するFIB励起二次電子のSEM像への影響を少なくした。
【選択図】 図1
Description
SEM FIB
(1) 1Dot時間 = 1Line周期
(2) 1Line周期 = 1Line周期
(3) 1Frame周期 = 1Line周期
上記した完全一致の例は(2)に相当する。
3 チャンバー 4 二次電子検出器
5 コンピュータ 6 ディスプレイ
8 FIB電源 9 SEM電源
Claims (7)
- SEMの1ドット照射時間をFIBの1ライン走査時間に調整することにより、FIBブランキング期間ノイズをSEM画像から排除するようにしたFIB/SEM複合装置における画像ノイズ除去方法。
- SEMの1ライン走査時間をFIBの1ライン走査時間に調整することにより、FIBブランキング期間ノイズをSEM画像から排除するようにしたFIB/SEM複合装置における画像ノイズ除去方法。
- SEMの1フレーム走査時間をFIBの1ライン走査時間に調整することにより、FIBブランキング期間ノイズをSEM画像から排除するようにしたFIB/SEM複合装置における画像ノイズ除去方法。
- FIBブランキング期間の二次電子検出信号レベル変化を検出してその値を記憶する手段と、FIBブランキング期間の二次電子検出信号に前記記憶したレベル変化分を重畳させる手段とを備えることにより、FIBブランキング期間ノイズを画像より除去する機能を備えたFIB/SEM複合装置。
- SEM画像を複数枚取得して記憶する手段と1枚のSEM画像中のFIBブランキング期間ノイズ領域を抽出する手段と、その領域の画像情報を他のSEM画像から切り出す手段と、該切り出した画像情報で前記FIBブランキング期間ノイズ領域の画像情報を置換する手段とを備えることにより、画像中のFIBブランキング期間ノイズを画像より除去する機能を備えたFIB/SEM複合装置。
- 試料の種類毎にSEM電流/FIB電流比値に対するSEM分解能特性と,荷電粒子照射によるチャージアップ特性と,FIBノイズ特性とを予め試験して蓄積したデータから得たFIB電流に対する最適SEM電流値データを蓄積した記憶媒体と、試料の特定情報,FIBの電流値が設定入力されると前記記憶媒体の情報に基づいてSEMの最適電流値を割り出す手段とを備えることにより、前記条件設定を受けると前記記憶媒体にアクセスしてその条件下での最適SEM電流値を読み出して、それをSEMに自動的に設定する機能を備えたFIB/SEM複合装置。
- 試料の種類毎にSEM走査速度/FIB走査速度比に対するSEM像へのFIBノイズ特性を予め試験して蓄積したデータから得たFIB走査速度に対する最適SEM走査速度を蓄積した記憶媒体と、試料の特定情報,FIBの走査速度が設定入力されると前記記憶媒体の情報に基づいてSEMの最適走査速度を割り出す手段とを備えることにより、前記条件設定を受けると前記記憶媒体にアクセスして、FIBの走査速度に応じてその条件下での最適なSEM走査速度を読み出して、それをSEMに自動的に設定する機能を備えたFIB/SEM複合装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004050465A JP4426871B2 (ja) | 2004-02-25 | 2004-02-25 | Fib/sem複合装置の画像ノイズ除去 |
US11/059,434 US7173261B2 (en) | 2004-02-25 | 2005-02-16 | Image noise removing method in FIB/SEM complex apparatus |
Applications Claiming Priority (1)
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---|---|---|---|
JP2004050465A JP4426871B2 (ja) | 2004-02-25 | 2004-02-25 | Fib/sem複合装置の画像ノイズ除去 |
Publications (2)
Publication Number | Publication Date |
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JP2005243368A true JP2005243368A (ja) | 2005-09-08 |
JP4426871B2 JP4426871B2 (ja) | 2010-03-03 |
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JP2004050465A Expired - Lifetime JP4426871B2 (ja) | 2004-02-25 | 2004-02-25 | Fib/sem複合装置の画像ノイズ除去 |
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US (1) | US7173261B2 (ja) |
JP (1) | JP4426871B2 (ja) |
Cited By (3)
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JP2009295371A (ja) * | 2008-06-04 | 2009-12-17 | Jeol Ltd | 断面観察用走査電子顕微鏡 |
WO2014119350A1 (ja) * | 2013-01-31 | 2014-08-07 | 株式会社 日立ハイテクノロジーズ | 複合荷電粒子線検出器および荷電粒子線装置ならびに荷電粒子線検出器 |
JP2015018720A (ja) * | 2013-07-12 | 2015-01-29 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
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JP4563049B2 (ja) * | 2004-02-24 | 2010-10-13 | エスアイアイ・ナノテクノロジー株式会社 | Fib−sem複合装置を用いたイオンビーム加工方法 |
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US8041103B2 (en) | 2005-11-18 | 2011-10-18 | Kla-Tencor Technologies Corp. | Methods and systems for determining a position of inspection data in design data space |
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2004
- 2004-02-25 JP JP2004050465A patent/JP4426871B2/ja not_active Expired - Lifetime
-
2005
- 2005-02-16 US US11/059,434 patent/US7173261B2/en active Active
Patent Citations (8)
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JPH02121252A (ja) * | 1988-10-28 | 1990-05-09 | Jeol Ltd | 荷電粒子ビーム複合装置 |
JPH0676781A (ja) * | 1992-08-27 | 1994-03-18 | Yokogawa Electric Corp | イオンビーム走査画像の取得方法、および集束イオンビーム装置 |
JPH0729539A (ja) * | 1993-07-07 | 1995-01-31 | Hitachi Ltd | 集束イオンビーム装置 |
JPH07230784A (ja) * | 1994-02-16 | 1995-08-29 | Jeol Ltd | 複合荷電粒子ビーム装置 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009295371A (ja) * | 2008-06-04 | 2009-12-17 | Jeol Ltd | 断面観察用走査電子顕微鏡 |
WO2014119350A1 (ja) * | 2013-01-31 | 2014-08-07 | 株式会社 日立ハイテクノロジーズ | 複合荷電粒子線検出器および荷電粒子線装置ならびに荷電粒子線検出器 |
CN104956461A (zh) * | 2013-01-31 | 2015-09-30 | 株式会社日立高新技术 | 复合带电粒子束检测器、带电粒子束装置以及带电粒子束检测器 |
US9761409B2 (en) | 2013-01-31 | 2017-09-12 | Hitachi High-Technologies Corporation | Composite charged particle detector, charged particle beam device, and charged particle detector |
US10128081B2 (en) | 2013-01-31 | 2018-11-13 | Hitachi High-Technologies Corporation | Composite charged particle beam detector, charged particle beam device, and charged particle beam detector |
JP2015018720A (ja) * | 2013-07-12 | 2015-01-29 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
Also Published As
Publication number | Publication date |
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US7173261B2 (en) | 2007-02-06 |
JP4426871B2 (ja) | 2010-03-03 |
US20050184252A1 (en) | 2005-08-25 |
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