JP2005236188A - 導体パターンの製造方法 - Google Patents
導体パターンの製造方法 Download PDFInfo
- Publication number
- JP2005236188A JP2005236188A JP2004046179A JP2004046179A JP2005236188A JP 2005236188 A JP2005236188 A JP 2005236188A JP 2004046179 A JP2004046179 A JP 2004046179A JP 2004046179 A JP2004046179 A JP 2004046179A JP 2005236188 A JP2005236188 A JP 2005236188A
- Authority
- JP
- Japan
- Prior art keywords
- resist layer
- conductor pattern
- transparent conductive
- conductive film
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 title claims abstract description 86
- 238000000034 method Methods 0.000 title abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 63
- 238000007747 plating Methods 0.000 claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 claims description 32
- 238000010030 laminating Methods 0.000 claims description 9
- 229920002120 photoresistant polymer Polymers 0.000 claims description 9
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 4
- 230000001678 irradiating effect Effects 0.000 abstract description 3
- 238000000151 deposition Methods 0.000 abstract 1
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 9
- 238000001039 wet etching Methods 0.000 description 6
- 229910001020 Au alloy Inorganic materials 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- RZVXOCDCIIFGGH-UHFFFAOYSA-N chromium gold Chemical compound [Cr].[Au] RZVXOCDCIIFGGH-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000003353 gold alloy Substances 0.000 description 4
- 239000011651 chromium Substances 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 235000006408 oxalic acid Nutrition 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 239000012780 transparent material Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04M—TELEPHONIC COMMUNICATION
- H04M1/00—Substation equipment, e.g. for use by subscribers
- H04M1/26—Devices for calling a subscriber
- H04M1/27—Devices whereby a plurality of signals may be stored simultaneously
- H04M1/274—Devices whereby a plurality of signals may be stored simultaneously with provision for storing more than one subscriber number at a time, e.g. using toothed disc
- H04M1/2745—Devices whereby a plurality of signals may be stored simultaneously with provision for storing more than one subscriber number at a time, e.g. using toothed disc using static electronic memories, e.g. chips
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F21/30—Authentication, i.e. establishing the identity or authorisation of security principals
- G06F21/31—User authentication
- G06F21/32—User authentication using biometric data, e.g. fingerprints, iris scans or voiceprints
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10L—SPEECH ANALYSIS TECHNIQUES OR SPEECH SYNTHESIS; SPEECH RECOGNITION; SPEECH OR VOICE PROCESSING TECHNIQUES; SPEECH OR AUDIO CODING OR DECODING
- G10L15/00—Speech recognition
- G10L15/02—Feature extraction for speech recognition; Selection of recognition unit
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04M—TELEPHONIC COMMUNICATION
- H04M3/00—Automatic or semi-automatic exchanges
- H04M3/42—Systems providing special services or facilities to subscribers
- H04M3/487—Arrangements for providing information services, e.g. recorded voice services or time announcements
- H04M3/493—Interactive information services, e.g. directory enquiries ; Arrangements therefor, e.g. interactive voice response [IVR] systems or voice portals
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04M—TELEPHONIC COMMUNICATION
- H04M2215/00—Metering arrangements; Time controlling arrangements; Time indicating arrangements
- H04M2215/62—Called party billing, e.g. reverse billing, freephone, collect call, 0800 or 0900
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Signal Processing (AREA)
- Theoretical Computer Science (AREA)
- Computer Security & Cryptography (AREA)
- Acoustics & Sound (AREA)
- Human Computer Interaction (AREA)
- Audiology, Speech & Language Pathology (AREA)
- Health & Medical Sciences (AREA)
- Multimedia (AREA)
- Computational Linguistics (AREA)
- Computer Hardware Design (AREA)
- Software Systems (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004046179A JP2005236188A (ja) | 2004-02-23 | 2004-02-23 | 導体パターンの製造方法 |
KR1020050014383A KR100602912B1 (ko) | 2004-02-23 | 2005-02-22 | 도체 패턴의 제조방법 |
CNB2005100519669A CN100334710C (zh) | 2004-02-23 | 2005-02-23 | 导体图形的制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004046179A JP2005236188A (ja) | 2004-02-23 | 2004-02-23 | 導体パターンの製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2005236188A true JP2005236188A (ja) | 2005-09-02 |
Family
ID=35010980
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004046179A Pending JP2005236188A (ja) | 2004-02-23 | 2004-02-23 | 導体パターンの製造方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2005236188A (ko) |
KR (1) | KR100602912B1 (ko) |
CN (1) | CN100334710C (ko) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013222752A (ja) * | 2012-04-13 | 2013-10-28 | Lapis Semiconductor Co Ltd | 半導体装置の製造方法 |
JP2013222754A (ja) * | 2012-04-13 | 2013-10-28 | Lapis Semiconductor Co Ltd | 半導体装置の製造方法 |
US9293402B2 (en) | 2012-04-13 | 2016-03-22 | Lapis Semiconductor Co., Ltd. | Device with pillar-shaped components |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100773588B1 (ko) * | 2006-06-29 | 2007-11-05 | 한국과학기술원 | 폴리머 패턴 형성방법 및 이를 이용한 금속 박막 패턴,금속 패턴, 마이크로셔터, 마이크로렌즈 어레이 스탬퍼,플라스틱 몰드의 형성방법 |
JP4861893B2 (ja) * | 2006-07-28 | 2012-01-25 | 東京エレクトロン株式会社 | 基板の処理方法、プログラム、コンピュータ記憶媒体及び基板の処理システム |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100276052B1 (ko) * | 1994-10-04 | 2000-12-15 | 모리시타 요이찌 | 전사도체의 제조방법 및 적층용 그린시트의 제조방법 |
JP2002062638A (ja) * | 2000-08-21 | 2002-02-28 | Semiconductor Leading Edge Technologies Inc | マスクブランクス、フォトマスク、パターン形成方法および半導体装置の製造方法 |
JP3760927B2 (ja) * | 2003-05-09 | 2006-03-29 | 凸版印刷株式会社 | パターン転写方法 |
-
2004
- 2004-02-23 JP JP2004046179A patent/JP2005236188A/ja active Pending
-
2005
- 2005-02-22 KR KR1020050014383A patent/KR100602912B1/ko not_active IP Right Cessation
- 2005-02-23 CN CNB2005100519669A patent/CN100334710C/zh not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013222752A (ja) * | 2012-04-13 | 2013-10-28 | Lapis Semiconductor Co Ltd | 半導体装置の製造方法 |
JP2013222754A (ja) * | 2012-04-13 | 2013-10-28 | Lapis Semiconductor Co Ltd | 半導体装置の製造方法 |
US9293402B2 (en) | 2012-04-13 | 2016-03-22 | Lapis Semiconductor Co., Ltd. | Device with pillar-shaped components |
US9721879B2 (en) | 2012-04-13 | 2017-08-01 | Lapis Semiconductor Co., Ltd. | Device with pillar-shaped components |
US10424537B2 (en) | 2012-04-13 | 2019-09-24 | Lapis Semiconductor Co., Ltd. | Device with pillar-shaped components |
US10957638B2 (en) | 2012-04-13 | 2021-03-23 | Lapis Semiconductor Co., Ltd. | Device with pillar-shaped components |
Also Published As
Publication number | Publication date |
---|---|
KR20060045328A (ko) | 2006-05-17 |
KR100602912B1 (ko) | 2006-07-19 |
CN1661793A (zh) | 2005-08-31 |
CN100334710C (zh) | 2007-08-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4534984B2 (ja) | 金属フォトエッチング製品の製造方法 | |
JP2014027317A (ja) | プリント基板の製造方法 | |
KR20150087691A (ko) | 임베디드 트레이스 기판과 그의 범프 형성 방법 | |
KR100602912B1 (ko) | 도체 패턴의 제조방법 | |
JP2010263000A (ja) | 電子部品製造方法 | |
JP2004221450A (ja) | プリント配線板およびその製造方法 | |
CN111624851A (zh) | 压印模板及其制备方法 | |
CN110161809B (zh) | 一种改进光刻胶粘结性的结构及其方法 | |
KR20130060999A (ko) | 패턴 형성 방법 | |
CN113873771A (zh) | 一种适用于超精细fpc线路的制作工艺 | |
JP2018046223A (ja) | 凹凸構造体の製造方法、インプリントモールド製造用基材、およびインプリントモールドの製造方法 | |
JP2004218033A (ja) | エッチング製品及びエッチング方法 | |
JPH0681173A (ja) | 金属膜パターン形成方法 | |
TWI625607B (zh) | 具薄膜圖案的基板及形成薄膜圖案於基板的方法 | |
KR20060136174A (ko) | 미세 패턴 형성 방법 | |
JP2001350269A (ja) | 半田印刷用マスクの製造方法 | |
JP2004204251A (ja) | 金属エッチング製品及びその製造方法 | |
KR100917774B1 (ko) | 인쇄 회로 기판의 회로 선폭 제어 방법 | |
JP2003183811A (ja) | メタルマスク、及び、その製造方法 | |
JP2010135461A (ja) | 電子部品実装用フィルムキャリアテープの製造方法 | |
KR20030000475A (ko) | 패턴 형성 방법 | |
KR101250422B1 (ko) | 액정표시장치용 고정밀 인쇄판 및 그의 제조 방법 | |
JP2005264283A (ja) | 金属エッチング製品及びその製造方法 | |
JP4421706B2 (ja) | 表面にメッキパターンを備えた金属部品の製造方法 | |
JP2014162109A (ja) | スクリーン印刷版の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060906 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20060907 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20080905 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080916 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20081113 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20090324 |